Vapor-Based Synthesis of Poly[(4-formyl-p-xylylene)-co-(p-xylylene)] and Its Use for Biomimetic Surface Modifications

Systematic Studies into the Area Selectivity of Chemical Vapor Deposition Polymerization

As the current top-down microchip manufacturing processes approach their resolution limits, there is a need for alternative patterning technologies that offer high feature densities and edge fidelity with single-digit nanometer resolution. To address this challenge, bottom-up processes have been considered, but they typically require sophisticated masking and alignment schemes and/or face materials' compatibility issues. In this work, we report a systematic study into the impact of thermodynamic processes on the area selectivity of chemical vapor deposition (CVD) polymerization of functional [2.2]paracyclophanes (PCP). Adhesion mapping of preclosure CVD films by atomic force microscopy (AFM) provided a detailed understanding of the geometric features of the polymer islands that form under different deposition conditions. Our results suggest a correlation between interfacial transport processes, including adsorption, diffusion, and desorption, and thermodynamic control parameters, such as substrate temperature and working pressure. This work culminates in a kinetic model that predictes both area-selective and nonselective CVD parameters for the same polymer/substrate ensemble (PPX-C + Cu). While limited to a focused subset of CVD polymers and substrates, this work provides an improved mechanistic understanding of area-selective CVD polymerization and highlights the potential for thermodynamic control in tuning area selectivity.

Surfaces Decorated with Enantiomorphically Pure Polymer Nanohelices via Hierarchical Chirality Transfer across Multiple Length Scales

Mesoscale chiral materials are prepared by lithographic methods, assembly of chiral building blocks, and through syntheses in the presence of polarized light. Typically, these processes result in micrometer-sized structures, require complex top-down manipulation, or rely on tedious asymmetric separation. Chemical vapor deposition (CVD) polymerization of chiral precursors into supported films of liquid crystals (LCs) are discovered to result in superhierarchical arrangements of enantiomorphically pure nanofibers. Depending on the molecular chirality of the 1-hydroxyethyl [2.2]paracyclophane precursor, extended arrays of enantiomorphic nanohelices are formed from achiral nematic templates. Arrays of chiral nanohelices extend over hundreds of micrometers and consistently display enantiomorphic micropatterns. The pitch of individual nanohelices depends on the enantiomeric excess and the purity of the chiral precursor, consistent with the theoretical model of a doubly twisted LC director configuration. During CVD of chiral precursors into cholesteric LC films, aspects of molecular and mesoscale asymmetry combine constructively to form regularly twisted nanohelices. Enantiomorphic surfaces permit the tailoring of a wide range of functional properties, such as the asymmetric induction of weak chiral systems.

Substrate-Independent Micropatterning of Polymer Brushes Based on Photolytic Deactivation of Chemical Vapor Deposition Based Surface-Initiated Atom-Transfer Radical Polymerization Initiator Films

Precise microscale arrangement of biomolecules and cells is essential for tissue engineering, microarray development, diagnostic sensors, and fundamental research in the biosciences. Biofunctional polymer brushes have attracted broad interest in these applications. However, patterning approaches to creating microstructured biointerfaces based on polymer brushes often involve tedious, expensive, and complicated procedures that are specifically designed for model substrates. We report a substrate-independent, facile, and scalable technique with which to prepare micropatterned biofunctional brushes with the ability to generate binary chemical patterns. Employing chemical vapor deposition (CVD) polymerization, a functionalized polymer coating decorated with 2-bromoisobutyryl groups that act as atom-transfer radical polymerization (ATRP) initiators was prepared and subsequently modified using UV light. The exposure of 2-bromoisobutyryl groups to UV light with wavelengths between 187 and 254 nm resulted in selective debromination, effectively eliminating the initiation of ATRP. In addition, when coatings incorporating both 2-bromoisobutyryl and primary amine groups were irradiated with UV light, the amines retained their functionality after UV treatment and could be conjugated to activated esters, facilitating binary chemical patterns. In contrast, polymer brushes were selectively grown from areas protected from UV treatment, as confirmed by atomic force microscopy, time-of-flight secondary ion mass spectrometry, and imaging ellipsometry. Furthermore, spatial control over biomolecular adhesion was achieved in three ways: (1) patterned nonfouling brushes resulted in nonspecific protein adsorption to areas not covered with polymer brushes; (2) patterned brushes decorated with active binding sides gave rise to specific protein immobilization on areas presenting polymer brushes; (3) and primary amines were co-patterned along with clickable polymer brushes bearing pendant alkyne groups, leading to bifunctional reactivity. Because this novel technique is independent of the original substrate's physicochemical properties, it can be extended to technologically relevant substrates such as polystyrene, polydimethylsiloxane, polyvinyl chloride, and steel. With further work, the photolytic deactivation of CVD-based initiator coatings promises to advance the utility of patterned biofunctional polymer brushes across a spectrum of biomedical applications.

Electrically charged selectivity of poly-para-xylylene deposition

Electrically charged surfaces show inhibited selectivity for the deposition of poly-para-xylylenes, irrespective of their substituted functionalities.

Switching biological functionalities of biointerfaces via dynamic covalent bonds

We construct a stimuli responsive biointerface via a dynamic covalent bond that could switch its surface biofunctionalities on demand. The switchability is achieved via reversible attaching/detaching of aldehyde end-functionalized biomacromolecules.

Current Trends and Challenges in Biointerfaces Science and Engineering

The cellular microenvironment is extremely complex, and a plethora of materials and methods have been employed to mimic its properties in vitro. In particular, scientists and engineers have taken an interdisciplinary approach in their creation of synthetic biointerfaces that replicate chemical and physical aspects of the cellular microenvironment. Here the focus is on the use of synthetic materials or a combination of synthetic and biological ligands to recapitulate the defined surface chemistries, microstructure, and function of the cellular microenvironment for a myriad of biomedical applications. Specifically, strategies for altering the surface of these environments using self-assembled monolayers, polymer coatings, and their combination with patterned biological ligands are explored. Furthermore, methods for augmenting an important physical property of the cellular microenvironment, topography, are highlighted, and the advantages and disadvantages of these approaches are discussed. Finally, the progress of materials for prolonged stem cell culture, a key component in the translation of stem cell therapeutics for clinical use, is featured.

Selective and Reversible Binding of Thiol-Functionalized Biomolecules on Polymers Prepared via Chemical Vapor Deposition Polymerization

We use chemical vapor deposition polymerization to prepare a novel dibromomaleimide-functionalized polymer for selective and reversible binding of thiol-containing biomolecules on a broad range of substrates. We report the synthesis and CVD polymerization of 4-(3,4-dibromomaleimide)[2.2]paracyclophane to yield nanometer thick polymer coatings. Fourier transformed infrared spectroscopy and X-ray photoelectron spectroscopy confirmed the chemical composition of the polymer coating. The reactivity of the polymer coating toward thiol-functionalized molecules was confirmed using fluorescent ligands. As a proof of concept, the binding and subsequent release of cysteine-modified peptides from the polymer coating were also demonstrated via sum frequency generation spectroscopy. This reactive polymer coating provides a flexible surface modification approach to selectively and reversibly bind biomolecules on a broad range of materials, which could open up new opportunities in many biomedical sensing and diagnostic applications where specific binding and release of target analytes are desired.

A dynamic duo: pairing click chemistry and postpolymerization modification to design complex surfaces

Advances in key 21st century technologies such as biosensors, biomedical implants, and organic light-emitting diodes rely heavily on our ability to imagine, design, and understand spatially complex interfaces. Polymer-based thin films provide many advantages in this regard, but the direct synthesis of polymers with incompatible functional groups is extremely difficult. Using postpolymerization modification in conjunction with click chemistry can circumvent this limitation and result in multicomponent surfaces that are otherwise unattainable. The two methods used to form polymer thin films include physisorption and chemisorption. Physisorbed polymers suffer from instability because of the weak intermolecular forces between the film and the substrate, which can lead to dewetting, delamination, desorption, or displacement. Covalent immobilization of polymers to surfaces through either a "grafting to" or "grafting from" approach provides thin films that are more robust and less prone to degradation. The grafting to technique consists of adsorbing a polymer containing at least one reactive group along the backbone to form a covalent bond with a complementary surface functionality. Grafting from involves polymerization directly from the surface, in which the polymer chains deviate from their native conformation in solution and stretch away from the surface because of the high density of chains. Postpolymerization modification (PPM) is a strategy used by our groups over the past several years to immobilize two or more different chemical functionalities onto substrates that contain covalently grafted polymer films. PPM exploits monomers with reactive pendant groups that are stable under the polymerization conditions but are readily modified via covalent attachment of the desired functionality. "Click-like" reactions are the most common type of reactions used for PPM because they are orthogonal, high-yielding, and rapid. Some of these reactions include thiol-based additions, activated ester coupling, azide-alkyne cycloadditions, some Diels-Alder reactions, and non-aldol carbonyl chemistry such as oxime, hydrazone, and amide formation. In this Account, we highlight our research combining PPM and click chemistry to generate complexity in polymer thin films. For the purpose of this Account, we define a complex coating as a polymer film grafted to a planar surface that acts as a template for the patterning of two or more discrete chemical functionalities using PPM. After a brief introduction to grafting, the rest of the review is arranged in terms of the sequence in which PPM is performed. First, we describe sequential functionalization using iterations of the same click-type reaction. Next, we discuss the use of two or more different click-like reactions performed consecutively, and we conclude with examples of self-sorting reactions involving orthogonal chemistries used for one-pot surface patterning.

Co-immobilization of biomolecules on ultrathin reactive chemical vapor deposition coatings using multiple click chemistry strategies

Immobilization of biomolecules, such as proteins or sugars, is a key issue in biotechnology because it enables the understanding of cellular behavior in more biological relevant environment. Here, poly(4-ethynyl-p-xylylene-co-p-xylylene) coatings have been fabricated by chemical vapor deposition (CVD) polymerization in order to bind bioactive molecules onto the surface of the material. The control of the thickness of the CVD films has been achieved by tuning the amount of precursor used for deposition. Copper-catalyzed Huisgen cycloaddition has then been performed via microcontact printing to immobilize various biomolecules on the reactive coatings. The selectivity of this click chemistry reaction has been confirmed by spatially controlled conjugation of fluorescent sugar recognizing molecules (lectins) as well as cell adhesion onto the peptide pattern. In addition, a microstructured coating that may undergo multiple click chemistry reactions has been developed by two sequential CVD steps. Poly(4-ethynyl-p-xylylene-co-p-xylylene) and poly(4-formyl-p-xylylene-co-p-xylylene) have been patterned via vapor-assisted micropatterning in replica structures (VAMPIR). A combination of Huisgen cycloaddition and carbonyl-hydrazide coupling was used to spatially direct the immobilization of sugars on a patterned substrate. This work opens new perspectives in tailoring microstructured, multireactive interfaces that can be decorated via bio-orthogonal chemistry for use as mimicking the biological environment of cells.

Vapor-deposited parylene photoresist: a multipotent approach toward chemically and topographically defined biointerfaces

Poly(4-benzoyl-p-xylylene-co-p-xylylene), a biologically compatible photoreactive polymer belonging to the parylene family, can be deposited using a chemical vapor deposition (CVD) polymerization process on a wide range of substrates. This study discovered that the solvent stability of poly(4-benzoyl-p-xylylene-co-p-xylylene) in acetone is significantly increased when exposed to approximately 365 nm of UV irradiation, because of the cross-linking of benzophenone side chains with adjacent molecules. This discovery makes the photodefinable polymer a powerful tool for use as a negative photoresist for surface microstructuring and biointerface engineering purposes. The polymer is extensively characterized using infrared reflection adsorption spectroscopy (IRRAS), scanning electron microscopy (SEM), and imaging ellipsometry. Furthermore, the vapor-based polymer coating process provides access to substrates with unconventional and complex three-dimensional (3D) geometries, as compared to conventional spin-coated resists that are limited to flat 2D assemblies. Moreover, this photoresist technology is seamlessly integrated with other functionalized parylenes including aldehyde-, acetylene-, and amine-functionalized parylenes to create unique surface microstructures that are chemically and topographically defined. The photopatterning and immobilization protocols described in this paper represent an approach that avoids contact between harmful substances (such as solvents and irradiations) and sensitive biomolecules. Finally, multiple biomolecules on planar substrates, as well as on unconventional 3D substrates (e.g., stents), are presented.

Novel multi-sided, microelectrode arrays for implantable neural applications

A new parylene-based microfabrication process is presented for neural recording and drug delivery applications. We introduce a large design space for electrode placement and structural flexibility with a six mask process. By using chemical mechanical polishing, electrode sites may be created top-side, back-side, or on the edge of the device having three exposed sides. Added surface area was achieved on the exposed edge through electroplating. Poly(3,4-ethylenedioxythiophene) (PEDOT) modified edge electrodes having an 85-μm(2) footprint resulted in an impedance of 200 kΩ at 1 kHz. Edge electrodes were able to successfully record single unit activity in acute animal studies. A finite element model of planar and edge electrodes relative to neuron position reveals that edge electrodes should be beneficial for increasing the volume of tissue being sampled in recording applications.

Engineering, characterization and directional self-assembly of anisotropically modified nanocolloids

Along with traditional attributes such as the size, shape, and chemical structure of polymeric micro-objects, control over material distribution, or selective compartmentalization, appears to be increasingly important for maximizing the functionality and efficacy of biomaterials. The fabrication of tri- and tetracompartmental colloids made from biodegradable poly(lactide-co-glycolide) polymers via electrohydrodynamic co-jetting is demonstrated. The presence of three compartments is confirmed via flow cytometry. Additional chemical functionality is introduced via the incorporation of acetylene-functionalized polymers into individual compartments of the particles. Direct visualization of the spatioselective distribution of acetylene groups is demonstrated by confocal Raman microscopy as well as by reaction of the acetylene groups with azide-biotin via 'click chemistry'. Biotin-streptavidin binding is then utilized for the controlled assembly and orientation of bicompartmental particles onto functionalized, micropatterned substrates prepared via chemical vapor deposition polymerization.

Cellular transduction gradients via vapor-deposited polymer coatings

Spatiotemporal control of gene delivery, particularly signaling gradients, via biomaterials poses significant challenges because of the lack of efficient delivery systems for therapeutic proteins and genes. This challenge was addressed by using chemical vapor deposition (CVD) polymerization in a counterflow set-up to deposit copolymers bearing two reactive chemical gradients. FTIR spectroscopy verified the formation of compositional gradients. Adenovirus expressing a reporter gene was biotinylated and immobilized using the VBABM method (virus-biotin-avidin-biotin-materials). Sandwich ELISA confirmed selective attachment of biotinylated adenovirus onto copolymer gradients. When cultured on the adenovirus gradients, human gingival fibroblasts exhibited asymmetric transduction with full confluency. Importantly, gradient transduction occurred in both lateral directions, thus enabling more advanced delivery studies that involve gradients of multiple therapeutic genes.

Chemical-vapor-deposition-based polymer substrates for spatially resolved analysis of protein binding by imaging ellipsometry

Biomolecular interactions between proteins and synthetic surfaces impact diverse biomedical fields. Simple, quantitative, label-free technologies for the analysis of protein adsorption and binding of biomolecules are thus needed. Here, we report the use of a novel type of substrate, poly-p-xylylene coatings prepared by chemical vapor deposition (CVD) polymerization, for surface plasmon resonance enhanced ellipsometry (SPREE) studies and assess the reactive coatings as spatially resolved biomolecular sensing arrays. Prior to use in binding studies, reactive coatings were fully characterized by Fourier transform infrared spectroscopy, electrochemical impedance spectroscopy, and ellipsometry. As a result, the chemical structure, thickness, and homogeneous coverage of the substrate surface were confirmed for a series of CVD-coated samples. Subsequent SPREE imaging and fluorescence microscopy indicated that the synthetic substrates supported detectable binding of a cascade of biomolecules. Moreover, analysis revealed a useful thickness range for CVD films in the assessment of protein and/or antigen-antibody binding via SPREE imaging. With a variety of functionalized end groups available for biomolecule immobilization and ease of patterning, CVD thin films are useful substrates for spatially resolved, quantitative binding arrays.

Complex Protein Patterns in Drying Droplets

We demonstrate that deposition patterns formed during drying droplets of aqueous protein solutions are complex, characteristic, and highly reproducible. Substrate, buffer as well as protein type are important factors largely influencing the patterned structure. Specifically, multiple growth zones in what we refer to as “soccer ball pattern” are formed when a droplet of albumin solution in sodium bicarbonate buffer is dried. Each growth zone has periodically patterned, concentric ringed structures surrounding a core at the center. Different macroscopic patterns are also found for streptavidin, fibrinogen, IgG antibody as well as rhodamine B base and polystyrene beads when droplets of their aqueous solutions are dried on the substrates with different degrees of hydrophilicity/hydrophobicity. Furthermore, distinguishable deposition patterns are formed in drying droplets of aqueous protein solutions containing albumin and fibrinogen at different ratios, suggesting that even the relative abundance of multiple proteins influences the deposition patterns. Since the protein pattern is reproducible for a given protein and variable among different proteins, the protein patterns from drying droplets might be useful to potentially identify a given protein under specific conditions.

Designable biointerfaces using vapor-based reactive polymers

Functionalized poly(p-xylylenes) constitute a versatile class of reactive polymers that can be prepared in a solventless process via chemical vapor deposition (CVD) polymerization. The resulting ultrathin coatings are typically pinhole-free and can be conformally deposited onto a wide range of substrates and materials. More importantly, appropriately selected functional groups can serve as anchoring sites for tailoring biointerface properties via the immobilization of biomolecules. In this article, controlled surface chemistries are outlined that use functionalized poly(p-xylylenes) as reactive coatings, including alkyne-functionalized coatings for Huisgen 1,3-dipolar cycloaddition reactions or aldehyde-functionalized coatings. The reactive coatings technology provides flexible access to a range of different surface chemistries, enabling a broad range of potential applications in microfluidics, medical device coatings, and biotechnology. In this feature article, we will highlight recent progress in vapor-based reactive coatings and will discuss potential benefits and current limitations.

Progress report on microstructured surfaces based on chemical vapor deposition

This book chapter discusses recent advances in the fabrication of microscale surface patterns using chemical vapor deposition polymerization. Reactive poly(p-xylylene) (PPX) coatings are useful for their ability to immobilize specific biomolecules, as determined by the PPX functional group. PPXs can either be modified postdeposition, or they can be patterned onto a substrate in situ. Specific methods discussed in this progress report include microcontact printing, vapor-assisted micropatterning in replica structures, projection lithography-based patterning, and selective polymer deposition.

Surface patterning strategies for microfluidic applications based on functionalized poly-p-xylylenes

Microfluidic systems require precise surface modification in order to tailor the interfacial properties. For instance, in lab-on-a-chip research, defined surface chemistry is key to minimizing contamination and to increasing signal-to-noise ratios for bioconjugation schemes. Device efficiency and analytical output can also be maximized with devices that have defined surfaces. Similarly, minimizing biofouling is also crucial to suppress background noise and ensure device functions. Once defined, surface properties have been engineered, microstructuring of surfaces can provide defined microenvironments for cell-based culture systems. In this report, we highlight the use of functionalized poly-p-xylylenes for surface modification with a specific focus on microfluidic systems. Functionalized poly-p-xylylenes constitute a versatile group of reactive coatings that can provide a defined chemical makeup of substrate surfaces irrespective of underlying bulk material properties. Recent advances using reactive coatings for surface modification of microfluidics are introduced, including use as nonfouling coatings, fabrication of patterned surfaces, functionalization of previously assembled devices, as well as device-bonding applications.

Chemical vapor deposition of conformal, functional, and responsive polymer films

Chemical vapor deposition (CVD) polymerization utilizes the delivery of vapor-phase monomers to form chemically well-defined polymeric films directly on the surface of a substrate. CVD polymers are desirable as conformal surface modification layers exhibiting strong retention of organic functional groups, and, in some cases, are responsive to external stimuli. Traditional wet-chemical chain- and step-growth mechanisms guide the development of new heterogeneous CVD polymerization techniques. Commonality with inorganic CVD methods facilitates the fabrication of hybrid devices. CVD polymers bridge microfabrication technology with chemical, biological, and nanoparticle systems and assembly. Robust interfaces can be achieved through covalent grafting enabling high-resolution (60 nm) patterning, even on flexible substrates. Utilizing only low-energy input to drive selective chemistry, modest vacuum, and room-temperature substrates, CVD polymerization is compatible with thermally sensitive substrates, such as paper, textiles, and plastics. CVD methods are particularly valuable for insoluble and infusible films, including fluoropolymers, electrically conductive polymers, and controllably crosslinked networks and for the potential to reduce environmental, health, and safety impacts associated with solvents. Quantitative models aid the development of large-area and roll-to-roll CVD polymer reactors. Relevant background, fundamental principles, and selected applications are reviewed.

Surface Engineering and Patterning Using Parylene for Biological Applications

Parylene is a family of chemically vapour deposited polymer with material properties that are attractive for biomedicine and nanobiotechnology. Chemically inert parylene “peel-off” stencils have been demonstrated for micropatterning biomolecular arrays with high uniformity, precise spatial control down to nanoscale resolution. Such micropatterned surfaces are beneficial in engineering biosensors and biological microenvironments. A variety of substituted precursors enables direct coating of functionalised parylenes onto biomedical implants and microfluidics, providing a convenient method for designing biocompatible and bioactive surfaces. This article will review the emerging role and applications of parylene as a biomaterial for surface chemical modification and provide a future outlook.

The effects of Runx2 immobilization on poly (epsilon-caprolactone) on osteoblast differentiation of bone marrow stromal cells in vitro

In vivo regenerative gene therapy is a promising approach for bone regeneration and can help to address cell-source limitations through surgical implantation of osteoinductive materials and subsequent recruitment of host-derived cells. Localized viral delivery may reduce the risk of virus dispersion, enhance transduction efficiency, and reduce administration/injection dosing, which subsequently increases patient safety. In this manuscript, we present a custom-tailored strategy to immobilize adenovirus expressing runt-related transcription factor 2 (AdRunx2) by using reactive polymer coatings to enhance in vitro osteoblast differentiation of bone marrow stromal cells (BMSCs). A thin polymer film of poly[p-xylylene carboxylic acid pentafluorophenol ester-co-p-xylylene] equipped with amine-reactive active ester groups was deposited on the surface of poly (epsilon-caprolactone) (PCL) using the chemical vapor deposition (CVD) polymerization technique and then anti-adenovirus antibody was conjugated on the material with an amide chemical bond. Following antibody conjugation, AdRunx2 was conjugated to the PCL surface through antibody-antigen interaction. Osteoblast differentiation of BMSCs was induced by incubation in osteogenic medium. Alkaline phosphatase (ALP) activity, calcium deposition, and matrix mineralization were confirmed as markers of osteoblast formation. Incubation of the BMSCs in the presence of AdRunx2 modified PCL resulted in a 6.5-fold increase in ALP activity and significant increases in matrix mineralization when compared to controls. These results demonstrate that adenovirus vectors driving the expression of transcription factors can be delivered directly from biomaterials to direct cell differentiation.

Structurally Controlled Bio-hybrid Materials Based on Unidirectional Association of Anisotropic Microparticles with Human Endothelial Cells

Biocompatible anisotropic polymer particles with bipolar affinity towards human endothelial cells are a novel type of building blocks for microstructured bio-hybrid materials. Functional polarity due to two biologically distinct hemispheres has been achieved by synthesis of anisotropic particles via electro-hydrodynamic co-jetting of two different polymer solutions and subsequent selective surface modification.

The insulation performance of reactive parylene films in implantable electronic devices

Parylene-C (poly-chloro-p-xylylene) is an appropriate material for use in an implantable, microfabricated device. It is hydrophobic, conformally deposited, has a low dielectric constant, and superb biocompatibility. Yet for many bioelectrical applications, its poor wet adhesion may be an impassable shortcoming. This research contrasts parylene-C and poly(p-xylylene) functionalized with reactive group X (PPX-X) layers using long-term electrical soak and adhesion tests. The reactive parylene was made of complementary derivatives having aldehyde and aminomethyl side groups (PPX-CHO and PPX-CH2NH2 respectively). These functional groups have previously been shown to covalently react together after heating. Electrical testing was conducted in saline at 37 degrees C on interdigitated electrodes with either parylene-C or reactive parylene as the metal layer interface. Results showed that reactive parylene devices maintained the highest impedance. Heat-treated PPX-X device impedance was 800% greater at 10kHz and 70% greater at 1Hz relative to heated parylene-C controls after 60 days. Heat treatment proved to be critical for maintaining high impedance of both parylene-C and the reactive parylene. Adhesion measurements showed improved wet metal adhesion for PPX-X, which corresponds well with its excellent high frequency performance.

Surface Modification of Confined Microgeometries via Vapor-Deposited Polymer Coatings

The development of generally applicable protocols for the surface modification of complex substrates has emerged as one of the key challenges in biotechnology. The use of vapor-deposited polymer coatings may provide an appealing alternative to the currently employed arsenal of surface modification methods consisting mainly of wet-chemical approaches. Herein, we demonstrate the usefulness of chemical vapor deposition polymerization for surface modification in confined microgeometries with both nonfunctionalized and functionalized poly(p-xylylenes). For a diverse group of polymer coatings, homogeneous surface coverage of different microgeometries featuring aspect ratios as high as 37 has been demonstrated based on optical microscopy and imaging X-ray photoelectron spectroscopy. In addition, height profiles of deposited polymer footprints were obtained by atomic force microscopy and imaging ellipsometry indicating continuous transport and deposition throughout the entire microchannels. Finally, the ability of reactive coatings to support chemical binding of biological ligands, when deposited in previously assembled microchannels, is demonstrated, verifying the usefulness of the CVD coatings for applications in micro/nanofluidics, where surface modifications with stable and designable biointerfaces are essential. The fact that reactive coatings can be deposited within confined microenvironments exhibits an important step toward new device architectures with potential relevance to bioanalytical, medical, or "BioMEMS" applications.