1
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Ducker RE, Brügge OS, Meijer AJHM, Leggett GJ. Tribochemical nanolithography: selective mechanochemical removal of photocleavable nitrophenyl protecting groups with 23 nm resolution at speeds of up to 1 mm s -1. Chem Sci 2023; 14:1752-1761. [PMID: 36819865 PMCID: PMC9931061 DOI: 10.1039/d2sc06305k] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/15/2022] [Accepted: 01/14/2023] [Indexed: 01/18/2023] Open
Abstract
We describe the mechanochemical regulation of a reaction that would otherwise be considered to be photochemical, via a simple process that yields nm spatial resolution. An atomic force microscope (AFM) probe is used to remove photocleavable nitrophenyl protecting groups from alkylsilane films at loads too small for mechanical wear, thus enabling nanoscale differentiation of chemical reactivity. Feature sizes of 20-50 nm are achieved repeatably and controllably at writing rates up to 1 mm s-1. Line widths vary monotonically with the load up to 2000 nN. To demonstrate the capacity for sophisticated surface functionalisation provided by this strategy, we show that functionalization of nanolines with nitrilo triacetic acid enables site-specific immobilization of histidine-tagged green fluorescent protein. Density functional theory (DFT) calculations reveal that the key energetic barrier in the photo-deprotection reaction of the nitrophenyl protecting group is excitation of a π-π* transition (3.1 eV) via an intramolecular charge-transfer mechanism. Under modest loading, compression of the adsorbate layer causes a decrease in the N-N separation, with the effect that this energy barrier can be reduced to as little as 1.2 eV. Thus, deprotection becomes possible via either absorption of visible photons or phononic excitation transfer, facilitating fast nanolithography with a very small feature size.
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Affiliation(s)
- Robert E. Ducker
- Department of Chemistry, University of SheffieldBrook HillSheffield S3 7HFUK
| | - Oscar Siles Brügge
- Department of Chemistry, University of Sheffield Brook Hill Sheffield S3 7HF UK
| | | | - Graham J. Leggett
- Department of Chemistry, University of SheffieldBrook HillSheffield S3 7HFUK
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2
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Chang B, Zhao D, Sun H. Plasma-Assisted Microcontact Printing. ACS APPLIED MATERIALS & INTERFACES 2022; 14:23944-23950. [PMID: 35543581 DOI: 10.1021/acsami.2c02123] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Microcontact printing, polymer pen lithography, and their variations have attracted interests from a broad spectrum of research fields as a result of the feasibility of defining patterns in micro- and nanoscales. In this work, we have proposed and demonstrated a novel lithography method, named plasma-assisted microcontact printing (PA-μCP). Unlike the previous printing methods, where a direct contact is normally required for the transport of liquid-phase inks, plasma-deposited fluorocarbon (FC) has been employed in PA-μCP as the ink material, which can be transferred from the stamp to substrates through a thermal evaporation process. The geometry of the patterns can be modified by adjusting the design of stamp patterns and the contact time, and transferred FC patterns can be used directly as an etch mask to create microstructures in the substrate materials. We have demonstrated the possibility of performing multi-patterning with PA-μCP, where FC patterns can be generated conformally on structured substrates. Because the height of FC patterns is closely related to the local pattern designs, PA-μCP can be used for grayscale patterning. As a proof of concept, Fabry-Perot planar cavities are fabricated with grayscale PA-μCP for structure color printing. We believe PA-μCP is distinguished from conventional techniques by its printing mechanism, which can pave the way for convenient fabrication of photonic, electronic, and biological devices.
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Affiliation(s)
- Bingdong Chang
- DTU Nanolab, Technical University of Denmark, Ørsteds Plads, Building 347, 2800 Kongens Lyngby, Denmark
| | - Ding Zhao
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, 18 Shilongshan Road, Hangzhou, Zhejiang 310024, People's Republic of China
| | - Hongyu Sun
- School of Resources and Materials, Northeastern University at Qinhuangdao, Qinhuangdao, Hebei 066004, People's Republic of China
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3
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Zhang X, Ding S, Magoline J, Ivankin A, Mirkin CA. Photopolymerized Features via Beam Pen Lithography as a Novel Tool for the Generation of Large Area Protein Micropatterns. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2022; 18:e2105998. [PMID: 35119205 DOI: 10.1002/smll.202105998] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/30/2021] [Revised: 01/10/2022] [Indexed: 06/14/2023]
Abstract
A cantilever-free scanning probe lithography (CF-SPL)-based method for the rapid polymerization of nanoscale features on a surface via crosslinking and thiol-acrylate photoreactions is described, wherein the nanoscale position, height, and diameter of each feature can be finely and independently tuned. With precise spatiotemporal control over the illumination pattern, beam pen lithography (BPL) allows for the photo-crosslinking of polymers into ultrahigh resolution features over centimeter-scale areas using massively parallel >160 000 pen arrays of individually addressable pens that guide and focus light onto the surface with sub-diffraction resolution. The photoinduced crosslinking reaction of the ink material, which is composed of photoinitiator, diphenyl(2,4,6-trimethylbenzoyl) phosphine oxide, poly(ethylene glycol) diacrylate, and thiol-modified functional binding molecules (i.e., thiol-PEG-biotin or 16-mercaptohexanoic acid), proceeds to ≈80% conversion with UV exposure (72 mW cm-2 ) for short time periods (0.5 s). Such polymer patterns are further reacted with proteins (streptavidin and fibronectin) to yield protein arrays with feature arrangements at high resolution and densities controlled by local UV exposure. This platform, which combines polymer photochemistry and massive arrays of scanning probes, constitutes a new approach to making biomolecular microarrays in a high-throughput and high-yielding manner, opening new routes for biochip synthesis, bioscreening, and cell biology research.
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Affiliation(s)
- Xinpeng Zhang
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, Evanston, IL, 60208, USA
| | - Shaowei Ding
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, Evanston, IL, 60208, USA
- TERA-print, LLC, 8140 McCormick Blvd, Suite 132, Skokie, IL, 60076, USA
| | - Jared Magoline
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, Evanston, IL, 60208, USA
- TERA-print, LLC, 8140 McCormick Blvd, Suite 132, Skokie, IL, 60076, USA
| | - Andrey Ivankin
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, Evanston, IL, 60208, USA
- TERA-print, LLC, 8140 McCormick Blvd, Suite 132, Skokie, IL, 60076, USA
| | - Chad A Mirkin
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, Evanston, IL, 60208, USA
- TERA-print, LLC, 8140 McCormick Blvd, Suite 132, Skokie, IL, 60076, USA
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4
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Arrabito G, Gulli D, Alfano C, Pignataro B. "Writing biochips": high-resolution droplet-to-droplet manufacturing of analytical platforms. Analyst 2022; 147:1294-1312. [PMID: 35275148 DOI: 10.1039/d1an02295d] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/02/2023]
Abstract
The development of high-resolution molecular printing allows the engineering of analytical platforms enabling applications at the interface between chemistry and biology, i.e. in biosensing, electronics, single-cell biology, and point-of-care diagnostics. Their successful implementation stems from the combination of large area printing at resolutions from sub-100 nm up to macroscale, whilst controlling the composition and volume of the ink, and reconfiguring the deposition features in due course. Similar to handwriting pens, the engineering of continuous writing systems tackles the issue of the tedious ink replenishment between different printing steps. To this aim, this review article provides an unprecedented analysis of the latest continuous printing methods for bioanalytical chemistry, focusing on ink deposition systems based on specific sets of technologies that have been developed to this aim, namely nanofountain probes, microcantilever spotting, capillary-based polymer pens and continuous 3D printing. Each approach will be discussed revealing the most important applications in the fields of biosensors, lab-on-chips and diagnostics.
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Affiliation(s)
- Giuseppe Arrabito
- Department of Physics and Chemistry (DiFC) Emilio Segrè, University of Palermo, Building 17, V.le delle Scienze, Palermo 90128, Italy.
| | - Daniele Gulli
- Department of Physics and Chemistry (DiFC) Emilio Segrè, University of Palermo, Building 17, V.le delle Scienze, Palermo 90128, Italy.
| | - Caterina Alfano
- Structural Biology and Biophysics Unit, Fondazione Ri.MED, Palermo 90133, Italy
| | - Bruno Pignataro
- Department of Physics and Chemistry (DiFC) Emilio Segrè, University of Palermo, Building 17, V.le delle Scienze, Palermo 90128, Italy.
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5
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Valles DJ, Zholdassov YS, Braunschweig AB. Evolution and applications of polymer brush hypersurface photolithography. Polym Chem 2021. [DOI: 10.1039/d1py01073e] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/19/2022]
Abstract
Hypersurface photolithography creates arbitrary polymer brush patterns with independent control over feature diameter, height, and spacing between features, while controlling composition along a polymer chain and between features.
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Affiliation(s)
- Daniel J. Valles
- Advanced Science Research Center at the Graduate Center of the City University of New York, 85 St Nicholas Terrace, New York, NY 10031, USA
- Department of Chemistry, Hunter College, 695 Park Ave, New York, NY 10065, USA
- PhD Program in Chemistry, Graduate Center of the City University of New York, 365 5th Ave, New York, NY 10016, USA
| | - Yerzhan S. Zholdassov
- Advanced Science Research Center at the Graduate Center of the City University of New York, 85 St Nicholas Terrace, New York, NY 10031, USA
- Department of Chemistry, Hunter College, 695 Park Ave, New York, NY 10065, USA
- PhD Program in Chemistry, Graduate Center of the City University of New York, 365 5th Ave, New York, NY 10016, USA
| | - Adam B. Braunschweig
- Advanced Science Research Center at the Graduate Center of the City University of New York, 85 St Nicholas Terrace, New York, NY 10031, USA
- Department of Chemistry, Hunter College, 695 Park Ave, New York, NY 10065, USA
- PhD Program in Chemistry, Graduate Center of the City University of New York, 365 5th Ave, New York, NY 10016, USA
- PhD Program in Biochemistry, Graduate Center of the City University of New York, 365 5th Ave, New York, NY 10016, USA
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6
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Xie Z, Gan T, Fang L, Zhou X. Recent progress in creating complex and multiplexed surface-grafted macromolecular architectures. SOFT MATTER 2020; 16:8736-8759. [PMID: 32969442 DOI: 10.1039/d0sm01043j] [Citation(s) in RCA: 9] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Surface-grafted macromolecules, including polymers, DNA, peptides, etc., are versatile modifications to tailor the interfacial functions in a wide range of fields. In this review, we aim to provide an overview of the most recent progress in engineering surface-grafted chains for the creation of complex and multiplexed surface architectures over micro- to macro-scopic areas. A brief introduction to surface grafting is given first. Then the fabrication of complex surface architectures is summarized with a focus on controlled chain conformations, grafting densities and three-dimensional structures. Furthermore, recent advances are highlighted for the generation of multiplexed arrays with designed chemical composition in both horizontal and vertical dimensions. The applications of such complicated macromolecular architectures are then briefly discussed. Finally, some perspective outlooks for future studies and challenges are suggested. We hope that this review will be helpful to those just entering this field and those in the field requiring quick access to useful reference information about the progress in the properties, processing, performance, and applications of functional surface-grafted architectures.
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Affiliation(s)
- Zhuang Xie
- School of Materials Science and Engineering, and Key Laboratory for Polymeric Composite and Functional Materials of Ministry of Education, Sun Yat-sen University, Xingangxi Road No. 135, Guangzhou, Guangdong Province 510275, P. R. China.
| | - Tiansheng Gan
- College of Chemistry and Environmental Engineering, Shenzhen University, Nanhai Avenue 3688, Shenzhen, Guangdong Province 518055, P. R. China.
| | - Lvye Fang
- School of Materials Science and Engineering, and Key Laboratory for Polymeric Composite and Functional Materials of Ministry of Education, Sun Yat-sen University, Xingangxi Road No. 135, Guangzhou, Guangdong Province 510275, P. R. China.
| | - Xuechang Zhou
- College of Chemistry and Environmental Engineering, Shenzhen University, Nanhai Avenue 3688, Shenzhen, Guangdong Province 518055, P. R. China.
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7
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Huang K, Wu J, Chen Z, Xu H, Wu Z, Tao K, Yang T, Wu Q, Zhou H, Huang B, Chen H, Chen J, Liu C. Nanostructured High-Performance Thin-Film Transistors and Phototransistors Fabricated by a High-Yield and Versatile Near-Field Nanolithography Strategy. ACS NANO 2019; 13:6618-6630. [PMID: 31082195 DOI: 10.1021/acsnano.9b00665] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Thin-film transistors (TFTs) and field-effect transistors (FETs) are basic units to build functional electronic circuits and investigate transport physics. In conventional TFTs or FETs, performance in terms of current level, on-off ratio, and the sensitivity of detection is limited by homogeneous semiconducting layers. In this paper, we develop TFTs with submicron heterostructures by using a strategy based on near-field photolithography. We use an array of total-reflective polydimethylsiloxane pyramids or trenches as a soft photomask in photolithography to induce multiple reflections and diffractions to focus the light. The textured feature enables the generation of gaps, dots, and grids at the nanoscale, with dimensions as small as sub-100 nm on substrates at the centimeter scale. We demonstrated the very high performance oxide TFTs on the nanoscale and periodic degenerately doped heterojunctions, and they yielded a nearly 20-fold increase in transconductance and apparent device mobility. The on-off ratio was higher than 109, with notably enhanced output current and clear scaling effect with channel length. We also built nanostructured wide-gap/narrow-gap heterojunctions to balance the high on-off ratio and sensitive photoresponse in a unidirectional phototransistor. This study shows the viability of programming a variety of nanoscale submicron patterns or interfaces in TFTs and FETs to significantly enlarge the scope of research on multifunctional TFTs and FETs.
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Affiliation(s)
- Kairong Huang
- State Key Laboratory of Optoelectronic Materials and Technologies and the Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology , Sun Yat-sen University , Guangzhou 510275 , China
| | - Jin Wu
- State Key Laboratory of Optoelectronic Materials and Technologies and the Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology , Sun Yat-sen University , Guangzhou 510275 , China
| | - Zihao Chen
- State Key Laboratory of Optoelectronic Materials and Technologies and the Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology , Sun Yat-sen University , Guangzhou 510275 , China
| | - Huihua Xu
- State Key Laboratory of Optoelectronic Materials and Technologies and the Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology , Sun Yat-sen University , Guangzhou 510275 , China
| | - Zixuan Wu
- State Key Laboratory of Optoelectronic Materials and Technologies and the Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology , Sun Yat-sen University , Guangzhou 510275 , China
| | - Kai Tao
- The Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace , Northwestern Polytechnical University , Xi'an 710072 , China
| | - Tengzhou Yang
- State Key Laboratory of Optoelectronic Materials and Technologies and the Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology , Sun Yat-sen University , Guangzhou 510275 , China
| | - Qian Wu
- State Key Laboratory of Optoelectronic Materials and Technologies and the Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology , Sun Yat-sen University , Guangzhou 510275 , China
| | - Hang Zhou
- Shenzhen Key Lab of Thin Film Transistor and Advanced Display, Peking University Shenzhen Graduate School , Peking University , Shenzhen 518055 , China
| | - Bolong Huang
- Department of Applied Biology and Chemical Technology , The Hong Kong Polytechnic University , Hung Hom, Kowloon , Hong Kong SAR
- The Hong Kong Polytechnic University Shenzhen Research Institute , Shenzhen 518000 , China
| | - Huanjun Chen
- State Key Laboratory of Optoelectronic Materials and Technologies and the Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology , Sun Yat-sen University , Guangzhou 510275 , China
| | - Jun Chen
- State Key Laboratory of Optoelectronic Materials and Technologies and the Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology , Sun Yat-sen University , Guangzhou 510275 , China
| | - Chuan Liu
- State Key Laboratory of Optoelectronic Materials and Technologies and the Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology , Sun Yat-sen University , Guangzhou 510275 , China
- State Key Lab of Silicon Materials , Zhejiang University , Hangzhou 310027 , China
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8
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Brown KA, Hedrick JL, Eichelsdoerfer DJ, Mirkin CA. Nanocombinatorics with Cantilever-Free Scanning Probe Arrays. ACS NANO 2019; 13:8-17. [PMID: 30561191 DOI: 10.1021/acsnano.8b08185] [Citation(s) in RCA: 10] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
The effectiveness of combinatorial experiments is determined by the rate at which distinct experimental conditions can be prepared and interrogated. This has been particularly limiting at the intersection of nanotechnology and soft materials research, where structures are difficult to reliably prepare and materials are incompatible with conventional lithographic techniques. For example, studying nanoparticle-based heterogeneous catalysis or the interaction between biological cells and abiotic surfaces requires precise tuning of materials composition on the nanometer scale. Scanning probe techniques are poised to be major players in the combinatorial nanoscience arena because they allow one to directly deposit materials at high resolution without any harsh processing steps that limit material compatibility. The chief limitation of scanning probe techniques is throughput, as patterning with single probes is prohibitively slow in the context of large-scale combinatorial experiments. A recent paradigm shift circumvents this problem by fundamentally altering the architecture of scanning probes by replacing the conventionally used cantilever with a soft compliant film on a rigid substrate, a substitution that allows a densely packed array of probes to function in parallel in an inexpensive format. This is a major lithographic advance in terms of scalability, throughput, and versatility that, when combined with the development of approaches to actuate individual probes in cantilever-free arrays, sets the stage for scanning-probe-based tools to address scientific questions through nanocombinatorial studies in biology and materials science. In this review, we outline the development of cantilever-free scanning probe lithography and prospects for nanocombinatorial studies enabled by these tools.
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Affiliation(s)
- Keith A Brown
- Department of Mechanical Engineering, Division of Materials Science & Engineering, and Physics Department , Boston University , 110 Cummington Mall , Boston , Massachusetts 02215 , United States
| | | | | | - Chad A Mirkin
- Department of Mechanical Engineering, Division of Materials Science & Engineering, and Physics Department , Boston University , 110 Cummington Mall , Boston , Massachusetts 02215 , United States
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9
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Liu X, Carbonell C, Braunschweig AB. Towards scanning probe lithography-based 4D nanoprinting by advancing surface chemistry, nanopatterning strategies, and characterization protocols. Chem Soc Rev 2018; 45:6289-6310. [PMID: 27460011 DOI: 10.1039/c6cs00349d] [Citation(s) in RCA: 38] [Impact Index Per Article: 6.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/20/2022]
Abstract
Biointerfaces direct some of the most complex biological events, including cell differentiation, hierarchical organization, and disease progression, or are responsible for the remarkable optical, electronic, and biological behavior of natural materials. Chemical information encoded within the 4D nanostructure of biointerfaces - comprised of the three Cartesian coordinates (x, y, z), and chemical composition of each molecule within a given volume - dominates their interfacial properties. As such, there is a strong interest in creating printing platforms that can emulate the 4D nanostructure - including both the chemical composition and architectural complexity - of biointerfaces. Current nanolithography technologies are unable to recreate 4D nanostructures with the chemical or architectural complexity of their biological counterparts because of their inability to position organic molecules in three dimensions and with sub-1 micrometer resolution. Achieving this level of control over the interfacial structure requires transformational advances in three complementary research disciplines: (1) the scope of organic reactions that can be successfully carried out on surfaces must be increased, (2) lithography tools are needed that are capable of positioning soft organic and biologically active materials with sub-1 micrometer resolution over feature diameter, feature-to-feature spacing, and height, and (3) new techniques for characterizing the 4D structure of interfaces should be developed and validated. This review will discuss recent advances in these three areas, and how their convergence is leading to a revolution in 4D nanomanufacturing.
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Affiliation(s)
- Xiaoming Liu
- Department of Chemistry, University of Miami, Coral Gables, FL 33146, USA
| | - Carlos Carbonell
- Department of Chemistry, University of Miami, Coral Gables, FL 33146, USA and Advanced Science Research Center (ASRC), City University of New York, New York, New York 10031, USA
| | - Adam B Braunschweig
- Department of Chemistry, University of Miami, Coral Gables, FL 33146, USA and Advanced Science Research Center (ASRC), City University of New York, New York, New York 10031, USA and Department of Chemistry and Biochemistry, City University of New York, Hunter College, 695 Park Avenue, New York, New York 10065, USA.
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10
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Rühe J. And There Was Light: Prospects for the Creation of Micro- and Nanostructures through Maskless Photolithography. ACS NANO 2017; 11:8537-8541. [PMID: 28910077 DOI: 10.1021/acsnano.7b05593] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
In photolithographic processes, the light inducing the photochemical reactions is confined to a small volume, which enables direct writing of micro- and nanoscale features onto solid surfaces without the need of a predefined photomask. The direct writing process can be used to generate topographic patterns through photopolymerization or photo-cross-linking or can be employed to use light to generate chemical patterns on the surface with high spatial control, which would make such processes attractive for bioapplications. The prospects of maskless photolithography technologies with a focus on two-photon lithography and scanning-probe-based photochemical processes based on scanning near-field optical microscopy or beam pen lithography are discussed.
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Affiliation(s)
- J Rühe
- Department of Microsystems Engineering (IMTEK), University of Freiburg , Georges-Köhler Allee 103, 79110 Freiburg, Germany
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11
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Zhang S, Geryak R, Geldmeier J, Kim S, Tsukruk VV. Synthesis, Assembly, and Applications of Hybrid Nanostructures for Biosensing. Chem Rev 2017; 117:12942-13038. [DOI: 10.1021/acs.chemrev.7b00088] [Citation(s) in RCA: 206] [Impact Index Per Article: 29.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/18/2022]
Affiliation(s)
- Shuaidi Zhang
- School of Materials Science
and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245, United States
| | - Ren Geryak
- School of Materials Science
and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245, United States
| | - Jeffrey Geldmeier
- School of Materials Science
and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245, United States
| | - Sunghan Kim
- School of Materials Science
and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245, United States
| | - Vladimir V. Tsukruk
- School of Materials Science
and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245, United States
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12
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Xie Z, Gordiichuk P, Lin QY, Meckes B, Chen PC, Sun L, Du JS, Zhu J, Liu Y, Dravid VP, Mirkin CA. Solution-Phase Photochemical Nanopatterning Enabled by High-Refractive-Index Beam Pen Arrays. ACS NANO 2017; 11:8231-8241. [PMID: 28617585 DOI: 10.1021/acsnano.7b03282] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
A high-throughput, solution-based, scanning-probe photochemical nanopatterning approach, which does not require the use of probes with subwavelength apertures, is reported. Specifically, pyramid arrays made from high-refractive-index polymeric materials were constructed and studied as patterning tools in a conventional liquid-phase beam pen lithography experiment. Two versions of the arrays were explored with either metal-coated or metal-free tips. Importantly, light can be channeled through both types of tips and the appropriate solution phase (e.g., H2O or CH3OH) and focused on subwavelength regions of a substrate to effect a photoreaction in solution that results in localized patterning of a self-assembled monolayer (SAM)-coated Au thin film substrate. Arrays with as many as 4500 pyramid-shaped probes were used to simultaneously initiate thousands of localized free-radical photoreactions (decomposition of a lithium acylphosphinate photoinitiator in an aqueous solution) that result in oxidative removal of the SAM. The technique is attractive since it allows one to rapidly generate features less than 200 nm in diameter, and the metal-free tips afford more than 10-fold higher intensity than the tips with nanoapertures over a micrometer propagation length. In principle, this mask-free method can be utilized as a versatile tool for performing a wide variety of photochemistries across multiple scales that may be important in high-throughput combinatorial screening applications related to chemistry, biology, and materials science.
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Affiliation(s)
| | | | - Qing-Yuan Lin
- Department of Materials Science and Engineering, Northwestern University , 2220 Campus Drive, Evanston, Illinois 60208, United States
| | | | - Peng-Cheng Chen
- Department of Materials Science and Engineering, Northwestern University , 2220 Campus Drive, Evanston, Illinois 60208, United States
| | - Lin Sun
- Department of Materials Science and Engineering, Northwestern University , 2220 Campus Drive, Evanston, Illinois 60208, United States
| | - Jingshan S Du
- Department of Materials Science and Engineering, Northwestern University , 2220 Campus Drive, Evanston, Illinois 60208, United States
| | - Jinghan Zhu
- Department of Materials Science and Engineering, Northwestern University , 2220 Campus Drive, Evanston, Illinois 60208, United States
| | | | - Vinayak P Dravid
- Department of Materials Science and Engineering, Northwestern University , 2220 Campus Drive, Evanston, Illinois 60208, United States
| | - Chad A Mirkin
- Department of Materials Science and Engineering, Northwestern University , 2220 Campus Drive, Evanston, Illinois 60208, United States
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13
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Abstract
Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology.
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14
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Liu X, Zheng Y, Peurifoy SR, Kothari EA, Braunschweig AB. Optimization of 4D polymer printing within a massively parallel flow-through photochemical microreactor. Polym Chem 2016. [DOI: 10.1039/c6py00283h] [Citation(s) in RCA: 28] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/22/2022]
Abstract
Brush polymer patterns, where the position (x,y), height (z), and chemical composition of each feature in an array were controlled independently, were prepared by combining massively parallel tip-based photolithography, microfluidics, and photochemical radical polymerizations.
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Affiliation(s)
- Xiaoming Liu
- Department of Chemistry
- University of Miami
- Coral Gables
- USA
| | - Yeting Zheng
- Department of Chemistry
- University of Miami
- Coral Gables
- USA
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