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Choi SB, Noh T, Jung SB, Kim JW. Stretchable Piezoresistive Pressure Sensor Array with Sophisticated Sensitivity, Strain-Insensitivity, and Reproducibility. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024; 11:e2405374. [PMID: 39013112 PMCID: PMC11425275 DOI: 10.1002/advs.202405374] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/16/2024] [Revised: 06/07/2024] [Indexed: 07/18/2024]
Abstract
This study delves into the development of a novel 10 by 10 sensor array featuring 100 pressure sensor pixels, achieving remarkable sensitivity up to 888.79 kPa-1, through the innovative design of sensor structure. The critical challenge of strain sensitivity inherent is addressed in stretchable piezoresistive pressure sensors, a domain that has seen significant interest due to their potential for practical applications. This approach involves synthesizing and electrospinning polybutadiene-urethane (PBU), a reversible cross-linking polymer, subsequently coated with MXene nanosheets to create a conductive fabric. This fabrication technique strategically enhances sensor sensitivity by minimizing initial current values and incorporating semi-cylindrical electrodes with Ag nanowires (AgNWs) selectively coated for optimal conductivity. The application of a pre-strain method to electrode construction ensures strain immunity, preserving the sensor's electrical properties under expansion. The sensor array demonstrated remarkable sensitivity by consistently detecting even subtle airflow from an air gun in a wind sensing test, while a novel deep learning methodology significantly enhanced the long-term sensing accuracy of polymer-based stretchable mechanical sensors, marking a major advancement in sensor technology. This research presents a significant step forward in enhancing the reliability and performance of stretchable piezoresistive pressure sensors, offering a comprehensive solution to their current limitations.
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Affiliation(s)
- Su Bin Choi
- Department of Smart Fab Technology, Sungkyunkwan University, Suwon, 16419, South Korea
| | - Taejoon Noh
- School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, 16419, South Korea
| | - Seung-Boo Jung
- School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, 16419, South Korea
| | - Jong-Woong Kim
- Department of Smart Fab Technology, Sungkyunkwan University, Suwon, 16419, South Korea
- Department of Semiconductor Convergence Engineering, Sungkyunkwan University, Suwon, 16419, South Korea
- School of Mechanical Engineering, Sungkyunkwan University, Suwon, 16419, South Korea
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2
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Zhu Y, Hu X, Yan X, Ni W, Wu M, Liu J. Nanoengineering Ultrathin Flexible Pressure Sensors with Superior Sensitivity and Wide Range via Nanocomposite Structures. ACS Sens 2024; 9:4176-4185. [PMID: 38967386 DOI: 10.1021/acssensors.4c01171] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 07/06/2024]
Abstract
Flexible pressure sensors have attracted great interest due to their bendable, stretchable, and lightweight characteristics compared to rigid pressure sensors. However, the contradictions among sensitivity, detection limit, thickness, and detection range restrict the performance of flexible pressure sensors and the scope of their applications, especially for scenarios requiring conformal fitting, such as rough surfaces such as the human skin. This paper proposes a novel flexible pressure sensor by combining the nanoengineering strategy and nanocomposite structures. The nanoengineering strategy utilizes the bending deformation of nanofilm instead of the compression of the active layer to achieve super high sensitivity and low detection limit; meanwhile, the nanocomposite structures introduce distributed microbumps that delay the adhesion of nanofilm to enlarge the detection range. As a result, this device not only ensures an ultrathin thickness of 1.6 μm and a high sensitivity of 84.29 kPa-1 but also offers a large detection range of 20 kPa and an ultralow detection limit of 0.07 Pa. Owing to the ultrathin thickness as well as high performance, this device promotes applications in detecting fingertip pressure, flexible mechanical gripping, and so on, and demonstrates significant potential in wearable electronics, human-machine interaction, health monitoring, and tactile perception. This device offers a strategy to resolve the conflicts among thickness, sensitivity, detection limit, and detection range; therefore, it will advance the development of flexible pressure sensors and contribute to the community and other related research fields.
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Affiliation(s)
- Yike Zhu
- State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China
- Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, Liaoning, China
| | - Xiaoguang Hu
- State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China
- Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, Liaoning, China
| | - Xinran Yan
- State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China
- Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, Liaoning, China
| | - Weiyao Ni
- State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China
- Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, Liaoning, China
| | - Mengxi Wu
- State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China
- Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, Liaoning, China
| | - Junshan Liu
- State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China
- Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, Liaoning, China
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Huang Z, Yu S, Xu Y, Cao Z, Zhang J, Guo Z, Wu T, Liao Q, Zheng Y, Chen Z, Liao X. In-Sensor Tactile Fusion and Logic for Accurate Intention Recognition. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2407329. [PMID: 38966893 DOI: 10.1002/adma.202407329] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/22/2024] [Revised: 06/28/2024] [Indexed: 07/06/2024]
Abstract
Touch control intention recognition is an important direction for the future development of human-machine interactions (HMIs). However, the implementation of parallel-sensing functional modules generally requires a combination of different logical blocks and control circuits, which results in regional redundancy, redundant data, and low efficiency. Here, a location-and-pressure intelligent tactile sensor (LPI tactile sensor) unprecedentedly combined with sensing, computing, and logic is proposed, enabling efficient and ultrahigh-resolution action-intention interaction. The LPI tactile sensor eliminates the need for data transfer among the functional units through the core integration design of the layered structure. It actuates in-sensor perception through feature transmission, fusion, and differentiation, thereby revolutionizing the traditional von Neumann architecture. While greatly simplifying the data dimensionality, the LPI tactile sensor achieves outstanding resolution sensing in both location (<400 µm) and pressure (75 Pa). Synchronous feature fusion and decoding support the high-fidelity recognition of action and combinatorial logic intentions. Benefiting from location and pressure synergy, the LPI tactile sensor demonstrates robust privacy as an encrypted password device and interaction intelligence through pressure enhancement. It can recognize continuous touch actions in real time, map real intentions to target events, and promote accurate and efficient intention-driven HMIs.
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Affiliation(s)
- Zijian Huang
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Shifan Yu
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Yijing Xu
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Zhicheng Cao
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Jinwei Zhang
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Ziquan Guo
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Tingzhu Wu
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Qingliang Liao
- Academy for Advanced Interdisciplinary Science and Technology, Key Laboratory of Advanced Materials and Devices for Post-Moore Chips Ministry of Education, University of Science and Technology Beijing, Beijing, 100083, China
- Beijing Key Laboratory for Advanced Energy Materials and Technologies, School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing, 100083, China
| | - Yuanjin Zheng
- School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798, Singapore
| | - Zhong Chen
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Xinqin Liao
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
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Ma Z, Wang W, Xiong Y, Long Y, Shao Q, Wu L, Wang J, Tian P, Khan AU, Yang W, Dong Y, Yin H, Tang H, Dai J, Tahir M, Liu X, He L. Carbon Micro/Nano Machining toward Miniaturized Device: Structural Engineering, Large-Scale Fabrication, and Performance Optimization. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024:e2400179. [PMID: 39031523 DOI: 10.1002/smll.202400179] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/08/2024] [Revised: 07/03/2024] [Indexed: 07/22/2024]
Abstract
With the rapid development of micro/nano machining, there is an elevated demand for high-performance microdevices with high reliability and low cost. Due to their outstanding electrochemical, optical, electrical, and mechanical performance, carbon materials are extensively utilized in constructing microdevices for energy storage, sensing, and optoelectronics. Carbon micro/nano machining is fundamental in carbon-based intelligent microelectronics, multifunctional integrated microsystems, high-reliability portable/wearable consumer electronics, and portable medical diagnostic systems. Despite numerous reviews on carbon materials, a comprehensive overview is lacking that systematically encapsulates the development of high-performance microdevices based on carbon micro/nano structures, from structural design to manufacturing strategies and specific applications. This review focuses on the latest progress in carbon micro/nano machining toward miniaturized device, including structural engineering, large-scale fabrication, and performance optimization. Especially, the review targets an in-depth evaluation of carbon-based micro energy storage devices, microsensors, microactuators, miniaturized photoresponsive and electromagnetic interference shielding devices. Moreover, it highlights the challenges and opportunities in the large-scale manufacturing of carbon-based microdevices, aiming to spark further exciting research directions and application prospectives.
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Affiliation(s)
- Zeyu Ma
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Wenwu Wang
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Yibo Xiong
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Yihao Long
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Qi Shao
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Leixin Wu
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Jiangwang Wang
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Peng Tian
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Arif Ullah Khan
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Wenhao Yang
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Yixiao Dong
- Pritzker School of Molecular Engineering, University of Chicago, 5640 South Ellis Avenue, Chicago, IL, 60637, USA
| | - Hongbo Yin
- Department of Ophthalmology, West China Hospital, Sichuan University, Chengdu, 610041, P. R. China
| | - Hui Tang
- School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu, 611731, P. R. China
| | - Jun Dai
- School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
| | - Muhammad Tahir
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
- School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
| | - Xiaoyu Liu
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Liang He
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
- Med+X Center for Manufacturing, West China Hospital, Sichuan University, Chengdu, 610041, P. R. China
- Yibin Industrial Technology Research Institute of Sichuan University, Yibin R&D Park of Sichuan University, Yibin, 644005, P. R. China
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5
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Liu J, Wang L, Xu R, Zhang X, Zhao J, Liu H, Chen F, Qu L, Tian M. Underwater Gesture Recognition Meta-Gloves for Marine Immersive Communication. ACS NANO 2024; 18:10818-10828. [PMID: 38597459 DOI: 10.1021/acsnano.3c13221] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/11/2024]
Abstract
Rapid advancements in immersive communications and artificial intelligence have created a pressing demand for high-performance tactile sensing gloves capable of delivering high sensitivity and a wide sensing range. Unfortunately, existing tactile sensing gloves fall short in terms of user comfort and are ill-suited for underwater applications. To address these limitations, we propose a flexible hand gesture recognition glove (GRG) that contains high-performance micropillar tactile sensors (MPTSs) inspired by the flexible tube foot of a starfish. The as-prepared flexible sensors offer a wide working range (5 Pa to 450 kPa), superfast response time (23 ms), reliable repeatability (∼10000 cycles), and a low limit of detection. Furthermore, these MPTSs are waterproof, which makes them well-suited for underwater applications. By integrating the high-performance MPTSs with a machine learning algorithm, the proposed GRG system achieves intelligent recognition of 16 hand gestures under water, which significantly extends real-time and effective communication capabilities for divers. The GRG system holds tremendous potential for a wide range of applications in the field of underwater communications.
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Affiliation(s)
- Jiaxu Liu
- Health & Protective Smart Textiles Research Center (HPT)/Research Center for Intelligent & Wearable Technology, College of Textiles & Clothing, State Key Laboratory of Bio-Fibers & Eco-Textiles, Collaborative Innovation Center for Eco-Textiles of Shandong Province, Qingdao University, Qingdao, Shandong 266071, People's Republic of China
| | - Lihong Wang
- Health & Protective Smart Textiles Research Center (HPT)/Research Center for Intelligent & Wearable Technology, College of Textiles & Clothing, State Key Laboratory of Bio-Fibers & Eco-Textiles, Collaborative Innovation Center for Eco-Textiles of Shandong Province, Qingdao University, Qingdao, Shandong 266071, People's Republic of China
| | - Ruidong Xu
- Health & Protective Smart Textiles Research Center (HPT)/Research Center for Intelligent & Wearable Technology, College of Textiles & Clothing, State Key Laboratory of Bio-Fibers & Eco-Textiles, Collaborative Innovation Center for Eco-Textiles of Shandong Province, Qingdao University, Qingdao, Shandong 266071, People's Republic of China
| | - Xinwei Zhang
- Health & Protective Smart Textiles Research Center (HPT)/Research Center for Intelligent & Wearable Technology, College of Textiles & Clothing, State Key Laboratory of Bio-Fibers & Eco-Textiles, Collaborative Innovation Center for Eco-Textiles of Shandong Province, Qingdao University, Qingdao, Shandong 266071, People's Republic of China
| | - Jisheng Zhao
- Health & Protective Smart Textiles Research Center (HPT)/Research Center for Intelligent & Wearable Technology, College of Textiles & Clothing, State Key Laboratory of Bio-Fibers & Eco-Textiles, Collaborative Innovation Center for Eco-Textiles of Shandong Province, Qingdao University, Qingdao, Shandong 266071, People's Republic of China
| | - Hong Liu
- Health & Protective Smart Textiles Research Center (HPT)/Research Center for Intelligent & Wearable Technology, College of Textiles & Clothing, State Key Laboratory of Bio-Fibers & Eco-Textiles, Collaborative Innovation Center for Eco-Textiles of Shandong Province, Qingdao University, Qingdao, Shandong 266071, People's Republic of China
| | - Fuxing Chen
- Health & Protective Smart Textiles Research Center (HPT)/Research Center for Intelligent & Wearable Technology, College of Textiles & Clothing, State Key Laboratory of Bio-Fibers & Eco-Textiles, Collaborative Innovation Center for Eco-Textiles of Shandong Province, Qingdao University, Qingdao, Shandong 266071, People's Republic of China
| | - Lijun Qu
- Health & Protective Smart Textiles Research Center (HPT)/Research Center for Intelligent & Wearable Technology, College of Textiles & Clothing, State Key Laboratory of Bio-Fibers & Eco-Textiles, Collaborative Innovation Center for Eco-Textiles of Shandong Province, Qingdao University, Qingdao, Shandong 266071, People's Republic of China
| | - Mingwei Tian
- Health & Protective Smart Textiles Research Center (HPT)/Research Center for Intelligent & Wearable Technology, College of Textiles & Clothing, State Key Laboratory of Bio-Fibers & Eco-Textiles, Collaborative Innovation Center for Eco-Textiles of Shandong Province, Qingdao University, Qingdao, Shandong 266071, People's Republic of China
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6
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Huang B, Feng J, He J, Huang W, Huang J, Yang S, Duan W, Zhou Z, Zeng Z, Gui X. High Sensitivity and Wide Linear Range Flexible Piezoresistive Pressure Sensor with Microspheres as Spacers for Pronunciation Recognition. ACS APPLIED MATERIALS & INTERFACES 2024; 16:19298-19308. [PMID: 38568137 DOI: 10.1021/acsami.4c04156] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/19/2024]
Abstract
Flexible piezoresistive pressure sensors have received great popularity in flexible electronics due to their simple structure and promising applications in health monitoring and artificial intelligence. However, the contradiction between sensitivity and detection range limits the application of the sensors in the medium-pressure regime. Here, a flexible piezoresistive pressure sensor is fabricated by combining a hierarchical spinous microstructure sensitive layer and a periodic microsphere array spacer. The sensor achieves high sensitivity (39.1 kPa-1) and outstanding linearity (0.99, R2 coefficient) in a medium-pressure regime, as well as a wide range of detection (100 Pa-160.0 kPa), high detection precision (<0.63‰ full scale), and excellent durability (>5000 cycles). The mechanism of the microsphere array spacer in improving sensitivity and detection range was revealed through finite element analysis. Furthermore, the sensors have been utilized to detect muscle and joint movements, spatial pressure distributions, and throat movements during pronouncing words. By means of a full-connect artificial neural network for machine learning, the sensor's output of different pronounced words can be precisely distinguished and classified with an overall accuracy of 96.0%. Overall, the high-performance flexible pressure sensor based on a microsphere array spacer has great potential in health monitoring, human-machine interface, and artificial intelligence of medium-pressure regime.
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Affiliation(s)
- Bingfang Huang
- State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510275, China
| | - Jiyong Feng
- State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510275, China
| | - Junkai He
- State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510275, China
| | - Weibo Huang
- State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510275, China
| | - Junhua Huang
- State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510275, China
| | - Shaodian Yang
- State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510275, China
| | - Wenfeng Duan
- State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510275, China
| | - Zheng Zhou
- School of Electronics and Information Engineering, Guangzhou City University of Technology, Guangzhou 510800, China
| | - Zhiping Zeng
- School of Materials Science and Engineering, Sun Yat-sen University, Guangzhou 510275, China
| | - Xuchun Gui
- State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510275, China
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Xu C, Chen J, Zhu Z, Liu M, Lan R, Chen X, Tang W, Zhang Y, Li H. Flexible Pressure Sensors in Human-Machine Interface Applications. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024; 20:e2306655. [PMID: 38009791 DOI: 10.1002/smll.202306655] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/04/2023] [Revised: 10/30/2023] [Indexed: 11/29/2023]
Abstract
Flexible sensors are highly flexible, malleable, and capable of adapting todifferent shapes, surfaces, and environments, which opens a wide range ofpotential applications in the field of human-machine interface (HMI). Inparticular, flexible pressure sensors as a crucial member of the flexiblesensor family, are widely used in wearable devices, health monitoringinstruments, robots and other fields because they can achieve accuratemeasurement and convert the pressure into electrical signals. The mostintuitive feeling that flexible sensors bring to people is the change ofhuman-machine interface interaction, from the previous rigid interaction suchas keyboard and mouse to flexible interaction such as smart gloves, more inline with people's natural control habits. Many advanced flexible pressuresensors have emerged through extensive research and development, and to adaptto various fields of application. Researchers have been seeking to enhanceperformance of flexible pressure sensors through improving materials, sensingmechanisms, fabrication methods, and microstructures. This paper reviews the flexible pressure sensors in HMI in recent years, mainlyincluding the following aspects: current cutting-edge flexible pressuresensors; sensing mechanisms, substrate materials and active materials; sensorfabrication, performances, and their optimization methods; the flexiblepressure sensors for various HMI applications and their prospects.
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Affiliation(s)
- Chengsheng Xu
- College of Big Data and Internet, Shenzhen Technology University, Shenzhen, Guangdong, 518118, China
- Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, 518055, China
| | - Jing Chen
- Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, 518055, China
| | - Zhengfang Zhu
- Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, 518055, China
| | - Moran Liu
- College of Big Data and Internet, Shenzhen Technology University, Shenzhen, Guangdong, 518118, China
- Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, 518055, China
| | - Ronghua Lan
- Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, 518055, China
| | - Xiaohong Chen
- Department of Infertility and Sexual Medicine, The Third Affiliated Hospital, Sun Yat-sen University, Guangzhou, Guangdong, 510630, China
| | - Wei Tang
- Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, 518055, China
| | - Yan Zhang
- Department of Infertility and Sexual Medicine, The Third Affiliated Hospital, Sun Yat-sen University, Guangzhou, Guangdong, 510630, China
| | - Hui Li
- College of Big Data and Internet, Shenzhen Technology University, Shenzhen, Guangdong, 518118, China
- Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, 518055, China
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8
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Che L, Hu X, Xu H, Liu Y, Lv C, Kang Z, Wu M, Wen R, Wu H, Cui J, Li K, Qi G, Luo Y, Ma X, Sun F, Li M, Liu J. Soap Film Transfer Printing for Ultrathin Electronics. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024; 20:e2308312. [PMID: 37992249 DOI: 10.1002/smll.202308312] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/20/2023] [Revised: 10/31/2023] [Indexed: 11/24/2023]
Abstract
Flexible and stretchable electronics have attractive applications inaccessible to conventional rigid electronics. However, the mainstream transfer printing techniques have challenges for electronic films in terms of thickness and size and limitations for target substrates in terms of curvature, depth, and interfacial adhesion. Here a facile, damage-free, and contamination-free soap film transfer printing technique is reported that enables the wrinkle-free transfer of ultrathin electronic films, precise alignment in a transparent manner, and conformal and adhesion-independent printing onto various substrates, including those too topographically and adhesively challenging by existing methods. In principle, not only the pattern, resolution, and thickness of transferred films, but also the curvature, depth, and adhesion of target substrates are unlimited, while the size of transferred films can be as high as meter-scale. To demonstrate the capabilities of soap film transfer printing, pre-fabricated ultrathin electronics with multiple patterns, single micron resolution, sub-micron thickness, and centimeter size are conformably integrated onto the ultrathin web, ultra-soft cotton, DVD-R disk with the minimum radius of curvature of 131 nm, interior cavity of Klein bottle and dandelion with ultralow adhesion. The printed ultrathin sensors show superior conformabilities and robust adhesion, leading to engineering opportunities including electrocardiogram (ECG) signal acquisition and temperature measurement in aqueous environments.
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Affiliation(s)
- Lixuan Che
- State Key Laboratory of Structural Analysis Optimization and CAE Software for Industrial Equipment, Department of Engineering Mechanics, School of Mechanics and Aerospace Engineering, Dalian University of Technology, Dalian, 116024, China
| | - Xiaoguang Hu
- State Key Laboratory of High-performance Precision Manufacturing, Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian, 116024, China
| | - Hechen Xu
- Department of Engineering Mechanics and Center for Nano and Micro Mechanics, AML, Tsinghua University, Beijing, 100084, China
| | - Yuanbo Liu
- State Key Laboratory of Fine Chemicals, Frontier Science Center for Smart Materials, Liaoning Key Laboratory of Clean Utilization of Chemical Resources, Dalian University of Technology, Dalian, 116024, China
| | - Cunjing Lv
- Department of Engineering Mechanics and Center for Nano and Micro Mechanics, AML, Tsinghua University, Beijing, 100084, China
| | - Zhan Kang
- State Key Laboratory of Structural Analysis Optimization and CAE Software for Industrial Equipment, Department of Engineering Mechanics, School of Mechanics and Aerospace Engineering, Dalian University of Technology, Dalian, 116024, China
| | - Mengxi Wu
- State Key Laboratory of High-performance Precision Manufacturing, Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian, 116024, China
| | - Rongfu Wen
- State Key Laboratory of Fine Chemicals, Frontier Science Center for Smart Materials, Liaoning Key Laboratory of Clean Utilization of Chemical Resources, Dalian University of Technology, Dalian, 116024, China
| | - Huaping Wu
- College of Mechanical Engineering, Zhejiang University of Technology, Key Laboratory of Special Purpose Equipment and Advanced Processing Technology, Ministry of Education and Zhejiang Province, Hangzhou, 310032, China
| | - Jiayi Cui
- State Key Laboratory of Structural Analysis Optimization and CAE Software for Industrial Equipment, Department of Engineering Mechanics, School of Mechanics and Aerospace Engineering, Dalian University of Technology, Dalian, 116024, China
| | - Kun Li
- Department of Engineering Mechanics and Center for Nano and Micro Mechanics, AML, Tsinghua University, Beijing, 100084, China
| | - Guangliang Qi
- State Key Laboratory of Structural Analysis Optimization and CAE Software for Industrial Equipment, Department of Engineering Mechanics, School of Mechanics and Aerospace Engineering, Dalian University of Technology, Dalian, 116024, China
| | - Yangjun Luo
- School of Science, Harbin Institute of Technology, Shenzhen, 518055, China
| | - Xuehu Ma
- State Key Laboratory of Fine Chemicals, Frontier Science Center for Smart Materials, Liaoning Key Laboratory of Clean Utilization of Chemical Resources, Dalian University of Technology, Dalian, 116024, China
| | - Feiyi Sun
- Department of Medical Ultrasound, Health Medical Department, Central Hospital of Dalian University of Technology, Dalian, 116024, China
| | - Ming Li
- State Key Laboratory of Structural Analysis Optimization and CAE Software for Industrial Equipment, Department of Engineering Mechanics, School of Mechanics and Aerospace Engineering, Dalian University of Technology, Dalian, 116024, China
| | - Junshan Liu
- State Key Laboratory of High-performance Precision Manufacturing, Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian, 116024, China
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Chen J, Ma G, Wang X, Song T, Zhu Y, Jia S, Zhang X, Zhao Y, Chen J, Yang B, Li Y. Multifunctional black phosphorus pressure sensors with bending angle monitoring and direction recognition characteristics. NANOSCALE 2024; 16:5999-6009. [PMID: 38391244 DOI: 10.1039/d3nr05372e] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/24/2024]
Abstract
Flexible pressure sensors, an important class of intelligent sensing devices, are widely explored in body-motion and medical health monitoring, artificial intelligence and human-machine interaction. As a unique layered nanomaterial, black phosphorus (BP) has excellent electrical, mechanical, and flexible characteristics, which make it a promising candidate for fabricating high-performance pressure sensors. Herein, hierarchically structured BP-based pressure sensors were constructed. The sensors exhibit high sensitivity, stability and a wide sensing range and respond to various human motions including finger pressure, swallowing, and wrist bending. The sensors can identify different handwriting processes with featured signals. In particular, benefiting from the unique structure of loose-dense layers, the sensors show a distinctive response to bending angles and directions, revealing a characteristic of direction recognition. This feature facilitates the sensors to monitor human motions. The sensors have been successfully powered by a home-made Cu2ZnSn(S,Se)4 thin-film solar cell, which demonstrates the sustainability, flexibility and low power consumption of integrated devices. This work offers a strategy to construct hierarchically structured pressure/strain sensors with direction recognition and provides further insights into manufacturing portable sensing devices for realistic and innovative applications.
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Affiliation(s)
- Jiangtao Chen
- Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China.
| | - Guobin Ma
- Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China.
| | - Xinyi Wang
- Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China.
| | - Tiancheng Song
- Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China.
| | - Yirun Zhu
- Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China.
| | - Shuangju Jia
- Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China.
| | - Xuqiang Zhang
- Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China.
| | - Yun Zhao
- Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China.
| | - Jianbiao Chen
- Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China.
| | - Bingjun Yang
- Laboratory of Clean Energy Chemistry and Materials, State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China
| | - Yan Li
- Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province, College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China.
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Song Y, Ren W, Zhang Y, Liu Q, Peng Z, Wu X, Wang Z. Synergetic Monitoring of both Physiological Pressure and Epidermal Biopotential Based on a Simplified on-Skin-Printed Sensor Modality. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2023; 19:e2303301. [PMID: 37423977 DOI: 10.1002/smll.202303301] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/19/2023] [Revised: 06/07/2023] [Indexed: 07/11/2023]
Abstract
Flexible electronic sensors show great potential for health monitoring but are usually limited to single sensing functionality. To enrich their functions, complicated device configurations, sophisticated material systems, and preparation processes are typically involved, obstructing their large-scale deployment and widespread application. Herein, to achieve a good balance between simplicity and multifunctionality, a new paradigm of sensor modality for both mechanical sensing and bioelectrical sensing is presented based on a single material system and a simple solution processing approach. The whole multifunctional sensors are constructed with a pair of highly conductive ultrathin electrodes (WPU/MXene-1) and an elastic micro-structured mechanical sensing layer (WPU/MXene-2), with the human skin serving as the substrate for the whole sensors. The resultant sensors show high pressure sensitivity and low skin-electrode interfacial impedance, enabling to synergetically monitor both physiological pressure (e.g., arterial pulse signals) and epidermal bioelectrical signals (including electrocardiograph and electromyography). The universality and extensibility of this methodology to construct multifunctional sensors with different material systems are also verified. This simplified sensor modality with enhanced multifunctionality provides a novel design concept to construct future smart wearables for health monitoring and medical diagnosis.
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Affiliation(s)
- Yangyang Song
- School of Mechanical Engineering, Sichuan University, Chengdu, 610065, China
- Med + X Center for Manufacturing, West China Hospital, Sichuan University, Chengdu, 610041, China
| | - Wenjuan Ren
- School of Mechanical Engineering, Sichuan University, Chengdu, 610065, China
| | - Yiqun Zhang
- School of Mechanical Engineering, Sichuan University, Chengdu, 610065, China
- Med + X Center for Manufacturing, West China Hospital, Sichuan University, Chengdu, 610041, China
| | - Qi Liu
- School of Mechanical Engineering, Sichuan University, Chengdu, 610065, China
- Med + X Center for Manufacturing, West China Hospital, Sichuan University, Chengdu, 610041, China
| | - Zhen Peng
- School of Mechanical Engineering, Sichuan University, Chengdu, 610065, China
- Med + X Center for Manufacturing, West China Hospital, Sichuan University, Chengdu, 610041, China
| | - Xiaodong Wu
- School of Mechanical Engineering, Sichuan University, Chengdu, 610065, China
| | - Zhuqing Wang
- School of Mechanical Engineering, Sichuan University, Chengdu, 610065, China
- Med + X Center for Manufacturing, West China Hospital, Sichuan University, Chengdu, 610041, China
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11
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Seesaard T, Wongchoosuk C. Flexible and Stretchable Pressure Sensors: From Basic Principles to State-of-the-Art Applications. MICROMACHINES 2023; 14:1638. [PMID: 37630177 PMCID: PMC10456594 DOI: 10.3390/mi14081638] [Citation(s) in RCA: 3] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/27/2023] [Revised: 08/14/2023] [Accepted: 08/17/2023] [Indexed: 08/27/2023]
Abstract
Flexible and stretchable electronics have emerged as highly promising technologies for the next generation of electronic devices. These advancements offer numerous advantages, such as flexibility, biocompatibility, bio-integrated circuits, and light weight, enabling new possibilities in diverse applications, including e-textiles, smart lenses, healthcare technologies, smart manufacturing, consumer electronics, and smart wearable devices. In recent years, significant attention has been devoted to flexible and stretchable pressure sensors due to their potential integration with medical and healthcare devices for monitoring human activity and biological signals, such as heartbeat, respiratory rate, blood pressure, blood oxygen saturation, and muscle activity. This review comprehensively covers all aspects of recent developments in flexible and stretchable pressure sensors. It encompasses fundamental principles, force/pressure-sensitive materials, fabrication techniques for low-cost and high-performance pressure sensors, investigations of sensing mechanisms (piezoresistivity, capacitance, piezoelectricity), and state-of-the-art applications.
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Affiliation(s)
- Thara Seesaard
- Department of Physics, Faculty of Science and Technology, Kanchanaburi Rajabhat University, Kanchanaburi 71190, Thailand;
| | - Chatchawal Wongchoosuk
- Department of Physics, Faculty of Science, Kasetsart University, Bangkok 10900, Thailand
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