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Liu L, Li J, Song T, Wu R, Zhao W, Huo F. Synthesis of Acrylate Dual-Tone Resists and the Effect of Their Molecular Weight on Lithography Performance and Mechanism: An Investigation. MATERIALS (BASEL, SWITZERLAND) 2023; 16:2331. [PMID: 36984212 PMCID: PMC10057158 DOI: 10.3390/ma16062331] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/08/2023] [Revised: 03/05/2023] [Accepted: 03/10/2023] [Indexed: 06/18/2023]
Abstract
Acrylate photoresists have gained considerable attention in recent years owing to their high resolution, high sensitivity, and versality. In this work, a series of thermally stable copolymers are synthesized by introducing an isobornyl group, and well characterized using Fourier transform infrared spectroscopy (FT-IR) and nuclear magnetic resonance spectra (1H-NMR). The effects of polymerization conditions on the molecular weight and their further influence on lithography are explored. By analyzing the thermal properties, film-forming capabilities, and the patterning behavior of these copolymers, a direct correlation between lithography performance and polymerization conditions is established via the molecular weight. In addition, the baking temperature of lithography is also optimized by atomic force microscopy (AFM), after which a line resolution of 0.1 μm is observed under the exposure of a 248 nm UV light and electron beam. Notably, our synthesized photoresist displays dual-tone resist characteristics when different developers are applied, and the reaction mechanism of acid-catalyzed hydrolysis is finally proposed by comparing the structural changes before and after exposure.
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Affiliation(s)
- Lifei Liu
- Beijing Key Laboratory of Ionic Liquids Clean Process, CAS Key Laboratory of Green Process and Engineering, Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100190, China
- School of Chemical Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Jintong Li
- Beijing Key Laboratory of Ionic Liquids Clean Process, CAS Key Laboratory of Green Process and Engineering, Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100190, China
| | - Ting Song
- Beijing Key Laboratory of Ionic Liquids Clean Process, CAS Key Laboratory of Green Process and Engineering, Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100190, China
| | - Rong Wu
- Beijing Key Laboratory of Ionic Liquids Clean Process, CAS Key Laboratory of Green Process and Engineering, Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100190, China
| | - Weizhen Zhao
- Beijing Key Laboratory of Ionic Liquids Clean Process, CAS Key Laboratory of Green Process and Engineering, Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100190, China
- School of Chemical Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Feng Huo
- Beijing Key Laboratory of Ionic Liquids Clean Process, CAS Key Laboratory of Green Process and Engineering, Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100190, China
- School of Chemical Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Zhengzhou Institute of Emerging Industrial Technology, Zhengzhou 450000, China
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Zhao X, Ratanasak M, Kon K, Hasegawa JY, Ishihara K. Bulky magnesium(ii) and sodium(i) bisphenoxide catalysts for chemoselective transesterification of methyl (meth)acrylates. Chem Sci 2023; 14:566-572. [PMID: 36741511 PMCID: PMC9847673 DOI: 10.1039/d2sc05413b] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/28/2022] [Accepted: 11/27/2022] [Indexed: 11/29/2022] Open
Abstract
Given the industrial importance of (meth)acrylate esters, various groups have devoted considerable effort to investigating their chemoselective transesterification. In 2021, we developed magnesium(ii) and sodium(i) complexes derived from 2,6-di-tert-butyl-p-cresol (BHT-H) as chemoselective catalysts for the transesterification of methyl acrylate (MA) and methyl methacrylate (MMA), respectively. Based on our results, we report the discovery of magnesium(ii) and sodium(i) salts derived from 6,6'-(propane-2,2'-diyl)bis(2,4-di-tert-butylphenol) (PBTP-H2), i.e. Mg(PBTP) and Na2(PBTP), which are 41 and 81 times more effective catalysts than Mg(BHT)2 and Na(BHT) for the transesterification of MA and MMA, respectively. These new catalysts are highly effective across an extensive range of alcohols, including primary and secondary alcohols, diols, and triols. Overall, this efficient transesterification technology can be expected to find practical applications in industrial process chemistry.
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Affiliation(s)
- Xue Zhao
- Graduate School of Engineering, Nagoya UniversityB2-3(611) Furo-cho, ChikusaNagoya 464-8603Japan
| | - Manussada Ratanasak
- Section of Theoretical Catalytic Chemistry, Institute for Catalysis, Hokkaido UniversitySapporoHokkaido 011-0021Japan
| | - Kazumasa Kon
- Graduate School of Engineering, Nagoya UniversityB2-3(611) Furo-cho, ChikusaNagoya 464-8603Japan,Venture Business Laboratory, Nagoya UniversityB2-4 Furo-cho, ChikusaNagoya 464-0814Japan
| | - Jun-ya Hasegawa
- Section of Theoretical Catalytic Chemistry, Institute for Catalysis, Hokkaido UniversitySapporoHokkaido 011-0021Japan
| | - Kazuaki Ishihara
- Venture Business Laboratory, Nagoya UniversityB2-4 Furo-cho, ChikusaNagoya 464-0814Japan
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Ng JQ, Arima H, Mochizuki T, Toh K, Matsui K, Ratanasak M, Hasegawa JY, Hatano M, Ishihara K. Chemoselective Transesterification of Methyl (Meth)acrylates Catalyzed by Sodium(I) or Magnesium(II) Aryloxides. ACS Catal 2020. [DOI: 10.1021/acscatal.0c04217] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Jie Qi Ng
- Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
| | - Hiro Arima
- Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
| | - Takuya Mochizuki
- Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
| | - Kohei Toh
- Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
| | - Kai Matsui
- Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
| | - Manussada Ratanasak
- Section of Theoretical Catalytic Chemistry, Institute for Catalysis, Hokkaido University, N21W10, Kita-ku, Sapporo, Hokkaido 011-0021, Japan
| | - Jun-Ya Hasegawa
- Section of Theoretical Catalytic Chemistry, Institute for Catalysis, Hokkaido University, N21W10, Kita-ku, Sapporo, Hokkaido 011-0021, Japan
| | - Manabu Hatano
- Graduate School of Pharmaceutical Sciences, Kobe Pharmaceutical University, 4-19-1, Motoyamakitamachi, Higashinada, Kobe 658-8558, Japan
| | - Kazuaki Ishihara
- Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan
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