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Shen YC, Wang CP, Liou KL, Tan PH, Wang YC, Wu SC, Yang TY, Yu YJ, Chiang TY, Chih YD, Chang J, Shih JR, Lin CJ, King YC, Chueh YL. Multifunctional Ion-Sensitive Floating Gate Fin Field-Effect Transistor with Three-Dimensional Nanoseaweed Structure by Glancing Angle Deposition Technology. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2022; 18:e2104168. [PMID: 34821034 DOI: 10.1002/smll.202104168] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/25/2021] [Revised: 09/12/2021] [Indexed: 06/13/2023]
Abstract
A multifunctional ion-sensitive floating gate Fin field-effect transistor (ISFGFinFET) for hydrogen and sodium detection is demonstrated. The ISFGFinFET comprises a FGFET and a sensing film, both of which are used to detect and improve sensitivity. The sensitivity of the ISFGFinFET can be adjusted by modulating the coupling effect of the FG. A nanoseaweed structure is fabricated via glancing angle deposition (GLAD) technology to obtain a large sensing area to enhance the sensitivity for hydrogen ion detection. A sensitivity of 266 mV per pH can be obtained using a surface area of 3.28 mm2 . In terms of sodium ion detection, a calix[4]arene sensing film to monitor sodium ions, obtaining a Na+ sensitivity of 432.7 mV per pNa, is used. In addition, the ISFGFinFET demonstrates the functionality of multiple ions detection simultaneously. The sensor arrays composed of 3 × 3 pixels are demonstrated, each of which comprise of an FGFET sensor and a transistor. Furthermore, 16 × 16 arrays with a decoder and other peripheral circuits are constructed and simulated. The performance of the proposed ISFGFinFET is competitive with that of other state-of-the-art ion sensors.
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Affiliation(s)
- Ying-Chun Shen
- Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan
- Frontier Research Center on Fundamental and Applied Sciences of Matters, National Tsing Hua University, Hsinchu, 30013, Taiwan
- Department of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Chien-Ping Wang
- Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan
| | - Kun-Lin Liou
- Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan
| | - Po-Hung Tan
- Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan
| | - Yi-Chung Wang
- Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan
- Frontier Research Center on Fundamental and Applied Sciences of Matters, National Tsing Hua University, Hsinchu, 30013, Taiwan
- Department of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Shu-Chi Wu
- Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan
- Frontier Research Center on Fundamental and Applied Sciences of Matters, National Tsing Hua University, Hsinchu, 30013, Taiwan
- Department of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Tzu-Yi Yang
- Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan
- Frontier Research Center on Fundamental and Applied Sciences of Matters, National Tsing Hua University, Hsinchu, 30013, Taiwan
- Department of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Yi-Jen Yu
- Instrument Center, National Tsing Hua University, Hsinchu, 30013, Taiwan
| | - Tsung-Yu Chiang
- Design Technology Division, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan
| | - Yue-Der Chih
- Design Technology Division, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan
| | - Jonathan Chang
- Design Technology Division, Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan
| | - Jiaw-Ren Shih
- Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan
| | - Chrong Jung Lin
- Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan
| | - Ya-Chin King
- Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan
| | - Yu-Lun Chueh
- Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan
- Frontier Research Center on Fundamental and Applied Sciences of Matters, National Tsing Hua University, Hsinchu, 30013, Taiwan
- Department of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
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Fathi SAM, Yaftian MR, Kargari A, Matt D. Emulsion liquid membrane pertraction of l-cysteine from sodium chloride aqueous solutions mediated by a narrow rim phosphorylated cone-shaped calix[4]arene. JOURNAL OF THE IRANIAN CHEMICAL SOCIETY 2012. [DOI: 10.1007/s13738-012-0079-2] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/28/2022]
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Brunink JAJ, Verboom W, Engbersen JFJ, Reinhoudt DN, Harkema S. Synthesis and cation complexation selectivity of bis(syn-proximally) functionalized calix[4]arenes. ACTA ACUST UNITED AC 2010. [DOI: 10.1002/recl.19921111203] [Citation(s) in RCA: 19] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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Sun H, Zeng XS, Liu JQ, Leng XB, Qi-Fa C, Xu FB, Li QS, He XW, Zhang WQ, Zhang ZZ. Synthesis of a Tweezer-like Bis(phenylthiapropoxy)calix[4]-arene as a Cation/π Enhanced Sensor for Ion-Selective Electrodes. CHINESE J CHEM 2010. [DOI: 10.1002/cjoc.20020201033] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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Alifragis Y, Volosirakis A, Chaniotakis NA, Konstantinidis G, Adikimenakis A, Georgakilas A. Potassium selective chemically modified field effect transistors based on AlGaN/GaN two-dimensional electron gas heterostructures. Biosens Bioelectron 2006; 22:2796-801. [PMID: 17098415 DOI: 10.1016/j.bios.2006.10.010] [Citation(s) in RCA: 23] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/30/2006] [Revised: 09/26/2006] [Accepted: 10/03/2006] [Indexed: 11/24/2022]
Abstract
We investigate the use of the AlGaN/GaN high electron mobility transistor (HEMT) as a novel transducer for the development of ion-selective chemically modified HEMT sensors (ChemHEMTs). For this, polyvinyl chloride (PVC) membrane doped with ion-selective ionophores is deposited onto the area of the gate for the chemical recognition step, while the AlGaN/GaN HEMT is used as the transducer. In particular, the use of a valinocycin doped membrane with thickness of 50 microm generates a sensor with excellent analytical characteristics for the monitoring of K(+). The K(+)-ChemHEMT has sensitivity of 52.4 mV/pK(+)in the linear range of 10(-5) to 10(-2)M, while the detection limit is in the order of 3.1 x 10(-6)M. Also, the sensor shows selectivity similar to valinomycin-based ISEs, while the signal stability over time and the measurement to measurement reproducibility are very good.
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Affiliation(s)
- Y Alifragis
- Laboratory of Analytical Chemistry, Department of Chemistry, University of Crete, Voutes, PO Box 2208, 71003 Iraklion-Crete, Greece
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Lu J, Tong X, He X. A mercury ion-selective electrode based on a calixarene derivative containing the thiazole azo group. J Electroanal Chem (Lausanne) 2003. [DOI: 10.1016/s0022-0728(02)01298-6] [Citation(s) in RCA: 57] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
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Rochefeuille S, Jimenez C, Tingry S, Seta P, Desfours J. Mixed Langmuir–Blodgett monolayers containing carboxylic ionophores. Application to Na+ and Ca2+ ISFET-based sensors. MATERIALS SCIENCE & ENGINEERING. C, MATERIALS FOR BIOLOGICAL APPLICATIONS 2002. [DOI: 10.1016/s0928-4931(02)00056-5] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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A lead ion-selective electrode based on a calixarene carboxyphenyl azo derivative. J Electroanal Chem (Lausanne) 2002. [DOI: 10.1016/s0022-0728(02)00840-9] [Citation(s) in RCA: 50] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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Zeng X, Weng L, Chen L, Xu F, Li Q, Leng X, He X, Zhang ZZ. The syntheses and Ag+-selective electrode properties of benzothiazolylthiaalkoxy functionalized calix[4]arenes: an investigation of the structure–selectivity relationship in the ionophore-based ISEs. Tetrahedron 2002. [DOI: 10.1016/s0040-4020(02)00124-2] [Citation(s) in RCA: 22] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
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Calix[2]furano[2]pyrrole and related compounds as the neutral carrier in silver ion-selective electrode. Anal Chim Acta 2002. [DOI: 10.1016/s0003-2670(01)01493-3] [Citation(s) in RCA: 40] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/19/2022]
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Chen L, Zeng X, Ju H, He X, Zhang Z. Calixarene derivatives as the sensory molecules for silver ion-selective electrode. Microchem J 2000. [DOI: 10.1016/s0026-265x(00)00038-2] [Citation(s) in RCA: 29] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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Chen L, He X, Zhao B, Liu Y. Calixarene derivative as the neutral carrier in silver ion-selective electrode and liquid membrane transport. Anal Chim Acta 2000. [DOI: 10.1016/s0003-2670(00)00912-0] [Citation(s) in RCA: 32] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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Kharitonov AB, Shipway AN, Willner I. An Au nanoparticle/bisbipyridinium cyclophane-functionalized ion-sensitive field-effect transistor for the sensing of adrenaline. Anal Chem 1999; 71:5441-3. [PMID: 10596219 DOI: 10.1021/ac990997s] [Citation(s) in RCA: 37] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Abstract
A film consisting of polyethyleneimine (PEI), Au nanoparticles (12 +/- 1 nm) and coadsorbed cyclobis(paraquat-p-phenylene) (1) was assembled as a sensing interface on the Al2O3 insulating layer of an ion-sensitive field-effect transistor (ISFET). Adrenaline (2) was sensed by the functionalized ISFET with a detection limit of 1 x 10(-6) M. The sensing ability of the nanostructured device for the analysis of adrenaline originates from the preconcentration of the analyte in the cyclophane by pi-pi donor-acceptor interactions. Analysis of adrenaline is accomplished by the measurement of the source-drain current, Isd, or by the gate-source voltage, Vgs. The sensing device is reusable (at least 100 cycles) and exhibits high stability.
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Lugtenberg RJ, Egberink RJ, van den Berg A, Engbersen JF, Reinhoudt DN. The effects of covalent binding of the electroactive components in durable CHEMFET membranes—impedance spectroscopy and ion sensitivity studies. J Electroanal Chem (Lausanne) 1998. [DOI: 10.1016/s0022-0728(98)00080-1] [Citation(s) in RCA: 22] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
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Bühlmann P, Pretsch E, Bakker E. Carrier-Based Ion-Selective Electrodes and Bulk Optodes. 2. Ionophores for Potentiometric and Optical Sensors. Chem Rev 1998; 98:1593-1688. [PMID: 11848943 DOI: 10.1021/cr970113+] [Citation(s) in RCA: 1264] [Impact Index Per Article: 48.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Philippe Bühlmann
- Department of Chemistry, School of Science, The University of Tokyo, Hongo 7-3-1, Bunkyo-ku, Tokyo 113-0033, Japan, Department of Organic Chemistry, Swiss Federal Institute of Technology (ETH), Universitätstrasse 16, CH-8092 Zürich, Switzerland, and Department of Chemistry, Auburn University, Auburn, Alabama 36849
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Membranes containing new large size calixarenes on semiconductor substrates for chemical microsensors. Anal Chim Acta 1997. [DOI: 10.1016/s0003-2670(97)00440-6] [Citation(s) in RCA: 11] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/20/2022]
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Glennon JD, Hutchinson S, Harris SJ, Walker A, McKervey MA, McSweeney CC. Molecular Baskets in Supercritical CO2. Anal Chem 1997; 69:2207-12. [DOI: 10.1021/ac960850q] [Citation(s) in RCA: 21] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Jeremy D. Glennon
- Department of Chemistry, University College Cork, Cork, Ireland, and School of Chemistry, Queen's University, Belfast, N. Ireland
| | - Sharon Hutchinson
- Department of Chemistry, University College Cork, Cork, Ireland, and School of Chemistry, Queen's University, Belfast, N. Ireland
| | - Stephen J. Harris
- Department of Chemistry, University College Cork, Cork, Ireland, and School of Chemistry, Queen's University, Belfast, N. Ireland
| | - Andrew Walker
- Department of Chemistry, University College Cork, Cork, Ireland, and School of Chemistry, Queen's University, Belfast, N. Ireland
| | - M. Anthony McKervey
- Department of Chemistry, University College Cork, Cork, Ireland, and School of Chemistry, Queen's University, Belfast, N. Ireland
| | - Conor C. McSweeney
- Department of Chemistry, University College Cork, Cork, Ireland, and School of Chemistry, Queen's University, Belfast, N. Ireland
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O'Connor KM, Henderson W, O'Neill E, Arrigan DWM, Harris SJ, McKervey MA, Svehla G. Calix[4]Arenes in the partial cone conformation as ionophores in silver ion-selective electrodes. ELECTROANAL 1997. [DOI: 10.1002/elan.1140090410] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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22
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FET-based sensors with robust photosensitive polymer membranes for detection of ammonium ions and urea. Biosens Bioelectron 1996. [DOI: 10.1016/0956-5663(96)88412-0] [Citation(s) in RCA: 27] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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Lugtenberg RJ, Brzozka Z, Casnati A, Ungaro R, Engbersen JF, Reinhoudt DN. Cesium-selective chemically modified field effect transistors with calix[4]arene-crown-6 derivatives. Anal Chim Acta 1995. [DOI: 10.1016/0003-2670(95)00139-q] [Citation(s) in RCA: 25] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
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Arrigan DWM, Svehla G, Harris SJ, McKervey MA. Use of calixarenes as modifiers of carbon paste electrodes for voltammetric analysis. ELECTROANAL 1994. [DOI: 10.1002/elan.1140060205] [Citation(s) in RCA: 31] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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O'Sullivan P, Böhmer V, Vogt W, Paulus EF, Jakobi RA. Diastereoselective Functionalization of a Spherand-Type Calixarene. ACTA ACUST UNITED AC 1994. [DOI: 10.1002/cber.19941270219] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
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Shibutani Y, Yoshinaga H, Yakabe K, Shono T, Tanaka M. Polymeric membrane sodium-selective electrodes based on calix[4]arene ionophores. ACTA ACUST UNITED AC 1994. [DOI: 10.1007/bf00708991] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
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Cobben PL, Egberink RJ, Bomer JG, Schouwenaar R, Brzozka Z, Bos M, Bergveld P, Reinhoudt DN. Chemically modified ion-sensitive field-effect transistors: elimination of the liquid juction potential in a double sensor flow-injection analysis cell. Anal Chim Acta 1993. [DOI: 10.1016/0003-2670(93)80403-8] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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Comparative study of tripodal oxa-amides and oxa-esters as ionophores in potentiometric ion-selective electrodes for alkali and alkaline earth cations. Anal Chim Acta 1993. [DOI: 10.1016/0003-2670(93)80404-9] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022]
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