Ultrafast Transmission Electron Microscopy: Historical Development, Instrumentation, and Applications

Attosecond electron microscopy and diffraction

Advances in attosecond spectroscopy have enabled tracing and controlling the electron motion dynamics in matter, although they have yielded insufficient information about the electron dynamic in the space domain. Hence, ultrafast electron and x-ray imaging tools have been developed to image the ultrafast dynamics of matter in real time and space. The cutting-edge temporal resolution of these imaging tools is on the order of a few tens to a hundred femtoseconds, limiting imaging to the atomic dynamics and leaving electron motion imaging out of reach. Here, we obtained the attosecond temporal resolution in the transmission electron microscope, which we coined "attomicroscopy." We demonstrated this resolution by the attosecond diffraction measurements of the field-driven electron dynamics in graphene. This attosecond imaging tool would provide more insights into electron motion and directly connect it to the structural dynamics of matter in real-time and space domains, opening the door for long-anticipated real-life attosecond science applications in quantum physics, chemistry, and biology.

Picosecond carrier dynamics in InAs and GaAs revealed by ultrafast electron microscopy

Understanding the limits of spatiotemporal carrier dynamics, especially in III-V semiconductors, is key to designing ultrafast and ultrasmall optoelectronic components. However, identifying such limits and the properties controlling them has been elusive. Here, using scanning ultrafast electron microscopy, in bulk n-GaAs and p-InAs, we simultaneously measure picosecond carrier dynamics along with three related quantities: subsurface band bending, above-surface vacuum potentials, and surface trap densities. We make two unexpected observations. First, we uncover a negative-time contrast in secondary electrons resulting from an interplay among these quantities. Second, despite dopant concentrations and surface state densities differing by many orders of magnitude between the two materials, their carrier dynamics, measured by photoexcited band bending and filling of surface states, occur at a seemingly common timescale of about 100 ps. This observation may indicate fundamental kinetic limits tied to a multitude of material and surface properties of optoelectronic III-V semiconductors and highlights the need for techniques that simultaneously measure electro-optical kinetic properties.

A Gold Needle Tip Array Ultrafast Electron Source with High Beam Quality

Electron sources are crucial elements in diverse applications such as electron microscopes, synchrotrons, and free-electron lasers. Nanometer-sharp needle tips are electron emitters with the highest beam quality, yet for a single needle the current is limited. Combining the emission of multiple needles promises large current yields while preserving the individual emitters' favorable properties. We present an ultrafast electron source consisting of a lithographically fabricated array of sharp gold tips illuminated with 25 fs laser pulses. The source provides up to 2000 electrons per pulse for moderate laser peak intensities of 1011 W/cm2 and a narrow energy width of 0.5 ± 0.05 eV at low current. The electron beam has a well-behaved Gaussian profile and is highly collimated, yielding a small normalized emittance on the order of nm·rad. These properties are well suited for applications requiring both high current and spatial resolution, such as free-electron light sources and chip-based particle accelerators.

Accelerating Quantum Materials Development with Advances in Transmission Electron Microscopy

Quantum materials are driving a technology revolution in sensing, communication, and computing, while simultaneously testing many core theories of the past century. Materials such as topological insulators, complex oxides, superconductors, quantum dots, color center-hosting semiconductors, and other types of strongly correlated materials can exhibit exotic properties such as edge conductivity, multiferroicity, magnetoresistance, superconductivity, single photon emission, and optical-spin locking. These emergent properties arise and depend strongly on the material's detailed atomic-scale structure, including atomic defects, dopants, and lattice stacking. In this review, we describe how progress in the field of electron microscopy (EM), including in situ and in operando EM, can accelerate advances in quantum materials and quantum excitations. We begin by describing fundamental EM principles and operation modes. We then discuss various EM methods such as (i) EM spectroscopies, including electron energy loss spectroscopy (EELS), cathodoluminescence (CL), and electron energy gain spectroscopy (EEGS); (ii) four-dimensional scanning transmission electron microscopy (4D-STEM); (iii) dynamic and ultrafast EM (UEM); (iv) complementary ultrafast spectroscopies (UED, XFEL); and (v) atomic electron tomography (AET). We describe how these methods could inform structure-function relations in quantum materials down to the picometer scale and femtosecond time resolution, and how they enable precision positioning of atomic defects and high-resolution manipulation of quantum materials. For each method, we also describe existing limitations to solve open quantum mechanical questions, and how they might be addressed to accelerate progress. Among numerous notable results, our review highlights how EM is enabling identification of the 3D structure of quantum defects; measuring reversible and metastable dynamics of quantum excitations; mapping exciton states and single photon emission; measuring nanoscale thermal transport and coupled excitation dynamics; and measuring the internal electric field and charge density distribution of quantum heterointerfaces- all at the quantum materials' intrinsic atomic and near atomic-length scale. We conclude by describing open challenges for the future, including achieving stable sample holders for ultralow temperature (below 10K) atomic-scale spatial resolution, stable spectrometers that enable meV energy resolution, and high-resolution, dynamic mapping of magnetic and spin fields. With atomic manipulation and ultrafast characterization enabled by EM, quantum materials will be poised to integrate into many of the sustainable and energy-efficient technologies needed for the 21st century.

Time-resolved electron holography and its application to an ionic liquid specimen

Time-resolved electron holography was implemented in a transmission electron microscope by means of electron beam gating with a parallel-plate electrostatic deflector. Stroboscopic observations were performed by accumulating gated electron interference images while applying a periodic modulation voltage to a specimen. Electric polarization in an ionic liquid specimen was observed under applied fields. While a static electric field in the specimen was reduced by the polarization of the material, an applied field modulated at 10 kHz was not screened. This indicates that time-resolved electron holography is capable of determining the frequency limit of dynamic response of polarization in materials. Graphical Abstract.

Efficiently accelerated free electrons by metallic laser accelerator

Strong electron-photon interactions occurring in a dielectric laser accelerator provide the potential for development of a compact electron accelerator. Theoretically, metallic materials exhibiting notable surface plasmon-field enhancements can possibly generate a high electron acceleration capability. Here, we present a design for metallic material-based on-chip laser-driven accelerators that show a remarkable electron acceleration capability, as demonstrated in ultrafast electron microscopy investigations. Under phase-matching conditions, efficient and continuous acceleration of free electrons on a periodic nanostructure can be achieved. Importantly, an asymmetric spectral structure in which the vast majority of the electrons are in the energy-gain states has been obtained by means of a periodic bowtie-structure accelerator. Due to the presence of surface plasmon enhancement and nonlinear optical effects, the maximum acceleration gradient can reach as high as 0.335 GeV/m. This demonstrates that metallic laser accelerator could provide a way to develop compact accelerators on chip.

Tracing attosecond electron emission from a nanometric metal tip

Solids exposed to intense electric fields release electrons through tunnelling. This fundamental quantum process lies at the heart of various applications, ranging from high brightness electron sources in d.c. operation1,2 to petahertz vacuum electronics in laser-driven operation3-8. In the latter process, the electron wavepacket undergoes semiclassical dynamics9,10 in the strong oscillating laser field, similar to strong-field and attosecond physics in the gas phase11,12. There, the subcycle electron dynamics has been determined with a stunning precision of tens of attoseconds13-15, but at solids the quantum dynamics including the emission time window has so far not been measured. Here we show that two-colour modulation spectroscopy of backscattering electrons16 uncovers the suboptical-cycle strong-field emission dynamics from nanostructures, with attosecond precision. In our experiment, photoelectron spectra of electrons emitted from a sharp metallic tip are measured as function of the relative phase between the two colours. Projecting the solution of the time-dependent Schrödinger equation onto classical trajectories relates phase-dependent signatures in the spectra to the emission dynamics and yields an emission duration of 710 ± 30 attoseconds by matching the quantum model to the experiment. Our results open the door to the quantitative timing and precise active control of strong-field photoemission from solid state and other systems and have direct ramifications for diverse fields such as ultrafast electron sources17, quantum degeneracy studies and sub-Poissonian electron beams18-21, nanoplasmonics22 and petahertz electronics23.

Time-resolved transmission electron microscopy for nanoscale chemical dynamics

The ability of transmission electron microscopy (TEM) to image a structure ranging from millimetres to Ångströms has made it an indispensable component of the toolkit of modern chemists. TEM has enabled unprecedented understanding of the atomic structures of materials and how structure relates to properties and functions. Recent developments in TEM have advanced the technique beyond static material characterization to probing structural evolution on the nanoscale in real time. Accompanying advances in data collection have pushed the temporal resolution into the microsecond regime with the use of direct-electron detectors and down to the femtosecond regime with pump-probe microscopy. Consequently, studies have deftly applied TEM for understanding nanoscale dynamics, often in operando. In this Review, time-resolved in situ TEM techniques and their applications for probing chemical and physical processes are discussed, along with emerging directions in the TEM field.

Nanoscale subparticle imaging of vibrational dynamics using dark-field ultrafast transmission electron microscopy

An understanding of nanoscale energy transport and acoustic response is important for applications of nanomaterials but hinges on a complete characterization of their structural dynamics. The precise determination of the structural dynamics within nanoparticles, however, is still challenging and requires high spatiotemporal resolution and detection sensitivity. Here we present a centred dark-field imaging approach based on ultrafast transmission electron microscopy that is capable of directly mapping the picosecond-scale evolution of intrananoparticle vibration with a spatial resolution down to 3 nm. Using this approach, we investigated the photo-induced vibrational dynamics in individual gold heterodimers composed of a nanoprism and a nanosphere. We observed not only the retardation of in-plane vibrations in the nanoprisms, which we attribute to thermal and vibrational energy transferred from adjacent nanospheres mediated by surfactants, but also the existence of a complex multimodal oscillation and its spatial variation within individual nanoprisms. This work represents an advance in real-space mapping of vibrational dynamics on the subnanoparticle level with a high detection sensitivity.

Light-Induced In Situ Transmission Electron Microscopy─Development, Challenges, and Perspectives

Transmission electron microscopy is a basic technique used for examining matter at the highest magnification scale available. One of its most challenging branches is in situ microscopy, in which dynamic processes are observed in real time. Among the various stimuli, like strain, temperature, and magnetic or electric fields, the light-matter interaction is rarely observed. However, in recent years, a significant increase in the interest in this technique has been observed. Therefore, I present a summary and critical review of all the in situ experiments performed with light, various technical possibilities for bringing radiation inside the transmission electron microscope, and the most important differences between the effects of light and electrons on the studied matter. Finally, I summarize the most promising directions for further research using light excitation.

Non-Poissonian Ultrashort Nanoscale Electron Pulses

The statistical character of electron beams used in current technologies, as described by a stream of particles, is random in nature. Using coincidence measurements of femtosecond pulsed electron pairs, we report the observation of sub-Poissonian electron statistics that are nonrandom due to two-electron Coulomb interactions, and that exhibit an antibunching signal of 1 part in 4. This advancement is a fundamental step toward observing a strongly quantum degenerate electron beam needed for many applications, and in particular electron correlation spectroscopy.

Imprinting the quantum statistics of photons on free electrons

[Figure: see text].

Femtosecond laser driven precessing magnetic gratings

Manipulation and detection of spins at the nanoscale is of considerable contemporary interest as it may not only facilitate a description of fundamental physical processes but also plays a critical role in the development of spintronic devices. Here, we describe the application of a novel combination of transient grating excitation with Lorentz ultrafast electron microscopy to control and detect magnetization dynamics with combined nanometer and picosecond resolutions. Excitation of Ni80Fe20 thin film samples results in the formation of transient coherently precessing magnetic gratings. From the time-resolved results, we extract detailed real space information of the magnetic precession, including local magnetization, precession frequency, and relevant decay factors. The Lorentz contrast of the dynamics is sensitive to the alignment of the in-plane components of the applied field. The experimental results are rationalized by a model considering local demagnetization and the phase of the precessing magnetic moments. We envision that this technique can be extended to the study of spin waves and dynamic behavior in ferrimagnetic and antiferromagnetic systems.

Optimization of off-axis electron holography performed with femtosecond electron pulses

We report on electron holography experiments performed with femtosecond electron pulses in an ultrafast coherent Transmission Electron Microscope based on a laser-driven cold field emission gun. We first discuss the experimental requirements related to the long acquisition times imposed by the low emission/probe current available in these instruments. The experimental parameters are first optimized and electron holograms are then acquired in vacuum and on a nano-object showing that useful physical properties can nevertheless be extracted from the hologram phase in pulsed condition. Finally, we show that the acquisition of short exposure time holograms assembled in a stack, combined with a computer-assisted shift compensation of usual instabilities encountered in holography, such as beam and biprism wire instabilities, can yield electron holograms acquired with a much better contrast paving the way to ultrafast time-resolved electron holography.