Biodegradation of tetramethylammonium hydroxide (TMAH) in completely autotrophic nitrogen removal over nitrite (CANON) process

Research on carbon and nitrogen removal of tetramethylammonium hydroxide containing wastewater by combined anaerobic/integrated fixed film activated sludge process

Tetramethylammonium hydroxide (TMAH) is widely used as a developer and etchant in the thin-film transistor liquid crystal display industry, which is the main component of developer wastewater with low C/N ratio. This study investigated TMAH degradation by combined anaerobic/integrated fixed film activated sludge (A/IFAS) process, especially for nitrogen removal. Effects of process condition on the TMAH degradation were studied, including dissolved oxygen concentration in IFAS reactor and the temperature of anaerobic reactor. Especially, the nitrogen removal was studied through the monitoring of intermediate products during TMAH biodegradation. The results indicated that lower the anaerobic treatment temperature can provide more available organic matters to enhance the denitrification in the subsequent IFAS reactor. Less oxygen supply in the IFAS reactor contributed to simultaneous nitrification and denitrification. Removal efficiency of total organic carbon and total nitrogen was up to 95.8% and 80.7%, when the temperature of anaerobic treatment was controlled at 30 °C with the DO kept at 0.7 mg/L. It indicated that A/IFAS process was efficient in carbon and nitrogen removal for TMAH degradation. The results also confirmed intermediate products of TMAH biodegradation can be used as the electron donor during denitrification, including trimethylamine, dimethylamine and methylamine. Illumina MiSeq sequencing showed that Proteobacteria was the dominant phylum contribute to nitrogen removal. Compared to sludge flocs in IFAS reactor, richer community and higher microbial diversity were observed in the biofilm.

Anaerobic hydrolysis of recalcitrant tetramethylammonium from semiconductor wastewater: Performance and mechanisms

The treatment of tetramethylammonium hydroxide (TMAH)-bearing wastewater, generated in the electronic and semiconductor industries, raises significant concerns due to the neurotoxic, recalcitrant, and bio-inhibiting effects of TMAH. In this study, we proposed the use of an anaerobic hydrolysis bioreactor (AHBR) for TMAH removal, achieving a high removal efficiency of approximately 85%, which greatly surpassed the performance of widely-used advanced oxidation processes (AOPs). Density functional theory calculations indicated that the unexpectedly poor efficiency (5.8-8.0%) of selected AOPs can be attributed to the electrostatic repulsion between oxidants and the tightly bound electrons of TMAH. Metagenomic analyses of the AHBR revealed that Proteobacteria and Euryarchaeota played a dominant role in the transformation of TMAH through processes such as methyl transfer, methanogenesis, and acetyl-coenzyme A synthesis, utilizing methyl-tetrahydromethanopterin as a substrate. Moreover, several potential functional genes (e.g., mprF, basS, bcrB, sugE) related to TMAH resistance have been identified. Molecular docking studies between five selected proteins and tetramethylammonium further provided evidence supporting the roles of these potential functional genes. This study demonstrates the superiority of AHBR as a pretreatment technology compared to several widely-researched AOPs, paving the way for the proper design of treatment processes to abate TMAH in semiconductor wastewater.

Treatment of Semiconductor Wastewater Containing Tetramethylammonium Hydroxide (TMAH) Using Nanofiltration, Reverse Osmosis, and Membrane Capacitive Deionization

As the semiconductor industry has grown tremendously over the last decades, its environmental impact has become a growing concern, including the withdrawal of fresh water and the generation of harmful wastewater. Tetramethylammonium hydroxide (TMAH), one of the toxic compounds inevitably found in semiconductor wastewater, should be removed before the wastewater is discharged. However, there are few affordable technologies available to remove TMAH from semiconductor wastewater. Therefore, the objective of this study was to compare different treatment options, such as Membrane Capacitive Deionization (MCDI), Reverse Osmosis (RO), and Nanofiltration (NF), for the treatment of semiconductor wastewater containing TMAH. A series of bench-scale experimental setups were conducted to investigate the removal efficiencies of TMAH, TDS, and TOC. The results confirmed that the MCDI process showed its great ability as well as RO to remove them, while the NF could not make a sufficient removal under identical recovery conditions. MCDI showed higher removals of monovalent ions, including TMA+, than divalent ions. Moreover, the removal of TMA+ by MCDI was higher under the basic solution than under both neutral and acidic conditions. These results were the first to demonstrate that MCDI has significant potential for treating semiconductor wastewater that contains TMAH.

A review of the existing and emerging technologies for wastewaters containing tetramethyl ammonium hydroxide (TMAH) and waste management systems in micro-chip microelectronic industries

The present work aims to describe and review the available technologies and the recent advancements in treating industrial wastewater containing tetramethylammonium hydroxide (TMAH). It is a quaternary ammonium salt and widely used in the microelectronics industry; this kind of company produces large quantities of wastewater containing TMAH. The exhausted solutions must be treated appropriately since TMAH is corrosive, toxic to human health, and ecotoxic. Regarding the concentration at discharge, currently there are no European regulations. Still, it has been indicated that the substance has a negative influence on the oxygen balance and cause eutrophication, and fall into the relevant categories. In the first part of the work, the available technologies and the recent advancements for the treatment of TMAH contained in industrial wastewater are reviewed. Separation methods as such adsorption, ion exchange, membrane processes, and destruction technologies classified as advanced oxidation processes and biological processes have been considered. In the second part of the manuscript, industrial patented wastewater treatments have been described. Biological processes are those more used, being more economically feasible, require very long times not always sustainable.

Quorum quenching bacteria isolated from industrial wastewater sludge to control membrane biofouling

N-acylhomoserine lactone (AHL)-based bacterial communication through quorum sensing (QS) is one of the main causes of biofouling. Although quorum quenching (QQ) has proven to be an effective strategy against biofouling in membrane bioreactors (MBRs) for municipal wastewater treatment, its applicability for industrial wastewater treatment has rarely been studied. This is the first study to isolate QQ strains from the activated sludge used to treat industrial wastewater containing toxic tetramethylammonium hydroxide (TMAH) and 1-methyl-2-pyrrolidinone. The two QQ strains from genus Bacillus (SDC-U1 and SDC-A8) survived and effectively degraded QS signals in the presence of TMAH. They also showed resistance to toxic byproducts of TMAH degradation such as ammonium and formaldehyde. They effectively reduced the biofilm formation of Pseudomonas aeruginosa PAO1 and mixed community of activated sludge. The strains isolated in this study thus have the potential to be employed to reduce membrane biofouling in MBRs during the treatment of TMAH-containing wastewater.

Water reclamation and microbial community investigation: Treatment of tetramethylammonium hydroxide wastewater through an anaerobic osmotic membrane bioreactor hybrid system

Tetramethylammonium hydroxide (TMAH) is a toxic photoresist developer used in the photolithography process in thin-film transistor liquid crystal display (TFT-LCD) production, and it can be removed through anaerobic treatment. TMAH cannot be released into the environment because of its higher toxicity. A tight membrane, such as a forward osmosis (FO) membrane, together with an anaerobic biological process can ensure that no TMAH is released into the environment. Thus, for the first time, an anaerobic osmotic membrane bioreactor (AnOMBR) hybrid system was developed in this study to treat a low-strength TMAH wastewater and to simultaneously investigate its microbial community. Microfiltration extraction was used to mitigate the salinity accumulation, and a periodically physical water cleaning was utilized to mitigate the FO membrane fouling. The diluted draw solute (MgSO₄) was reconcentrated and reused by a membrane distillation (MD) process in the AnOMBR to achieve 99.99% TMAH removal in this AnOMBR-MD hybrid system, thereby ensuring that no TMAH is released into the natural environment. Moreover, the membrane fouling in the feed and draw sides were analyzed through the fluorescence excitation-emission matrix (FEEM) spectrophotometry to confirm that the humic acid-like materials were the primary membrane fouling components in this AnOMBR. Additionally, 16S rRNA metagenomics analysis indicated that Methanosaeta was the predominant contributor to methanogenesis and proliferated during the long-term operation. The methane yield was increased from 0.2 to 0.26 L CH₄/g COD when the methanogen species acclimatized to the saline system.

Aerobic degradation of high tetramethylammonium hydroxide (TMAH) and its impacts on nitrification and microbial community

Tetramethylammonium hydroxide (TMAH) was often used as developer in the high-tech industries. Information regarding biological treatment of high TMAH-containing wastewater is limited. This study investigated aerobic degradation of high TMAH, its impacts on nitrification, and microbial community in a sequencing batch reactor (SBR). The initial TMAH concentrations of SBR gradually increased from 200 to 4666 mg L^-1 (equivalent to 31 to 718 mg-N L^-1) to enrich microbial community for aerobic TMAH degradation and nitrification. The results indicated that the aerobic specific TMAH degradation rates followed the Monod-type kinetics with a maximum specific TMAH degradation rate of 2.184 mg N hour^-1 g volatile suspended solid (VSS)^-1 and the half-saturation coefficient of 175.1 mg N L^-1. After TMAH degradation and ammonia release, the lag time for the onset of nitrification highly correlated with initial TMAH fed for the SBR. According to the microbial community analysis using next generation sequencing (NGS), potential aerobic TMAH-degraders including Mycobacterium sp. and Hypomicrobium sp. were enriched in the aerobic SBR. The results of real-time quantitative polymerase chain reaction (qPCR) and reverse transcript (RT)-qPCR indicated that Hyphomicrobium sp. may be able to utilize both TMAH and its degradation intermediates such as trimethylamine (TMA), while Thiobacillus sp. can only utilize TMAH. The qPCR and RT-qPCR results suggested that TMAH may inhibit nitrification by inactive expression of amoA gene and the intermediates of TMAH degradation may compete ammonia monooxygenase (AMO) enzyme with ammonia for nitrification inhibition.

Assessment of an MnCe-GAC Treatment Process for Tetramethylammonium-Contaminated Wastewater from Optoelectronic Industries

Nitrogen-containing wastewater is an important issue in optoelectronic and semiconductor industries. Wastewater containing nitrogen compounds such as ammonium, monoethanolamine (MEA), and tetramethylammonium hydroxide (TMAH) must be properly treated due to concerns about health and environmental effects. MnCe-GAC (granular activated carbon) processes were developed in this study for the treatment of TMAH-contaminated wastewater in high-tech industries. The MnCe-GAC processes could effectively remove ammonium, MEA, and TMAH from aqueous solutions. The removal efficiencies of ammonium and MEA by these processes were better than observed for TMAH. Parameters affecting TMAH removal such as type of process, type of wastewater (synthetic or real), pH, salts, and t-butanol were investigated. In general, removal efficiencies of TMAH by various processes were in the following order: MnCe-GAC/O3/H2O2 > MnCe-GAC/O3 > MnCe-GAC/H2O2 > MnCe-GAC > GAC. The negative effect of sulfate and nitrate on pollutant removal might be due to the salting-out effect. Based on t-butanol experiments, the main degradation mechanisms of TMAH by the MnCe-GAC/O3/H2O2 process likely involved hydroxyl radicals. The process proposed in this study could be an effective alternative method for the treatment of high-tech industrial wastewater to meet the new TMAH discharge limit.

Aerobic Treatment of Waste Process Solutions from the Semiconductor Industry: From Lab to Pilot Scale

Tetramethylammonium hydroxide (TMAH) is widely used as a solvent in the semiconductor industry. After the photo-impression process, it is necessary to remove the photoresist (PR) layer from the surface of the circuits; for this purpose, a TMAH solution is usually used. This chemical compound is highly toxic and corrosive and cannot be discharged into the environment. This study was carried out in collaboration with LFoundry (SMIC group), in order to prove the feasibility of biodegradation under aerobic conditions, using microorganisms coming from the LFoundry’s wastewater treatment plant (WWTP) at different operating conditions. The feed composition was modified in order to add a small but increasing amount of TMAH and PR. The aim was to verify if the increase of TMAH concentration was harmful to bacteria. The feed stream, containing TMAH and PR, was the only carbon source for the metabolism of the aerobic microorganisms. The results of this study demonstrated an effective biological degradation of TMAH and showed a total removal efficiency of more than 99.3%, with a final concentration of 7 mg/L. Moreover, the kinetic parameters of the Monod model were also calculated. The results obtained from the experimental campaign were used to design a pilot plant that will treat around 25 L/h of waste TMAH/PR solution.

Biological treatment of electronic industry wastewater containing TMAH, MEA and sulfate in an UASB reactor

This study investigated the feasibility of the methanogenic treatment of electronic industry wastewater containing tetramethylammonium hydroxide (TMAH), monoethanolamine (MEA) and sulfate in a lab-scale mesophilic up-flow anaerobic sludge blanket reactor. Feeding a mixture of electronic industry wastewater and co-substrate organics to the reactor for smooth acclimatization of sludge gave complete degradation of each organics within five days. When the reactor was fed only electronic industry wastewater, total COD removal, TMAH removal and MEA removal were achieved over 80, 99 and 99%, respectively, at an organic loading rate of 11.5 kg-COD m^-3day^-1. 173 mg-S L^-1 of influent sulfate was almost reduced simultaneously with the COD removal. In order to evaluate performance stability, the TMAH shock load event was performed under the conditions of 11,000 mg-COD L^-1 for 24 h. Inflow of high TMAH concentration inhibited TMAH degradation and sulfate reduction for more than one month, however, not MEA. The batch feeding experiment and specific activity measurement revealed degradation pathways of each organics. TMAH was degraded via methanogenic pathway without sulfate reduction, MEA was degraded via methanogenic pathway with sulfate reduction. The results indicated that methanogenic treatment was applicable to electronic industry wastewater by appropriate reactor handling.

Influence of tetramethylammonium hydroxide (TMAH) on the microbial properties of anaerobic granular sludge acclimated to isoplophyl alcohol (IPA) wastewater under psychrophilic conditions

In this study, a continuous flow experiment was conducted in which a lab-scale upflow anaerobic sludge blanket (UASB) reactor at psychrophilic conditions (18-19°C) was fed with artificial wastewater, containing tetramethylammonium hydroxide (TMAH) and isoplophyl alcohol (IPA), from the electronics industry. This was done to evaluate process performance and microbial properties of the granular sludge that was retained in the reactor. The inoculated granular sludge was precultured with IPA containing wastewater but not TMAH; as a result, no degradation was observed in 30 days of operation. To enhance degradation, the reactor was seeded with 2% weight of the TMAH-enriched sludge, after which TMAH was enhanced. Consequently, the total COD removal efficiency reached 90% at an organic loading rate of 7.5 kg COD/m³/day. The TMAH inflow decreased the diameter of the retained granular sludge, but the sludge retained its settleability. The proliferation of the Methanometylovorans microorganisms present in the enrichment culture was confirmed by analysis of the 16 S rRNA gene in the retained sludge. In addition, TMAH degradation was inhibited by addition chloroform, a methanogen inhibitor. These results suggested species in the genus Methanometylovorans in the granular sludge contributed significantly to methanogenic TMAH degradation.

Realization of microbial community stratification for single-stage nitrogen removal in a sequencing batch biofilter granular reactor

A permanent microbial stratified nitrogen removal system coupling anammox with partial nitrification (SNAP) in a sequencing batch biofilter granular reactor (SBBGR) was successfully constructed for the treatment of ammonia-rich wastewater. With a nitrogen loading rate of 0.1kgNm^-3·d^-1, the maximal ammonia and total nitrogen removal efficiencies could reach up to 96.08% and 84.86% on day 108, respectively. The pH, DO profiles revealed a switch of functional species (AOB and anammox) at a typical intermittent aeration cycle. qPCR and high throughput analyses certified a stable spatial microbial stratified community structure. Although, anammox preferred strict anaerobic environment while AOB needed oxygen, a special stratified community structure contributed to conquer this obstacle. Moreover, Bacteroidet, Chlorobi, OD1, Planctomycetes, and Proteobacteria were the dominant species in the SBBGR. Although we have predicted the possible pathways of nitrogen transformation, further studies are needed to validate the pathways in enzymology.