MEMS micro-coils for magnetic neurostimulation

Microfabrication Technologies for Nanoinvasive and High-Resolution Magnetic Neuromodulation

The increasing demand for precise neuromodulation necessitates advancements in techniques to achieve higher spatial resolution. Magnetic stimulation, offering low signal attenuation and minimal tissue damage, plays a significant role in neuromodulation. Conventional transcranial magnetic stimulation (TMS), though noninvasive, lacks the spatial resolution and neuron selectivity required for spatially precise neuromodulation. To address these limitations, the next generation of magnetic neurostimulation technologies aims to achieve submillimeter-resolution and selective neuromodulation with high temporal resolution. Invasive and nanoinvasive magnetic neurostimulation are two next-generation approaches: invasive methods use implantable microcoils, while nanoinvasive methods use magnetic nanoparticles (MNPs) to achieve high spatial and temporal resolution of magnetic neuromodulation. This review will introduce the working principles, technical details, coil designs, and potential future developments of these approaches from an engineering perspective. Furthermore, the review will discuss state-of-the-art microfabrication in depth due to its irreplaceable role in realizing next-generation magnetic neuromodulation. In addition to reviewing magnetic neuromodulation, this review will cover through-silicon vias (TSV), surface micromachining, photolithography, direct writing, and other fabrication technologies, supported by case studies, providing a framework for the integration of magnetic neuromodulation and microelectronics technologies.

Epidural magnetic stimulation of the motor cortex using an implantable coil

BACKGROUND

Magnetic stimulation, represented by transcranial magnetic stimulation (TMS), is used to treat neurological diseases. Various strategies have been explored to improve the spatial resolution of magnetic stimulation. While reducing the coil size is the most impactful approach for increasing the spatial resolution, it decreases the stimulation intensity and increases heat generation.

OBJECTIVE

We aim to demonstrate the feasibility of magnetic stimulation using an epidurally implanted millimeter-sized coil and that it does not damage the cortical tissue via heating even when a repetitive stimulation protocol is used.

METHODS

A coil with dimensions of 3.5 × 3.5 × 2.6 mm3 was epidurally implanted on the left motor cortex of rat, corresponding to the right hindlimb. Before and after epidural magnetic stimulation using a quadripulse stimulation (QPS) protocol, changes in the amplitude of motor evoked potentials (MEPs) elicited by a TMS coil were compared.

RESULTS

The experimental group showed an average increase of 88 % in MEP amplitude in the right hindlimb after QPS, whereas the MEP amplitude in the left hindlimb increased by 18 % on average. The control group showed no significant change in MEP amplitude after QPS in either hindlimb. The temperature changes at the coil surface remained <2 °C during repetitive stimulation, meeting the thermal safety limit for implantable medical devices.

CONCLUSION

These results demonstrate the feasibility of epidural magnetic stimulation using an implantable coil to induce neuromodulation effects. This novel method is expected to be a promising alternative for focal magnetic stimulation with an improved spatial resolution and lowered stimulus current than previous magnetic stimulation methods.

Design and Implementation of a Flexible Electromagnetic Actuator for Tunable Terahertz Metamaterials

Actuators play a crucial role in microelectromechanical systems (MEMS) and hold substantial potential for applications in various domains, including reconfigurable metamaterials. This research aims to design, fabricate, and characterize structures for the actuation of the EMA. The electromagnetic actuator overcomes the lack of high drive voltage required by other actuators. The proposed actuator configuration comprises supporting cantilever beams with fixed ends, an integrated coil positioned above the cantilever's movable plate, and a permanent magnet located beneath the cantilever's movable plate to generate a static magnetic field. Utilizing flexible polyimide, the fabrication process of the EMA is simplified, overcoming limitations associated with silicon-based micromachining techniques. Furthermore, this approach potentially enables large-scale production of EMA, with displacement reaching up to 250 μm under a 100 mA current, thereby expanding their scope of applications in manufacturing. To demonstrate the function of the EMA, we integrated it with a metamaterial structure to form a compact, tunable terahertz absorber, demonstrating a potential for reconfigurable electromagnetic space.