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Wang Y, Yuan J, Chen J, Zeng Y, Yu T, Guo X, Wang S, Yang G, Li Y. A Single-Component Molecular Glass Resist Based on Tetraphenylsilane Derivatives for Electron Beam Lithography. ACS OMEGA 2023; 8:12173-12182. [PMID: 37033792 PMCID: PMC10077460 DOI: 10.1021/acsomega.2c08112] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/21/2022] [Accepted: 02/21/2023] [Indexed: 06/19/2023]
Abstract
A novel molecular glass (TPSiS) with photoacid generator (sulfonium salt group) binding to tetraphenylsilane derivatives was synthesized and characterized. The physical properties such as solubility, film-forming ability, and thermal stability of TPSiS were examined to assess the suitability for application as a candidate for photoresist materials. The sulfonium salt unit underwent photolysis to effectively generate photoacid on UV irradiation, which catalyzed the deprotection of the t-butyloxycarbonyl groups. It demonstrates that the TPSiS can be used as a 'single-component' molecular resist without any additives. The lithographic performance of the TPSiS resist was evaluated by electron beam lithography. The TPSiS resist can resolve 25 nm dense line/space patterns and 16 nm L/4S semidense line/space patterns at a dose of 45 and 85 μC/cm2 for negative-tone development (NTD). The etching selectivity of the TPSiS resist to Si substrate is 8.6 under SF6/O2 plasma, indicating a potential application. Contrast analysis suggests that the significant solubility switch within a narrow exposure dose range (18-47 μC/cm2) by NTD is favorable for high-resolution patterns. This study supplies useful guidelines for the optimization and development of single-component molecular glass resists with high lithographic performance.
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Affiliation(s)
- Yake Wang
- Key
Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese
Academy of Sciences, Beijing 100190, China
- University
of Chinese Academy of Sciences, Beijing 100049, China
| | - Jundi Yuan
- Key
Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese
Academy of Sciences, Beijing 100190, China
- University
of Chinese Academy of Sciences, Beijing 100049, China
| | - Jinping Chen
- Key
Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese
Academy of Sciences, Beijing 100190, China
| | - Yi Zeng
- Key
Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese
Academy of Sciences, Beijing 100190, China
- University
of Chinese Academy of Sciences, Beijing 100049, China
| | - Tianjun Yu
- Key
Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese
Academy of Sciences, Beijing 100190, China
| | - Xudong Guo
- Beijing
National Laboratory for Molecular Sciences (BNLMS), Key Laboratory
of Photochemistry, Institute of Chemistry,
Chinese Academy of Sciences, Beijing 100190, China
| | - Shuangqing Wang
- Beijing
National Laboratory for Molecular Sciences (BNLMS), Key Laboratory
of Photochemistry, Institute of Chemistry,
Chinese Academy of Sciences, Beijing 100190, China
| | - Guoqiang Yang
- Beijing
National Laboratory for Molecular Sciences (BNLMS), Key Laboratory
of Photochemistry, Institute of Chemistry,
Chinese Academy of Sciences, Beijing 100190, China
- University
of Chinese Academy of Sciences, Beijing 100049, China
| | - Yi Li
- Key
Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese
Academy of Sciences, Beijing 100190, China
- University
of Chinese Academy of Sciences, Beijing 100049, China
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2
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Synthesis, characterization, reaction conditions, conductivity and thermal properties of poly(phenoxy-imine)s containing methoxy unit. J Mol Struct 2023. [DOI: 10.1016/j.molstruc.2022.134133] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/20/2022]
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3
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Kaya İ, Koça S, Karaer Yağmur H. The green synthesis of oligo(azomethine)s based on p-anisidine and o-anisidine: reaction conditions, electrochemical and thermal properties. JOURNAL OF MACROMOLECULAR SCIENCE PART A-PURE AND APPLIED CHEMISTRY 2022. [DOI: 10.1080/10601325.2022.2140675] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
Affiliation(s)
- İsmet Kaya
- Polymer Synthesis and Analysis Laboratory, Department of Chemistry, Çanakkale Onsekiz Mart University, Çanakkale, Turkey
| | - Semra Koça
- Polymer Synthesis and Analysis Laboratory, Department of Chemistry, Çanakkale Onsekiz Mart University, Çanakkale, Turkey
| | - Hatice Karaer Yağmur
- Polymer Synthesis and Analysis Laboratory, Department of Chemistry, Çanakkale Onsekiz Mart University, Çanakkale, Turkey
- Faculty of Science, Department of Chemistry, Dicle University, Diyarbakır, Turkey
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Sobarzo PA, González A, Jessop IA, Hauyon RA, Medina J, García LE, Zarate X, González-Henríquez C, Schott E, Tundidor-Camba A, Terraza CA. Tetraphenylsilane-based oligo(azomethine)s containing 3,4-ethylenedioxythiophene units along their backbone: Optical, electronic, thermal properties and computational simulations. Eur Polym J 2022. [DOI: 10.1016/j.eurpolymj.2022.111712] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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Wang Y, Chen J, Zeng Y, Yu T, Guo X, Wang S, Allenet T, Vockenhuber M, Ekinci Y, Zhao J, Yang S, Wu Y, Yang G, Li Y. Molecular Glass Resists Based on Tetraphenylsilane Derivatives: Effect of Protecting Ratios on Advanced Lithography. ACS OMEGA 2022; 7:29266-29273. [PMID: 36033723 PMCID: PMC9404489 DOI: 10.1021/acsomega.2c03445] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/02/2022] [Accepted: 07/25/2022] [Indexed: 05/27/2023]
Abstract
A series of t-butyloxycarbonyl (t-Boc) protected tetraphenylsilane derivatives (TPSi-Boc x , x = 60, 70, 85, 100%) were synthesized and used as resist materials to investigate the effect of t-Boc protecting ratio on advanced lithography. The physical properties such as solubility, film-forming ability, and thermal stability of TPSi-Boc x were examined to assess the suitability for application as candidates for positive-tone molecular glass resist materials. The effects of t-Boc protecting ratio had been studied in detail by electron beam lithography. The results suggest that the TPSi-Boc x resist with different t-Boc protecting ratios exhibit a significant change in contrast, pattern blur, and the density of bridge defect. The TPSi-Boc70% resist achieves the most excellent patterning capability. The extreme ultraviolet (EUV) lithography performance on TPSi-Boc70% was evaluated by using the soft X-ray interference lithography. The results demonstrate that the TPSi-Boc70% resist can achieve excellent patterning capability down to 20 nm isolated lines at 8.7 mJ/cm2 and 25 nm dense lines at 14.5 mJ/cm2. This study will help us to understand the relationship between the t-Boc protecting ratio and the patterning ability and supply useful guidelines for designing molecular resists.
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Affiliation(s)
- Yake Wang
- Key
Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese
Academy of Sciences, Beijing 100190, China
- University
of Chinese Academy of Sciences, Beijing 100049, China
| | - Jinping Chen
- Key
Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese
Academy of Sciences, Beijing 100190, China
| | - Yi Zeng
- Key
Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese
Academy of Sciences, Beijing 100190, China
- University
of Chinese Academy of Sciences, Beijing 100049, China
| | - Tianjun Yu
- Key
Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese
Academy of Sciences, Beijing 100190, China
| | - Xudong Guo
- Beijing
National Laboratory for Molecular Sciences (BNLMS), Key Laboratory
of Photochemistry, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, China
| | - Shuangqing Wang
- Beijing
National Laboratory for Molecular Sciences (BNLMS), Key Laboratory
of Photochemistry, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, China
| | - Timothée Allenet
- Paul Scherrer
Institute, Laboratory for
Micro and Nanotechnology, CH-5232 Villigen, Switzerland
| | - Michaela Vockenhuber
- Paul Scherrer
Institute, Laboratory for
Micro and Nanotechnology, CH-5232 Villigen, Switzerland
| | - Yasin Ekinci
- Paul Scherrer
Institute, Laboratory for
Micro and Nanotechnology, CH-5232 Villigen, Switzerland
| | - Jun Zhao
- Shanghai
Synchrotron Radiation Facility, Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
| | - Shumin Yang
- Shanghai
Synchrotron Radiation Facility, Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
| | - Yanqing Wu
- Shanghai
Synchrotron Radiation Facility, Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
| | - Guoqiang Yang
- Beijing
National Laboratory for Molecular Sciences (BNLMS), Key Laboratory
of Photochemistry, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, China
- University
of Chinese Academy of Sciences, Beijing 100049, China
| | - Yi Li
- Key
Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese
Academy of Sciences, Beijing 100190, China
- University
of Chinese Academy of Sciences, Beijing 100049, China
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Man J, Liu Z. Balance of both short wavelength and long wavelength light absorption by blending two “D18-series” donor enables ternary polymer solar cells. Eur Polym J 2022. [DOI: 10.1016/j.eurpolymj.2022.111407] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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Sobarzo PA, Jessop IA, Pérez Y, Hauyon RA, Velázquez‐Tundidor MV, Medina J, González A, García LE, González‐Henríquez CM, Coll D, Ortiz PA, Tundidor‐Camba A, Terraza CA. Synthesis of dimethyl‐ and diphenylsilane‐based oligo(azine)s: Thermal, optical, electronic, and morphological properties. J Appl Polym Sci 2022. [DOI: 10.1002/app.52911] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
Affiliation(s)
- Patricio A. Sobarzo
- Research Laboratory for Organic Polymers (RLOP), Facultad de Química y de Farmacia Pontificia Universidad Católica de Chile Santiago Chile
| | - Ignacio A. Jessop
- Laboratory of Organic and Polymeric Materials, Department of Chemistry Universidad de Tarapacá Arica Chile
| | - Yasmín Pérez
- Laboratory of Organic and Polymeric Materials, Department of Chemistry Universidad de Tarapacá Arica Chile
| | - René A. Hauyon
- Research Laboratory for Organic Polymers (RLOP), Facultad de Química y de Farmacia Pontificia Universidad Católica de Chile Santiago Chile
| | - María V. Velázquez‐Tundidor
- Research Laboratory for Organic Polymers (RLOP), Facultad de Química y de Farmacia Pontificia Universidad Católica de Chile Santiago Chile
| | - Jean Medina
- Research Laboratory for Organic Polymers (RLOP), Facultad de Química y de Farmacia Pontificia Universidad Católica de Chile Santiago Chile
| | - Alexis González
- Research Laboratory for Organic Polymers (RLOP), Facultad de Química y de Farmacia Pontificia Universidad Católica de Chile Santiago Chile
| | - Luis E. García
- Research Laboratory for Organic Polymers (RLOP), Facultad de Química y de Farmacia Pontificia Universidad Católica de Chile Santiago Chile
| | - Carmen M. González‐Henríquez
- Laboratory of Nanotechnology and Advanced Materials (LNnMA), Chemistry Department Universidad Tecnológica Metropolitana Santiago Chile
- Programa Institucional de Fomento a la Investigación, Desarrollo e Innovación (PIDi) Universidad Tecnológica Metropolitana Santiago Chile
| | - Deysma Coll
- Centro de Nanotecnología Aplicada, Facultad de Ciencias Universidad Mayor Santiago Chile
- Núcleo de Química y Bioquímica, Facultad de Estudios Interdisciplinarios Universidad Mayor Santiago Chile
| | - Pablo A. Ortiz
- Centro de Nanotecnología Aplicada, Facultad de Ciencias Universidad Mayor Santiago Chile
- Núcleo de Química y Bioquímica, Facultad de Estudios Interdisciplinarios Universidad Mayor Santiago Chile
| | - Alain Tundidor‐Camba
- Research Laboratory for Organic Polymers (RLOP), Facultad de Química y de Farmacia Pontificia Universidad Católica de Chile Santiago Chile
- UC Energy Research Center Pontificia Universidad Católica de Chile Santiago Chile
| | - Claudio A. Terraza
- Research Laboratory for Organic Polymers (RLOP), Facultad de Química y de Farmacia Pontificia Universidad Católica de Chile Santiago Chile
- UC Energy Research Center Pontificia Universidad Católica de Chile Santiago Chile
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Pająk AK, Kotowicz S, Gnida P, Małecki JG, Ciemięga A, Łuczak A, Jung J, Schab-Balcerzak E. Synthesis and Characterization of New Conjugated Azomethines End-Capped with Amino-thiophene-3,4-dicarboxylic Acid Diethyl Ester. Int J Mol Sci 2022; 23:ijms23158160. [PMID: 35897736 PMCID: PMC9330727 DOI: 10.3390/ijms23158160] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/29/2022] [Revised: 07/19/2022] [Accepted: 07/22/2022] [Indexed: 02/04/2023] Open
Abstract
A new series of thiophene-based azomethines differing in the core structure was synthesized. The effect of the central core structure in azomethines on the thermal, optical and electrochemical properties was investigated. The obtained compounds exhibited the ability to form a stable amorphous phase with a high glass transition temperature above 100 °C. They were electrochemically active and undergo oxidation and reduction processes. The highest occupied (HOMO) and the lowest unoccupied molecular (LUMO) orbitals were in the range of −3.86–−3.60 eV and −5.46–−5.17 eV, respectively, resulting in a very low energy band gap below 1.7 eV. Optical investigations were performed in the solvents with various polarity and in the solid state as a thin film deposited on a glass substrate. The synthesized imines absorbed radiation from 350 to 600 nm, depending on its structure and showed weak emission with a photoluminescence quantum yield below 2.5%. The photophysical investigations were supported by theoretical calculations using the density functional theory. The synthesized imines doped with lithium bis-(trifluoromethanesulfonyl)imide were examined as hole transporting materials (HTM) in hybrid inorganic-organic perovskite solar cells. It was found that both a volume of lithium salt and core imine structure significantly impact device performance. The best power conversion efficiency (PCE), being about 35–63% higher compared to other devices, exhibited cells based on the imine containing a core tiphenylamine unit.
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Affiliation(s)
- Agnieszka Katarzyna Pająk
- Institute of Chemistry, University of Silesia, 9 Szkolna Str., 40-006 Katowice, Poland; (A.K.P.); (J.G.M.)
- Centre of Polymer and Carbon Materials, Polish Academy of Sciences, 34 M. Curie-Sklodowska Str., 41-819 Zabrze, Poland;
| | - Sonia Kotowicz
- Institute of Chemistry, University of Silesia, 9 Szkolna Str., 40-006 Katowice, Poland; (A.K.P.); (J.G.M.)
- Correspondence: (S.K.); (E.S.-B.)
| | - Paweł Gnida
- Centre of Polymer and Carbon Materials, Polish Academy of Sciences, 34 M. Curie-Sklodowska Str., 41-819 Zabrze, Poland;
| | - Jan Grzegorz Małecki
- Institute of Chemistry, University of Silesia, 9 Szkolna Str., 40-006 Katowice, Poland; (A.K.P.); (J.G.M.)
| | - Agnieszka Ciemięga
- Institute of Chemical Engineering, Polish Academy of Sciences, 5 Bałtycka Str., 44-100 Gliwice, Poland;
| | - Adam Łuczak
- Department of Molecular Physics, Faculty of Chemistry, Lodz University of Technology, 116 Żeromskiego Str., 90-924 Lodz, Poland; (A.Ł.); (J.J.)
| | - Jarosław Jung
- Department of Molecular Physics, Faculty of Chemistry, Lodz University of Technology, 116 Żeromskiego Str., 90-924 Lodz, Poland; (A.Ł.); (J.J.)
| | - Ewa Schab-Balcerzak
- Institute of Chemistry, University of Silesia, 9 Szkolna Str., 40-006 Katowice, Poland; (A.K.P.); (J.G.M.)
- Centre of Polymer and Carbon Materials, Polish Academy of Sciences, 34 M. Curie-Sklodowska Str., 41-819 Zabrze, Poland;
- Correspondence: (S.K.); (E.S.-B.)
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Yeldir EK, Kaya İ. Synthesis, characterization and investigation of fluorescent Sn2+ probe potential of pyrene-derived monomer and its oligo(azomethine) compound. Eur Polym J 2022. [DOI: 10.1016/j.eurpolymj.2022.111229] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/04/2022]
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Comparison between poly(azomethine)s and poly(p-phenylvinylene)s containing a di-R-diphenylsilane (R = methyl or phenyl) moiety. Optical, electronic and thermal properties. Eur Polym J 2021. [DOI: 10.1016/j.eurpolymj.2021.110714] [Citation(s) in RCA: 6] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/02/2023]
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11
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Azomethines containing 1,3,4-oxadiazole ring: Synthesis, photophysical properties, halochromism and metal ions sensing responses. J Mol Liq 2021. [DOI: 10.1016/j.molliq.2021.116268] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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12
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Jessop IA, Mariman A, Sobarzo PA, Hauyon RA, Saldías C, Schott E, Zarate X, Rodríguez-González FE, Medina J, González-Henríquez CM, Tundidor-Camba A, Terraza CA. Novel germanium-based σ-π conjugated oligourethanes containing dibenzofuran moieties in the backbone: Thermal, optical, electronic properties and theoretical simulations. Eur Polym J 2021. [DOI: 10.1016/j.eurpolymj.2021.110373] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/22/2022]
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