Coherent Bremsstrahlung effect observed during STEM analysis of dopant distribution in silicon devices using large area silicon drift EDX detectors and high brightness electron source

espm: A Python library for the simulation of STEM-EDXS datasets

We present two open-source Python packages: "electron spectro-microscopy" (espm) and "electron microscopy tables" (emtables). The espm software enables the simulation of scanning transmission electron microscopy energy-dispersive X-ray spectroscopy datacubes, based on user-defined chemical compositions and spatial abundance maps of constituent phases. The simulation process uses X-ray emission cross-sections generated via state-of-the-art calculations made with emtables. These tables are designed to be easily modifiable, either manually or using espm. The simulation framework is designed to test the application of decomposition algorithms for the analysis of STEM-EDX spectrum images with access to a known ground truth. We validate our approach using the case of a complex geology-related sample, comparing raw simulated and experimental datasets and the outputs of their non-negative matrix factorization. In addition to testing machine learning algorithms, our packages will also help experimental design, for instance, predicting dataset characteristics or establishing minimum counts needed to measure nanoscale features.

Enhanced Versatility of Table-Top X-Rays from Van der Waals Structures

Van der Waals (vdW) materials have attracted much interest for their myriad unique electronic, mechanical, and thermal properties. In particular, they are promising candidates for monochromatic, table-top X-ray sources. This work reveals that the versatility of the table-top vdW X-ray source goes beyond what has been demonstrated so far. By introducing a tilt angle between the vdW structure and the incident electron beam, it is theoretically and experimentally shown that the accessible photon energy range is more than doubled. This allows for greater versatility in real-time tuning of the vdW X-ray source. Furthermore, this work shows that the accessible photon energy range is maximized by simultaneously controlling both the electron energy and the vdW structure tilt. These results will pave the way for highly tunable, compact X-ray sources, with potential applications including hyperspectral X-ray fluoroscopy and X-ray quantum optics.

Tilt series STEM simulation of a 25×25×25nm semiconductor with characteristic X-ray emission

The detection and quantification of fabrication defects is vital to the ongoing miniaturization of integrated circuits. The atomic resolution of HAADF-STEM combined with the chemical sensitivity of EDS could provide the means by which this is achieved for the next generation of semiconductor devices. To realize this, however, a streamlined acquisition and analysis procedure must first be developed. Here, we report the simulation of a HAADF-STEM and EDS tilt-series dataset of a PMOS finFET device which will be used as a testbed for such a development. The methods used to calculate the data and the details of the specimen model are fully described here. The dataset consists of 179 projections in 2° increments with HAADF images and characteristic X-ray maps for each projection. This unusually large calculation has been made possible through the use of a national supercomputer and will be made available for the development and assessment of reconstruction and analysis procedures for this highly significant industrial application.

The Dark Side of EDX Tomography: Modeling Detector Shadowing to Aid 3D Elemental Signal Analysis

A simple model is proposed to account for the loss of collected X-ray signal by the shadowing of X-ray detectors in the scanning transmission electron microscope. The model is intended to aid the analysis of three-dimensional elemental data sets acquired using energy-dispersive X-ray tomography methods where shadow-free specimen holders are unsuitable or unavailable. The model also provides a useful measure of the detection system geometry.