1
|
Singh RS, Takagi K, Aoki T, Moon JH, Neo Y, Iwata F, Mimura H, Moraru D. Precise Deposition of Carbon Nanotube Bundles by Inkjet-Printing on a CMOS-Compatible Platform. MATERIALS 2022; 15:ma15144935. [PMID: 35888413 PMCID: PMC9323799 DOI: 10.3390/ma15144935] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/20/2022] [Revised: 07/08/2022] [Accepted: 07/12/2022] [Indexed: 12/10/2022]
Abstract
Carbon nanotubes (CNTs) are ultimately small structures, attractive for future nanoelectronics. CNT-bundles on Si nanostructures can offer an alternative pathway to build hybrid CMOS-compatible devices. To develop a simple method of using such CNT-bundles as transistor channels, we fabricated semiconductor single-walled CNT field-effect transistors using inkjet printing on a CMOS-compatible platform. We investigated a method of producing stable CNT solutions without surfactants, allowing for CNT debundling and dispersion. An inkjet-printing system disperses CNT-networks with ultimately low density (down to discrete CNT-bundles) in Al source-drain gaps of transistors. Despite the small number of networks and random positions, such CNT-bundles provide paths to the flow current. For enhanced controllability, we also demonstrate the manipulation of CNT-networks using an AFM technique.
Collapse
Affiliation(s)
- Rohitkumar Shailendra Singh
- Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
- Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan; (R.S.S.); (K.T.); (T.A.); (J.H.M.); (Y.N.); (F.I.); (H.M.)
| | - Katsuyuki Takagi
- Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan; (R.S.S.); (K.T.); (T.A.); (J.H.M.); (Y.N.); (F.I.); (H.M.)
| | - Toru Aoki
- Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
- Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan; (R.S.S.); (K.T.); (T.A.); (J.H.M.); (Y.N.); (F.I.); (H.M.)
| | - Jong Hyun Moon
- Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan; (R.S.S.); (K.T.); (T.A.); (J.H.M.); (Y.N.); (F.I.); (H.M.)
| | - Yoichiro Neo
- Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
- Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan; (R.S.S.); (K.T.); (T.A.); (J.H.M.); (Y.N.); (F.I.); (H.M.)
| | - Futoshi Iwata
- Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
- Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan; (R.S.S.); (K.T.); (T.A.); (J.H.M.); (Y.N.); (F.I.); (H.M.)
| | - Hidenori Mimura
- Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
- Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan; (R.S.S.); (K.T.); (T.A.); (J.H.M.); (Y.N.); (F.I.); (H.M.)
| | - Daniel Moraru
- Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
- Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan; (R.S.S.); (K.T.); (T.A.); (J.H.M.); (Y.N.); (F.I.); (H.M.)
- Correspondence:
| |
Collapse
|
2
|
Evans CT, Payton O, Picco L, Allen MJ. Algal Viruses: The (Atomic) Shape of Things to Come. Viruses 2018; 10:E490. [PMID: 30213102 PMCID: PMC6165301 DOI: 10.3390/v10090490] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/31/2018] [Revised: 08/30/2018] [Accepted: 09/07/2018] [Indexed: 01/15/2023] Open
Abstract
Visualization of algal viruses has been paramount to their study and understanding. The direct observation of the morphological dynamics of infection is a highly desired capability and the focus of instrument development across a variety of microscopy technologies. However, the high temporal (ms) and spatial resolution (nm) required, combined with the need to operate in physiologically relevant conditions presents a significant challenge. Here we present a short history of virus structure study and its relation to algal viruses and highlight current work, concentrating on electron microscopy and atomic force microscopy, towards the direct observation of individual algae⁻virus interactions. Finally, we make predictions towards future algal virus study direction with particular focus on the exciting opportunities offered by modern high-speed atomic force microscopy methods and instrumentation.
Collapse
Affiliation(s)
- Christopher T Evans
- Plymouth Marine Laboratory, Plymouth PL1 3DH, UK.
- Interface Analysis Centre, Wills Physics Laboratory, University of Bristol, Bristol BS8 1TL, UK.
| | - Oliver Payton
- Interface Analysis Centre, Wills Physics Laboratory, University of Bristol, Bristol BS8 1TL, UK.
| | - Loren Picco
- Interface Analysis Centre, Wills Physics Laboratory, University of Bristol, Bristol BS8 1TL, UK.
- Department of Physics, Virginia Commonwealth University, Richmond, VA 23284, USA.
| | - Michael J Allen
- Plymouth Marine Laboratory, Plymouth PL1 3DH, UK.
- College of Life and Environmental Sciences, University of Exeter, Exeter EX4 4QD, UK.
| |
Collapse
|
3
|
Sadeghian H, Herfst R, Winters J, Crowcombe W, Kramer G, van den Dool T, van Es MH. Development of a detachable high speed miniature scanning probe microscope for large area substrates inspection. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2015; 86:113706. [PMID: 26628143 DOI: 10.1063/1.4936270] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
We have developed a high speed, miniature scanning probe microscope (MSPM) integrated with a Positioning Unit (PU) for accurately positioning the MSPM on a large substrate. This combination enables simultaneous, parallel operation of many units on a large sample for high throughput measurements. The size of the MSPM is 19 × 45 × 70 mm(3). It contains a one-dimensional flexure stage with counter-balanced actuation for vertical scanning with a bandwidth of 50 kHz and a z-travel range of more than 2 μm. This stage is mechanically decoupled from the rest of the MSPM by suspending it on specific dynamically determined points. The motion of the probe, which is mounted on top of the flexure stage is measured by a very compact optical beam deflection (OBD). Thermal noise spectrum measurements of short cantilevers show a bandwidth of 2 MHz and a noise of less than 15 fm/Hz(1/2). A fast approach and engagement of the probe to the substrate surface have been achieved by integrating a small stepper actuator and direct monitoring of the cantilever response to the approaching surface. The PU has the same width as the MSPM, 45 mm and can position the MSPM to a pre-chosen position within an area of 275×30 mm(2) to within 100 nm accuracy within a few seconds. During scanning, the MSPM is detached from the PU which is essential to eliminate mechanical vibration and drift from the relatively low-resonance frequency and low-stiffness structure of the PU. Although the specific implementation of the MSPM we describe here has been developed as an atomic force microscope, the general architecture is applicable to any form of SPM. This high speed MSPM is now being used in a parallel SPM architecture for inspection and metrology of large samples such as semiconductor wafers and masks.
Collapse
Affiliation(s)
- Hamed Sadeghian
- Department of Optomechatronics, Netherlands Organization for Scientific Applied Research, TNO, Stieltjesweg 1, 2628 CK Delft, The Netherlands
| | - Rodolf Herfst
- Department of Optomechatronics, Netherlands Organization for Scientific Applied Research, TNO, Stieltjesweg 1, 2628 CK Delft, The Netherlands
| | - Jasper Winters
- Department of Optomechatronics, Netherlands Organization for Scientific Applied Research, TNO, Stieltjesweg 1, 2628 CK Delft, The Netherlands
| | - Will Crowcombe
- Department of Optomechatronics, Netherlands Organization for Scientific Applied Research, TNO, Stieltjesweg 1, 2628 CK Delft, The Netherlands
| | - Geerten Kramer
- Department of Optomechatronics, Netherlands Organization for Scientific Applied Research, TNO, Stieltjesweg 1, 2628 CK Delft, The Netherlands
| | - Teun van den Dool
- Department of Optomechatronics, Netherlands Organization for Scientific Applied Research, TNO, Stieltjesweg 1, 2628 CK Delft, The Netherlands
| | - Maarten H van Es
- Department of Optomechatronics, Netherlands Organization for Scientific Applied Research, TNO, Stieltjesweg 1, 2628 CK Delft, The Netherlands
| |
Collapse
|