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Cooper D, Arcara VF, Damilano B, Duboz JY. Investigation of AlGaN UV emitting tunnel junction LED devices by off-axis electron holography. NANOTECHNOLOGY 2024; 35:435206. [PMID: 39079543 DOI: 10.1088/1361-6528/ad690a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/28/2024] [Accepted: 07/30/2024] [Indexed: 08/13/2024]
Abstract
Here we use off-axis electron holography combined with advanced transmission electron microscopy techniques to understand the opto-electronic properties of AlGaN tunnel junction (TJ)-light-emitting diode (LED) devices for ultraviolet emission. Four identical AlGaN LED devices emitting at 290 nm have been grown by metal-organic chemical vapour deposition. Then Ge doped n-type regions with and without InGaN or GaN interlayers (IL) have been grown by molecular beam epitaxy onto the top Mg doped p-type layer to form a TJ and hence a high quality ohmic metal contact. Off-axis electron holography has then been used to demonstrate a reduction in the width of the TJ from 9.5 to 4.1 nm when an InGaN IL is used. As such we demonstrate that off-axis electron holography can be used to reproducibly measure nm-scale changes in electrostatic potential in highly defected and challenging materials such as AlGaN and that systematic studies of devices can be performed. The LED devices are then characterized using standard opto-electric techniques and the improvements in the performance of the LEDs are correlated with the electron holography results.
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Affiliation(s)
- David Cooper
- University Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France
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Cooper D, Bruas L, Bryan M, Boureau V. Measuring electrical properties in semiconductor devices by pixelated STEM and off-axis electron holography (or convergent beams vs. plane waves). Micron 2024; 179:103594. [PMID: 38340549 DOI: 10.1016/j.micron.2024.103594] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/04/2023] [Revised: 01/24/2024] [Accepted: 01/25/2024] [Indexed: 02/12/2024]
Abstract
We demonstrate the use of both pixelated differential phase contrast (DPC) scanning transmission electron microscopy (STEM) and off-axis electron holography (EH) for the measurement of electric fields and assess the advantages and limitations of each technique when applied to technologically relevant samples. Three different types of samples are examined, firstly a simple highly-doped Si pn junction. Then a SiGe superlattice is examined to evaluate the effects of the mean inner potential on the measured signal. Finally, an InGaN/GaN microwire light-emitting diode (LED) device is examined which has a polarization field, variations of mean inner potential and a wurtzite crystal lattice. We discuss aspects such as spatial resolution and sensitivity, and the concept of pseudo-field is defined. However, the most important point is the need to limit the influence of diffraction contrast to obtain accurate measurements. In this respect, the use of a plane electron wave for EH is clearly beneficial when compared to the use of a convergent beam for pixelated DPC STEM.
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Affiliation(s)
- David Cooper
- Universite Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France.
| | - Lucas Bruas
- Universite Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France
| | - Matthew Bryan
- Universite Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France
| | - Victor Boureau
- Universite Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France; Interdisciplinary Center for Electron Microscopy, EPFL, 1015 Lausanne, Switzerland
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Hÿtch M, Gatel C. Phase detection limits in off-axis electron holography from pixelated detectors: gain variations, geometric distortion and failure of reference-hologram correction. Microscopy (Oxf) 2021; 70:47-58. [PMID: 32744626 DOI: 10.1093/jmicro/dfaa044] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/01/2020] [Revised: 07/15/2020] [Accepted: 07/27/2020] [Indexed: 11/13/2022] Open
Abstract
We investigate the effect that recording off-axis electron holograms on pixelated detectors, such as charge-coupled devices (CCD) and direct-detection devices (DDD), can have on measured amplitudes and phases. Theory will be developed for the case of perfectly uniform interference fringes illuminating an imperfect detector with gain variations and pixel displacements. We will show that both these types of defect produce a systematic noise in the phase images that depends on the position of the holographic fringes with respect to the detector. Subtracting a reference hologram from the object hologram will therefore not remove the phase noise if the initial phases of the two holograms do not coincide exactly. Another finding is that pi-shifted holograms are much less affected by gain variations but show no improvement concerning geometric distortions. The resulting phase errors will be estimated and simulations presented that confirm the theoretical developments.
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Affiliation(s)
- Martin Hÿtch
- CEMES, Université de Toulouse, CNRS, 29 rue Jeanne Marvig, 31055 Toulouse, France
| | - Christophe Gatel
- CEMES, Université de Toulouse, CNRS, 29 rue Jeanne Marvig, 31055 Toulouse, France
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Boureau V, Sklenard B, McLeod R, Ovchinnikov D, Dumcenco D, Kis A, Cooper D. Quantitative Mapping of the Charge Density in a Monolayer of MoS 2 at Atomic Resolution by Off-Axis Electron Holography. ACS NANO 2020; 14:524-530. [PMID: 31820927 DOI: 10.1021/acsnano.9b06716] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
The electric potential, electric field, and charge density of a monolayer of MoS2 have been quantitatively measured at atomic-scale resolution. This has been performed by off-axis electron holography using a double aberration-corrected transmission electron microscope operated at 80 kV and a low electron beam current density. Using this low dose rate and acceleration voltage, the specimen damage is limited during imaging. In order to improve the sensitivity of the measurement, a series of holograms have been acquired. Instabilities of the microscope such as the drifts of the specimen, biprism, and optical aberrations during the acquisition have been corrected by data processing. Phase images of the MoS2 monolayer have been acquired with a sensitivity of 2π/698 rad associated with a spatial resolution of 2.4 Å. The improvement in the signal-to-noise ratio allows the charge density to be directly calculated from the phase images using Poisson's equation. Density functional theory simulations of the potential and charge density of this MoS2 monolayer were performed for comparison to the experiment. The experimental measurements and simulations are consistent with each other, and notably, the charge density in a sulfur monovacancy (VS) site is shown.
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Affiliation(s)
- Victor Boureau
- Université Grenoble Alpes, CEA, LETI , F-38054 Grenoble , France
| | - Benoit Sklenard
- Université Grenoble Alpes, CEA, LETI , F-38054 Grenoble , France
| | - Robert McLeod
- Université Grenoble Alpes, CEA, INAC , F-38054 Grenoble , France
| | - Dmitry Ovchinnikov
- Electrical Engineering Institute , Ecole Polytechnique Federale de Lausanne , CH-1015 Lausanne , Switzerland
| | - Dumitru Dumcenco
- Electrical Engineering Institute , Ecole Polytechnique Federale de Lausanne , CH-1015 Lausanne , Switzerland
| | - Andras Kis
- Electrical Engineering Institute , Ecole Polytechnique Federale de Lausanne , CH-1015 Lausanne , Switzerland
| | - David Cooper
- Université Grenoble Alpes, CEA, LETI , F-38054 Grenoble , France
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Haas B, Rouvière JL, Boureau V, Berthier R, Cooper D. Direct comparison of off-axis holography and differential phase contrast for the mapping of electric fields in semiconductors by transmission electron microscopy. Ultramicroscopy 2019; 198:58-72. [DOI: 10.1016/j.ultramic.2018.12.003] [Citation(s) in RCA: 32] [Impact Index Per Article: 6.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/28/2018] [Revised: 11/30/2018] [Accepted: 12/05/2018] [Indexed: 11/24/2022]
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Off-axis electron holography combining summation of hologram series with double-exposure phase-shifting: Theory and application. Ultramicroscopy 2018; 193:52-63. [DOI: 10.1016/j.ultramic.2018.06.004] [Citation(s) in RCA: 20] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/19/2018] [Revised: 05/30/2018] [Accepted: 06/03/2018] [Indexed: 11/23/2022]
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Zheng F, Rybakov FN, Borisov AB, Song D, Wang S, Li ZA, Du H, Kiselev NS, Caron J, Kovács A, Tian M, Zhang Y, Blügel S, Dunin-Borkowski RE. Experimental observation of chiral magnetic bobbers in B20-type FeGe. NATURE NANOTECHNOLOGY 2018; 13:451-455. [PMID: 29632400 DOI: 10.1038/s41565-018-0093-3] [Citation(s) in RCA: 89] [Impact Index Per Article: 14.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/08/2017] [Accepted: 02/14/2018] [Indexed: 05/12/2023]
Abstract
Chiral magnetic skyrmions1,2 are nanoscale vortex-like spin textures that form in the presence of an applied magnetic field in ferromagnets that support the Dzyaloshinskii-Moriya interaction (DMI) because of strong spin-orbit coupling and broken inversion symmetry of the crystal3,4. In sharp contrast to other systems5,6 that allow for the formation of a variety of two-dimensional (2D) skyrmions, in chiral magnets the presence of the DMI commonly prevents the stability and coexistence of topological excitations of different types 7 . Recently, a new type of localized particle-like object-the chiral bobber (ChB)-was predicted theoretically in such materials 8 . However, its existence has not yet been verified experimentally. Here, we report the direct observation of ChBs in thin films of B20-type FeGe by means of quantitative off-axis electron holography (EH). We identify the part of the temperature-magnetic field phase diagram in which ChBs exist and distinguish two mechanisms for their nucleation. Furthermore, we show that ChBs are able to coexist with skyrmions over a wide range of parameters, which suggests their possible practical applications in novel magnetic solid-state memory devices, in which a stream of binary data bits can be encoded by a sequence of skyrmions and bobbers.
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Affiliation(s)
- Fengshan Zheng
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Jülich, Jülich, Germany
| | - Filipp N Rybakov
- Department of Physics, KTH-Royal Institute of Technology, Stockholm, Sweden
- M.N. Miheev Institute of Metal Physics of Ural Branch of Russian Academy of Sciences, Ekaterinburg, Russia
- Ural Federal University, Ekaterinburg, Russia
| | - Aleksandr B Borisov
- M.N. Miheev Institute of Metal Physics of Ural Branch of Russian Academy of Sciences, Ekaterinburg, Russia
- Ural Federal University, Ekaterinburg, Russia
| | - Dongsheng Song
- National Center for Electron Microscopy in Beijing, School of Materials Science and Engineering, Tsinghua University, Beijing, China
| | - Shasha Wang
- The Anhui Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory and University of Science and Technology of China, Chinese Academy of Science (CAS), Hefei, Anhui Province, China
- Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Jiangsu Province, China
| | - Zi-An Li
- Institute of Physics, Chinese Academy of Sciences, Beijing, China
| | - Haifeng Du
- The Anhui Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory and University of Science and Technology of China, Chinese Academy of Science (CAS), Hefei, Anhui Province, China.
- Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Jiangsu Province, China.
| | - Nikolai S Kiselev
- Peter Grünberg Institute and Institute for Advanced Simulation, Forschungszentrum Jülich and JARA, Jülich, Germany.
| | - Jan Caron
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Jülich, Jülich, Germany
| | - András Kovács
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Jülich, Jülich, Germany
| | - Mingliang Tian
- The Anhui Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory and University of Science and Technology of China, Chinese Academy of Science (CAS), Hefei, Anhui Province, China
- Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Jiangsu Province, China
| | - Yuheng Zhang
- The Anhui Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory and University of Science and Technology of China, Chinese Academy of Science (CAS), Hefei, Anhui Province, China
- Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Jiangsu Province, China
| | - Stefan Blügel
- Peter Grünberg Institute and Institute for Advanced Simulation, Forschungszentrum Jülich and JARA, Jülich, Germany
| | - Rafal E Dunin-Borkowski
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter Grünberg Institute, Forschungszentrum Jülich, Jülich, Germany
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den Hertog M, Donatini F, McLeod R, Monroy E, Sartel C, Sallet V, Pernot J. In situ biasing and off-axis electron holography of a ZnO nanowire. NANOTECHNOLOGY 2018; 29:025710. [PMID: 28994395 DOI: 10.1088/1361-6528/aa923c] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Quantitative characterization of electrically active dopants and surface charges in nano-objects is challenging, since most characterization techniques using electrons [1-3], ions [4] or field ionization effects [5-7] study the chemical presence of dopants, which are not necessarily electrically active. We perform cathodoluminescence and voltage contrast experiments on a contacted and biased ZnO nanowire with a Schottky contact and measure the depletion length as a function of reverse bias. We compare these results with state-of-the-art off-axis electron holography in combination with electrical in situ biasing on the same nanowire. The extension of the depletion length under bias observed in scanning electron microscopy based techniques is unusual as it follows a linear rather than square root dependence, and is therefore difficult to model by bulk equations or finite element simulations. In contrast, the analysis of the axial depletion length observed by holography may be compared with three-dimensional simulations, which allows estimating an n-doping level of 1 × 1018 cm-3 and negative sidewall surface charge of 2.5 × 1012 cm-2 of the nanowire, resulting in a radial surface depletion to a depth of 36 nm. We found excellent agreement between the simulated diameter of the undepleted core and the active thickness observed in the experimental data. By combining TEM holography experiments and finite element simulation of the NW electrostatics, the bulk-like character of the nanowire core is revealed.
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Affiliation(s)
- Martien den Hertog
- Université Grenoble Alpes, F-38000 Grenoble, France. Institut Néel CNRS, BP 166, 25 rue des Martyrs, F-38042 Grenoble, France
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Kovács A, Dunin-Borkowski RE. Magnetic Imaging of Nanostructures Using Off-Axis Electron Holography. HANDBOOK OF MAGNETIC MATERIALS 2018. [DOI: 10.1016/bs.hmm.2018.09.001] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/08/2023]
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10
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Migunov V, Dwyer C, Boothroyd CB, Pozzi G, Dunin-Borkowski RE. Prospects for quantitative and time-resolved double and continuous exposure off-axis electron holography. Ultramicroscopy 2017; 178:48-61. [DOI: 10.1016/j.ultramic.2016.08.010] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/15/2016] [Revised: 08/08/2016] [Accepted: 08/16/2016] [Indexed: 11/28/2022]
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11
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Robust image alignment for cryogenic transmission electron microscopy. J Struct Biol 2016; 197:279-293. [PMID: 28038834 DOI: 10.1016/j.jsb.2016.12.006] [Citation(s) in RCA: 19] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/12/2016] [Revised: 12/13/2016] [Accepted: 12/16/2016] [Indexed: 11/23/2022]
Abstract
Cryo-electron microscopy recently experienced great improvements in structure resolution due to direct electron detectors with improved contrast and fast read-out leading to single electron counting. High frames rates enabled dose fractionation, where a long exposure is broken into a movie, permitting specimen drift to be registered and corrected. The typical approach for image registration, with high shot noise and low contrast, is multi-reference (MR) cross-correlation. Here we present the software package Zorro, which provides robust drift correction for dose fractionation by use of an intensity-normalized cross-correlation and logistic noise model to weight each cross-correlation in the MR model and filter each cross-correlation optimally. Frames are reliably registered by Zorro with low dose and defocus. Methods to evaluate performance are presented, by use of independently-evaluated even- and odd-frame stacks by trajectory comparison and Fourier ring correlation. Alignment of tiled sub-frames is also introduced, and demonstrated on an example dataset. Zorro source code is available at github.com/CINA/zorro.
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Hayashida M, Malac M. Practical electron tomography guide: Recent progress and future opportunities. Micron 2016; 91:49-74. [PMID: 27728842 DOI: 10.1016/j.micron.2016.09.010] [Citation(s) in RCA: 20] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/09/2016] [Revised: 09/26/2016] [Accepted: 09/27/2016] [Indexed: 10/20/2022]
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Performance of a direct detection camera for off-axis electron holography. Ultramicroscopy 2016; 161:90-97. [DOI: 10.1016/j.ultramic.2015.09.004] [Citation(s) in RCA: 29] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/14/2015] [Revised: 08/21/2015] [Accepted: 09/11/2015] [Indexed: 11/22/2022]
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Cooper D, Denneulin T, Bernier N, Béché A, Rouvière JL. Strain mapping of semiconductor specimens with nm-scale resolution in a transmission electron microscope. Micron 2016; 80:145-65. [DOI: 10.1016/j.micron.2015.09.001] [Citation(s) in RCA: 89] [Impact Index Per Article: 11.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/20/2015] [Revised: 08/31/2015] [Accepted: 09/01/2015] [Indexed: 11/26/2022]
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Chang SL, Dwyer C, Boothroyd CB, Dunin-Borkowski RE. Optimising electron holography in the presence of partial coherence and instrument instabilities. Ultramicroscopy 2015; 151:37-45. [DOI: 10.1016/j.ultramic.2014.11.019] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/04/2014] [Revised: 11/10/2014] [Accepted: 11/10/2014] [Indexed: 11/24/2022]
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