1
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Ruffato G, Beleggia M, Tavabi AH, Rotunno E, Viani L, Rosi P, Kavkani PH, Chiari C, Frabboni S, Gazzadi GC, Pozzi G, Bertoni G, Tiemeijer P, Dunin-Borkowski RE, Grillo V. Three-dimensional Stacking of Phase Plates for Advanced Electron Beam Shaping. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2024:ozae108. [PMID: 39589924 DOI: 10.1093/mam/ozae108] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/14/2024] [Revised: 09/14/2024] [Accepted: 10/14/2024] [Indexed: 11/28/2024]
Abstract
Tuneable phase plates for free electrons are a highly active area of research. However, their widespread implementation, similar to that of spatial light modulators in light optics, has been hindered by both conceptual and technical challenges. A specific technical challenge involves the need to minimize obstruction of the electron beam by supporting films and electrodes. Here, we describe numerical and analytical mathematical frameworks for three-dimensional stacks of phase plates that can be used to provide near-arbitrary electron beam shaping with minimal obstruction.
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Affiliation(s)
- Gianluca Ruffato
- Department of Physics and Astronomy 'G. Galilei', University of Padova, via Marzolo 8, Padova 35131, Italy
- Department of Information Engineering, University of Padova, via Gradenigo 6, Padova 35131, Italy
| | - Marco Beleggia
- Dipartimento FIM, Università degli studi di Modena e Reggio Emilia, via G. Campi 213/A, Modena 41125, Italy
| | - Amir Hossein Tavabi
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, Jülich 52425, Germany
| | - Enzo Rotunno
- Istituto Nanoscienze, Consiglio Nazionale delle Ricerche, via G. Campi 213/A, Modena 41125, Italy
| | - Lorenzo Viani
- Dipartimento FIM, Università degli studi di Modena e Reggio Emilia, via G. Campi 213/A, Modena 41125, Italy
- Istituto Nanoscienze, Consiglio Nazionale delle Ricerche, via G. Campi 213/A, Modena 41125, Italy
| | - Paolo Rosi
- Istituto Nanoscienze, Consiglio Nazionale delle Ricerche, via G. Campi 213/A, Modena 41125, Italy
| | - Payam Habibzadeh Kavkani
- Dipartimento FIM, Università degli studi di Modena e Reggio Emilia, via G. Campi 213/A, Modena 41125, Italy
- Istituto Nanoscienze, Consiglio Nazionale delle Ricerche, via G. Campi 213/A, Modena 41125, Italy
| | - Caterina Chiari
- Dipartimento FIM, Università degli studi di Modena e Reggio Emilia, via G. Campi 213/A, Modena 41125, Italy
- Istituto Nanoscienze, Consiglio Nazionale delle Ricerche, via G. Campi 213/A, Modena 41125, Italy
| | - Stefano Frabboni
- Dipartimento FIM, Università degli studi di Modena e Reggio Emilia, via G. Campi 213/A, Modena 41125, Italy
- Istituto Nanoscienze, Consiglio Nazionale delle Ricerche, via G. Campi 213/A, Modena 41125, Italy
| | - Gian Carlo Gazzadi
- Istituto Nanoscienze, Consiglio Nazionale delle Ricerche, via G. Campi 213/A, Modena 41125, Italy
| | - Giulio Pozzi
- Dipartimento FIM, Università degli studi di Modena e Reggio Emilia, via G. Campi 213/A, Modena 41125, Italy
| | - Giovanni Bertoni
- Istituto Nanoscienze, Consiglio Nazionale delle Ricerche, via G. Campi 213/A, Modena 41125, Italy
| | - Peter Tiemeijer
- Thermo Fisher Scientific, PO Box 80066, Eindhoven 5600 KA, The Netherlands
| | - Rafal Edward Dunin-Borkowski
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, Jülich 52425, Germany
| | - Vincenzo Grillo
- Istituto Nanoscienze, Consiglio Nazionale delle Ricerche, via G. Campi 213/A, Modena 41125, Italy
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2
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Shi H, Wang K, Chen W, Yang Z, Liu J. Generation of a terahertz quasi-Pearcey beam and its investigation in ptychography. OPTICS EXPRESS 2024; 32:2607-2618. [PMID: 38297785 DOI: 10.1364/oe.509890] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/25/2023] [Accepted: 12/06/2023] [Indexed: 02/02/2024]
Abstract
The terahertz structured beams played a significant role in imaging. We utilized the transmitter with 0.1 THz to generate the quasi-Pearcey beam. The beam is produced by combining the self-designed parabola-slit modulated plate and Fourier lens, showing stripe-shaped pattern and self-focusing property. Based on that, introducing it into the testing of ptychography, we discovered there are decent effects in field reconstruction of the probe and sample with this beam by comparisons both in the simulations and the experiments. The beam has good spatial coherence through the analysis of the spatial frequency spectrums. It suggests that the beam with such features can take advantage of rapid reconstruction in full-field imaging.
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3
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Dang Z, Chen Y, Fang Z. Cathodoluminescence Nanoscopy: State of the Art and Beyond. ACS NANO 2023; 17:24431-24448. [PMID: 38054434 DOI: 10.1021/acsnano.3c07593] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/07/2023]
Abstract
Cathodoluminescence (CL) nanoscopy is proven to be a powerful tool to explore nanoscale optical properties, whereby free electron beams achieve a spatial resolution far beyond the diffraction limit of light. With developed methods for the control of electron beams and the collection of light, the dimension of information that CL can access has been expanded to include polarization, momentum, and time, holding promise to provide invaluable insights into the study of materials and optical near-field dynamics. With a focus on the burgeoning field of CL nanoscopy, this perspective outlines the recent advancements and applications of this technique, as illustrated by the salient experimental works. In addition, as an outlook for future research, several appealing directions that may bring about developments and discoveries are highlighted.
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Affiliation(s)
- Zhibo Dang
- School of Physics, State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, Academy for Advanced Interdisciplinary Studies, Collaborative Innovation Center of Quantum Matter, and Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, People's Republic of China
| | - Yuxiang Chen
- School of Physics, State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, Academy for Advanced Interdisciplinary Studies, Collaborative Innovation Center of Quantum Matter, and Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, People's Republic of China
| | - Zheyu Fang
- School of Physics, State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, Academy for Advanced Interdisciplinary Studies, Collaborative Innovation Center of Quantum Matter, and Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, People's Republic of China
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4
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Roitman D, Shiloh R, Lu PH, Dunin-Borkowski RE, Arie A. Shaping of Electron Beams Using Sculpted Thin Films. ACS PHOTONICS 2021; 8:3394-3405. [PMID: 34938823 PMCID: PMC8679091 DOI: 10.1021/acsphotonics.1c00951] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/25/2021] [Revised: 10/31/2021] [Accepted: 11/04/2021] [Indexed: 05/04/2023]
Abstract
Electron beam shaping by sculpted thin films relies on electron-matter interactions and the wave nature of electrons. It can be used to study physical phenomena of special electron beams and to develop technological applications in electron microscopy that offer new and improved measurement techniques and increased resolution in different imaging modes. In this Perspective, we review recent applications of sculpted thin films for electron orbital angular momentum sorting, improvements in phase contrast transmission electron microscopy, and aberration correction. For the latter, we also present new results of our work toward correction of the spherical aberration of Lorentz scanning transmission electron microscopes and suggest a method to correct chromatic aberration using thin films. This review provides practical insight for researchers in the field and motivates future progress in electron microscopy.
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Affiliation(s)
- Dolev Roitman
- School
of Electrical Engineering, Fleischman Faculty of Engineering, Tel Aviv University, Tel Aviv 69978, Israel
| | - Roy Shiloh
- Physics
Department, Friedrich-Alexander-Universität
Erlangen-Nürnberg, Erlangen 91058, Germany
| | - Peng-Han Lu
- Ernst
Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter
Grünberg Institute, Forschungszentrum
Jülich, Jülich 52428, Germany
- RWTH
Aachen University, Aachen 52062, Germany
| | - Rafal E. Dunin-Borkowski
- Ernst
Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter
Grünberg Institute, Forschungszentrum
Jülich, Jülich 52428, Germany
| | - Ady Arie
- School
of Electrical Engineering, Fleischman Faculty of Engineering, Tel Aviv University, Tel Aviv 69978, Israel
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5
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Khonina SN, Kazanskiy NL, Khorin PA, Butt MA. Modern Types of Axicons: New Functions and Applications. SENSORS 2021; 21:s21196690. [PMID: 34641014 PMCID: PMC8512447 DOI: 10.3390/s21196690] [Citation(s) in RCA: 15] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/19/2021] [Revised: 10/05/2021] [Accepted: 10/06/2021] [Indexed: 01/23/2023]
Abstract
Axicon is a versatile optical element for forming a zero-order Bessel beam, including high-power laser radiation schemes. Nevertheless, it has drawbacks such as the produced beam's parameters being dependent on a particular element, the output beam's intensity distribution being dependent on the quality of element manufacturing, and uneven axial intensity distribution. To address these issues, extensive research has been undertaken to develop nondiffracting beams using a variety of advanced techniques. We looked at four different and special approaches for creating nondiffracting beams in this article. Diffractive axicons, meta-axicons-flat optics, spatial light modulators, and photonic integrated circuit-based axicons are among these approaches. Lately, there has been noteworthy curiosity in reducing the thickness and weight of axicons by exploiting diffraction. Meta-axicons, which are ultrathin flat optical elements made up of metasurfaces built up of arrays of subwavelength optical antennas, are one way to address such needs. In addition, when compared to their traditional refractive and diffractive equivalents, meta-axicons have a number of distinguishing advantages, including aberration correction, active tunability, and semi-transparency. This paper is not intended to be a critique of any method. We have outlined the most recent advancements in this field and let readers determine which approach best meets their needs based on the ease of fabrication and utilization. Moreover, one section is devoted to applications of axicons utilized as sensors of optical properties of devices and elements as well as singular beams states and wavefront features.
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Affiliation(s)
- Svetlana N. Khonina
- Image Processing Systems Institute of RAS—Branch of the FSRC “Crystallography and Photonics” RAS, 443001 Samara, Russia; (S.N.K.); (N.L.K.)
- Samara National Research University, 443086 Samara, Russia;
| | - Nikolay L. Kazanskiy
- Image Processing Systems Institute of RAS—Branch of the FSRC “Crystallography and Photonics” RAS, 443001 Samara, Russia; (S.N.K.); (N.L.K.)
- Samara National Research University, 443086 Samara, Russia;
| | | | - Muhammad A. Butt
- Samara National Research University, 443086 Samara, Russia;
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warszawa, Poland
- Correspondence:
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6
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Alignment of electron optical beam shaping elements using a convolutional neural network. Ultramicroscopy 2021; 228:113338. [PMID: 34218137 DOI: 10.1016/j.ultramic.2021.113338] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/12/2021] [Revised: 05/28/2021] [Accepted: 06/09/2021] [Indexed: 11/23/2022]
Abstract
A convolutional neural network is used to align an orbital angular momentum sorter in a transmission electron microscope. The method is demonstrated using simulations and experiments. As a result of its accuracy and speed, it offers the possibility of real-time tuning of other electron optical devices and electron beam shaping configurations.
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7
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Chen X, Waller L, Chen J, Tang R, Zhang Z, Gagne I, Gutierrez B, Cho SH, Tseng CY, Lian IY, Lo YH. Label-free image-encoded microfluidic cell sorter with a scanning Bessel beam. APL PHOTONICS 2021; 6:076101. [PMID: 34263031 PMCID: PMC8259130 DOI: 10.1063/5.0051354] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/24/2021] [Accepted: 06/23/2021] [Indexed: 05/03/2023]
Abstract
The microfluidic-based, label-free image-guided cell sorter offers a low-cost, high information content, and disposable solution that overcomes many limitations in conventional cell sorters. However, flow confinement for most microfluidic devices is generally only one-dimensional using sheath flow. As a result, the equilibrium distribution of cells spreads beyond the focal plane of commonly used Gaussian laser excitation beams, resulting in a large number of blurred images that hinder subsequent cell sorting based on cell image features. To address this issue, we present a Bessel-Gaussian beam image-guided cell sorter with an ultra-long depth of focus, enabling focused images of >85% of passing cells. This system features label-free sorting capabilities based on features extracted from the output temporal waveform of a photomultiplier tube (PMT) detector. For the sorting of polystyrene beads, SKNO1 leukemia cells, and Scenedesmus green algae, our results indicate a sorting purity of 97%, 97%, and 98%, respectively, showing that the temporal waveforms from the PMT outputs have strong correlations with cell image features. These correlations are also confirmed by off-line reconstructed cell images from a temporal-spatial transformation algorithm tailored to the scanning Bessel-Gaussian beam.
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Affiliation(s)
- Xinyu Chen
- Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, California 92093, USA
| | - Lauren Waller
- Department of Bioengineering, University of California, San Diego, La Jolla, California 92093, USA
| | - Jiajie Chen
- College of Physics and Optoelectronics Engineering, Shenzhen University, Shenzhen 518060, China
- Authors to whom correspondence should be addressed: and
| | - Rui Tang
- Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, California 92093, USA
| | - Zunming Zhang
- Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, California 92093, USA
| | - Ivan Gagne
- NanoCellect Biomedical, Inc., San Diego, California 92121, USA
| | - Bien Gutierrez
- NanoCellect Biomedical, Inc., San Diego, California 92121, USA
| | - Sung Hwan Cho
- NanoCellect Biomedical, Inc., San Diego, California 92121, USA
| | - Chi-Yang Tseng
- Department of Materials Science and Engineering, University of California, San Diego, La Jolla, California 92093, USA
| | - Ian Y. Lian
- Department of Biology, Lamar University, Beaumont, Texas 77710, USA
| | - Yu-Hwa Lo
- Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, California 92093, USA
- Authors to whom correspondence should be addressed: and
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8
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Řiháček T, Horák M, Schachinger T, Mika F, Matějka M, Krátký S, Fořt T, Radlička T, Johnson CW, Novák L, Sed'a B, McMorran BJ, Müllerová I. Beam shaping and probe characterization in the scanning electron microscope. Ultramicroscopy 2021; 225:113268. [PMID: 33892378 DOI: 10.1016/j.ultramic.2021.113268] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/17/2020] [Revised: 03/21/2021] [Accepted: 03/24/2021] [Indexed: 10/21/2022]
Abstract
Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.
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Affiliation(s)
- T Řiháček
- Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic.
| | - M Horák
- Central European Institute of Technology, Brno University of Technology, Purkyňova 123, 612 00 Brno, Czech Republic
| | - T Schachinger
- USTEM, TU Wien, Wiedner Hauptstraße 8-10, 1040 Vienna, Austria; Institute of Solid-State Physics, TU Wien, Wiedner Hauptstraße 8-10, 1040 Vienna, Austria
| | - F Mika
- Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic
| | - M Matějka
- Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic
| | - S Krátký
- Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic
| | - T Fořt
- Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic
| | - T Radlička
- Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic
| | - C W Johnson
- Department of Physics, University of Oregon, Eugene, Oregon 97405, USA
| | - L Novák
- Thermo Fisher Scientific Brno, Vlastimila Pecha 12, Brno 627 00, Czech Republic
| | - B Sed'a
- Thermo Fisher Scientific Brno, Vlastimila Pecha 12, Brno 627 00, Czech Republic
| | - B J McMorran
- Department of Physics, University of Oregon, Eugene, Oregon 97405, USA
| | - I Müllerová
- Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic
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9
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Guido CA, Rotunno E, Zanfrognini M, Corni S, Grillo V. Exploring the Spatial Features of Electronic Transitions in Molecular and Biomolecular Systems by Swift Electrons. J Chem Theory Comput 2021; 17:2364-2373. [PMID: 33646769 PMCID: PMC8047794 DOI: 10.1021/acs.jctc.1c00045] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/04/2022]
Abstract
![]()
We
devise a new kind of experiment that extends the technology
of electron energy loss spectroscopy to probe (supra-)molecular systems: by using
an electron beam in a configuration that avoids
molecular damage and a very recently introduced electron optics setup
for the analysis of the outcoming electrons, one can obtain information
on the spatial features of the investigated excitations. Physical
insight into the proposed experiment is provided by means of a simple
but rigorous model to obtain the transition rate and selection rule.
Numerical simulations of DNA G-quadruplexes and other biomolecular
systems, based on time dependent density functional theory calculations,
point out that the conceived new technique can probe the multipolar
components and even the chirality of molecular transitions, superseding
the usual optical spectroscopies for those cases that are problematic,
such as dipole-forbidden transitions, at a very high spatial resolution.
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Affiliation(s)
- Ciro A Guido
- Dipartimento di Scienze Chimiche, Università di Padova, via F. Marzolo 1, 35131 Padova, Italy
| | - Enzo Rotunno
- CNR-NANO, Institute of Nanoscience, via Campi 213/A, Modena, Italy
| | | | - Stefano Corni
- Dipartimento di Scienze Chimiche, Università di Padova, via F. Marzolo 1, 35131 Padova, Italy.,CNR-NANO, Institute of Nanoscience, via Campi 213/A, Modena, Italy
| | - Vincenzo Grillo
- CNR-NANO, Institute of Nanoscience, via Campi 213/A, Modena, Italy
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10
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Tomita M, Nagatani Y, Murata K, Momose A. Enhancement of low-spatial-frequency components by a new phase-contrast STEM using a probe formed with an amplitude Fresnel zone plate. Ultramicroscopy 2020; 218:113089. [PMID: 32896830 DOI: 10.1016/j.ultramic.2020.113089] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/26/2020] [Revised: 07/17/2020] [Accepted: 08/02/2020] [Indexed: 10/23/2022]
Abstract
Electron microscopy is a powerful tool for visualizing the shapes of sub-nanometer objects. However, Contrast Transfer Function (CTF) principally restricts lower frequency components in the image. To overcome this problem, phase-plate techniques have been proposed and currently Hole Free Phase Plate (HFPP) and Volta Phase Plate (VPP) are widely used especially for biological specimens to retrieve low frequency information of the sample's potential distributions. In this report, we have developed a new phase-contrast scanning transmission electron microscope (STEM) in which a probe beam including side robes is formed with an amplitude Fresnel zone plate (FZP) and the interference patterns produced by the zero and first order diffracted waves generated by the FZP are detected. We name it FZP Phase Contrast STEM (FZP-PC-STEM) hereinafter. The amplitude FZP was manufactured by using focused ion beam (FIB) equipment, and the diffraction data were collected by using diffraction imaging technique. The validity of our proposed optical model was confirmed by comparing experimental and simulated images. Observations of carbon nanotube (CNT) bundles by using this method showed that the contrast of low-spatial-frequency components in the CNT image was significantly enhanced. This method does not, in principle, require the post-image processing used in the diffraction imaging method, and it can be easily introduced into pre-existing equipment without major modifications. The stability and robustness of the FZP inserted in condenser system were also confirmed during long-time operation. We expect that the FZP-PC-STEM will be widely applicable to high-contrast observations of low-Z samples with simple and easy operation.
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Affiliation(s)
- Masato Tomita
- National Institute for Physiological Sciences, 38 Nishigonaka Myodaiji, Okazaki, Aichi, 444-8585, Japan.
| | - Yukinori Nagatani
- National Institute for Physiological Sciences, 38 Nishigonaka Myodaiji, Okazaki, Aichi, 444-8585, Japan; KEK, High Energy Accelerator Research Organization, 4 Shirane Shirakata, Tokai-mura, Naka-gun, Ibaraki 319-1195 Japan.
| | - Kazuyoshi Murata
- National Institute for Physiological Sciences, 38 Nishigonaka Myodaiji, Okazaki, Aichi, 444-8585, Japan
| | - Atsushi Momose
- Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577 Japan
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11
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Uesugi Y, Fukushima R, Saitoh K, Sato S. Creating electron phase holograms using femtosecond laser interference processing. OPTICS EXPRESS 2019; 27:20958-20964. [PMID: 31510182 DOI: 10.1364/oe.27.020958] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/03/2019] [Accepted: 06/16/2019] [Indexed: 06/10/2023]
Abstract
Recently, electron beams with structured phase fronts, such as electron vortex beams, have attracted considerable interest. Herein, we present a novel method of fabricating electron phase holograms using a femtosecond laser interference processing. A 35-nm-thick silicon membrane, corresponding to a phase shift of π for 200-keV electrons, was processed using single-shot laser irradiation, whereas processing such thin membranes with a focused ion beam milling technique would be very difficult. This rapid and efficient technique is expected to produce phase diffraction elements for practical applications in a wide range of electron optics fields.
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12
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Grünewald L, Gerthsen D, Hettler S. Fabrication of phase masks from amorphous carbon thin films for electron-beam shaping. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2019; 10:1290-1302. [PMID: 31293866 PMCID: PMC6604735 DOI: 10.3762/bjnano.10.128] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/07/2019] [Accepted: 05/24/2019] [Indexed: 06/09/2023]
Abstract
Background: Electron-beam shaping opens up the possibility for novel imaging techniques in scanning (transmission) electron microscopy (S(T)EM). Phase-modulating thin-film devices (phase masks) made of amorphous silicon nitride are commonly used to generate a wide range of different beam shapes. An additional conductive layer on such a device is required to avoid charging under electron-beam irradiation, which induces unwanted scattering events. Results: Phase masks of conductive amorphous carbon (aC) were successfully fabricated with optical lithography and focused ion beam milling. Analysis by TEM shows the successful generation of Bessel and vortex beams. No charging or degradation of the aC phase masks was observed. Conclusion: Amorphous carbon can be used as an alternative to silicon nitride for phase masks at the expense of a more complex fabrication process. The quality of arbitrary beam shapes could benefit from the application of phase masks made of amorphous C.
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Affiliation(s)
- Lukas Grünewald
- Laboratory for Electron Microscopy, Karlsruhe Institute of Technology (KIT), Engesserstrasse 7, 76131 Karlsruhe, Germany
| | - Dagmar Gerthsen
- Laboratory for Electron Microscopy, Karlsruhe Institute of Technology (KIT), Engesserstrasse 7, 76131 Karlsruhe, Germany
| | - Simon Hettler
- Laboratory for Electron Microscopy, Karlsruhe Institute of Technology (KIT), Engesserstrasse 7, 76131 Karlsruhe, Germany
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13
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Shen T, Lang T, Wu M, Han Z. Bessel-like beam generated by an axicon based on parallel-plate waveguides. APPLIED OPTICS 2018; 57:6174-6180. [PMID: 30118002 DOI: 10.1364/ao.57.006174] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/14/2018] [Accepted: 06/20/2018] [Indexed: 06/08/2023]
Abstract
The axicon is the simplest and most effective optical element for generating the zero-order Bessel-like beam. The zero-order Bessel-like beam, which has the characteristics of small spot size, high brightness, good direction, and large collimation distance, can be applied to optical micromanipulation and power transmission. In this paper, we proposed and designed a structure for phase manipulation based on parallel-plate waveguides that can be used to realize the functionality of the axicon in the terahertz (THz) region. Meanwhile, we characterized the influence of the cone angle of the axicon and the waist radius of the incident Gaussian beam on the generated zero-order Bessel-like beam by simulation. The planar structure, consisting of a parallel stack of thin copper plates, can be easily fabricated to fulfill the phase requirement to realize the zero-order Bessel-like beam and also can be utilized in THz imaging systems, THz sensing systems, THz communication systems, etc.
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14
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Korneychuk S, Partoens B, Guzzinati G, Ramaneti R, Derluyn J, Haenen K, Verbeeck J. Exploring possibilities of band gap measurement with off-axis EELS in TEM. Ultramicroscopy 2018; 189:76-84. [PMID: 29626835 DOI: 10.1016/j.ultramic.2018.03.021] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/10/2017] [Revised: 03/16/2018] [Accepted: 03/28/2018] [Indexed: 11/16/2022]
Abstract
A technique to measure the band gap of dielectric materials with high refractive index by means of energy electron loss spectroscopy (EELS) is presented. The technique relies on the use of a circular (Bessel) aperture and suppresses Cherenkov losses and surface-guided light modes by enforcing a momentum transfer selection. The technique also strongly suppresses the elastic zero loss peak, making the acquisition, interpretation and signal to noise ratio of low loss spectra considerably better, especially for excitations in the first few eV of the EELS spectrum. Simulations of the low loss inelastic electron scattering probabilities demonstrate the beneficial influence of the Bessel aperture in this setup even for high accelerating voltages. The importance of selecting the optimal experimental convergence and collection angles is highlighted. The effect of the created off-axis acquisition conditions on the selection of the transitions from valence to conduction bands is discussed in detail on a simplified isotropic two band model. This opens the opportunity for deliberately selecting certain transitions by carefully tuning the microscope parameters. The suggested approach is experimentally demonstrated and provides good signal to noise ratio and interpretable band gap signals on reference samples of diamond, GaN and AlN while offering spatial resolution in the nm range.
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Affiliation(s)
- Svetlana Korneychuk
- Electron Microscopy for Material Science (EMAT), University of Antwerp, Antwerp 2020, Belgium.
| | - Bart Partoens
- Condensed Matter Theory (CMT), University of Antwerp, Antwerp 2020, Belgium
| | - Giulio Guzzinati
- Electron Microscopy for Material Science (EMAT), University of Antwerp, Antwerp 2020, Belgium
| | - Rajesh Ramaneti
- Institute for Materials Research (IMO), Hasselt University, Diepenbeek 3590, Belgium; IMOMEC, IMEC vzw, Diepenbeek 3590, Belgium
| | | | - Ken Haenen
- Institute for Materials Research (IMO), Hasselt University, Diepenbeek 3590, Belgium; IMOMEC, IMEC vzw, Diepenbeek 3590, Belgium
| | - Jo Verbeeck
- Electron Microscopy for Material Science (EMAT), University of Antwerp, Antwerp 2020, Belgium
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15
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Zheng C, Petersen TC, Kirmse H, Neumann W, Morgan MJ, Etheridge J. Axicon Lens for Electrons Using a Magnetic Vortex: The Efficient Generation of a Bessel Beam. PHYSICAL REVIEW LETTERS 2017; 119:174801. [PMID: 29219431 DOI: 10.1103/physrevlett.119.174801] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/23/2017] [Indexed: 05/21/2023]
Abstract
We demonstrate experimentally an efficient electron axicon lens using a magnetic vortex. We show that naturally occurring magnetic vortices with circular magnetic moment distributions in a soft-magnetic thin film create conical phase shifts for fast electrons. Such radially symmetric linear phase ramps are equivalent to ideal light optical axicons. We apply this lens to generate efficient nondiffracting electron Bessel beams, which we observe experimentally in through-focus Lorentz images as well as in propagated off-axis electron holograms. This highlights the potential for using magnetic nanostructures as highly efficient and flexible phase plates for crafting desired electron beam shapes.
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Affiliation(s)
- Changlin Zheng
- Monash Centre for Electron Microscopy, Monash University, Victoria 3800, Australia
| | - Timothy C Petersen
- School of Physics and Astronomy, Monash University, Victoria 3800, Australia
| | - Holm Kirmse
- Institute of Physics, Humboldt University of Berlin, D-12489 Berlin, Germany
| | - Wolfgang Neumann
- Institute of Physics, Humboldt University of Berlin, D-12489 Berlin, Germany
- Department of Chemistry and Biochemistry, University of Oregon, Eugene, Oregon 97403, USA
| | - Michael J Morgan
- School of Physics and Astronomy, Monash University, Victoria 3800, Australia
| | - Joanne Etheridge
- Monash Centre for Electron Microscopy, Monash University, Victoria 3800, Australia
- Department of Materials Science and Engineering, Monash University, Victoria 3800, Australia
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