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Williams J, Faley MI, Vas JV, Lu PH, Dunin-Borkowski RE. TEM sample preparation of lithographically patterned permalloy nanostructures on silicon nitride membranes. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2024; 15:1-12. [PMID: 38213573 PMCID: PMC10777327 DOI: 10.3762/bjnano.15.1] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/31/2023] [Accepted: 11/28/2023] [Indexed: 01/13/2024]
Abstract
We have prepared ferromagnetic nanostructures intended for the investigation of high-frequency magnetization dynamics in permalloy (Py) nanodisks using Lorentz transmission electron microscopy (LTEM) and electron holography. Py nanodisks were fabricated on thin silicon nitride (SiN) membranes using three different fabrication methods: lift-off, ion beam etching (IBE), and stencil lithography. They were further analyzed using different instruments, including scanning electron microscopy, LTEM, and electron holography. A bilayer of positive PMMA resist was utilized in the first fabrication method to form an undercut structure that guarantees a clean lift-off procedure. The second approach used dry etching with an Ar beam to etch a thin Py film, while an electron-beam-patterned negative resist mask kept the desired structure. In the third process, nanostencils (shadow masks) with submicrometer apertures were milled on SiN membranes using a focused ion beam. Furthermore, we have developed a new TEM sample preparation method, where we fabricated Py nanostructures on a bulk substrate with a SiN buffer layer and etched the substrate to create a thin SiN membrane under the Py nanostructure. Finally, we observed the vortex dynamics of the Py nanodisk under magnetic fields using LTEM and off-axis electron holography. A correlation between preparation methods and the properties of the Py nanostructures was made.
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Affiliation(s)
- Joshua Williams
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, 52425 Jülich, Germany
- Faculty of Engineering, University Duisburg-Essen, 47057 Duisburg, Germany
| | - Michael I Faley
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, 52425 Jülich, Germany
| | - Joseph Vimal Vas
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, 52425 Jülich, Germany
| | - Peng-Han Lu
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, 52425 Jülich, Germany
| | - Rafal E Dunin-Borkowski
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, 52425 Jülich, Germany
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Gaida JH, Lourenço-Martins H, Yalunin SV, Feist A, Sivis M, Hohage T, García de Abajo FJ, Ropers C. Lorentz microscopy of optical fields. Nat Commun 2023; 14:6545. [PMID: 37848420 PMCID: PMC10582189 DOI: 10.1038/s41467-023-42054-3] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/20/2022] [Accepted: 09/25/2023] [Indexed: 10/19/2023] Open
Abstract
In electron microscopy, detailed insights into nanoscale optical properties of materials are gained by spontaneous inelastic scattering leading to electron-energy loss and cathodoluminescence. Stimulated scattering in the presence of external sample excitation allows for mode- and polarization-selective photon-induced near-field electron microscopy (PINEM). This process imprints a spatial phase profile inherited from the optical fields onto the wave function of the probing electrons. Here, we introduce Lorentz-PINEM for the full-field, non-invasive imaging of complex optical near fields at high spatial resolution. We use energy-filtered defocus phase-contrast imaging and iterative phase retrieval to reconstruct the phase distribution of interfering surface-bound modes on a plasmonic nanotip. Our approach is universally applicable to retrieve the spatially varying phase of nanoscale fields and topological modes.
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Affiliation(s)
- John H Gaida
- Department of Ultrafast Dynamics, Max Planck Institute for Multidisciplinary Sciences, 37077, Göttingen, Germany
- 4th Physical Institute - Solids and Nanostructures, University of Göttingen, 37077, Göttingen, Germany
| | - Hugo Lourenço-Martins
- Department of Ultrafast Dynamics, Max Planck Institute for Multidisciplinary Sciences, 37077, Göttingen, Germany
- 4th Physical Institute - Solids and Nanostructures, University of Göttingen, 37077, Göttingen, Germany
| | - Sergey V Yalunin
- Department of Ultrafast Dynamics, Max Planck Institute for Multidisciplinary Sciences, 37077, Göttingen, Germany
- 4th Physical Institute - Solids and Nanostructures, University of Göttingen, 37077, Göttingen, Germany
| | - Armin Feist
- Department of Ultrafast Dynamics, Max Planck Institute for Multidisciplinary Sciences, 37077, Göttingen, Germany
- 4th Physical Institute - Solids and Nanostructures, University of Göttingen, 37077, Göttingen, Germany
| | - Murat Sivis
- Department of Ultrafast Dynamics, Max Planck Institute for Multidisciplinary Sciences, 37077, Göttingen, Germany
- 4th Physical Institute - Solids and Nanostructures, University of Göttingen, 37077, Göttingen, Germany
| | - Thorsten Hohage
- Institute of Numerical and Applied Mathematics, University of Göttingen, 37083, Göttingen, Germany
| | - F Javier García de Abajo
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860, Castelldefels (Barcelona), Spain
- ICREA-Institució Catalana de Recerca i Estudis Avançats, 08010, Barcelona, Spain
| | - Claus Ropers
- Department of Ultrafast Dynamics, Max Planck Institute for Multidisciplinary Sciences, 37077, Göttingen, Germany.
- 4th Physical Institute - Solids and Nanostructures, University of Göttingen, 37077, Göttingen, Germany.
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Time-resolved transmission electron microscopy for nanoscale chemical dynamics. Nat Rev Chem 2023; 7:256-272. [PMID: 37117417 DOI: 10.1038/s41570-023-00469-y] [Citation(s) in RCA: 11] [Impact Index Per Article: 11.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Accepted: 01/12/2023] [Indexed: 02/24/2023]
Abstract
The ability of transmission electron microscopy (TEM) to image a structure ranging from millimetres to Ångströms has made it an indispensable component of the toolkit of modern chemists. TEM has enabled unprecedented understanding of the atomic structures of materials and how structure relates to properties and functions. Recent developments in TEM have advanced the technique beyond static material characterization to probing structural evolution on the nanoscale in real time. Accompanying advances in data collection have pushed the temporal resolution into the microsecond regime with the use of direct-electron detectors and down to the femtosecond regime with pump-probe microscopy. Consequently, studies have deftly applied TEM for understanding nanoscale dynamics, often in operando. In this Review, time-resolved in situ TEM techniques and their applications for probing chemical and physical processes are discussed, along with emerging directions in the TEM field.
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Feist A, Huang G, Arend G, Yang Y, Henke JW, Raja AS, Kappert FJ, Wang RN, Lourenço-Martins H, Qiu Z, Liu J, Kfir O, Kippenberg TJ, Ropers C. Cavity-mediated electron-photon pairs. Science 2022; 377:777-780. [PMID: 35951690 DOI: 10.1126/science.abo5037] [Citation(s) in RCA: 17] [Impact Index Per Article: 8.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/02/2022]
Abstract
Quantum information, communication, and sensing rely on the generation and control of quantum correlations in complementary degrees of freedom. Free electrons coupled to photonics promise novel hybrid quantum technologies, although single-particle correlations and entanglement have yet to be shown. In this work, we demonstrate the preparation of electron-photon pair states using the phase-matched interaction of free electrons with the evanescent vacuum field of a photonic chip-based optical microresonator. Spontaneous inelastic scattering produces intracavity photons coincident with energy-shifted electrons, which we employ for noise-suppressed optical mode imaging. This parametric pair-state preparation will underpin the future development of free-electron quantum optics, providing a route to quantum-enhanced imaging, electron-photon entanglement, and heralded single-electron and Fock-state photon sources.
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Affiliation(s)
- Armin Feist
- Max Planck Institute for Multidisciplinary Sciences, D-37077 Göttingen, Germany.,4th Physical Institute - Solids and Nanostructures, University of Göttingen, D-37077 Göttingen, Germany
| | - Guanhao Huang
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland.,Center for Quantum Science and Engineering, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland
| | - Germaine Arend
- Max Planck Institute for Multidisciplinary Sciences, D-37077 Göttingen, Germany.,4th Physical Institute - Solids and Nanostructures, University of Göttingen, D-37077 Göttingen, Germany
| | - Yujia Yang
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland.,Center for Quantum Science and Engineering, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland
| | - Jan-Wilke Henke
- Max Planck Institute for Multidisciplinary Sciences, D-37077 Göttingen, Germany.,4th Physical Institute - Solids and Nanostructures, University of Göttingen, D-37077 Göttingen, Germany
| | - Arslan Sajid Raja
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland.,Center for Quantum Science and Engineering, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland
| | - F Jasmin Kappert
- Max Planck Institute for Multidisciplinary Sciences, D-37077 Göttingen, Germany.,4th Physical Institute - Solids and Nanostructures, University of Göttingen, D-37077 Göttingen, Germany
| | - Rui Ning Wang
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland.,Center for Quantum Science and Engineering, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland
| | - Hugo Lourenço-Martins
- Max Planck Institute for Multidisciplinary Sciences, D-37077 Göttingen, Germany.,4th Physical Institute - Solids and Nanostructures, University of Göttingen, D-37077 Göttingen, Germany
| | - Zheru Qiu
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland.,Center for Quantum Science and Engineering, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland
| | - Junqiu Liu
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland.,Center for Quantum Science and Engineering, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland
| | - Ofer Kfir
- Max Planck Institute for Multidisciplinary Sciences, D-37077 Göttingen, Germany.,4th Physical Institute - Solids and Nanostructures, University of Göttingen, D-37077 Göttingen, Germany
| | - Tobias J Kippenberg
- Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland.,Center for Quantum Science and Engineering, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland
| | - Claus Ropers
- Max Planck Institute for Multidisciplinary Sciences, D-37077 Göttingen, Germany.,4th Physical Institute - Solids and Nanostructures, University of Göttingen, D-37077 Göttingen, Germany
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