Chapter 3 Advances in Aberration-Corrected Scanning Transmission Electron Microscopy and Electron Energy-Loss Spectroscopy

In Situ TEM/STEM Investigation of Crystallization in Y3Al5O12:Ce at High Temperatures Inside a Transmission Electron Microscope

Y3Al5O12:Ce (YAG:Ce) phosphors are extensively used in the field of white light-emitting diodes (LEDs) due to their efficient luminescent properties. To optimize the performance of YAG:Ce phosphors, a comprehensive understanding of their synthesis and structural evolution is essential. This paper presents a direct in situ transmission electron microscopy (TEM) /scanning TEM (STEM) investigation on the transformation process of a precursor comprising nanocrystalline CeO2 dispersed in an amorphous Y-Al oxide matrix into crystalline YAG:Ce particles. The study reveals that nanocrystalline CeO2 particles dissolve completely in the Y-Al oxide matrix at a temperature above 900 °C, while YAlO3 (YAP)-type crystalline particles with Al2O3 phase in grain boundaries are observed above 1000 °C. Finally, YAG:Ce-type crystalline particles are formed above 1180 °C. Atomic-resolution energy-dispersive X-ray spectroscopy (EDS) elemental mapping demonstrates that the doped cerium (Ce) atoms occupy the same atomic sites as yttrium (Y). Photoluminescence measurements validate the efficient luminescent properties of the obtained YAG:Ce phosphor.

Characterization of single-atom catalysts by EELS and EDX spectroscopy

Fitted with a field emission source, aberration-corrected optics and an energy-dispersive X-ray detector of large solid angle, a modern analytical TEM can generate a current density high enough to chemically identify a single metal atom within a fraction of a second, if the atom remains stationary within the electron probe. However, atom motion will occur if the atomic binding energy is too low, the specimen temperature too high, or the electron accelerating voltage above a certain threshold. We discuss such motion in terms of thermal diffusion, beam-induced sputtering and beam-assisted surface migration. Calculations based on a Rutherford-scattering approximation suggest that when atomic displacement is possible, it drastically reduces the analytical signal and signal/noise ratio. For certain elements, electron energy-loss spectroscopy (EELS) provides a higher detectability than energy-dispersive X-ray (EDX) but suffers from the same problem of atomic displacement.

Ultra-high resolution electron microscopy

The last two decades have seen dramatic advances in the resolution of the electron microscope brought about by the successful correction of lens aberrations that previously limited resolution for most of its history. We briefly review these advances, the achievement of sub-Ångstrom resolution and the ability to identify individual atoms, their bonding configurations and even their dynamics and diffusion pathways. We then present a review of the basic physics of electron scattering, lens aberrations and their correction, and an approximate imaging theory for thin crystals which provides physical insight into the various different imaging modes. Then we proceed to describe a more exact imaging theory starting from Yoshioka's formulation and covering full image simulation methods using Bloch waves, the multislice formulation and the frozen phonon/quantum excitation of phonons models. Delocalization of inelastic scattering has become an important limiting factor at atomic resolution. We therefore discuss this issue extensively, showing how the full-width-half-maximum is the appropriate measure for predicting image contrast, but the diameter containing 50% of the excitation is an important measure of the range of the interaction. These two measures can differ by a factor of 5, are not a simple function of binding energy, and full image simulations are required to match to experiment. The Z-dependence of annular dark field images is also discussed extensively, both for single atoms and for crystals, and we show that temporal incoherence must be included accurately if atomic species are to be identified through matching experimental intensities to simulations. Finally we mention a few promising directions for future investigation.

Automatic software correction of residual aberrations in reconstructed HRTEM exit waves of crystalline samples

We develop an automatic and objective method to measure and correct residual aberrations in atomic-resolution HRTEM complex exit waves for crystalline samples aligned along a low-index zone axis. Our method uses the approximate rotational point symmetry of a column of atoms or single atom to iteratively calculate a best-fit numerical phase plate for this symmetry condition, and does not require information about the sample thickness or precise structure. We apply our method to two experimental focal series reconstructions, imaging a β-Si₃N₄ wedge with O and N doping, and a single-layer graphene grain boundary. We use peak and lattice fitting to evaluate the precision of the corrected exit waves. We also apply our method to the exit wave of a Si wedge retrieved by off-axis electron holography. In all cases, the software correction of the residual aberration function improves the accuracy of the measured exit waves.

The correction of electron lens aberrations

The progress of electron lens aberration correction from about 1990 onwards is chronicled. Reasonably complete lists of publications on this and related topics are appended. A present for Max Haider and Ondrej Krivanek in the year of their 65th birthdays. By a happy coincidence, this review was completed in the year that both Max Haider and Ondrej Krivanek reached the age of 65. It is a pleasure to dedicate it to the two leading actors in the saga of aberration corrector design and construction. They would both wish to associate their colleagues with such a tribute but it is the names of Haider and Krivanek (not forgetting Joachim Zach) that will remain in the annals of electron optics, next to that of Harald Rose. I am proud to know that both regard me as a friend as well as a colleague.

Exploiting lens aberrations to create electron-vortex beams

A model for a new electron-vortex beam production method is proposed and experimentally demonstrated. The technique calls on the controlled manipulation of the degrees of freedom of the lens aberrations to achieve a helical phase front. These degrees of freedom are accessible by using the corrector lenses of a transmission electron microscope. The vortex beam is produced through a particular alignment of these lenses into a specifically designed astigmatic state and applying an annular aperture in the condenser plane. Experimental results are found to be in good agreement with simulations.

The three-dimensional point spread function of aberration-corrected scanning transmission electron microscopy

Aberration correction reduces the depth of field in scanning transmission electron microscopy (STEM) and thus allows three-dimensional (3D) imaging by depth sectioning. This imaging mode offers the potential for sub-Ångstrom lateral resolution and nanometer-scale depth sensitivity. For biological samples, which may be many microns across and where high lateral resolution may not always be needed, optimizing the depth resolution even at the expense of lateral resolution may be desired, aiming to image through thick specimens. Although there has been extensive work examining and optimizing the probe formation in two dimensions, there is less known about the probe shape along the optical axis. Here the probe shape is examined in three dimensions in an attempt to better understand the depth resolution in this mode. Examples are presented of how aberrations change the probe shape in three dimensions, and it is found that off-axial aberrations may need to be considered for focal series of large areas. It is shown that oversized or annular apertures theoretically improve the vertical resolution for 3D imaging of nanoparticles. When imaging nanoparticles of several nanometer size, regular STEM can thereby be optimized such that the vertical full-width at half-maximum approaches that of the aberration-corrected STEM with a standard aperture.

Identification of active atomic defects in a monolayered tungsten disulphide nanoribbon

Edge structures and atomic defects can significantly affect the physical and chemical properties of low-dimensional materials, such as nanoribbons, and therefore merit a thorough investigation at the atomic scale. Here, we successfully discriminate single atoms on a monolayered tungsten disulphide nanoribbon by means of time-resolved annular dark-field imaging and spatially resolved electron energy-loss spectroscopy. We unambiguously identify and successfully visualize in motion atomic defects, such as vacancies and edge atoms, using scanning transmission electron microscopy. We also report a direct observation of slip deformation in the nanoribbons and present evidence demonstrating that the deformation process involves the migration of vacancies and rearrangement of tungsten atoms. Single-atom defects are successfully observed for the first time during plastic deformation.

Aberration correction past and present

Electron lenses are extremely poor: if glass lenses were as bad, we should see as well with the naked eye as with a microscope! The demonstration by Otto Scherzer in 1936 that skillful lens design could never eliminate the spherical and chromatic aberrations of rotationally symmetric electron lenses was therefore most unwelcome and the other great electron optician of those years, Walter Glaser, never ceased striving to find a loophole in Scherzer's proof. In the wartime and early post-war years, the first proposals for correcting C(s) were made and in 1947, in a second milestone paper, Scherzer listed these and other ways of correcting lenses; soon after, Dennis Gabor invented holography for the same purpose. These approaches will be briefly summarized and the work that led to the successful implementation of quadupole-octopole and sextupole correctors in the 1990 s will be analysed. In conclusion, the elegant role of image algebra in describing image formation and processing and, above all, in developing new methods will be mentioned.

High-energy-resolution monochromator for aberration-corrected scanning transmission electron microscopy/electron energy-loss spectroscopy

An all-magnetic monochromator/spectrometer system for sub-30 meV energy-resolution electron energy-loss spectroscopy in the scanning transmission electron microscope is described. It will link the energy being selected by the monochromator to the energy being analysed by the spectrometer, without resorting to decelerating the electron beam. This will allow it to attain spectral energy stability comparable to systems using monochromators and spectrometers that are raised to near the high voltage of the instrument. It will also be able to correct the chromatic aberration of the probe-forming column. It should be able to provide variable energy resolution down to approximately 10 meV and spatial resolution less than 1 A.