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Guo M, Zhou M, Yang B, Zhao X, Li C, Yu Q, Zhang G, Fang Z, Chen K. All-Optical Photoacoustic Spectroscopy-Based Dual-Component Greenhouse Gas Analyzer. Anal Chem 2024. [PMID: 39235439 DOI: 10.1021/acs.analchem.4c02440] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 09/06/2024]
Abstract
To achieve high sensitivity detection of dual-component greenhouse gases carbon dioxide and methane simultaneously, a multimechanism synergistic enhanced all-optical photoacoustic spectroscopy gas analyzer is presented. The acoustic resonance of the photoacoustic cell and the mechanical resonance of a fiber-optic cantilever acoustic sensor are used to enhance the photoacoustic signals of the dual-component gas. The optimized multipass beam reflection structure enhances the effective excitation power of the dual-component gas. The highly sensitive detection of carbon dioxide and methane at dual-frequency operating points is realized by dual-channel laser modulation combined with dual-input digital lock-in amplification technology. The Allan-Werle deviation analysis results show that with a 100 s average time, the minimum detection limits of carbon dioxide and methane are 76.5 and 1.9 ppb, respectively. The corresponding normalized noise equivalent absorption (NNEA) coefficients are 3.1 × 10-10 and 2.9 × 10-10 cm-1 W/Hz1/2, respectively.
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Affiliation(s)
- Min Guo
- Zhejiang Engineering Research Center of MEMS, Shaoxing University, Shaoxing, Zhejiang 312000, China
| | - Mengda Zhou
- Zhejiang Engineering Research Center of MEMS, Shaoxing University, Shaoxing, Zhejiang 312000, China
| | - Beilei Yang
- Zhejiang Engineering Research Center of MEMS, Shaoxing University, Shaoxing, Zhejiang 312000, China
| | - Xinyu Zhao
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Chenxi Li
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Qing Yu
- United Nova Technology Co., Ltd., Shaoxing, Zhejiang 312000, China
| | - Guangyin Zhang
- Department of Electrical and Computer Engineering, University of Pittsburgh, Pittsburgh, Pennsylvania 15260, United States
| | - Zebo Fang
- Zhejiang Engineering Research Center of MEMS, Shaoxing University, Shaoxing, Zhejiang 312000, China
| | - Ke Chen
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
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2
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Zhao X, Qi H, Wang H, Wang X, Guo M, Peng W, Chen K. Dense Multibutterfly Spots-Enhanced Miniaturized Optical Fiber Photoacoustic Gas Sensor. Anal Chem 2024; 96:5554-5559. [PMID: 38545859 DOI: 10.1021/acs.analchem.4c00005] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 04/10/2024]
Abstract
A miniaturized optical fiber photoacoustic gas sensor enhanced by dense multibutterfly spots is reported for the first time. The principle of space light transmission of neglecting paraxial approximation is theoretically analyzed for designing a dense multibutterfly spots-based miniature multipass cell. In a multipass photoacoustic tube with a diameter of 16 mm, the light beam is reflected about a hundred times. The light spots on the mirror surfaces at both ends of the photoacoustic tube form a dense multibutterfly distribution. The volume of the micro multipass gas chamber is only 5.3 mL. An optical fiber cantilever based on F-P interference is utilized as a photoacoustic pressure detector. Compared with that of the single-pass structure, the gas detection ability of the photoacoustic system with dense multibutterfly spots is improved by about 50 times. The proposed miniaturized sensor realizes a detection limit of 3.4 ppb for C2H2 gas with an averaging time of 100 s. The recognized coefficients of minimum detectable absorption (αmin) and normalized noise equivalent absorption are 1.9 × 10-8 cm-1 and 8.4 × 10-10 W cm-1 Hz-1/2, respectively.
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Affiliation(s)
- Xinyu Zhao
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Hongchao Qi
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Heng Wang
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Xiaona Wang
- School of Physics, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Min Guo
- Zhejiang Engineering Research Center of MEMS, Shaoxing University, Shaoxing, Zhejiang 312000, China
| | - Wei Peng
- School of Physics, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Ke Chen
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
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3
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Tong Y, Pan C, Li Z, Chen H, Xue D, Cheng L, Zhen Y, Zhang T, Gao Y, Zhang L, Guo X, Tong L, Wang P. High-sensitivity fiber-tip acoustic sensor with ultrathin gold diaphragm. OPTICS EXPRESS 2024; 32:14674-14684. [PMID: 38859405 DOI: 10.1364/oe.519624] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/26/2024] [Accepted: 03/23/2024] [Indexed: 06/12/2024]
Abstract
Miniature acoustic sensors with high sensitivity are highly desired for applications in medical photoacoustic imaging, acoustic communications and industrial nondestructive testing. However, conventional acoustic sensors based on piezoelectric, piezoresistive and capacitive detectors usually require a large element size on a millimeter to centimeter scale to achieve a high sensitivity, greatly limiting their spatial resolution and the application in space-confined sensing scenarios. Herein, by using single-crystal two-dimensional gold flakes (2DGFs) as the sensing diaphragm of an extrinsic Fabry-Perot interferometer on a fiber tip, we demonstrate a miniature optical acoustic sensor with high sensitivity. Benefiting from the ultrathin thickness (∼8 nm) and high reflectivity of the 2DGF, the fiber-tip acoustic sensor gives an acoustic pressure sensitivity of ∼300 mV/Pa in the frequency range from 100 Hz to 20 kHz. The noise-equivalent pressure of the fiber-tip acoustic sensor at the frequency of 13 kHz is as low as 62.8 µPa/Hz1/2, which is one or two orders of magnitude lower than that of reported optical acoustic sensors with the same size.
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Zhao X, Wang Z, Li C, Wang H, Qi H, Guo M, Ma F, Chen K. Ultrahigh Sensitive Trace Gas Sensing System with Dual Fiber-Optic Cantilever Multiplexing-Based Differential Photoacoustic Detection. Anal Chem 2024; 96:1046-1053. [PMID: 38196109 DOI: 10.1021/acs.analchem.3c03636] [Citation(s) in RCA: 7] [Impact Index Per Article: 7.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/11/2024]
Abstract
An ultrahigh sensitive trace gas sensing system was presented with dual cantilever-based differential photoacoustic detection. By combining the double enhancement of multipass absorption and optical differential detection, the gas detection sensitivity was significantly improved. The dual-channel synchronous photoacoustic detection was realized by fiber-optic Fabry-Perot interference spectrum multiplexing. The photoacoustic signals detected by two fiber-optic cantilever microphones installed in a differential photoacoustic cell (DPAC) were out of phase, while the detected gas flow noises were in phase. The optical differential detection method achieved both highly sensitive optical interference measurement and differential noise suppression. In the multipass configuration, the interaction path between excitation light and target gas achieved 4.1 m, which improved the photoacoustic signal by an order of magnitude compared with a single reflection. The maximum gas flow allowed by the system based on the DPAC was 250 sccm, which realized the dynamic monitoring of H2S in the SF6 background. The detection limit for H2S in SF6 background was 5.1 ppb, which corresponds to the normalized noise equivalent absorption coefficient of 9 × 10-10 cm-1 W Hz-1/2.
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Affiliation(s)
- Xinyu Zhao
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Zhengzhi Wang
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Chenxi Li
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Heng Wang
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Hongchao Qi
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Min Guo
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Fengxiang Ma
- Electric Power Research Institute, Net Anhui Electric Power Co., Ltd, Hefei, Anhui 230601, China
| | - Ke Chen
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
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5
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Wu G, Wu X, Gong Z, Xing J, Fan Y, Ma J, Peng W, Yu Q, Mei L. Highly sensitive trace gas detection based on a miniaturized 3D-printed Y-type resonant photoacoustic cell. OPTICS EXPRESS 2023; 31:34213-34223. [PMID: 37859182 DOI: 10.1364/oe.502733] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/07/2023] [Accepted: 09/18/2023] [Indexed: 10/21/2023]
Abstract
We report, what we believe to be, a novel miniaturized 3D-printed Y-type resonant photoacoustic cell (YRPAC) consisting of a frustum of cone-type buffer chamber and a cylindrical resonant chamber. The volume of the designed YRPAC is about 7.0 cm3, which is only about a half of the T-resonant photoacoustic cell (TRPAC). The finite element simulation of the sound field distribution of the TRPAC and YRPAC based on COMSOL shows that the photoacoustic signal is enhanced with the shape of the buffer chamber changing from the traditional cylinder to a frustum of cone. The photoacoustic spectroscopy (PAS) system, utilizing the YRPAC and TRPAC as the photoacoustic reaction units, a 1653.7 nm distributed feedback (DFB) laser as the excitation light source, a cantilever beam acoustic sensor as the acoustic sensing unit, and a high-speed spectrometer as the demodulation unit, has been successfully developed for high-sensitivity trace CH4 sensing. When the CH4 concentration is 1000 ppm, the 2f signal of YRPAC in the first-order resonance mode is 2.3 nm, which is 1.7 times higher than the 2f signal amplitude of TRPAC. The detection sensitivity and minimum detection limit for the PAS system are 2.29 pm/ppm and 52.8 parts per billion (ppb) at 100 s of averaging time. The reported YRPAC has higher sensitivity, smaller size, and faster response time compared to the conventional TRPAC, which can provide a new solution for PAS development.
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Luo H, Yang Z, Zhuang R, Lv H, Wang C, Lin H, Zhang D, Zhu W, Zhong Y, Cao Y, Liu K, Kan R, Pan Y, Yu J, Zheng H. Ppbv-level mid-infrared photoacoustic sensor for mouth alcohol test after consuming lychee fruits. PHOTOACOUSTICS 2023; 33:100559. [PMID: 38021287 PMCID: PMC10658599 DOI: 10.1016/j.pacs.2023.100559] [Citation(s) in RCA: 6] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/01/2023] [Revised: 08/29/2023] [Accepted: 09/19/2023] [Indexed: 12/01/2023]
Abstract
A ppbv-level mid-infrared photoacoustic spectroscopy sensor was developed for mouth alcohol tests. A compact CO2 laser with a sealed waveguide and integrated radio frequency (RF) power supply was used. The emission wavelength is ∼9.3 µm with a power of 10 W. A detection limit of ∼18 ppbv (1σ) for ethanol gas with an integration of 1 s was achieved. The sensor performed a linear dynamic range with an R square value of ∼0.999. A breath measurement experiment after consuming lychees was conducted. The photoacoustic signal amplitude decreased with the quality of lychee consumed, confirming the existence of residual alcohol in the mouth. During continuous measurement, the photoacoustic signal decreased in < 10 min when consuming 30 g lychee fruits, proving that the alcohol detected in exhaled breath originated from the oral cavity rather than the bloodstream. This work provided valuable information on the distinction of alcoholism and crime.
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Affiliation(s)
- Huijian Luo
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
| | - Zhifei Yang
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
| | - Ruobin Zhuang
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
| | - Haohua Lv
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
| | - Chenglong Wang
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
| | - Haoyang Lin
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
| | - Di Zhang
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
| | - Wenguo Zhu
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
| | - Yongchun Zhong
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
| | - Yuan Cao
- Key Laboratory of Environmental Optics and Technology, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei, Anhui 230031, China
| | - Kun Liu
- Key Laboratory of Environmental Optics and Technology, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei, Anhui 230031, China
| | - Ruifeng Kan
- Key Laboratory of Environmental Optics and Technology, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei, Anhui 230031, China
| | - Yuwen Pan
- Department of Preventive Treatment of Disease, The affiliated TCM Hospital of Guangzhou Medical University, Guangzhou 510405, China
| | - Jianhui Yu
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
| | - Huadan Zheng
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou 510632, China
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7
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Zhao X, Guo M, Cui D, Li C, Qi H, Chen K, Ma F, Huang J, Zhang G, Zhao J. Multi-pass Differential Photoacoustic Sensor for Real-Time Measurement of SF 6 Decomposition Component H 2S at the ppb Level. Anal Chem 2023; 95:8214-8222. [PMID: 37192501 DOI: 10.1021/acs.analchem.3c00003] [Citation(s) in RCA: 18] [Impact Index Per Article: 18.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 05/18/2023]
Abstract
We designed and implemented a photoacoustic (PA) sensor for H2S detection in SF6 background gas based on a multi-pass differential photoacoustic cell (MDPC) and a near-infrared distributed feedback (DFB) laser. In the MDPC apparatus, two resonators with identical geometric parameters were vertically and symmetrically embedded. The differential processing algorithm of two phase-reversed signals realized the effective enhancement of the PA signal and suppressed the flow noise in the dynamic sampling process. In addition, the λ/4 buffer chamber in the MDPC was utilized as a muffler to further reduce the flow noise and realize the dynamic detection of H2S. The collimated excitation light was reflected 30 times in a multi-pass structure constituted of two gold-plated concave mirrors, and an absorption path length of 4.92 m was achieved. Due to the high gas density of SF6, the relationship between the signal-to-noise ratio (SNR) and the gas flow was different between SF6 and N2 background gases. The maximum flow rate of the characteristic gas components detected in the SF6 background is 150 standard cubic centimeters per minute (SCCM), which is lower than 350 SCCM in N2. The linearity property was analyzed, and the results show that the sensitivity of the sensor to H2S in the SF6 background was 27.3 μV/ppm. With the structure, parameters, temperature, gas flow, and natural frequency of the MDPC been optimized, a minimum detection limit (MDL) of 11 ppb was reached with an averaging time of 1000 s, which furnished an effective preventive implement for the safe operation of gas insulation equipment.
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Affiliation(s)
- Xinyu Zhao
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Min Guo
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Dongyu Cui
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Chenxi Li
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Hongchao Qi
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Ke Chen
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Fengxiang Ma
- Electric Power Research Institute, Net Anhui Electric Power Co., Ltd, Hefei, Anhui 230601, China
| | - Jiayu Huang
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Guangyin Zhang
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Jikuan Zhao
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
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8
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Luo H, Wang C, Lin H, Wu Q, Yang Z, Zhu W, Zhong Y, Kan R, Yu J, Zheng H. Helmholtz-resonator quartz-enhanced photoacoustic spectroscopy. OPTICS LETTERS 2023; 48:1678-1681. [PMID: 37221739 DOI: 10.1364/ol.481457] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/21/2022] [Accepted: 02/11/2023] [Indexed: 05/25/2023]
Abstract
In this work, Helmholtz-resonator quartz-enhanced photoacoustic spectroscopy (HR-QEPAS) was developed for trace gas sensing. A pair of Helmholtz resonators with high-order resonance frequency was designed and coupled with a quartz tuning fork (QTF). Detailed theoretical analysis and experimental research were carried out to optimize the HR-QEPAS performance. As a proof-of-concept experiment, the water vapor in the ambient air was detected using a 1.39 µm near-infrared laser diode. Benefiting from the acoustic filtering of the Helmholtz resonance, the noise level of QEPAS was reduced by >30%, making the QEPAS sensor immune to environmental noise. In addition, the photoacoustic signal amplitude was improved significantly by >1 order of magnitude. As a result, the detection signal-to-noise ratio was enhanced by >20 times, compared with a bare QTF.
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Guo M, Zhao X, Chen K, Cui D, Zhang G, Li C, Gong Z, Yu Q. Multi-mechanism collaboration enhanced photoacoustic analyzer for trace H 2S detection. PHOTOACOUSTICS 2023; 29:100449. [PMID: 36654963 PMCID: PMC9841283 DOI: 10.1016/j.pacs.2023.100449] [Citation(s) in RCA: 3] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/23/2022] [Revised: 01/01/2023] [Accepted: 01/03/2023] [Indexed: 05/25/2023]
Abstract
To realize the real-time highly sensitive detection of SF6 decomposition product H2S, a multi-mechanism collaboration enhancement photoacoustic spectroscopy analyzer (MCEPA) based on acoustic resonance enhancement, cantilever enhancement and excitation light enhancement is proposed. An SF6 background gas-induced photoacoustic cell (PAC) was used for acoustic resonance (AR) enhancement of the photoacoustic signals. A fiber-optic acoustic sensor based on a silicon cantilever is optimized and fabricated. The narrow-band acoustic signal enhancement based on cantilever mechanical resonance (MR) is realized in the optimal working frequency band of the PAC. A fiber-coupled DFB cascaded an Erbium-doped fiber amplifier (EDFA) realized the light power enhancement (LPE) of the photoacoustic signals excitation source. Experimental results show that the MR of the fiber-optic silicon cantilever acoustic sensor (FSCAS) is matched with the AR of the PAC and combined with the LPE, which realizes the multi-mechanism collaboration enhancement of weak photoacoustic signals. The Allan-Werle deviation evaluation showed that the minimum detection limit of H2S in the SF6 background is 10.96 ppb when the average time is 200 s. Benefiting from the all-optimization of photoacoustic excitation and detection, the MCEPA has near-field high-sensitivity gas detection capability immune to electromagnetic interference.
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Yin Y, Ren D, Li C, Chen R, Shi J. Cantilever-enhanced photoacoustic spectroscopy for gas sensing: A comparison of different displacement detection methods. PHOTOACOUSTICS 2022; 28:100423. [PMID: 36386293 PMCID: PMC9643576 DOI: 10.1016/j.pacs.2022.100423] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/23/2022] [Revised: 10/26/2022] [Accepted: 10/28/2022] [Indexed: 06/16/2023]
Abstract
Photoacoustic spectroscopy (PAS) combines the advantages of high sensitivity, high specificity and zero background, which is very suitable for trace gas detection. Cantilever-enhanced photoacoustic spectroscopy (CEPAS) utilizes highly sensitive mechanical cantilevers to further enhance the photoacoustic signal and shows a gas concentration detection limit of parts per trillion. This review is intended to summarize the recent advancements in CEPAS based on different displacement detection methods, such as Michelson interference, Fabry-Perot interference, light intensity detection, capacitive, piezoelectric and piezoresistive detection. Fundamental mechanisms and technical requirements of CEPAS are also provided in the literature. Finally, potential challenges and further opportunities are also discussed.
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Fu L, Lu P, Sima C, Zhao J, Pan Y, Li T, Zhang X, Liu D. Small-volume highly-sensitive all-optical gas sensor using non-resonant photoacoustic spectroscopy with dual silicon cantilever optical microphones. PHOTOACOUSTICS 2022; 27:100382. [PMID: 36068799 PMCID: PMC9441265 DOI: 10.1016/j.pacs.2022.100382] [Citation(s) in RCA: 9] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/01/2022] [Revised: 06/22/2022] [Accepted: 06/27/2022] [Indexed: 05/22/2023]
Abstract
A small-volume highly-sensitive photoacoustic spectroscopy (PAS) methane detection system based on differential silicon cantilever optical microphones (SCOMs) is proposed and experimentally demonstrated. The system contains a compact non-resonant photoacoustic cell with a small volume of 1.2 mL and symmetrically-located dual SCOMs, as well as a distributed feedback laser at 1650.96 nm. The two identical SCOMs utilize the Fabry-Perot interferometric fiber-optic structure, with the differential Q-point demodulation algorithm to suppress the external vibration noise. Experimental results show that the SCOM has a high displacement sensitivity about 7.1 µm/Pa at 150 Hz and within 2.5 dB fluctuation between 5 Hz and 250 Hz. In the PAS gas sensing experiment, the normalized noise equivalent absorption coefficient of the PAS system is estimated to be 1.2 × 10-9 cm-1·W·Hz-1/2 and the minimum detection limit for methane is about 111.2 ppb with 1 s integration time. External disturbance is also applied to the dual SCOM system and results show excellent stability and noise resistance. The proposed PAS system exhibits superiorities of low gas consumption, high sensitivity and immunity to vibration and electromagnetic interference, which has an enormous potential in medicine, industry and environment.
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Affiliation(s)
- Lujun Fu
- Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
- Shenzhen Huazhong University of Science and Technology Research Institute, Shenzhen 518000, China
| | - Ping Lu
- Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
- Shenzhen Huazhong University of Science and Technology Research Institute, Shenzhen 518000, China
- Wuhan OV Optical Networking Technology Co, Ltd, China
- Corresponding authors at: Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China.
| | - Chaotan Sima
- Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
- Shenzhen Huazhong University of Science and Technology Research Institute, Shenzhen 518000, China
- Corresponding authors at: Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China.
| | - Jinbiao Zhao
- Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Yufeng Pan
- Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Tailin Li
- Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Xiaohang Zhang
- Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Deming Liu
- Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
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12
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Wu G, Gong Z, Ma J, Li H, Guo M, Chen K, Peng W, Yu Q, Mei L. High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing. PHOTOACOUSTICS 2022; 27:100386. [PMID: 36068800 PMCID: PMC9441259 DOI: 10.1016/j.pacs.2022.100386] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/06/2022] [Revised: 07/05/2022] [Accepted: 07/13/2022] [Indexed: 05/17/2023]
Abstract
We report a miniature dual-resonance photoacoustic (PA) sensor, mainly consisting of a small resonant T-type PA cell and an integrated sensor probe based on a silicon cantilever beam. The resonance frequency of the miniature T-type PA cell is matched with the first-order natural frequency of the cantilever beam to achieve double resonance of the acoustic signal. The volume of the designed T-type PA cell is only about 2.26 cubic centimeters. A PA spectroscopy (PAS) system, employing the dual-resonance photoacoustic (PA) sensor as the prober and a high-speed spectrometer as the demodulator, has been implemented for high-sensitivity methane sensing. The sensitivity and the minimum detection limit can reach up to 2.0 pm/ppm and 35.6 parts-per-billion, respectively, with an averaging time of 100 s. The promising performance demonstrated a great potential of employing the reported sensor for high-sensitivity gas sensing in sub cubic centimeter-level spaces.
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Affiliation(s)
- Guojie Wu
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian116024, Liaoning, China
| | - Zhenfeng Gong
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian116024, Liaoning, China
- Corresponding authors.
| | - Junsheng Ma
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian116024, Liaoning, China
| | - Haie Li
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian116024, Liaoning, China
| | - Min Guo
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian116024, Liaoning, China
| | - Ke Chen
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian116024, Liaoning, China
| | - Wei Peng
- School of Physics, Dalian University of Technology, Dalian 116024, Liaoning, China
| | - Qingxu Yu
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian116024, Liaoning, China
| | - Liang Mei
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian116024, Liaoning, China
- Corresponding authors.
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Wu G, Gong Z, Li H, Ma J, Chen K, Peng W, Yu Q, Mei L. High-Sensitivity Multitrace Gas Simultaneous Detection Based on an All-Optical Miniaturized Photoacoustic Sensor. Anal Chem 2022; 94:12507-12513. [DOI: 10.1021/acs.analchem.2c02767] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Guojie Wu
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Zhenfeng Gong
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Haie Li
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Junsheng Ma
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Ke Chen
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Wei Peng
- School of Physics, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Qingxu Yu
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
| | - Liang Mei
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian, Liaoning 116024, China
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Optical Fiber Probe Microcantilever Sensor Based on Fabry–Perot Interferometer. SENSORS 2022; 22:s22155748. [PMID: 35957304 PMCID: PMC9370988 DOI: 10.3390/s22155748] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/11/2022] [Revised: 07/29/2022] [Accepted: 07/29/2022] [Indexed: 02/06/2023]
Abstract
Optical fiber Fabry–Perot sensors have long been the focus of researchers in sensing applications because of their unique advantages, including highly effective, simple light path, low cost, compact size, and easy fabrication. Microcantilever-based devices have been extensively explored in chemical and biological fields while the interrogation methods are still a challenge. The optical fiber probe microcantilever sensor is constructed with a microcantilever beam on an optical fiber, which opens the door for highly sensitive, as well as convenient readout. In this review, we summarize a wide variety of optical fiber probe microcantilever sensors based on Fabry–Perot interferometer. The operation principle of the optical fiber probe microcantilever sensor is introduced. The fabrication methods, materials, and sensing applications of an optical fiber probe microcantilever sensor with different structures are discussed in detail. The performances of different kinds of fiber probe microcantilever sensors are compared. We also prospect the possible development direction of optical fiber microcantilever sensors.
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