High-Sensitivity Silicon Cantilever-Enhanced Photoacoustic Spectroscopy Analyzer with Low Gas Consumption

Cantilever-Enhanced Photoacoustic Spectroscopy: Simultaneous Demodulation of Resonant and Nonresonant Signals for the Measurement of Dual SF6 Decomposition Components

Photoacoustic spectroscopy (PAS) gas sensing systems are generally classified into resonant and nonresonant types. However, it remains unclear whether signals at both resonant and nonresonant frequencies can be demodulated by one demodulation channel and one pass cell to achieve the simultaneous detection of two target molecules. In this study, a cantilever-enhanced photoacoustic (PA) gas detection system was utilized to measure H2S and CO2, both of which have been identified as typical fault gases in SF6 gas-insulated electrical equipment. The vibration modes of the cantilever beam at its first resonant and nonresonant frequencies were simulated and analyzed. Utilizing a laser interferometer, the vibration signals of a cantilever beam were measured. The results confirm that the resonant and nonresonant components of the vibration signal can be demodulated simultaneously. Gas detection experiments were conducted using a cantilever beam-based PAS gas sensing unit. Measurements in the ternary gas mixtures demonstrated the feasibility of simultaneously detecting H2S and CO2 by extracting components at 34 and 349 Hz. The PA signals exhibited a strong linear relationship with the gas concentrations, and the detection limits of H2S and CO2 are 2.55 and 84.69 ppm, respectively.

Fiber-Optic Photoacoustic Gas Microprobe Based on Linear Spot-Type Multipass Cell

A linear spot-type multipass cell-enhanced fiber-optic photoacoustic gas microprobe is proposed. To further reduce the volume of the gas chamber and enhance the photoacoustic signal, we designed the cross section of the photoacoustic tube as a slit with a height of 10 mm and a width of 1.5 mm. The volume of the gas chamber is only 210 μL. Through theoretical analysis and multiphysical field simulation, the photoacoustic intensity of the slit cross section is more than 6 times that of traditional circular cross section. A cantilever beam is integrated into the photoacoustic microprobe and forms a Fabry-Perot (FP) interferometer with an optical fiber, achieving enhanced photoacoustic detection. By adjusting the angle of the collimator, the light passes through the photoacoustic cell 26 times, and 13 linear spots are formed on the reflecting surface. The photoacoustic signal with multiple linear reflections is 12.4 times that of a single reflection. The gas enters the sensor in a freely diffused manner, and the response time of the sensing system is 54 s. When the averaging time is 400 s, the detection limit of the designed sensor for acetylene gas reaches 1.5 ppb. The minimum detectable absorption coefficient (αmin) and the normalized noise equivalent absorption coefficient (NNEA) are 1.7 × 10-8 cm-1 and 1.9 × 10-9 Wcm-1/Hz1/2, respectively.

Miniature optical fiber photoacoustic spectroscopy gas sensor based on a 3D micro-printed planar-spiral spring optomechanical resonator

Photoacoustic spectroscopy (PAS) gas sensors based on optomechanical resonators (OMRs) have garnered significant attention for ultrasensitive trace-gas detection. However, a major challenge lies in balancing small size with high performance when developing ultrasensitive miniaturized optomechanical resonant PAS (OMR-PAS) gas sensors for space-constrained applications. Here, we present a miniature optical fiber PAS gas sensor based on a planar-spiral spring OMR (PSS-OMR) that is in situ 3D micro-printed on the end-face of a fiber-optic ferrule. Experimental results demonstrate that mechanical vibrational resonance can enhance the sensor's acoustic sensitivity by over two orders of magnitude. Together with a 1.4 μL non-resonant photoacoustic cell, it can detect C2H2 gas concentration at the 45-ppb level, and its response is very fast approximating 0.2 seconds. This optical fiber OMR-PAS gas sensor holds great promise for the detection or monitoring of rapidly varying trace gas in many applications ranging from production process control to industrial environmental surveillance.

A Review on Photoacoustic Spectroscopy Techniques for Gas Sensing

The rapid growth of industry and the global drive for modernization have led to an increase in gas emissions, which present significant environmental and health risks. As a result, there is a growing need for precise and sensitive gas-monitoring technologies. This review delves into the progress made regarding photoacoustic gas sensors, with a specific focus on the vital components of acoustic cells and acoustic detectors. This review highlights photoacoustic spectroscopy (PAS) as an optical detection technique, lauding its high sensitivity, selectivity, and capability to detect a wide range of gaseous species. The principles of photoacoustic gas sensors are outlined, emphasizing the use of modulated light absorption to generate heat and subsequently detect gas pressure as acoustic pressure. Additionally, this review provides an overview of recent advancements in photoacoustic gas sensor components while also discussing the applications, challenges, and limitations of these sensors. It also includes a comparative analysis of photoacoustic gas sensors and other types of gas sensors, along with potential future research directions and opportunities. The main aim of this review is to advance the understanding and development of photoacoustic gas detection technology.

All-Optical Photoacoustic Spectroscopy-Based Dual-Component Greenhouse Gas Analyzer

To achieve high sensitivity detection of dual-component greenhouse gases carbon dioxide and methane simultaneously, a multimechanism synergistic enhanced all-optical photoacoustic spectroscopy gas analyzer is presented. The acoustic resonance of the photoacoustic cell and the mechanical resonance of a fiber-optic cantilever acoustic sensor are used to enhance the photoacoustic signals of the dual-component gas. The optimized multipass beam reflection structure enhances the effective excitation power of the dual-component gas. The highly sensitive detection of carbon dioxide and methane at dual-frequency operating points is realized by dual-channel laser modulation combined with dual-input digital lock-in amplification technology. The Allan-Werle deviation analysis results show that with a 100 s average time, the minimum detection limits of carbon dioxide and methane are 76.5 and 1.9 ppb, respectively. The corresponding normalized noise equivalent absorption (NNEA) coefficients are 3.1 × 10-10 and 2.9 × 10-10 cm-1 W/Hz1/2, respectively.

Dense Multibutterfly Spots-Enhanced Miniaturized Optical Fiber Photoacoustic Gas Sensor

A miniaturized optical fiber photoacoustic gas sensor enhanced by dense multibutterfly spots is reported for the first time. The principle of space light transmission of neglecting paraxial approximation is theoretically analyzed for designing a dense multibutterfly spots-based miniature multipass cell. In a multipass photoacoustic tube with a diameter of 16 mm, the light beam is reflected about a hundred times. The light spots on the mirror surfaces at both ends of the photoacoustic tube form a dense multibutterfly distribution. The volume of the micro multipass gas chamber is only 5.3 mL. An optical fiber cantilever based on F-P interference is utilized as a photoacoustic pressure detector. Compared with that of the single-pass structure, the gas detection ability of the photoacoustic system with dense multibutterfly spots is improved by about 50 times. The proposed miniaturized sensor realizes a detection limit of 3.4 ppb for C2H2 gas with an averaging time of 100 s. The recognized coefficients of minimum detectable absorption (αmin) and normalized noise equivalent absorption are 1.9 × 10-8 cm-1 and 8.4 × 10-10 W cm-1 Hz-1/2, respectively.

High-sensitivity fiber-tip acoustic sensor with ultrathin gold diaphragm

Miniature acoustic sensors with high sensitivity are highly desired for applications in medical photoacoustic imaging, acoustic communications and industrial nondestructive testing. However, conventional acoustic sensors based on piezoelectric, piezoresistive and capacitive detectors usually require a large element size on a millimeter to centimeter scale to achieve a high sensitivity, greatly limiting their spatial resolution and the application in space-confined sensing scenarios. Herein, by using single-crystal two-dimensional gold flakes (2DGFs) as the sensing diaphragm of an extrinsic Fabry-Perot interferometer on a fiber tip, we demonstrate a miniature optical acoustic sensor with high sensitivity. Benefiting from the ultrathin thickness (∼8 nm) and high reflectivity of the 2DGF, the fiber-tip acoustic sensor gives an acoustic pressure sensitivity of ∼300 mV/Pa in the frequency range from 100 Hz to 20 kHz. The noise-equivalent pressure of the fiber-tip acoustic sensor at the frequency of 13 kHz is as low as 62.8 µPa/Hz1/2, which is one or two orders of magnitude lower than that of reported optical acoustic sensors with the same size.

Ultrahigh Sensitive Trace Gas Sensing System with Dual Fiber-Optic Cantilever Multiplexing-Based Differential Photoacoustic Detection

An ultrahigh sensitive trace gas sensing system was presented with dual cantilever-based differential photoacoustic detection. By combining the double enhancement of multipass absorption and optical differential detection, the gas detection sensitivity was significantly improved. The dual-channel synchronous photoacoustic detection was realized by fiber-optic Fabry-Perot interference spectrum multiplexing. The photoacoustic signals detected by two fiber-optic cantilever microphones installed in a differential photoacoustic cell (DPAC) were out of phase, while the detected gas flow noises were in phase. The optical differential detection method achieved both highly sensitive optical interference measurement and differential noise suppression. In the multipass configuration, the interaction path between excitation light and target gas achieved 4.1 m, which improved the photoacoustic signal by an order of magnitude compared with a single reflection. The maximum gas flow allowed by the system based on the DPAC was 250 sccm, which realized the dynamic monitoring of H2S in the SF6 background. The detection limit for H2S in SF6 background was 5.1 ppb, which corresponds to the normalized noise equivalent absorption coefficient of 9 × 10-10 cm-1 W Hz-1/2.

Highly sensitive trace gas detection based on a miniaturized 3D-printed Y-type resonant photoacoustic cell

We report, what we believe to be, a novel miniaturized 3D-printed Y-type resonant photoacoustic cell (YRPAC) consisting of a frustum of cone-type buffer chamber and a cylindrical resonant chamber. The volume of the designed YRPAC is about 7.0 cm3, which is only about a half of the T-resonant photoacoustic cell (TRPAC). The finite element simulation of the sound field distribution of the TRPAC and YRPAC based on COMSOL shows that the photoacoustic signal is enhanced with the shape of the buffer chamber changing from the traditional cylinder to a frustum of cone. The photoacoustic spectroscopy (PAS) system, utilizing the YRPAC and TRPAC as the photoacoustic reaction units, a 1653.7 nm distributed feedback (DFB) laser as the excitation light source, a cantilever beam acoustic sensor as the acoustic sensing unit, and a high-speed spectrometer as the demodulation unit, has been successfully developed for high-sensitivity trace CH4 sensing. When the CH4 concentration is 1000 ppm, the 2f signal of YRPAC in the first-order resonance mode is 2.3 nm, which is 1.7 times higher than the 2f signal amplitude of TRPAC. The detection sensitivity and minimum detection limit for the PAS system are 2.29 pm/ppm and 52.8 parts per billion (ppb) at 100 s of averaging time. The reported YRPAC has higher sensitivity, smaller size, and faster response time compared to the conventional TRPAC, which can provide a new solution for PAS development.

Ppbv-level mid-infrared photoacoustic sensor for mouth alcohol test after consuming lychee fruits

A ppbv-level mid-infrared photoacoustic spectroscopy sensor was developed for mouth alcohol tests. A compact CO2 laser with a sealed waveguide and integrated radio frequency (RF) power supply was used. The emission wavelength is ∼9.3 µm with a power of 10 W. A detection limit of ∼18 ppbv (1σ) for ethanol gas with an integration of 1 s was achieved. The sensor performed a linear dynamic range with an R square value of ∼0.999. A breath measurement experiment after consuming lychees was conducted. The photoacoustic signal amplitude decreased with the quality of lychee consumed, confirming the existence of residual alcohol in the mouth. During continuous measurement, the photoacoustic signal decreased in < 10 min when consuming 30 g lychee fruits, proving that the alcohol detected in exhaled breath originated from the oral cavity rather than the bloodstream. This work provided valuable information on the distinction of alcoholism and crime.

Multi-pass Differential Photoacoustic Sensor for Real-Time Measurement of SF6 Decomposition Component H2S at the ppb Level

We designed and implemented a photoacoustic (PA) sensor for H₂S detection in SF₆ background gas based on a multi-pass differential photoacoustic cell (MDPC) and a near-infrared distributed feedback (DFB) laser. In the MDPC apparatus, two resonators with identical geometric parameters were vertically and symmetrically embedded. The differential processing algorithm of two phase-reversed signals realized the effective enhancement of the PA signal and suppressed the flow noise in the dynamic sampling process. In addition, the λ/4 buffer chamber in the MDPC was utilized as a muffler to further reduce the flow noise and realize the dynamic detection of H₂S. The collimated excitation light was reflected 30 times in a multi-pass structure constituted of two gold-plated concave mirrors, and an absorption path length of 4.92 m was achieved. Due to the high gas density of SF₆, the relationship between the signal-to-noise ratio (SNR) and the gas flow was different between SF₆ and N₂ background gases. The maximum flow rate of the characteristic gas components detected in the SF₆ background is 150 standard cubic centimeters per minute (SCCM), which is lower than 350 SCCM in N₂. The linearity property was analyzed, and the results show that the sensitivity of the sensor to H₂S in the SF₆ background was 27.3 μV/ppm. With the structure, parameters, temperature, gas flow, and natural frequency of the MDPC been optimized, a minimum detection limit (MDL) of 11 ppb was reached with an averaging time of 1000 s, which furnished an effective preventive implement for the safe operation of gas insulation equipment.

Helmholtz-resonator quartz-enhanced photoacoustic spectroscopy

In this work, Helmholtz-resonator quartz-enhanced photoacoustic spectroscopy (HR-QEPAS) was developed for trace gas sensing. A pair of Helmholtz resonators with high-order resonance frequency was designed and coupled with a quartz tuning fork (QTF). Detailed theoretical analysis and experimental research were carried out to optimize the HR-QEPAS performance. As a proof-of-concept experiment, the water vapor in the ambient air was detected using a 1.39 µm near-infrared laser diode. Benefiting from the acoustic filtering of the Helmholtz resonance, the noise level of QEPAS was reduced by >30%, making the QEPAS sensor immune to environmental noise. In addition, the photoacoustic signal amplitude was improved significantly by >1 order of magnitude. As a result, the detection signal-to-noise ratio was enhanced by >20 times, compared with a bare QTF.

Multi-mechanism collaboration enhanced photoacoustic analyzer for trace H2S detection

To realize the real-time highly sensitive detection of SF₆ decomposition product H₂S, a multi-mechanism collaboration enhancement photoacoustic spectroscopy analyzer (MCEPA) based on acoustic resonance enhancement, cantilever enhancement and excitation light enhancement is proposed. An SF₆ background gas-induced photoacoustic cell (PAC) was used for acoustic resonance (AR) enhancement of the photoacoustic signals. A fiber-optic acoustic sensor based on a silicon cantilever is optimized and fabricated. The narrow-band acoustic signal enhancement based on cantilever mechanical resonance (MR) is realized in the optimal working frequency band of the PAC. A fiber-coupled DFB cascaded an Erbium-doped fiber amplifier (EDFA) realized the light power enhancement (LPE) of the photoacoustic signals excitation source. Experimental results show that the MR of the fiber-optic silicon cantilever acoustic sensor (FSCAS) is matched with the AR of the PAC and combined with the LPE, which realizes the multi-mechanism collaboration enhancement of weak photoacoustic signals. The Allan-Werle deviation evaluation showed that the minimum detection limit of H₂S in the SF₆ background is 10.96 ppb when the average time is 200 s. Benefiting from the all-optimization of photoacoustic excitation and detection, the MCEPA has near-field high-sensitivity gas detection capability immune to electromagnetic interference.

Cantilever-enhanced photoacoustic spectroscopy for gas sensing: A comparison of different displacement detection methods

Photoacoustic spectroscopy (PAS) combines the advantages of high sensitivity, high specificity and zero background, which is very suitable for trace gas detection. Cantilever-enhanced photoacoustic spectroscopy (CEPAS) utilizes highly sensitive mechanical cantilevers to further enhance the photoacoustic signal and shows a gas concentration detection limit of parts per trillion. This review is intended to summarize the recent advancements in CEPAS based on different displacement detection methods, such as Michelson interference, Fabry-Perot interference, light intensity detection, capacitive, piezoelectric and piezoresistive detection. Fundamental mechanisms and technical requirements of CEPAS are also provided in the literature. Finally, potential challenges and further opportunities are also discussed.

Small-volume highly-sensitive all-optical gas sensor using non-resonant photoacoustic spectroscopy with dual silicon cantilever optical microphones

A small-volume highly-sensitive photoacoustic spectroscopy (PAS) methane detection system based on differential silicon cantilever optical microphones (SCOMs) is proposed and experimentally demonstrated. The system contains a compact non-resonant photoacoustic cell with a small volume of 1.2 mL and symmetrically-located dual SCOMs, as well as a distributed feedback laser at 1650.96 nm. The two identical SCOMs utilize the Fabry-Perot interferometric fiber-optic structure, with the differential Q-point demodulation algorithm to suppress the external vibration noise. Experimental results show that the SCOM has a high displacement sensitivity about 7.1 µm/Pa at 150 Hz and within 2.5 dB fluctuation between 5 Hz and 250 Hz. In the PAS gas sensing experiment, the normalized noise equivalent absorption coefficient of the PAS system is estimated to be 1.2 × 10^-9 cm^-1·W·Hz^-1/2 and the minimum detection limit for methane is about 111.2 ppb with 1 s integration time. External disturbance is also applied to the dual SCOM system and results show excellent stability and noise resistance. The proposed PAS system exhibits superiorities of low gas consumption, high sensitivity and immunity to vibration and electromagnetic interference, which has an enormous potential in medicine, industry and environment.

High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing

We report a miniature dual-resonance photoacoustic (PA) sensor, mainly consisting of a small resonant T-type PA cell and an integrated sensor probe based on a silicon cantilever beam. The resonance frequency of the miniature T-type PA cell is matched with the first-order natural frequency of the cantilever beam to achieve double resonance of the acoustic signal. The volume of the designed T-type PA cell is only about 2.26 cubic centimeters. A PA spectroscopy (PAS) system, employing the dual-resonance photoacoustic (PA) sensor as the prober and a high-speed spectrometer as the demodulator, has been implemented for high-sensitivity methane sensing. The sensitivity and the minimum detection limit can reach up to 2.0 pm/ppm and 35.6 parts-per-billion, respectively, with an averaging time of 100 s. The promising performance demonstrated a great potential of employing the reported sensor for high-sensitivity gas sensing in sub cubic centimeter-level spaces.

Optical Fiber Probe Microcantilever Sensor Based on Fabry–Perot Interferometer

Optical fiber Fabry–Perot sensors have long been the focus of researchers in sensing applications because of their unique advantages, including highly effective, simple light path, low cost, compact size, and easy fabrication. Microcantilever-based devices have been extensively explored in chemical and biological fields while the interrogation methods are still a challenge. The optical fiber probe microcantilever sensor is constructed with a microcantilever beam on an optical fiber, which opens the door for highly sensitive, as well as convenient readout. In this review, we summarize a wide variety of optical fiber probe microcantilever sensors based on Fabry–Perot interferometer. The operation principle of the optical fiber probe microcantilever sensor is introduced. The fabrication methods, materials, and sensing applications of an optical fiber probe microcantilever sensor with different structures are discussed in detail. The performances of different kinds of fiber probe microcantilever sensors are compared. We also prospect the possible development direction of optical fiber microcantilever sensors.