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Tong J, Le TT, Liang W, Hossain MA, McIntosh KR, Narangari P, Armand S, Kho TC, Khoo KT, Zakaria Y, Abdallah AA, Surve S, Ernst M, Hoex B, Fong KC. Impact of Pregrown SiO x on the Carrier Selectivity and Thermal Stability of Molybdenum-Oxide-Passivated Contact for Si Solar Cells. ACS APPLIED MATERIALS & INTERFACES 2021; 13:36426-36435. [PMID: 34308641 DOI: 10.1021/acsami.1c06765] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Thin SiOx interlayers are often formed naturally during the deposition of transition metal oxides on silicon surfaces due to interfacial reaction. The SiOx layer, often only several atomic layers thick, becomes the interface between the Si and deposited metal oxide and can therefore influence the electrical properties and thermal stability of the deposited stack. This work explores the potential benefits of controlling the properties of the SiOx interlayer by the introduction of pregrown high-quality SiOx which also inhibits the formation of low-quality SiOx from the metal-oxide deposition process. This work demonstrates that a high-quality pregrown SiOx can reduce the interfacial reaction and results in a more stoichiometric MoOx with improved surface passivation and thermal stability linked to its lower Dit. Detailed experimental data on carrier selectivity, carrier transport efficiency, annealing stability up to 250 °C, and in-depth material analysis are presented.
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Affiliation(s)
- Jingnan Tong
- Research School of Engineering, The Australian National University, Canberra, ACT 2601, Australia
| | - Tien T Le
- Research School of Engineering, The Australian National University, Canberra, ACT 2601, Australia
| | - Wensheng Liang
- Research School of Engineering, The Australian National University, Canberra, ACT 2601, Australia
| | - Md Anower Hossain
- School of Photovoltaic and Renewable Energy Engineering, UNSW Sydney, NSW 2052, Australia
| | | | - Parvathala Narangari
- Research School of Engineering, The Australian National University, Canberra, ACT 2601, Australia
| | - Stephane Armand
- Research School of Engineering, The Australian National University, Canberra, ACT 2601, Australia
| | - Teng C Kho
- Research School of Engineering, The Australian National University, Canberra, ACT 2601, Australia
| | - Kean T Khoo
- School of Photovoltaic and Renewable Energy Engineering, UNSW Sydney, NSW 2052, Australia
| | - Yahya Zakaria
- Qatar Environment and Energy Research Institute, Hamad Bin Khalifa University, Doha 34110, Qatar
| | - Amir A Abdallah
- Qatar Environment and Energy Research Institute, Hamad Bin Khalifa University, Doha 34110, Qatar
| | - Sachin Surve
- Research School of Engineering, The Australian National University, Canberra, ACT 2601, Australia
| | - Marco Ernst
- Research School of Engineering, The Australian National University, Canberra, ACT 2601, Australia
| | - Bram Hoex
- School of Photovoltaic and Renewable Energy Engineering, UNSW Sydney, NSW 2052, Australia
| | - Kean Chern Fong
- Research School of Engineering, The Australian National University, Canberra, ACT 2601, Australia
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