Electron-Induced Chemistry of Cobalt Tricarbonyl Nitrosyl (Co(CO)3NO) in Liquid Helium Nanodroplets

Condensed Matter Systems Exposed to Radiation: Multiscale Theory, Simulations, and Experiment

This roadmap reviews the new, highly interdisciplinary research field studying the behavior of condensed matter systems exposed to radiation. The Review highlights several recent advances in the field and provides a roadmap for the development of the field over the next decade. Condensed matter systems exposed to radiation can be inorganic, organic, or biological, finite or infinite, composed of different molecular species or materials, exist in different phases, and operate under different thermodynamic conditions. Many of the key phenomena related to the behavior of irradiated systems are very similar and can be understood based on the same fundamental theoretical principles and computational approaches. The multiscale nature of such phenomena requires the quantitative description of the radiation-induced effects occurring at different spatial and temporal scales, ranging from the atomic to the macroscopic, and the interlinks between such descriptions. The multiscale nature of the effects and the similarity of their manifestation in systems of different origins necessarily bring together different disciplines, such as physics, chemistry, biology, materials science, nanoscience, and biomedical research, demonstrating the numerous interlinks and commonalities between them. This research field is highly relevant to many novel and emerging technologies and medical applications.

Formation of negative ions from cobalt tricarbonyl nitrosyl Co(CO)3NO clusters

Electron attachment and corresponding dissociative electron attachment (DEA) to cobalt tricarbonyl nitrosyl (Co(CO)3NO) clusters have been studied by co-expansion with Ar gas into a high vacuum. A monochromatic electron beam was utilized to generate negative ions and the resulting reaction products were identified using mass spectrometry. The ion fragments corresponding to Co(CO)3NO monomers closely resemble results from earlier gas phase experiments and studies conducted on Co(CO)3NO in He nanodroplets. However, contrary to the gas phase or He nanodroplet ion yields, a resonance structure comprising several peaks at energies above ∼4 eV was observed both in the case of molecular clusters [Co(CO)3NO]n- (with n = 1, 2, 3) and clusters comprising DEA fragments. Additionally, the ion yields of numerous other clusters such as ions without nitrosyl ([Co(CO)4]-, [Co2(CO)5]-), clusters consisting of two fragments such as ([Co2(CO)NO]-, [Co2(CO)(NO)2]-, [Co2(CO)2NO]-, [Co2(CO)2(NO)2]-, [Co3(CO)(NO)3]-, [Co3(CO)8(NO)3]-, [Co3(CO)(NO)2]-, [Co3(CO)3(NO)2]-, and [Co3(CO)5(NO)2]-) were recorded. Moreover, NO bond dissociation was confirmed with the [Co(CO)2N]-ion and with N- or O-retaining cluster ions, such as [Co2(CO)(NO)N]-, [Co2(CO)2(NO)N]-, [Co3(CO)2(NO)N]-, [Co3(CO)3(NO)N]- and [Co3(CO)(NO)2N]-, or [Co2(CO)2O]-, [Co2(CO)3O]-, [Co3(CO)3O]-, [Co3(CO)4O]-and [Co3(CO)2(NO)O]- respectively.

Dissociative Electron Attachment Cross Sections for Ni(CO)4, Co(CO)3NO, Cr(CO)6

Ni(CO)4, Cr(CO)6, Co(CO)3NO are some of the most common precursors used for focused electron beam induced deposition. Some of the compounds, even though extensively used have high requirements when it comes to handling being, explosives, highly flammable and with high toxicity levels, as is the case of Ni(CO)4. We are employing simulations to determine values hard to determine experimentally, and compare them with DFT calculations and experimental data where available. The use of Quantemol-N cross section simulations for dissociative electron attachment (DEA) at low electron energy in the range of 0–20 eV, gives valuable information on the fragmentation of the molecules, based on their bond dissociation energies, electron affinities and incident electron energies. The values obtained for the cross sections are 0.12 × 10−18 cm2 for Ni(CO)4, 4.5 × 10−16 cm2 for Co(CO)3NO DEA cross-sections and 4.3 × 10−15 cm2 for Cr(CO)6.

First-Principles Study on Electron-Induced Excitations of Atomic Layer Deposition Precursors: Inelastic Electron Wave Packet Scattering with Cobalt Tricarbonyl Nitrosyl Co(CO)3NO Using Time-Dependent Density Functional Theory

A quantitative study on inelastic electron scattering with a molecule is of significant importance for understanding the essential mechanisms of electron-induced gas-phase and surface chemical reactions in their excited electronic states. A key issue to be addressed is the quantitatively detailed inelastic electron collision processes with a realistic molecular target, associated with electron excitation that leads to potential ionization and dissociation reactions of the molecule. Using the real-time time-dependent density functional theory (TDDFT) modeling, we present quantitative findings on the energy transfers and internal excitations for the low energy (up to 270 eV) electron wave packet impact with the molecular target cobalt tricarbonyl nitrosyl (CTN, Co(CO)₃NO) that is used as a precursor in electron-enhanced atomic layer deposition (EE-ALD) growth of Co films. Our modeling shows the quantitative dependence of the wave packet sizes, target molecule orientations, and impact parameters on the energy transfer in this inelastic electron scattering process. It is found that the wave packet sizes have little effect on the overall profile of the internal multiple excited states, whereas different target orientations can cause significantly different internal excited states. To evaluate the quantitative prediction capability, the inelastic scattering cross-section of a hydrogen atom is calculated and compared with the experimental data, leading to a constant scaling factor over the whole energy range. The present study demonstrates the remarkable potential of TDDFT for simulating the inelastic electron scattering process, which provides critical information for future exploration of electronic excitations in a wide range of electron-induced chemical reactions in current technological applications.

Nonadiabatic dynamics of cobalt tricarbonyl nitrosyl for ligand dissociation induced by electronic excitation

We utilize real-time time-dependent density functional theory and Ehrenfest dynamics scheme to investigate excited-state nonadiabatic dynamics of ligand dissociation of cobalt tricarbonyl nitrosyl, Co(CO)3NO, which is a precursor used for cobalt growth in advanced technologies, where the precursor's reaction is enhanced by electronic excitation. Based on the first-principles calculations, we demonstrate two dissociation pathways of the NO ligand on the precursor. Detailed electronic structures are further analyzed to provide an insight into dynamics following the electronic excitations. This study sheds light on computational demonstration and underlying mechanism of the electronic-excitation-induced dissociation, especially in molecules with complex chemical bonds such as the Co(CO)3NO.

Low energy electron-induced decomposition of (η3-C3H5)Ru(CO)3Br, a potential focused electron beam induced deposition precursor with a heteroleptic ligand set

Low energy electron induced fragmentation of (η³-C₃H₅)Ru(CO)₃Br is reported in relation to the suitability of different ligands in the design of focused electron beam induced deposition precursors.

Additive fabrication of nanostructures with focused soft X-rays

In a novel approach a high-resolution soft X-ray microscope has been applied to generate metallic nanostructures by X-ray beam induced decomposition of precursor molecules supplied from the gas phase.