High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching

Fiber-taper collected emission from NV centers in high-Q/V diamond microdisks

Fiber-coupled microdisks are a promising platform for enhancing the spontaneous emission from color centers in diamond. The measured cavity-enhanced emission from the microdisk is governed by the effective volume (V) of each cavity mode, the cavity quality factor (Q), and the coupling between the microdisk and the fiber. Here we observe room temperature photoluminescence from an ensemble of nitrogen-vacancy centers into high Q/V microdisk modes, which when combined with coherent spectroscopy of the microdisk modes, allows us to elucidate the relative contributions of these factors. The broad emission spectrum acts as an internal light source facilitating mode identification over several cavity free spectral ranges. Analysis of the fiber taper collected microdisk emission reveals spectral filtering both by the cavity and the fiber taper, the latter of which we find preferentially couples to higher-order microdisk modes. Coherent mode spectroscopy is used to measure Q ∼ 1 × 105 - the highest reported values for diamond microcavities operating at visible wavelengths. With realistic optimization of the microdisk dimensions, we predict that Purcell factors of ∼50 are within reach.

Quantum Photonic Circuits Integrated with Color Centers in Designer Nanodiamonds

Diamond has emerged as a leading host material for solid-state quantum emitters, quantum memories, and quantum sensors. However, the challenges in fabricating photonic devices in diamond have limited its potential for use in quantum technologies. While various hybrid integration approaches have been developed for coupling diamond color centers with photonic devices defined in a heterogeneous material, these methods suffer from either large insertion loss at the material interface or evanescent light-matter coupling. Here, we present a new technique that enables the deterministic assembly of diamond color centers in a silicon nitride photonic circuit. Using this technique, we observe Purcell enhancement of silicon vacancy centers coupled to a silicon nitride ring resonator. Our hybrid integration approach has the potential for achieving the maximum possible light-matter interaction strength while maintaining low insertion loss and paves the way toward scalable manufacturing of large-scale quantum photonic circuits integrated with high-quality quantum emitters and spins.

A Fiber-Coupled Scanning Magnetometer with Nitrogen-Vacancy Spins in a Diamond Nanobeam

Magnetic imaging with nitrogen-vacancy (NV) spins in diamond is becoming an established tool for studying nanoscale physics in condensed matter systems. However, the optical access required for NV spin readout remains an important hurdle for operation in challenging environments such as millikelvin cryostats or biological systems. Here, we demonstrate a scanning-NV sensor consisting of a diamond nanobeam that is optically coupled to a tapered optical fiber. This nanobeam sensor combines a natural scanning-probe geometry with high-efficiency through-fiber optical excitation and readout of the NV spins. We demonstrate through-fiber optically interrogated electron spin resonance and proof-of-principle magnetometry operation by imaging spin waves in an yttrium-iron-garnet thin film. Our scanning-nanobeam sensor can be combined with nanophotonic structuring to control the light-matter interaction strength and has potential for applications that benefit from all-fiber sensor access, such as millikelvin systems.

Development of hard masks for reactive ion beam angled etching of diamond

Diamond offers good optical properties and hosts bright color centers with long spin coherence times. Recent advances in angled-etching of diamond, specifically with reactive ion beam angled etching (RIBAE), have led to successful demonstration of quantum photonic devices operating at visible wavelengths. However, larger devices operating at telecommunication wavelengths have been difficult to fabricate due to the increased mask erosion, arising from the increased size of devices requiring longer etch times. We evaluated different mask materials for RIBAE of diamond photonic crystal nanobeams and waveguides, and how their thickness, selectivity, aspect ratio and sidewall smoothness affected the resultant etch profiles and optical performance. We found that a thick hydrogen silesquioxane (HSQ) layer on a thin alumina adhesion layer provided the best etch profile and optical performance. The techniques explored in this work can also be adapted to other bulk materials that are not available heteroepitaxially or as thin films-on-insulator.

Nanofabrication of high Q, transferable diamond resonators

Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components - including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single crystal diamond membranes utilising a metallic tungsten layer as a restraining, conductive and removable hard mask. The use of tungsten instead of a more conventional silicon oxide layer enables good repeatability and reliability of the fabrication procedures. The process yields high quality diamond cavities with quality factors (Q-factors) approaching 1 × 104. Finally, we show that the cavities can be picked up and transferred onto a trenched substrate to realise fully suspended diamond cavities. Our fabrication process demonstrates the capability of diamond membranes as modular components for broader diamond based quantum photonic circuitry.

Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics

In the last two decades, the use of diamond as a material for applications in nanophotonics, optomechanics, quantum information, and sensors tremendously increased due to its outstanding mechanical properties, wide optical transparency, and biocompatibility. This has been possible owing to advances in methods for growth of high-quality single crystal diamond (SCD), nanofabrication methods and controlled incorporation of optically active point defects (e.g., nitrogen vacancy centers) in SCD. This paper reviews the recent advances in SCD nano-structuring methods for realization of micro- and nano-structures. Novel fabrication methods are discussed and the different nano-structures realized for a wide range of applications are summarized. Moreover, the methods for color center incorporation in SCD and surface treatment methods to enhance their properties are described. Challenges in the upscaling of SCD nano-structure fabrication, their commercial applications and future prospects are discussed.

Diffractive optical elements in single crystal diamond

We demonstrate the design, fabrication, and experimental characterization of near-field binary phase transmission diffractive optical elements (DOEs) in single crystal diamond. Top-hat and arbitrary pattern DOE beam shapers were numerically optimized using an iterative Fourier transform algorithm (IFTA). Commercially available single crystal diamond plates (3mm×3mm×0.3mm) were patterned using hardmask deposition (α-Si), e-beam lithography, and O₂ plasma-based diamond reactive ion etching. The resulting binary phase relief patterns were characterized using scanning electron microscopy (SEM) and atomic force microscopy (AFM). Experimental characterization of the single crystal diamond DOEs in transmission at λ=532nm confirms excellent uniformity of the resulting top-hat beam profile as required in copper welding applications.

Two-colour interferometry and switching through optomechanical dark mode excitation

Efficient switching and routing of photons of different wavelengths is a requirement for realizing a quantum internet. Multimode optomechanical systems can solve this technological challenge and enable studies of fundamental science involving widely separated wavelengths that are inaccessible to single-mode optomechanical systems. To this end, we demonstrate interference between two optomechanically induced transparency processes in a diamond on-chip cavity. This system allows us to directly observe the dynamics of an optomechanical dark mode that interferes photons at different wavelengths via their mutual coupling to a common mechanical resonance. This dark mode does not transfer energy to the dissipative mechanical reservoir and is predicted to enable quantum information processing applications that are insensitive to mechanical decoherence. Control of the dark mode is also utilized to demonstrate all-optical, two-colour switching and interference with light separated by over 5 THz in frequency.

Generation of Tin-Vacancy Centers in Diamond via Shallow Ion Implantation and Subsequent Diamond Overgrowth

Group IV color centers in diamond have garnered great interest for their potential as optically active solid-state spin qubits. The future utilization of such emitters requires the development of precise site-controlled emitter generation techniques that are compatible with high-quality nanophotonic devices. This task is more challenging for color centers with large group IV impurity atoms, which are otherwise promising because of their predicted long spin coherence times without a dilution refrigerator. For example, when applied to the negatively charged tin-vacancy (SnV^-) center, conventional site-controlled color center generation methods either damage the diamond surface or yield bulk spectra with unexplained features. Here we demonstrate a novel method to generate site-controlled SnV^- centers with clean bulk spectra. We shallowly implant Sn ions through a thin implantation mask and subsequently grow a layer of diamond via chemical vapor deposition. This method can be extended to other color centers and integrated with quantum nanophotonic device fabrication.

High-Q diamond microresonators in the long-wave infrared

High quality factor (Q) photonic devices in the room temperature thermal infrared region, corresponding to deeper long-wave infrared with wavelengths beyond 9 microns, have been demonstrated for the first time. Whispering gallery mode diamond microresonators were fabricated using single crystal diamond substrates and oxygen-based inductively coupled plasma (ICP) reactive ion etching (RIE) at high angles. The spectral characteristics of the devices were probed at room temperature using a tunable quantum cascade laser that was free space-coupled into the resonators. Light was extracted via an arsenic selenide (As₂Se₃) chalcogenide infrared fiber and directed to a cryogenically cooled mercury cadmium telluride (HgCdTe) detector. The quality factors were tested in multiple microresonators across a wide spectral range from 9 to 9.7 microns with similar performance. One example resonance (of many comparables) was found to reach 3648 at 9.601 µm. Fourier analysis of the many resonances of each device showed free spectral ranges slightly greater than 40 GHz, matching theoretical expectations for the microresonator diameter and the overlap of the whispering gallery mode with the diamond.

Quantum nanophotonics with group IV defects in diamond

Diamond photonics is an ever-growing field of research driven by the prospects of harnessing diamond and its colour centres as suitable hardware for solid-state quantum applications. The last two decades have seen the field shaped by the nitrogen-vacancy (NV) centre with both breakthrough fundamental physics demonstrations and practical realizations. Recently however, an entire suite of other diamond defects has emerged-group IV colour centres-namely the Si-, Ge-, Sn- and Pb-vacancies. In this perspective, we highlight the leading techniques for engineering and characterizing these diamond defects, discuss the current state-of-the-art group IV-based devices and provide an outlook of the future directions the field is taking towards the realisation of solid-state quantum photonics with diamond.

High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching

We demonstrate a novel method for fabricating single crystal diamond diffraction gratings based on crystallographic etching that yields high-quality diffraction gratings from commercially available <100> diamond plates. Both V-groove and rectangular gratings were fabricated and characterised using scanning electron microscopy and atomic force microscopy, revealing angles of 57° and 87° depending on the crystal orientation, with mean roughness below R_a = 5 nm on the sidewalls. The gratings were also optically characterised, showing good agreement with simulated results. The fabrication method demonstrated in this contribution shows the way for manufacturing high-quality diamond diffractive components that surpass existing devices both in quality and manufacturability.

Inverse-designed diamond photonics

Diamond hosts optically active color centers with great promise in quantum computation, networking, and sensing. Realization of such applications is contingent upon the integration of color centers into photonic circuits. However, current diamond quantum optics experiments are restricted to single devices and few quantum emitters because fabrication constraints limit device functionalities, thus precluding color center integrated photonic circuits. In this work, we utilize inverse design methods to overcome constraints of cutting-edge diamond nanofabrication methods and fabricate compact and robust diamond devices with unique specifications. Our design method leverages advanced optimization techniques to search the full parameter space for fabricable device designs. We experimentally demonstrate inverse-designed photonic free-space interfaces as well as their scalable integration with two vastly different devices: classical photonic crystal cavities and inverse-designed waveguide-splitters. The multi-device integration capability and performance of our inverse-designed diamond platform represents a critical advancement toward integrated diamond quantum optical circuits.

Current diamond quantum optics experiments are restricted to single devices and few quantum emitters due to fabrication constraints. Here, the authors utilize inverse design to overcome constraints of diamond nanofabrication methods and fabricate compact and robust diamond devices with unique specifications.

Precision micro-mechanical components in single crystal diamond by deep reactive ion etching

The outstanding material properties of single crystal diamond have been at the origin of the long-standing interest in its exploitation for engineering of high-performance micro- and nanosystems. In particular, the extreme mechanical hardness, the highest elastic modulus of any bulk material, low density, and the promise for low friction have spurred interest most notably for micro-mechanical and MEMS applications. While reactive ion etching of diamond has been reported previously, precision structuring of freestanding micro-mechanical components in single crystal diamond by deep reactive ion etching has hitherto remained elusive, related to limitations in the etch processes, such as the need of thick hard masks, micromasking effects, and limited etch rates. In this work, we report on an optimized reactive ion etching process of single crystal diamond overcoming several of these shortcomings at the same time, and present a robust and reliable method to produce fully released micro-mechanical components in single crystal diamond. Using an optimized Al/SiO2 hard mask and a high-intensity oxygen plasma etch process, we obtain etch rates exceeding 30 µm/h and hard mask selectivity better than 1:50. We demonstrate fully freestanding micro-mechanical components for mechanical watches made of pure single crystal diamond. The components with a thickness of 150 µm are defined by lithography and deep reactive ion etching, and exhibit sidewall angles of 82°-93° with surface roughness better than 200 nm rms, demonstrating the potential of this powerful technique for precision microstructuring of single crystal diamond.

Single-mode light guiding in diamond waveguides directly written by a focused proton beam

Ion-implanted waveguides were directly written in bulk single-crystal diamond by scanning a focused 2 MeV proton beam. By controlling the fluence and the lateral size of the proton beam, a bright and near-circular single-mode profile was observed. Propagation loss and effective refractive index of the guided mode were measured by the Fabry-Pérot technique, confirming single-mode guiding. Micro-Raman maps of the waveguides were used to visualize damage profiles and defect distributions induced by the proton beam. The demonstration of single-mode light guiding in our waveguides shows that direct proton beam writing is a promising tool in the rapid manufacture of integrated optical circuits in bulk diamond.

Purcell effect in active diamond nanoantennas

We suggest a novel class of active nanoantennas based on diamond nanoparticles with embedded nitrogen-vacancy centres coupled to Mie resonances of nanoparticles. We theoretically study the optical properties of such nanoantennas including the field enhancement and Purcell effect, and experimentally demonstrate the enhancement of the fluorescence rate of the emitters due to particle resonances, as compared to a nonresonant regime. Our results pave the way towards active dielectric nanophotonics for quantum light sources, bioimaging, and quantum information processing.

Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond

Sculpturing desired shapes in single crystal diamond is ever more crucial in the realization of complex devices for nanophotonics, quantum computing, and quantum optics. The crystallographic orientation dependent wet etch of single crystalline silicon in potassium hydroxide (KOH) allows a range of shapes to be formed and has significant impacts on microelectromechanical systems (MEMS), atomic force microscopy (AFM), and microfluidics. Here, a crystal direction dependent dry etching principle in an inductively coupled plasma reactive ion etcher is presented, which selectively reveals desired crystal planes in monocrystalline diamond by controlling the etching conditions. Using this principle, monolithic diamond nanopillars for magnetometry using nitrogen vacancy centers are fabricated. In these nanopillars, a half-tapering angle up to 21° is achieved, the highest angle reported in the literature, which leads to a high photon efficiency and high mechanical strength of the nanopillar. These results represent the first demonstration of a crystallographic orientation dependent reactive ion etching principle, which opens a new window for shaping specific nanostructures which is at the heart of nanotechnology. It is believed that this principle will prove to be valuable for the structuring and patterning of other single crystal materials as well.

Advances in diamond nanofabrication for ultrasensitive devices

This paper reviews some of the major recent advances in single-crystal diamond nanofabrication and its impact in nano- and micro-mechanical, nanophotonics and optomechanical components. These constituents of integrated devices incorporating specific dopants in the material provide the capacity to enhance the sensitivity in detecting mass and forces as well as magnetic field down to quantum mechanical limits and will lead pioneering innovations in ultrasensitive sensing and precision measurements in the realm of the medical sciences, quantum sciences and related technologies.

Efficient Single-Photon Coupling from a Nitrogen-Vacancy Center Embedded in a Diamond Nanowire Utilizing an Optical Nanofiber

Nitrogen-Vacancy (NV) centers in diamond are promising solid-state quantum emitters that can be utilized for photonic quantum applications. Various diamond nanophotonic devices have been fabricated for efficient extraction of single photons emitted from NV centers to a single guided mode. However, for constructing scalable quantum networks, further efficient coupling of single photons to a guided mode of a single-mode fiber (SMF) is indispensable and a difficult challenge. Here, we propose a novel efficient hybrid system between an optical nanofiber and a cylindrical-structured diamond nanowire. The maximum coupling efficiency as high as 75% for the sum of both fiber ends is obtained by numerical simulations. The proposed hybrid system will provide a simple and efficient interface between solid-state quantum emitters and a SMF suitable for constructing scalable quantum networks.

Demonstration of diamond microlens structures by a three-dimensional (3D) dual-mask method

Diamond is a promising platform for quantum information technologies (QITs) mainly due to the properties of color centers including spin read-out, magnetic field sensing, and entanglement between different nitrogen-vacancy (NV) centers. High photon collection efficiency is essential for a high fidelity optical single-shot readout of electronic spin in the color center. To avoid total internal reflection, sculpting solid immersion lenses in the diamond surface is an ideal natural choice. Three-dimensional (3D) microstructures can be made in a photoresist material by a special lithography method. These structures can be subsequently transferred into silicon, diamond or other semiconductors by plasma etching with appropriate selectivity. However, this method cannot be directly implemented into making large height diamond microlenses where the selectivity between diamond and the photoresist is very low. In this work, we propose and demonstrate a dual mask method to achieve an overall high selectivity between diamond and photoresist via the interlayer of single crystalline silicon. By tuning the process parameters of the two etching steps, diamond micro-lenses with large variable height are successfully demonstrated..

Generation of macroscopic Schrödinger cat state in diamond mechanical resonator

We propose a scheme to generate macroscopic Schrödinger cat state (SCS) in diamond mechanical resonator (DMR) via the dynamical strain-mediated coupling mechanism. In our model, the direct coupling between the nitrogen-vacancy (NV) center and lattice strain field enables coherent spin–phonon interactions in the quantum regime. Based on a cyclic Δ-type transition structure of the NV center constructed by combining the quantized mechanical strain field and a pair of external microwave fields, the populations of the different energy levels can be selectively transferred by controlling microwave fields, and the SCS can be created by adjusting the controllable parameters of the system. Furthermore, we demonstrate the nonclassicality of the mechanical SCS both in non-dissipative case and dissipative case. The experimental feasibility and challenge are justified using currently available technology.