1
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Hirschauer P, Paris B, Messaoudene S, Fournier M, Bourlon B, Hou Y, Ricoul F, Laplatine L. Integrated interferometers as a new platform for low cost gas chromatography detection. Talanta 2024; 281:126659. [PMID: 39260259 DOI: 10.1016/j.talanta.2024.126659] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/17/2024] [Revised: 07/19/2024] [Accepted: 07/31/2024] [Indexed: 09/13/2024]
Abstract
Gas chromatography is a reference method for gas analysis. As part of efforts to miniaturize gas chromatography systems, the miniaturization of detectors is essential. In this work, we report a new integrated photonic platform for gas chromatography analyte detection. The fabricated silicon die integrates Mach-Zehnder interferometers into low dead volume microfluidic channels, with coherent cost-effective detection scheme with a fixed 850 nm wavelength laser. A proof of concept is demonstrated with the separation and detection of three volatile organic compounds: heptane, octane, and toluene. Peaks' widths at half height range from 1 to 5 s. Peaks are very well resolved by our system, which acquires more than 100 points per second. From a heptane dilution range, we evaluate the limit of detection of our system to be the headspace of a 0.26 % heptane concentration solution. To our knowledge, these are the first integrated Mach-Zehnder interferometers reported for gas chromatography detection. This work could open new strategies for fast low cost and low limit of detection specific gas chromatography silicon micro-detectors.
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Affiliation(s)
| | - Benoît Paris
- Univ. Grenoble Alpes, CEA, LETI, Grenoble, 38054, France
| | | | | | | | - Yanxia Hou
- Univ. Grenoble Alpes, CEA, LETI, Grenoble, 38054, France
| | - Florence Ricoul
- Univ. Grenoble Alpes, CEA, CNRS, Grenoble INP, IRIG, SyMMES, 38000, Grenoble, France
| | - Loïc Laplatine
- Univ. Grenoble Alpes, CEA, LETI, Grenoble, 38054, France.
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2
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McGovern FR, Hernik A, Grogan C, Amarandei G, Naydenova I. The Development of Optomechanical Sensors-Integrating Diffractive Optical Structures for Enhanced Sensitivity. SENSORS (BASEL, SWITZERLAND) 2023; 23:5711. [PMID: 37420875 DOI: 10.3390/s23125711] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/15/2023] [Revised: 06/15/2023] [Accepted: 06/16/2023] [Indexed: 07/09/2023]
Abstract
The term optomechanical sensors describes devices based on coupling the optical and mechanical sensing principles. The presence of a target analyte leads to a mechanical change, which, in turn, determines an alteration in the light propagation. Having higher sensitivity in comparison with the individual technologies upon which they are based, the optomechanical devices are used in biosensing, humidity, temperature, and gases detection. This perspective focuses on a particular class, namely on devices based on diffractive optical structures (DOS). Many configurations have been developed, including cantilever- and MEMS-type devices, fiber Bragg grating sensors, and cavity optomechanical sensing devices. These state-of-the-art sensors operate on the principle of a mechanical transducer coupled with a diffractive element resulting in a variation in the intensity or wavelength of the diffracted light in the presence of the target analyte. Therefore, as DOS can further enhance the sensitivity and selectivity, we present the individual mechanical and optical transducing methods and demonstrate how the DOS introduction can lead to an enhanced sensitivity and selectivity. Their (low-) cost manufacturing and their integration in new sensing platforms with great adaptability across many sensing areas are discussed, being foreseen that their implementation on wider application areas will further increase.
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Affiliation(s)
- Faolan Radford McGovern
- School of Physics, Clinical & Optometric Sciences, Technological University Dublin, D07 ADY7 Dublin, Ireland
- Centre for Industrial & Engineering Optics, Technological University Dublin, D07 ADY7 Dublin, Ireland
| | - Aleksandra Hernik
- School of Physics, Clinical & Optometric Sciences, Technological University Dublin, D07 ADY7 Dublin, Ireland
- Centre for Industrial & Engineering Optics, Technological University Dublin, D07 ADY7 Dublin, Ireland
| | - Catherine Grogan
- School of Physics, Clinical & Optometric Sciences, Technological University Dublin, D07 ADY7 Dublin, Ireland
- The Group of Applied Physics, Technological University Dublin, D07 ADY7 Dublin, Ireland
| | - George Amarandei
- School of Physics, Clinical & Optometric Sciences, Technological University Dublin, D07 ADY7 Dublin, Ireland
- The Group of Applied Physics, Technological University Dublin, D07 ADY7 Dublin, Ireland
| | - Izabela Naydenova
- School of Physics, Clinical & Optometric Sciences, Technological University Dublin, D07 ADY7 Dublin, Ireland
- Centre for Industrial & Engineering Optics, Technological University Dublin, D07 ADY7 Dublin, Ireland
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3
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Lamberti FR, Palanchoke U, Geurts TPJ, Gely M, Regord S, Banniard L, Sansa M, Favero I, Jourdan G, Hentz S. Real-Time Sensing with Multiplexed Optomechanical Resonators. NANO LETTERS 2022; 22:1866-1873. [PMID: 35170318 DOI: 10.1021/acs.nanolett.1c04017] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Nanoelectromechanical resonators have been successfully used for a variety of sensing applications. Their extreme resolution comes from their small size, which strongly limits their capture area. This leads to a long analysis time and the requirement for large sample quantity. Moreover, the efficiency of the electrical transductions commonly used for silicon resonators degrades with increasing frequency, limiting the achievable mechanical bandwidth and throughput. Multiplexing a large number of high-frequency resonators appears to be a solution, but this is complex with electrical transductions. We propose here a route to solve these issues, with a multiplexing scheme for very high-frequency optomechanical resonators. We demonstrate the simultaneous frequency measurement of three silicon microdisks fabricated with a 200 mm wafer large-scale process. The readout architecture is simple and does not degrade the sensing resolutions. This paves the way toward the realization of sensors for multiparametric analysis with an extremely low limit of detection and response time.
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Affiliation(s)
| | | | | | - Marc Gely
- Université Grenoble Alpes, CEA, LETI, 38000 Grenoble, France
| | | | - Louise Banniard
- Université Grenoble Alpes, CEA, LETI, 38000 Grenoble, France
| | - Marc Sansa
- Université Grenoble Alpes, CEA, LETI, 38000 Grenoble, France
| | - Ivan Favero
- Matériaux et Phénomènes Quantiques, CNRS UMR 7162, Université de Paris, 75013 Paris, France
| | | | - Sébastien Hentz
- Université Grenoble Alpes, CEA, LETI, 38000 Grenoble, France
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4
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Sbarra S, Waquier L, Suffit S, Lemaître A, Favero I. Multimode Optomechanical Weighting of a Single Nanoparticle. NANO LETTERS 2022; 22:710-715. [PMID: 35020404 DOI: 10.1021/acs.nanolett.1c03890] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
We demonstrate multimode optomechanical sensing of individual nanoparticles with a radius between 75 and 150 nm. A semiconductor optomechanical disk resonator is optically driven and detected under ambient conditions, as nebulized nanoparticles land on it. Multiple mechanical and optical resonant signals of the disk are tracked simultaneously, providing access to several pieces of physical information about the landing analyte in real time. Thanks to a fast camera registering the time and position of landing, these signals can be employed to weight each nanoparticle with precision. Sources of error and deviation are discussed and modeled, indicating a path to evaluate the elasticity of the nanoparticles on top of their mere mass. The device is optimized for the future investigation of biological particles in the high megadalton range, such as large viruses.
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Affiliation(s)
- Samantha Sbarra
- Matériaux et Phénomènes Quantiques, Université de Paris, CNRS, UMR 7162, 10 rue Alice Domon et Léonie Duquet, Paris 75013, France
| | - Louis Waquier
- Matériaux et Phénomènes Quantiques, Université de Paris, CNRS, UMR 7162, 10 rue Alice Domon et Léonie Duquet, Paris 75013, France
| | - Stephan Suffit
- Matériaux et Phénomènes Quantiques, Université de Paris, CNRS, UMR 7162, 10 rue Alice Domon et Léonie Duquet, Paris 75013, France
| | - Aristide Lemaître
- Centre de Nanosciences et de Nanotechnologies, CNRS, UMR 9001, Université Paris-Saclay, Palaiseau 91120, France
| | - Ivan Favero
- Matériaux et Phénomènes Quantiques, Université de Paris, CNRS, UMR 7162, 10 rue Alice Domon et Léonie Duquet, Paris 75013, France
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5
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Xu K, Li J, Han Q, Zhang D, Zhang L, Zhang Z, Lu X. Ultrasensitive detection of vitamin E by signal conversion combined with core-satellite structure-based plasmon coupling effect. Analyst 2022; 147:398-403. [DOI: 10.1039/d1an02289j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
A smart signal conversion and amplification strategy based on silver–gold–silica core-satellite structure nanoparticles to sensitively SERS detect vitamin E.
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Affiliation(s)
- Keying Xu
- Tianjin Key Laboratory of Molecular Optoelectronic, Department of Chemistry, School of Science, Tianjin University, Tianjin, 300072, P. R. China
| | - Jing Li
- Tianjin Key Laboratory of Molecular Optoelectronic, Department of Chemistry, School of Science, Tianjin University, Tianjin, 300072, P. R. China
| | - Qingyi Han
- Tianjin Key Laboratory of Molecular Optoelectronic, Department of Chemistry, School of Science, Tianjin University, Tianjin, 300072, P. R. China
| | - Dingding Zhang
- Tianjin Key Laboratory of Molecular Optoelectronic, Department of Chemistry, School of Science, Tianjin University, Tianjin, 300072, P. R. China
| | - Libing Zhang
- Tianjin Key Laboratory of Molecular Optoelectronic, Department of Chemistry, School of Science, Tianjin University, Tianjin, 300072, P. R. China
| | - Zhen Zhang
- Tianjin Key Laboratory of Molecular Optoelectronic, Department of Chemistry, School of Science, Tianjin University, Tianjin, 300072, P. R. China
| | - Xiaoquan Lu
- Key Laboratory of Bioelectrochemistry & Environmental Analysis of Gansu Province, College of Chemistry & Chemical Engineering, Northwest Normal University, Lanzhou, 730070, P. R. China
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6
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Biswas P, Zhang C, Chen Y, Liu Z, Vaziri S, Zhou W, Sun Y. A Portable Micro-Gas Chromatography with Integrated Photonic Crystal Slab Sensors on Chip. BIOSENSORS-BASEL 2021; 11:bios11090326. [PMID: 34562916 PMCID: PMC8468690 DOI: 10.3390/bios11090326] [Citation(s) in RCA: 9] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/16/2021] [Revised: 09/05/2021] [Accepted: 09/07/2021] [Indexed: 11/24/2022]
Abstract
The miniaturization of gas chromatography (GC) systems has made it possible to utilize the analytical technique in various on-site applications to rapidly analyze complex gas samples. Various types of miniaturized sensors have been developed for micro-gas chromatography (µGC). However, the integration of an appropriate detector in µGC systems still faces a significant challenge. We present a solution to the problem through integration of µGC with photonic crystal slab (PCS) sensors using transfer printing technology. This integration offers an opportunity to utilize the advantages of optical sensors, such as high sensitivity and rapid response time, and at the same time, compensate for the lack of detection specificity from which label-free optical sensors suffer. We transfer printed a 2D defect free PCS on a borofloat glass, bonded it to a silicon microfluidic gas cell or directly to a microfabricated GC column, and then coated it with a gas responsive polymer. Realtime spectral shift in Fano resonance of the PCS sensor was used to quantitatively detect analytes over a mass range of three orders. The integrated µGC–PCS system was used to demonstrate separation and detection of a complex mixture of 10 chemicals. Fast separation and detection (4 min) and a low detection limit (ng) was demonstrated.
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7
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Hoch D, Haas KJ, Moller L, Sommer T, Soubelet P, Finley JJ, Poot M. Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices. MICROMACHINES 2021; 12:880. [PMID: 34442502 PMCID: PMC8398287 DOI: 10.3390/mi12080880] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/21/2021] [Revised: 07/21/2021] [Accepted: 07/22/2021] [Indexed: 11/16/2022]
Abstract
Visualizing eigenmodes is crucial in understanding the behavior of state-of-the-art micromechanical devices. We demonstrate a method to optically map multiple modes of mechanical structures simultaneously. The fast and robust method, based on a modified phase-lock loop, is demonstrated on a silicon nitride membrane and shown to outperform three alternative approaches. Line traces and two-dimensional maps of different modes are acquired. The high quality data enables us to determine the weights of individual contributions in superpositions of degenerate modes.
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Affiliation(s)
- David Hoch
- Department of Physics, Technical University of Munich, 85748 Garching, Germany; (D.H.); (K.-J.H.); (L.M.); (T.S.); (P.S.); (J.J.F.)
- Munich Center for Quantum Science and Technology (MCQST), 80799 Munich, Germany
- Institute for Advanced Study, Technical University of Munich, 85748 Garching, Germany
| | - Kevin-Jeremy Haas
- Department of Physics, Technical University of Munich, 85748 Garching, Germany; (D.H.); (K.-J.H.); (L.M.); (T.S.); (P.S.); (J.J.F.)
| | - Leopold Moller
- Department of Physics, Technical University of Munich, 85748 Garching, Germany; (D.H.); (K.-J.H.); (L.M.); (T.S.); (P.S.); (J.J.F.)
| | - Timo Sommer
- Department of Physics, Technical University of Munich, 85748 Garching, Germany; (D.H.); (K.-J.H.); (L.M.); (T.S.); (P.S.); (J.J.F.)
- Munich Center for Quantum Science and Technology (MCQST), 80799 Munich, Germany
| | - Pedro Soubelet
- Department of Physics, Technical University of Munich, 85748 Garching, Germany; (D.H.); (K.-J.H.); (L.M.); (T.S.); (P.S.); (J.J.F.)
- Walter Schottky Institute, Technical University of Munich, 85748 Garching, Germany
| | - Jonathan J. Finley
- Department of Physics, Technical University of Munich, 85748 Garching, Germany; (D.H.); (K.-J.H.); (L.M.); (T.S.); (P.S.); (J.J.F.)
- Munich Center for Quantum Science and Technology (MCQST), 80799 Munich, Germany
- Walter Schottky Institute, Technical University of Munich, 85748 Garching, Germany
| | - Menno Poot
- Department of Physics, Technical University of Munich, 85748 Garching, Germany; (D.H.); (K.-J.H.); (L.M.); (T.S.); (P.S.); (J.J.F.)
- Munich Center for Quantum Science and Technology (MCQST), 80799 Munich, Germany
- Institute for Advanced Study, Technical University of Munich, 85748 Garching, Germany
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Abstract
Abstract
Overuse of polymer products has led to severe environmental problems, which are threatening survival of creatures on earth. It is urgent to tackle enormous polymer wastes with proper cycling methods. Pyrolysis of polymers into high-value chemicals and fuels is displaying great potential to address the white pollution issue. In this study, we focus on chemical recycling of polystyrene, an important polymer in our everyday life, into valuable chemicals through simple pyrolysis strategy under nitrogen protection. It is found that yield of liquid product from polystyrene pyrolysis achieves as high as 76.24%, and there exists single component in the liquid product, which has been identified as styrene through hydrogen nuclear magnetic resonance spectra. Moreover, we propose monomer dissociation mechanism to explain the pyrolysis process of polystyrene based on the structure of polystyrene and experimental results.
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9
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Cao J, Chen Q, Wang X, Zhang Q, Yu HD, Huang X, Huang W. Recent Development of Gas Sensing Platforms Based on 2D Atomic Crystals. RESEARCH (WASHINGTON, D.C.) 2021; 2021:9863038. [PMID: 33982003 PMCID: PMC8086560 DOI: 10.34133/2021/9863038] [Citation(s) in RCA: 14] [Impact Index Per Article: 4.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/13/2020] [Accepted: 03/22/2021] [Indexed: 11/24/2022]
Abstract
Sensors, capable of detecting trace amounts of gas molecules or volatile organic compounds (VOCs), are in great demand for environmental monitoring, food safety, health diagnostics, and national defense. In the era of the Internet of Things (IoT) and big data, the requirements on gas sensors, in addition to sensitivity and selectivity, have been increasingly placed on sensor simplicity, room temperature operation, ease for integration, and flexibility. The key to meet these requirements is the development of high-performance gas sensing materials. Two-dimensional (2D) atomic crystals, emerged after graphene, have demonstrated a number of attractive properties that are beneficial to gas sensing, such as the versatile and tunable electronic/optoelectronic properties of metal chalcogenides (MCs), the rich surface chemistry and good conductivity of MXenes, and the anisotropic structural and electronic properties of black phosphorus (BP). While most gas sensors based on 2D atomic crystals have been incorporated in the setup of a chemiresistor, field-effect transistor (FET), quartz crystal microbalance (QCM), or optical fiber, their working principles that involve gas adsorption, charge transfer, surface reaction, mass loading, and/or change of the refractive index vary from material to material. Understanding the gas-solid interaction and the subsequent signal transduction pathways is essential not only for improving the performance of existing sensing materials but also for searching new and advanced ones. In this review, we aim to provide an overview of the recent development of gas sensors based on various 2D atomic crystals from both the experimental and theoretical investigations. We will particularly focus on the sensing mechanisms and working principles of the related sensors, as well as approaches to enhance their sensing performances. Finally, we summarize the whole article and provide future perspectives for the development of gas sensors with 2D materials.
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Affiliation(s)
- Jiacheng Cao
- Frontiers Science Center for Flexible Electronics, Xi'an Institute of Flexible Electronics (IFE), and Xi'an Institute of Biomedical Materials & Engineering, Northwestern Polytechnical University, 127 West Youyi Road, Xi'an 710072, China
| | - Qian Chen
- Frontiers Science Center for Flexible Electronics, Xi'an Institute of Flexible Electronics (IFE), and Xi'an Institute of Biomedical Materials & Engineering, Northwestern Polytechnical University, 127 West Youyi Road, Xi'an 710072, China
| | - Xiaoshan Wang
- Frontiers Science Center for Flexible Electronics, Xi'an Institute of Flexible Electronics (IFE), and Xi'an Institute of Biomedical Materials & Engineering, Northwestern Polytechnical University, 127 West Youyi Road, Xi'an 710072, China
| | - Qiang Zhang
- Frontiers Science Center for Flexible Electronics, Xi'an Institute of Flexible Electronics (IFE), and Xi'an Institute of Biomedical Materials & Engineering, Northwestern Polytechnical University, 127 West Youyi Road, Xi'an 710072, China
| | - Hai-Dong Yu
- Frontiers Science Center for Flexible Electronics, Xi'an Institute of Flexible Electronics (IFE), and Xi'an Institute of Biomedical Materials & Engineering, Northwestern Polytechnical University, 127 West Youyi Road, Xi'an 710072, China
- Key Laboratory of Flexible Electronics (KLOFE) & Institute of Advanced Materials (IAM), Nanjing Tech University (NanjingTech), 30 South Puzhu Road, Nanjing 211800, China
| | - Xiao Huang
- Frontiers Science Center for Flexible Electronics, Xi'an Institute of Flexible Electronics (IFE), and Xi'an Institute of Biomedical Materials & Engineering, Northwestern Polytechnical University, 127 West Youyi Road, Xi'an 710072, China
- Key Laboratory of Flexible Electronics (KLOFE) & Institute of Advanced Materials (IAM), Nanjing Tech University (NanjingTech), 30 South Puzhu Road, Nanjing 211800, China
| | - Wei Huang
- Frontiers Science Center for Flexible Electronics, Xi'an Institute of Flexible Electronics (IFE), and Xi'an Institute of Biomedical Materials & Engineering, Northwestern Polytechnical University, 127 West Youyi Road, Xi'an 710072, China
- Key Laboratory of Flexible Electronics (KLOFE) & Institute of Advanced Materials (IAM), Nanjing Tech University (NanjingTech), 30 South Puzhu Road, Nanjing 211800, China
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10
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Chemical Sensors for Farm-to-Table Monitoring of Fruit Quality. SENSORS 2021; 21:s21051634. [PMID: 33652654 PMCID: PMC7956188 DOI: 10.3390/s21051634] [Citation(s) in RCA: 6] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/03/2021] [Revised: 02/20/2021] [Accepted: 02/23/2021] [Indexed: 02/03/2023]
Abstract
Farm-to-table operations produce, transport, and deliver produce to consumers in very different ways than conventional, corporate-scale agriculture operations. As a result, the time it takes to get a freshly picked fruit to the consumer is relatively short and the expectations of the consumer for freshness and quality are high. Since many of these operations involve small farms and small businesses, resources to deploy sensors and instruments for monitoring quality are scarce compared to larger operations. Within stringent power, cost, and size constraints, this article analyzes chemical sensor technologies suitable for monitoring fruit quality from the point of harvest to consumption in farm-to-table operations. Approaches to measuring sweetness (sugar content), acidity (pH), and ethylene gas are emphasized. Not surprisingly, many instruments developed for laboratory use or larger-scale operations are not suitable for farm-to-table operations. However, there are many opportunities still available to adapt pH, sugar, and ethylene sensing to the unique needs of localized farm-to-table operations that can help these operations survive and expand well into the future.
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11
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Westwood-Bachman JN, Lee TS, Hiebert WK. Efficient actuation design for optomechanical sensors. OPTICS EXPRESS 2020; 28:32349-32362. [PMID: 33114923 DOI: 10.1364/oe.403602] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/27/2020] [Accepted: 09/15/2020] [Indexed: 06/11/2023]
Abstract
For any nanomechanical device intended for sensing applications, actuation is an important consideration. Many different actuation mechanisms have been used, including self-oscillation, piezoelectric shakers, capacitive excitation, and optically pumping via the optical gradient force. Despite the relatively frequent use of optical pumping, the limits of optical actuation with a pump laser have not been fully explored. We provide a practical framework for designing optical cavities and optomechanical systems to maximize the efficiency of the optical pumping technique. The effects of coherent backscattering on detection and actuation are included. We verify our results experimentally and show good agreement between the model and experiment. Our model for efficient actuation will be a useful resource for the future design of optomechanical cavities for sensor and other high-amplitude applications.
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12
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Sansa M, Defoort M, Brenac A, Hermouet M, Banniard L, Fafin A, Gely M, Masselon C, Favero I, Jourdan G, Hentz S. Optomechanical mass spectrometry. Nat Commun 2020; 11:3781. [PMID: 32728047 PMCID: PMC7391691 DOI: 10.1038/s41467-020-17592-9] [Citation(s) in RCA: 20] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/24/2020] [Accepted: 07/01/2020] [Indexed: 12/20/2022] Open
Abstract
Nanomechanical mass spectrometry has proven to be well suited for the analysis of high mass species such as viruses. Still, the use of one-dimensional devices such as vibrating beams forces a trade-off between analysis time and mass resolution. Complex readout schemes are also required to simultaneously monitor multiple resonance modes, which degrades resolution. These issues restrict nanomechanical MS to specific species. We demonstrate here single-particle mass spectrometry with nano-optomechanical resonators fabricated with a Very Large Scale Integration process. The unique motion sensitivity of optomechanics allows designs that are impervious to particle position, stiffness or shape, opening the way to the analysis of large aspect ratio biological objects of great significance such as viruses with a tail or fibrils. Compared to top-down beam resonators with electrical read-out and state-of-the-art mass resolution, we show a three-fold improvement in capture area with no resolution degradation, despite the use of a single resonance mode. The use of one dimensional devices in nanomechanical mass spectrometry leads to a trade-off between analysis time and resolution. Here, the authors report single-particle mass spectrometry using integrated optomechanical resonators, impervious to particle position, stiffness or shape.
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Affiliation(s)
- Marc Sansa
- Université Grenoble Alpes, CEA, LETI, 38000, Grenoble, France
| | - Martial Defoort
- Université Grenoble Alpes, CEA, LETI, 38000, Grenoble, France.,Université Grenoble Alpes, CNRS, Grenoble INP, TIMA, 38000, Grenoble, France
| | - Ariel Brenac
- Université Grenoble Alpes, CEA, CNRS, Grenoble INP, IRIG-Spintec, 38000, Grenoble, France
| | - Maxime Hermouet
- Université Grenoble Alpes, CEA, LETI, 38000, Grenoble, France
| | - Louise Banniard
- Université Grenoble Alpes, CEA, LETI, 38000, Grenoble, France
| | - Alexandre Fafin
- Université Grenoble Alpes, CEA, LETI, 38000, Grenoble, France
| | - Marc Gely
- Université Grenoble Alpes, CEA, LETI, 38000, Grenoble, France
| | - Christophe Masselon
- CEA, IRIG, Biologie à Grande Echelle, F-38054, Grenoble, France.,Inserm, Unité 1038, F-38054, Grenoble, France
| | - Ivan Favero
- Matériaux et Phénomènes Quantiques, CNRS UMR 7162, Université de Paris, 75013, Paris, France
| | | | - Sébastien Hentz
- Université Grenoble Alpes, CEA, LETI, 38000, Grenoble, France.
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13
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Westwood-Bachman JN, Maksymowych MP, Van V, Hiebert WK. Transduction of large optomechanical amplitudes with racetrack-loaded Mach-Zehnder interferometers. OPTICS EXPRESS 2020; 28:21835-21844. [PMID: 32752455 DOI: 10.1364/oe.396971] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/07/2020] [Accepted: 06/26/2020] [Indexed: 06/11/2023]
Abstract
Chip-integrated photonic devices have stimulated development in areas ranging from telecommunications to optomechanics. Racetrack resonators have gained popularity for optomechanical transduction due to their high sensitivity and cavity finesse. However, they lack sufficient dynamic range to read out large amplitude mechanical resonators, which are preferred for sensing applications. We present a robust photonic circuit based on a Mach-Zehnder interferometer (MZI) combined with a racetrack resonator that increases linear range without compromising high transduction sensitivity. Optical and mechanical properties of combined MZI-racetrack devices are compared to lone racetracks with the same physical dimensions in the undercoupled, overcoupled and critical coupled regimes. We demonstrate an overall improvement in dynamic range, transduction responsivity, and mass sensitivity of up to 4x, 3x and 2.8x, respectively. Our highly phase sensitive MZI circuit also enables applications such as on-chip optical homodyning.
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14
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Venkatasubramanian A, Sauer VTK, Westwood-Bachman JN, Cui K, Xia M, Wishart DS, Hiebert WK. Porous Nanophotonic Optomechanical Beams for Enhanced Mass Adsorption. ACS Sens 2019; 4:1197-1202. [PMID: 30942578 DOI: 10.1021/acssensors.8b01366] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/28/2022]
Abstract
We have developed a porous silicon nanocantilever for a nano-optomechanical system (NOMS) with a universal sensing surface for enhanced sensitivity. Using electron beam lithography, we selectively applied a V2O5/HF stain etch to the mechanical elements while protecting the silicon-on-insulator photonic ring resonators. This simple, rapid, and electrodeless approach generates tunable device porosity simultaneously with the mechanical release step. By controlling the porous etchant concentration and etch time, the porous etch depth, resonant frequency, and the adsorption surface area could be precisely manipulated. Using this control, cantilever sensors ranging from nonporous to fully porous were fabricated and tested as gas-phase mass sensors of volatile organic compounds coming from a gas chromatography stream. The fully porous cantilever produced a dramatic 10-fold increase in sensing signal and a 6-fold improvement in limit of detection (LOD) compared to an otherwise identical nonporous cantilever. This signal improvement could be separated into mass responsivity increase and adsorption increase components. Allan deviation measurements indicate that a further 4-fold improvement in LOD could be expected upon speeding up characteristic peak response time from 1 s to 50 ms. These results show promise for performance enhancement in nanomechanical sensors for applications in gas sensing, gas chromatography, and mass spectrometry.
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Affiliation(s)
- Anandram Venkatasubramanian
- Nanotechnology Research Centre, National Research Council of Canada, Edmonton, Alberta T6G 2M9, Canada
- Department of Physics, University of Alberta, Edmonton, Alberta T6G 2E1, Canada
- Department of Biological Sciences, University of Alberta, Edmonton, Alberta T6G 2R3, Canada
| | - Vincent T. K. Sauer
- Nanotechnology Research Centre, National Research Council of Canada, Edmonton, Alberta T6G 2M9, Canada
- Department of Physics, University of Alberta, Edmonton, Alberta T6G 2E1, Canada
- Department of Biological Sciences, University of Alberta, Edmonton, Alberta T6G 2R3, Canada
| | - Jocelyn N. Westwood-Bachman
- Nanotechnology Research Centre, National Research Council of Canada, Edmonton, Alberta T6G 2M9, Canada
- Department of Physics, University of Alberta, Edmonton, Alberta T6G 2E1, Canada
| | - Kai Cui
- Nanotechnology Research Centre, National Research Council of Canada, Edmonton, Alberta T6G 2M9, Canada
| | - Mike Xia
- Nanotechnology Research Centre, National Research Council of Canada, Edmonton, Alberta T6G 2M9, Canada
| | - David S. Wishart
- Nanotechnology Research Centre, National Research Council of Canada, Edmonton, Alberta T6G 2M9, Canada
- Department of Biological Sciences, University of Alberta, Edmonton, Alberta T6G 2R3, Canada
- Department of Computing Science, University of Alberta, Edmonton, Alberta T6G 2E8, Canada
| | - Wayne K. Hiebert
- Nanotechnology Research Centre, National Research Council of Canada, Edmonton, Alberta T6G 2M9, Canada
- Department of Physics, University of Alberta, Edmonton, Alberta T6G 2E1, Canada
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Amplitude-modulated acoustic waves by nonlinear optical signals in bimetallic Au-Pt nanoparticles and ethanol based nanofluids. J Mol Liq 2018. [DOI: 10.1016/j.molliq.2018.05.019] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/07/2023]
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Roy SK, Sauer VTK, Westwood-Bachman JN, Venkatasubramanian A, Hiebert WK. Improving mechanical sensor performance through larger damping. Science 2018; 360:360/6394/eaar5220. [DOI: 10.1126/science.aar5220] [Citation(s) in RCA: 43] [Impact Index Per Article: 7.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/18/2017] [Accepted: 04/23/2018] [Indexed: 01/03/2023]
Abstract
Mechanical resonances are used in a wide variety of devices, from smartphone accelerometers to computer clocks and from wireless filters to atomic force microscopes. Frequency stability, a critical performance metric, is generally assumed to be tantamount to resonance quality factor (the inverse of the linewidth and of the damping). We show that the frequency stability of resonant nanomechanical sensors can be improved by lowering the quality factor. At high bandwidths, quality-factor reduction is completely mitigated by increases in signal-to-noise ratio. At low bandwidths, notably, increased damping leads to better stability and sensor resolution, with improvement proportional to damping. We confirm the findings by demonstrating temperature resolution of 60 microkelvin at 300-hertz bandwidth. These results open the door to high-performance ultrasensitive resonators in gaseous or liquid environments, single-cell nanocalorimetry, nanoscale gas chromatography, atmospheric-pressure nanoscale mass spectrometry, and new approaches in crystal oscillator stability.
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