1
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Cañas J, Rochat N, Grenier A, Jannaud A, Saghi Z, Rouviere JL, Bellet-Amalric E, Harikumar A, Bougerol C, Rigutti L, Monroy E. Effect of Extended Defects on AlGaN Quantum Dots for Electron-Pumped Ultraviolet Emitters. ACS NANO 2024; 18:11886-11897. [PMID: 38651233 DOI: 10.1021/acsnano.4c01376] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/25/2024]
Abstract
We study the origin of bimodal emission in AlGaN/AlN QD superlattices displaying a high internal quantum efficiency (around 50%) in the 230-300 nm spectral range. The secondary emission at longer wavelengths is linked to the presence of cone-like domains with deformed QD layers, which originate at the first AlN buffer/superlattice interface and propagate vertically. The cones originate at a 30°-faceted shallow pit in the AlN, which appears to be associated with a threading dislocation that produces strong shear strain. The cone-like structures present Ga enrichment at the boundaring facets and larger QDs within the conic domain. The bimodality of the luminescence is attributed to the differing dot size and composition within the cones and at the faceted boundaries, which is confirmed by the correlation of microscopy results and Schrödinger-Poisson calculations.
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Affiliation(s)
- Jesus Cañas
- Univ. Grenoble-Alpes, CEA, Grenoble INP, IRIG, PHELIQS, Grenoble 38000, France
| | - Nevine Rochat
- Univ. Grenoble Alpes, CEA, LETI, Grenoble 38000, France
| | | | | | - Zineb Saghi
- Univ. Grenoble Alpes, CEA, LETI, Grenoble 38000, France
| | | | | | - Anjali Harikumar
- Univ. Grenoble-Alpes, CEA, Grenoble INP, IRIG, PHELIQS, Grenoble 38000, France
| | - Catherine Bougerol
- Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Neel, Grenoble 38000, France
| | - Lorenzo Rigutti
- Univ. Rouen Normandie, INSA Rouen Normandie, CNRS, Normandie Univ, GPM UMR 6634, Rouen F-76000, France
| | - Eva Monroy
- Univ. Grenoble-Alpes, CEA, Grenoble INP, IRIG, PHELIQS, Grenoble 38000, France
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2
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Smalc-Koziorowska J, Moneta J, Muzioł G, Chromiński W, Kernke R, Albrecht M, Schulz T, Belabbas I. The dissociation of (a+c) misfit dislocations at the InGaN/GaN interface. J Microsc 2024; 293:146-152. [PMID: 37846455 DOI: 10.1111/jmi.13234] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/09/2023] [Revised: 09/29/2023] [Accepted: 10/03/2023] [Indexed: 10/18/2023]
Abstract
In hexagonal materials, (a+c) dislocations are typically observed to dissociate into partial dislocations. Edge (a+c) dislocations are introduced into (0001) nitride semiconductor layers by the process of plastic relaxation. As there is an increasing interest in obtaining relaxed InGaN buffer layers for the deposition of high In content structures, the study of the dissociation mechanism of misfit (a+c) dislocations laying at the InGaN/GaN interface is then crucial for understanding their nucleation and glide mechanisms. In the case of the presented plastically relaxed InGaN layers deposited on GaN substrates, we observe a trigonal network of (a+c) dislocations extending at the interface with a rotation of 3° from <11 ¯ $\bar 1$ 00> directions. High-resolution microscopy studies show that these dislocations are dissociated into two Frank-Shockley 1/6<22 ¯ $\bar 2$ 03> partial dislocations with the I1 BSF spreading between them. Atomistic simulations of a dissociated edge (a+c) dislocation revealed a 3/5-atom ring structure for the cores of both partial dislocations. The observed separation between two partial dislocations must result from the climb of at least one of the dislocations during the dissociation process, possibly induced by the mismatch stress in the InGaN layer.
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Affiliation(s)
- J Smalc-Koziorowska
- Institute of High Pressure Physics, Polish Academy of Sciences, Warsaw, Poland
| | - J Moneta
- Institute of High Pressure Physics, Polish Academy of Sciences, Warsaw, Poland
| | - G Muzioł
- Institute of High Pressure Physics, Polish Academy of Sciences, Warsaw, Poland
| | - W Chromiński
- Faculty of Materials Science and Engineering, Warsaw University of Technology, Warsaw, Poland
| | - R Kernke
- Lebniz Institute for Crystal Growth, Berlin, Germany
| | - M Albrecht
- Lebniz Institute for Crystal Growth, Berlin, Germany
| | - T Schulz
- Lebniz Institute for Crystal Growth, Berlin, Germany
| | - I Belabbas
- Equipe de Cristallographie et de Simulation des Matériaux, Laboratoire de Physico-Chimie des Matériaux et Catalyse, Faculté des Sciences Exactes, Université de Bejaia, Bejaia, Algeria
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3
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Yamaguchi Y, Kanitani Y, Kudo Y, Uzuhashi J, Ohkubo T, Hono K, Tomiya S. Atomic Diffusion of Indium through Threading Dislocations in InGaN Quantum Wells. NANO LETTERS 2022; 22:6930-6935. [PMID: 36048741 PMCID: PMC9480092 DOI: 10.1021/acs.nanolett.2c01479] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/12/2022] [Revised: 08/01/2022] [Indexed: 06/15/2023]
Abstract
The compositional and structural investigations of threading dislocations (TDs) in InGaN/GaN multiple quantum wells were carried out using correlative transmission electron microscopy (TEM) and atom probe tomography (APT). The correlative TEM/APT analysis on the same TD reveals that the indium atoms are diffused along the TD and its concentration decreases with distance from the InGaN layer. On the basis of the results, we directly observed that the indium atoms originating from the InGaN layer diffuse toward the epitaxial GaN surface through the TD, and it is considered to have occurred via the pipe diffusion mechanism induced by strain energy relaxation.
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Affiliation(s)
- Yudai Yamaguchi
- R&D
Center, Sony Group Corporation, 4-14-1 Asahi-cho, Atsugi, Kanagawa 243-0014, Japan
| | - Yuya Kanitani
- R&D
Center, Sony Group Corporation, 4-14-1 Asahi-cho, Atsugi, Kanagawa 243-0014, Japan
| | - Yoshihiro Kudo
- R&D
Center, Sony Group Corporation, 4-14-1 Asahi-cho, Atsugi, Kanagawa 243-0014, Japan
| | - Jun Uzuhashi
- National
Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan
| | - Tadakatsu Ohkubo
- National
Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan
| | - Kazuhiro Hono
- National
Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan
| | - Shigetaka Tomiya
- R&D
Center, Sony Group Corporation, 4-14-1 Asahi-cho, Atsugi, Kanagawa 243-0014, Japan
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4
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Lu S, Luo Z, Li J, Lin W, Chen H, Liu D, Cai D, Huang K, Gao N, Zhou Y, Li S, Kang J. Role of Strain-Induced Microscale Compositional Pulling on Optical Properties of High Al Content AlGaN Quantum Wells for Deep-Ultraviolet LED. NANOSCALE RESEARCH LETTERS 2022; 17:13. [PMID: 35032237 PMCID: PMC8760570 DOI: 10.1186/s11671-022-03652-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 04/10/2021] [Accepted: 01/03/2022] [Indexed: 06/14/2023]
Abstract
A systematic study was carried out for strain-induced microscale compositional pulling effect on the structural and optical properties of high Al content AlGaN multiple quantum wells (MQWs). Investigations reveal that a large tensile strain is introduced during the epitaxial growth of AlGaN MQWs, due to the grain boundary formation, coalescence and growth. The presence of this tensile strain results in the microscale inhomogeneous compositional pulling and Ga segregation, which is further confirmed by the lower formation enthalpy of Ga atom than Al atom on AlGaN slab using first principle simulations. The strain-induced microscale compositional pulling leads to an asymmetrical feature of emission spectra and local variation in emission energy of AlGaN MQWs. Because of a stronger three-dimensional carrier localization, the area of Ga segregation shows a higher emission efficiency compared with the intrinsic area of MQWs, which is benefit for fabricating efficient AlGaN-based deep-ultraviolet light-emitting diode.
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Affiliation(s)
- Shiqiang Lu
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China
| | - Zongyan Luo
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China
| | - Jinchai Li
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China.
| | - Wei Lin
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China
| | - Hangyang Chen
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China.
| | - Dayi Liu
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China
| | - Duanjun Cai
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China
| | - Kai Huang
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China
| | - Na Gao
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China
| | - Yinghui Zhou
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China
| | - Shuping Li
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China
| | - Junyong Kang
- Fujian Key Laboratory of Semiconductor Materials and Applications, CI Center for OSED, College of Physical Science and Technology, Xiamen University, Xiamen, 361005, China
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5
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Zhang L, Li L, Wang Y, Suo Y, Liu S, Gan Z. Atomic simulation of AlGaN film deposition on AlN template. Mol Phys 2019. [DOI: 10.1080/00268976.2019.1702728] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/25/2022]
Affiliation(s)
- Libin Zhang
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
| | - Ling Li
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
| | - Yifan Wang
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
| | - Yalun Suo
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
| | - Sheng Liu
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
- School of Power and Mechanical Engineering, Wuhan University, Wuhan, People’s Republic of China
| | - Zhiyin Gan
- School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan, People’s Republic of China
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6
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Chen C, Meng F, Ou P, Lan G, Li B, Chen H, Qiu Q, Song J. Effect of indium doping on motions of 〈a〉-prismatic edge dislocations in wurtzite gallium nitride. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2019; 31:315701. [PMID: 31018189 DOI: 10.1088/1361-648x/ab1bf3] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
The influences of indium doping on dynamics of 〈a〉-prismatic edge dislocation along [Formula: see text] shuffle plane in wurtzite GaN have been investigated employing classical molecular dynamics (MD) simulations. The dependence of dislocation motion mode and dislocation velocity on indium doping concentration, temperature, and applied shear stress was clarified. Moreover, the simulation results were further analyzed using elastic theory of dislocation and thermal activation theory of dislocation motion, showing excellent agreement with the simulation. Our findings help gain deep insights into modifying dynamic behaviors of TDs through the alloying doping and offer generic tools to the study of other wurtzite materials of promising application prospects, such as AlGaN and ZnO.
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Affiliation(s)
- Cheng Chen
- Department of Materials Engineering, McGill University, Montréal, Québec H3A0C5, Canada
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7
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Zielinski MS, Vardar E, Vythilingam G, Engelhardt EM, Hubbell JA, Frey P, Larsson HM. Quantitative intrinsic auto-cathodoluminescence can resolve spectral signatures of tissue-isolated collagen extracellular matrix. Commun Biol 2019; 2:69. [PMID: 30793047 PMCID: PMC6379429 DOI: 10.1038/s42003-019-0313-x] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/26/2018] [Accepted: 01/18/2019] [Indexed: 11/18/2022] Open
Abstract
By analyzing isolated collagen gel samples, we demonstrated in situ detection of spectrally deconvoluted auto-cathodoluminescence signatures of specific molecular content with precise spatial localization over a maximum field of view of 300 µm. Correlation of the secondary electron and the hyperspectral images proved ~40 nm resolution in the optical channel, obtained due to a short carrier diffusion length, suppressed by fibril dimensions and poor electrical conductivity specific to their organic composition. By correlating spectrally analyzed auto-cathodoluminescence with mass spectroscopy data, we differentiated spectral signatures of two extracellular matrices, namely human fibrin complex and rat tail collagen isolate, and uncovered differences in protein distributions of isolated extracellular matrix networks of heterogeneous populations. Furthermore, we demonstrated that cathodoluminescence can monitor the progress of a human cell-mediated remodeling process, where human collagenous matrix was deposited within a rat collagenous matrix. The revealed change of the heterogeneous biological composition was confirmed by mass spectroscopy. Zielinski et al. show that quantitative label-free cathodoluminescence-scanning electron microscopy differentiates spectral signatures of two extracellular matrices. This method can monitor the progress of a smooth muscle cell-mediated remodeling process without using antibodies to enhance the optical signal.
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Affiliation(s)
| | - Elif Vardar
- Institute for Bioengineering, School of Life Sciences and School of Engineering, École Polytechnique Fédérale de Lausanne, Lausanne, 1015, Switzerland.,Department of Pediatrics, Centre Hospitalier Universitaire Vaudois (CHUV), Lausanne, 1011, Switzerland
| | - Ganesh Vythilingam
- Institute for Bioengineering, School of Life Sciences and School of Engineering, École Polytechnique Fédérale de Lausanne, Lausanne, 1015, Switzerland.,Department of Surgery, Faculty of Medicine, University Malaya, Kuala Lumpur, 53100, Malaysia
| | - Eva-Maria Engelhardt
- Institute for Bioengineering, School of Life Sciences and School of Engineering, École Polytechnique Fédérale de Lausanne, Lausanne, 1015, Switzerland
| | - Jeffrey A Hubbell
- Institute for Molecular Engineering, University of Chicago, Chicago, IL, 60637, USA
| | - Peter Frey
- Institute for Bioengineering, School of Life Sciences and School of Engineering, École Polytechnique Fédérale de Lausanne, Lausanne, 1015, Switzerland
| | - Hans M Larsson
- Institute for Bioengineering, School of Life Sciences and School of Engineering, École Polytechnique Fédérale de Lausanne, Lausanne, 1015, Switzerland.
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8
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Song Y, Zhang L, Zeng Y, Qin L, Zhou Y, Ning Y, Wang L. Microscopic View of Defect Evolution in Thermal Treated AlGaInAs Quantum Well Revealed by Spatially Resolved Cathodoluminescence. MATERIALS 2018; 11:ma11061049. [PMID: 29925827 PMCID: PMC6024925 DOI: 10.3390/ma11061049] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/12/2018] [Revised: 06/05/2018] [Accepted: 06/16/2018] [Indexed: 11/21/2022]
Abstract
An aluminum gallium indium arsenic (AlGaInAs) material system is indispensable as the active layer of diode lasers emitting at 1310 or 1550 nm, which are used in optical fiber communications. However, the course of the high-temperature instability of a quantum well structure, which is closely related to the diffusion of indium atoms, is still not clear due to the system’s complexity. The diffusion process of indium atoms was simulated by thermal treatment, and the changes in the optical and structural properties of an AlGaInAs quantum well are investigated in this paper. Compressive strained Al0.07Ga0.22In0.71As quantum wells were treated at 170 °C with different heat durations. A significant decrement of photoluminescence decay time was observed on the quantum well of a sample that was annealed after 4 h. The microscopic cathodoluminescent (CL) spectra of these quantum wells were measured by scanning electron microscope-cathodoluminescence (SEM-CL). The thermal treatment effect on quantum wells was characterized via CL emission peak wavelength and energy density distribution, which were obtained by spatially resolved cathodoluminescence. The defect area was clearly observed in the Al0.07Ga0.22In0.71As quantum wells layer after thermal treatment. CL emissions from the defect core have higher emission energy than those from the defect-free regions. The defect core distribution, which was associated with indium segregation gradient distribution, showed asymmetric character.
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Affiliation(s)
- Yue Song
- State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
- Daheng College, University of Chinese Academy of Sciences, Beijing 100049, China.
| | - Ligong Zhang
- State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
| | - Yugang Zeng
- State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
| | - Li Qin
- State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
| | - Yinli Zhou
- State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
| | - Yongqiang Ning
- State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
| | - Lijun Wang
- State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
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