Ultrasensitive Thin-Film Pressure Sensors with a Broad Dynamic Response Range and Excellent Versatility Toward Pressure, Vibration, Bending, and Temperature

Research Progress and Application of Multimodal Flexible Sensors for Electronic Skin

In recent years, wearable electronic skin has garnered significant attention due to its broad range of applications in various fields, including personal health monitoring, human motion perception, human-computer interaction, and flexible display. The flexible multimodal sensor, as the core component of electronic skin, can mimic the multistimulus sensing ability of human skin, which is highly significant for the development of the next generation of electronic devices. This paper provides a summary of the latest advancements in multimodal sensors that possess two or more response capabilities (such as force, temperature, humidity, etc.) simultaneously. It explores the relationship between materials and multiple sensing capabilities, focusing on both active materials that are the same and different. The paper also discusses the preparation methods, device structures, and sensing properties of these sensors. Furthermore, it introduces the applications of multimodal sensors in human motion and health monitoring, as well as intelligent robots. Finally, the current limitations and future challenges of multimodal sensors will be presented.

Flexible Force Sensor Based on a PVA/AgNWs Nanocomposite and Cellulose Acetate

Nanocomposites are materials of special interest for the development of flexible electronic, optical, and mechanical devices in applications such as transparent conductive electrodes and flexible electronic sensors. These materials take advantage of the electrical, chemical, and mechanical properties of a polymeric matrix, especially in force sensors, as well as the properties of a conductive filler such as silver nanowires (AgNWs). In this work, the fabrication of a force sensor using AgNWs synthesized via the polyol chemical technique is presented. The nanowires were deposited via drop-casting in polyvinyl alcohol (PVA) to form the active (electrode) and resistive (nanocomposite) sensor films, with both films separated by a cellulose acetate substrate. The dimensions of the resulting sensor are 35 mm × 40 mm × 0.1 mm. The sensor shows an applied force ranging from 0 to 3.92 N, with a sensitivity of 0.039 N. The sensor stand-off resistance, exceeding 50 MΩ, indicates a good ability to detect changes in applied force without an external force. Additionally, studies revealed a response time of 10 ms, stabilization of 9 s, and a degree of hysteresis of 1.9%. The voltage response of the sensor under flexion at an angle of 85° was measured, demonstrating its functionality over a prolonged period. The fabricated sensor can be used in applications that require measuring pressure on irregular surfaces or systems with limited space, such as for estimating movement in robot joints.

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

Pressure sensors play a vital role in aerospace, automotive, medical, and consumer electronics. Although microelectromechanical system (MEMS)-based pressure sensors have been widely used for decades, new trends in pressure sensors, including higher sensitivity, higher accuracy, better multifunctionality, smaller chip size, and smaller package size, have recently emerged. The demand for performance upgradation has led to breakthroughs in sensor materials, design, fabrication, and packaging methods, which have emerged frequently in recent decades. This paper reviews common new trends in MEMS pressure sensors, including minute differential pressure sensors (MDPSs), resonant pressure sensors (RPSs), integrated pressure sensors, miniaturized pressure chips, and leadless pressure sensors. To realize an extremely sensitive MDPS with broad application potential, including in medical ventilators and fire residual pressure monitors, the "beam-membrane-island" sensor design exhibits the best performance of 66 μV/V/kPa with a natural frequency of 11.3 kHz. In high-accuracy applications, silicon and quartz RPS are analyzed, and both materials show ±0.01%FS accuracy with respect to varying temperature coefficient of frequency (TCF) control methods. To improve MEMS sensor integration, different integrated "pressure + x" sensor designs and fabrication methods are compared. In this realm, the intercoupling effect still requires further investigation. Typical fabrication methods for microsized pressure sensor chips are also reviewed. To date, the chip thickness size can be controlled to be <0.1 mm, which is advantageous for implant sensors. Furthermore, a leadless pressure sensor was analyzed, offering an extremely small package size and harsh environmental compatibility. This review is structured as follows. The background of pressure sensors is first presented. Then, an in-depth introduction to MEMS pressure sensors based on different application scenarios is provided. Additionally, their respective characteristics and significant advancements are analyzed and summarized. Finally, development trends of MEMS pressure sensors in different fields are analyzed.

Flexible Switching Pressure Sensors with Fast Response and Less Bending-Sensitive Performance Applied to Pain-Perception-Mimetic Gloves

A strategy is proposed herein for preparing a flexible switching piezoresistive pressure sensor, which has a bridge-like structure and inverted micropyramids (IMPs) on its lower conductive substrate. The sensor substrates were prepared by injection compression molding (an industrial manufacturing process) using thermoplastic polyurethane (TPU; an industrial grade polymer). The designed bridge-like structure enables the sensor to obtain a pressure threshold. The flexibility of upper and lower TPU substrates allows them to contact quickly when pressed, and so the sensor exhibits a fast response (as short as 2 ms) and can respond to both static force and dynamic force (up to 50 Hz frequency), which are prominent for the sensor made from TPU. The sensor exhibits less bending-sensitive performance, which is attributed to the conformality of the upper and lower substrates and lower strain on the lower substrate with the IMP under bending. The sensor can amplify signal response at the monitoring limit (the relative resistance change is up to 46%). It can achieve a higher sensitivity in different low-pressure ranges by changing the gap of the bridge-like structure. Moreover, the sensor can obviously and steadily respond to an additional very low pressure under preloading and exhibits good durability performance. As the sensor has a pressure threshold similar to the human pain perception process, a pain-perception-mimetic glove that can identify the external mechanical stimuli but reduces the interference of finger bending is prepared, displaying potential applications of the flexible switching sensor in intelligent wearable protectors.

Mold-Free Manufacturing of Highly Sensitive and Fast-Response Pressure Sensors Through High-Resolution 3D Printing and Conformal Oxidative Chemical Vapor Deposition Polymers

A new manufacturing paradigm is showcased to exclude conventional mold-dependent manufacturing of pressure sensors, which typically requires a series of complex and expensive patterning processes. This mold-free manufacturing leverages high-resolution 3D-printed multiscale microstructures as the substrate and a gas-phase conformal polymer coating technique to complete the mold-free sensing platform. The array of dome and spike structures with a controlled spike density of a 3D-printed substrate ensures a large contact surface with pressures applied and extended linearity in a wider pressure range. For uniform coating of sensing elements on the microstructured surface, oxidative chemical vapor deposition is employed to deposit a highly conformal and conductive sensing element, poly(3,4-ethylenedioxythiophene) at low temperatures (<60 °C). The fabricated pressure sensor reacts sensitively to various ranges of pressures (up to 185 kPa-1 ) depending on the density of the multiscale features and shows an ultrafast response time (≈36 µs). The mechanism investigations through the finite element analysis identify the effect of the multiscale structure on the figure-of-merit sensing performance. These unique findings are expected to be of significant relevance to technology that requires higher sensing capability, scalability, and facile adjustment of a sensor geometry in a cost-effective manufacturing manner.

Nanoengineering Ultrathin Flexible Pressure Sensor with Superior Sensitivity and Perfect Conformability

Flexible pressure sensors play an increasingly important role in a wide range of applications such as human health monitoring, soft robotics, and human-machine interfaces. To achieve a high sensitivity, a conventional approach is introducing microstructures to engineer the internal geometry of the sensor. However, this microengineering strategy requires the sensor's thickness to be typically at hundreds to thousands of microns level, impairing the sensor's conformability on surfaces with microscale roughness like human skin. In this manuscript, a nanoengineering strategy is pioneered that paves a path to resolve the conflicts between sensitivity and conformability. A dual-sacrificial-layer method is initiated that facilitates ease of fabrication and precise assembly of two functional nanomembranes to manufacture the thinnest resistive pressure sensor with a total thickness of ≈850 nm that achieves perfectly conformable contact to human skin. For the first time, the superior deformability of the nanothin electrode layer on a carbon nanotube conductive layer is utilized by the authors to achieve a superior sensitivity (92.11 kPa-1 ) and an ultralow detection limit (<0.8 Pa). This work offers a new strategy that is able to overcome a key bottleneck for current pressure sensors, therefore is of potential to inspire the research community for a new wave of breakthroughs.

Nature-Driven Biocompatible Epidermal Electronic Skin for Real-Time Wireless Monitoring of Human Physiological Signals

Wearable bioelectronic patches are creating a transformative effect in the health care industry for human physiological signal monitoring. However, the use of such patches is restricted due to the unavailability of a proper power source. Ideal biodevices should be thin, soft, robust, energy-efficient, and biocompatible. Here, we report development of a flexible, lightweight, and biocompatible electronic skin-cum-portable power source for wearable bioelectronics by using a processed chicken feather fiber. The device is fabricated with a novel, breathable composite of biowaste chicken feather and organic poly(vinylidene fluoride) (PVDF) polymer, where the chicken feather fiber constitutes the "microbones" of the PVDF, enhancing its piezoelectric phase content, biocompatibility, and crystallinity. Thanks to its outstanding pressure sensitivity, the fabricated electronic skin is used for the monitoring of different human physiological signals such as body motion, finger and joint bending, throat activities, and pulse rate with excellent sensitivity. A wireless system is developed to remotely receive the different physiological signals as captured by the electronic skin. We also explore the capabilities of the device as a power source for other small electronics. The piezoelectric energy harvesting device can harvest a maximum output voltage of ∼28 V and an area power density of 1.4 μW·cm^-2 from the human finger imparting. The improved energy harvesting property of the device is related to the induced higher fraction of the electroactive phase in the composite. The easy process ability, natural biocompatibility, superior piezoelectric performance, high pressure sensitivity, and alignment toward wireless transmission of the captured data make the device a promising candidate for wearable bioelectronic patches and power sources.

Flexible Pressure Sensors Based on Molybdenum Disulfide/Hydroxyethyl Cellulose/Polyurethane Sponge for Motion Detection and Speech Recognition Using Machine Learning

Flexible pressure sensors with excellent performance have broad application potential in wearable devices, motion monitoring, and human-computer interaction. In this paper, a flexible pressure sensor with a porous structure is proposed by coating molybdenum disulfide (MoS₂) and hydroxyethyl cellulose (HEC) on a polyurethane (PU) sponge skeleton. The obtained sensor has excellent sensitivity (0.746 kPa^-1), a wide detection range (250 kPa), fast response (120 ms), and outstanding repeatability over 2000 cycles. It is proven that the sensor can realize human motion detection and distinguish the touch of varying strength. In addition, a pressure sensing array was fabricated to reflect the pressure distribution and recognize the writing of Arabic numerals. Finally, the sensor performs speech detection through throat muscle movements, and high-accuracy (97.14%) speech recognition for seven words was achieved by a machine learning algorithm based on the support vector machine (SVM). This work provides an opportunity to fabricate simple flexible pressure sensors with potential applications in next-generation electronic skin, health detection, and intelligent robotics.

A flexible tactile sensor that uses polyimide/graphene oxide nanofiber as dielectric membrane for vertical and lateral force detection

Flexible force sensors are of great interest in the fields of healthcare, physiological signals, and aircraft smart skin applications because of their compatibility with curved surfaces. However, the simultaneous detection of multidirectional forces remains an engineering challenge, despite the great progress made in recent years. Herein, we present the development of a flexible capacitive force sensor capable of efficiently distinguishing normal and sliding shear forces. A two-layer electrospun polyimide/graphene oxide (PI/GO) nanofiber membrane is used as the dielectric layer, which is sandwiched between one top electrode and four symmetrically distributed bottom electrodes. This composite membrane has an improved dielectric constant, a reduced friction coefficient, and good compressibility, leading to superior performance that includes high sensitivity over a wide operational range with measured results of 3 MPa^-1for 0-242 kPa (0-2.2 N) and 0.92 MPa^-1for 242-550 kPa (2.2-5 N) in the normal direction; and better than 1 N^-1for 0-3 N in thex- andy-axis directions. The system also has a low detection limit of 10 Pa, fast response and recovery times of 39 ms and 13 ms, respectively, a good cyclic stability of 10,000 cycles at a pressure of 176 kPa, and promising potential for use in high-temperature environments (200 °C). Moreover, a prototype 4 × 4 sensor array has been fabricated and successfully used in a robotic system to grasp objects and operate a wireless toy car. As such, the proposed system could offer superior capabilities in simultaneous multidirectional force sensing for applications such as intelligent robots, human-machine interaction, and smart skin.

Flexible pressure sensors via engineering microstructures for wearable human-machine interaction and health monitoring applications

Flexible pressure sensors capable of transducing pressure stimuli into electrical signals have drawn extensive attention owing to their potential applications for human-machine interaction and healthcare monitoring. To meet these application demands, engineering microstructures in the pressure sensors are an efficient way to improve key sensing performances, such as sensitivity, linear sensing range, response time, hysteresis, and durability. In this review, we provide an overview of the recent advances in the fabrication and application of high-performance flexible pressure sensors via engineering microstructures. The implementation mechanisms and fabrication strategies of microstructures including micropatterned, porous, fiber-network, and multiple microstructures are systematically summarized. The applications of flexible pressure sensors with microstructures in the fields of wearable human-machine interaction, and ex vivo and in vivo healthcare monitoring are comprehensively discussed. Finally, the outlook and challenges in the future improvement of flexible pressure sensors toward practical applications are presented.

Controlled Vertically Aligned Structures in Polymer Composites: Natural Inspiration, Structural Processing, and Functional Application

Vertically aligned structures, which are a series of characteristic conformations with thickness-direction alignment, interconnection, or assembly of filler in polymeric composite materials that can provide remarkable structural performance and advanced anisotropic functions, have attracted considerable attention in recent years. The past two decades have witnessed extensive development with regard to universal fabrication methods, subtle control of morphological features, improvement of functional properties, and superior applications of vertically aligned structures in various fields. However, a systematic review remains to be attempted. The various configurations of vertical structures inspired from biological samples in nature, such as vertically aligned structures with honeycomb, reed, annual ring, radial, and lamellar configurations are summarized here. Additionally, relevant processing methods, which include the transformation of oriented direction, external-field inducement, template method, and 3D printing method, are discussed in detail. The diverse applications in mechanical, thermal, electric, dielectric, electromagnetic, water treatment, and energy fields are also highlighted by providing representative examples. Finally, future opportunities and prospects are listed to identify current issues and potential research directions. It is expected that perspectives on the vertically aligned structures presented here will contribute to the research on advanced multifunctional composites.

Use of Surface Penetration Technology to Fabricate Superhydrophobic Multifunctional Strain Sensors with an Ultrawide Sensing Range

Flexible sensors with wide sensing ranges require responsiveness under tiny and large strains. However, the development of strain sensors with wide detection ranges is still a great challenge due to the conflict between the tiny strain requirements of sparse conductive networks and the large strain requirement of dense conductive networks. Herein, we present a facile method for fabricating a gradient conductive network composed of sparse and dense conductive networks. The surface penetration technology in which carbon black (CB) penetrated from the natural rubber latex (NRL) glove surface to the interior was used to fabricate a gradient conductive network. The prolonged immersion time from 1 to 30 min caused the penetration depth of CB to increase from 2 to 80 μm. Moreover, CB formed hierarchical rough micro- and nanoscale structures, creating a superhydrophobic surface. The gradient conductive network of sensors produced an ultrawide detection range of strain (0.05-300%) and excellent reliability and reproducibility. The sensors can detect a wide range of human motions, from tiny (wrist pulse) to large (joint movements) motion monitoring. The flexible sensors attached to a flexible basement can be used to detect pressure in a wide detection range (1.7-2900 kPa). Pressure responsiveness was used to detect the weight, sound pressure, and dripping of tiny droplets. The sensor showed an excellent response to organic solvents, and the response intensity increased with the increasing swelling degree of the solvent for NRL.