Bright Field Structural Colors in Silicon-on-Insulator Nanostructures

Resonant-Cavity-Enhanced Electrochromic Materials and Devices

With rapid advances in optoelectronics, electrochromic materials and devices have received tremendous attentions from both industry and academia for their strong potentials in wearable and portable electronics, displays/billboards, adaptive camouflage, tunable optics, and intelligent devices, etc. However, conventional electrochromic materials and devices typically present some serious limitations such as undesirable dull colors, and long switching time, hindering their deeper development. Optical resonators have been proven to be the most powerful platform for providing strong optical confinement and controllable lightmatter interactions. They generate locally enhanced electromagnetic near-fields that can convert small refractive index changes in electrochromic materials into high-contrast color variations, enabling multicolor or even panchromatic tuning of electrochromic materials. Here, resonant-cavity-enhanced electrochromic materials and devices, an advanced and emerging trend in electrochromics, are reviewed. In this review, w e will focus on the progress in multicolor electrochromic materials and devices based on different types of optical resonators and their advanced and emerging applications, including multichromatic displays, adaptive visible camouflage, visualized energy storage, and applications of multispectral tunability. Among these topics, principles of optical resonators, related materials/devices and multicolor electrochromic properties are comprehensively discussed and summarized. Finally, the challenges and prospects for resonant-cavity-enhanced electrochromic materials and devices are presented.

Structural color modulation by laser post-processing on metal-coated colloidal crystals

A method to use a pulsed solid-state laser to create structural color modulation on metal-coated colloidal crystal surfaces by changing the scanning speed has been proposed. Vivid colors as cyan, orange, yellow, and magenta are obtained with different predefined stringent geometrical and structural parameters. The effect of laser scanning speeds and polystyrene (PS) particle sizes on the optical properties is studied, and the angle-dependent property of the samples is also discussed. As a result, the reflectance peak is progressively red shifted along with increasing the scanning speed from 4 mm/s to 200 mm/s with 300 nm PS microspheres. Moreover, the influence of the microsphere particle sizes and incident angle are also experimentally investigated. For 420 and 600 nm PS colloidal crystals, along with a gradual decrease in the scanning speed of the laser pulse from 100 mm/s to 10 mm/s and an increase in the incident angle from 15° to 45°, there was a blue shift for two reflection peak positions. This research is a key, low-cost step toward applications in green printing, anti-counterfeiting, and other related fields.

Mie Resonances Enabled Subtractive Structural Colors with Low-Index-Contrast Silicon Metasurfaces

All-dielectric structural colors are attracting increasing attention due to their great potential for various applications in display devices, imaging security certification, optical data storage, and so on. However, it remains a great challenge to achieve vivid structural colors with low-aspect-ratio silicon nanostructures directly on a silicon substrate, which is highly desirable for future integrated optoelectronic devices. The main obstacle comes from the difficulty in achieving strong Mie resonances by Si nanostructures on low-index-contrast substrates. Here, we demonstrate a generic principle to create vivid bright field structural colors by using silicon nanopillars directly on top of the silicon substrate. Complementary colors across the full visible spectrum are achieved as a result of the enhanced absorption due to Mie resonances. It is shown that the color saturation increases with the increasing of the nanopillar height. Remarkably, blue and black colors are generated by trapezoid nanopillar arrays as a result of the absorption at long wavelengths or all visible wavelengths. Our strategy provides a powerful scheme for accelerating the integrated optoelectronic applications in nanoscale color printing, imaging, and displays.

Silicon metasurface embedded Fabry-Perot cavity enables the high-quality transmission structural color

While nanoscale color generations have been studied for years, the high-performance transmission structural color, simultaneously equipped with large gamut, high resolution, and optical multiplexing abilities, still remains as a hanging issue. Here, a silicon metasurface embedded Fabry-Perot cavity is demonstrated to address this problem. By changing the planar geometries of meta-atoms, the cavities provide transmission colors with 194% sRGB gamut coverage and 141,111 DPI resolution, along with more than 300% enhanced angular tolerance. Such high density allows two-dimensional color mixing at the diffraction limit scale. Benefitting from the polarization manipulation capacity of the metasurface, arbitrary color arrangements between cyan and red for two orthogonal linear polarizations are also realized. Our proposed cavities can be used in filters, printings, optical storage, and many other applications in need of high quality and density colors.

Guided mode resonance aided polarization insensitive in-plane spectral filters for an on-chip spectrometer

We demonstrate an on-chip in-plane polarization independent multi-spectral color filter in the visible to near-infrared wavelength band. We experimentally show a four-channel transmission and in-plane spectral filter characteristics spanning a 400-nm spectral range. Engineered 2D guided mode resonance structures in a silicon nitride-on-sapphire substrate are used to realize the filters. The in-plane color filters could provide the necessary impetus for developing robust integrated photonic platforms for on-chip devices and applications.

Machine learning-assisted design of polarization-controlled dynamically switchable full-color metasurfaces

Dynamic color tuning has significant application prospects in the fields of color display, steganography, and information encryption. However, most methods for color switching require external stimuli, which increases the structural complexity and hinders the applicability of front-end dynamic display technology. In this study, we propose polarization-controlled hybrid metal-dielectric metasurfaces to realize full-color display and dynamic color tuning by altering the polarization angle of incident light without changing the structure and properties of the material. A bidirectional neural network is trained to predict the colors of mixed metasurfaces and inversely design the geometric parameters for the desired colors, which is less dependent on design experience and reduces the computational cost. According to the color recognition ability of human eyes, the accuracy of color prediction realized in our study is 93.18% and that of inverse parameter design is 92.37%. This study presents a simple method for dynamic structural color tuning and accelerating the design of full-color metasurfaces, which can offer further insight into the design of color filters and promote photonics research.

Independently tunable all-dielectric synthetic multi-spectral metamaterials based on Mie resonance

A single metamaterial (MM) is generally designed to operate in only one band, and the MMs with different dimensions of meta-atoms are required to be integrated to achieve multi-spectral responses simultaneously. In this study, an all-dielectric synthetic multi-spectral metamaterial (SMM) that can efficiently operate in the visible and terahertz (THz) ranges by incorporating nanoscale features into microscale unit cells is demonstrated and investigated numerically. The resonant frequency of the proposed SMM in both regimes can be tuned independently by changing the geometric parameters such as diameter, gap, width and height of unit cells functional in two different regions, whilst maintaining high reflectance efficiency. Results show that a variety of colors can be produced from red to purple in the visible range with maximal reflectance as high as 83% while the peak frequency of the SMM can be adjusted from 8.12 to 2.13 THz in the THz range with maximum reflectance up to 94%. The reflection characteristics of the SMM mainly originate from the electric dipole (ED) and magnetic dipole (MD) resonances via Mie scattering in both regions. The strategy of this research offers the possibility of applications in bio/chemical sensing, multi-spectral imaging, filtering, detection, modulation and so on.

Wide-Gamut Biomimetic Structural Colors from Interference-Assisted Two-Photon Polymerization

Two-photon polymerization (TPP) is an emerging direct laser writing technique for the fabrication of structural colors. However, its coloration ability is suppressed as the vertical resolution is up to several microns. To solve this issue, an interference-assisted TPP technique was employed. Laser interference at a highly reflective interface produced the periodic energy redistribution along the vertical direction, turning the laser voxel into multilayer structures and confirming this technology as a facile and robust method for precise control of its vertical feature size. Biomimetic structural colors (BSCs) inspired from the ridge-lamella configurations in the Morph butterflies were fabricated using this improved TPP technique. The coloration mechanisms of the multilayer interference from the lamella layers, the thin-film interference from the fusion of multilayers, and the hybrid situations were systematically studied. These BSC colors were grouped as pixel palettes with various TPP parameters corresponding to each other, and they spanned almost the entire standard red-green-blue color space. Moreover, under optimized conditions, it was possible to fabricate a 1 cm² area within 2.5 h. These features make interference-assisted TPP an ideal coloration method for practical applications, such as display, decoration, sensing, and so on.

Controllable Photonic Structures on Silicon-on-Insulator Devices Fabricated Using Femtosecond Laser Lithography

The design of micro/nanostructures on silicon-on-insulator (SOI) devices has attracted widespread attention in the science and applications of integrated optics, which, however, are usually restricted by the current manufacturing technologies. Hence, in this paper, we propose a mask-free, one-step femtosecond laser lithography method for efficient fabrication of high-quality controllable planar photonic structures on SOI devices. Subwavelength gratings with high uniformity are flexibly prepared on a SOI wafer, and they can be efficiently extended for large-area fabrication with long-range uniformity. Different from the melt flow mechanism to bulk silicon, the buried SiO₂ layer of the SOI material provides substantial control over the phase change process, thereby achieving local rapid vaporization to form a high-quality structure. The optical properties of the prepared structures are measured experimentally and determined to possess powerful diffraction and light-coupling characteristics. Strikingly, active control of the SOI surface structure morphology, from the grating to the periodic silicon wire structure, can be realized through precision adjustment of the pulse injection volumes. A homogeneous silicon photonic wire is successfully generated on the SOI device, providing an alternative to the preparation of waveguides. This effective femtosecond laser lithography method for fabricating controllable photonic structures on SOI devices is expected to further promote the development of integrated optics.

Aluminum Nitride to Silicon Direct Bonding for an Alternative Silicon-On-Insulator Platform

The next generation of microelectromechanical systems (MEMS) requires new materials and platforms that can exploit the intrinsic properties of advanced materials and structures, such as materials with high thermal conductivity, broad optical transmission spectra, piezoelectric properties, and miniaturization potential. Therefore, we need to look beyond standard SiO₂-based silicon-on-insulator (SOI) structures to realize ubiquitous MEMS. This work proposes using AlN as an alternative SOI structure due to several inherent material property advantages as well as functional advantages. This work presents the results of reactively sputtered AlN films on a Si handle wafer bonded with a mirror-polished Si device wafer. Wafer bonding was achieved by using hydrophilic wafer bonding processes, which was realized by appropriate polymerization of the prebonding surfaces. Plasma activation of the AlN surface included O₂, Ar, SF₆, SF₆ + Ar, and/or SF₆ + O₂, which resulted in a change in the chemical and topography state of the surface. Changes in the AlN surface properties included enhanced hydrophilicity, reduced surface roughness, and low nanotopography, components essential for successful hydrophilic direct wafer bonding. Wafer bonding experiments were carried out using promising surface activation methods. The results showed a multilayered bonding interface of Si(Device)/SiO₂/ALON/AlN/Si(Handle) with fluorine in the aluminum oxynitride layer from the proceeding AlN surface activation process. More notably, this work provided wafer bonding tensile strength results of the AlN alternative SOI structure that compares with the traditional SiO₂ SOI counterpart, making AlN to Si direct bonding an attractive alternative SOI platform.

Nearly Perfect Transmissive Subtractive Coloration through the Spectral Amplification of Mie Scattering and Lattice Resonance

Silicon has been utilized in metasurfaces to produce structural color filters due to its compatibility with mature and cost-effective methods for complementary metal oxide semiconductor devices. In this work, we propose and demonstrate efficiency- and scattering-enhanced structural color filters using all-dielectric metasurfaces made up of engineered hydrogenated amorphous silicon (a-Si:H) nanoblocks. Wavelength-dependent filtering is achieved by Mie scattering as each structure individually supports the electric dipole (ED) and magnetic dipole (MD) resonances. The ED and MD resonances are identified by observing the field profiles of the resonance calculated by finite element method (FEM) simulations. To enhance the efficiency and scattering response of the all-dielectric metasurfaces, the proposed structural color filters are designed with consideration of the lattice resonances and scattering directivity. The spectral positions of the transmission dips and peaks are rigorously analyzed in accordance with the Mie theory and multipole expansion. The transmission spectra exhibit 100% transmission where Kerker's first condition is satisfied, while the lattice resonances amplify the ED and MD scattering responses throughout the entire visible regime. Various colors are generated by varying the resonance peak, which is controlled by varying the geometric parameters of a-Si:H nanoblocks. The proposed structural color printing devices are expected to have applications in dynamic color displays, imaging devices, and photorealistic color printing.