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Wu H, Wu C, Guo C, Hu J, Guo D, He S. Highly Wavelength-Selective Self-Powered Solar-Blind Ultraviolet Photodetector Based on Colloidal Aluminum Nitride Quantum Dots. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024:e2312127. [PMID: 38698570 DOI: 10.1002/smll.202312127] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/26/2023] [Revised: 04/20/2024] [Indexed: 05/05/2024]
Abstract
Colloidal quantum dots are semiconductor nanocrystals endowed with unique optoelectronic properties. A major challenge to the field is the lack of methods for synthesizing quantum dots exhibit strong photo-response in the deep-ultraviolet (DUV) band. Here, a facile solution-processed method is presented for synthesizing ultrawide bandgap aluminium nitride quantum dots (AlN QDs) showing distinguished UV-B photoluminescence. Combined with the strong optical response in solar blind band, a solution-processed, self-powered AlN-QDs/β-Ga2O3 solar-blind photodetector is demonstrated. The photodetector is characterized with a high responsivity of 1.6 mA W-1 under 0 V bias and specific detectivity 7.60 × 10-11 Jones under 5 V bias voltage with good solar blind selectivity. Given the solution-processed capability of the devices and extraordinary properties of AlN QDs, this study anticipates the utilization of AlN QDs will open up unique opportunities for cost-effective industrial production of high-performance DUV optoelectronics for large-scale applications.
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Affiliation(s)
- Hao Wu
- National Engineering Research Center for Optical Instruments, College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310058, P. R. China
- School of Information and Electrical Engineering, Hangzhou City University, Hangzhou, 310015, P. R. China
| | - Chao Wu
- Department of Physics, Zhejiang Sci-Tech University, Hangzhou, 310018, P. R. China
| | - Chenyu Guo
- National Engineering Research Center for Optical Instruments, College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310058, P. R. China
| | - Jun Hu
- National Engineering Research Center for Optical Instruments, College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310058, P. R. China
| | - Daoyou Guo
- Department of Physics, Zhejiang Sci-Tech University, Hangzhou, 310018, P. R. China
| | - Sailing He
- National Engineering Research Center for Optical Instruments, College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310058, P. R. China
- Ningbo Research Institute, Ningbo, 315100, P. R. China
- Department of Electromagnetic Engineering, School of Electrical Engineering, Royal Institute of Technology, Stockholm, S-100 44, Sweden
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Labed M, Park BI, Kim J, Park JH, Min JY, Hwang HJ, Kim J, Rim YS. Ultrahigh Photoresponsivity of W/Graphene/β-Ga 2O 3 Schottky Barrier Deep Ultraviolet Photodiodes. ACS NANO 2024; 18:6558-6569. [PMID: 38334310 DOI: 10.1021/acsnano.3c12415] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/10/2024]
Abstract
The integration of graphene with semiconductor materials has been studied for developing advanced electronic and optoelectronic devices. Here, we propose ultrahigh photoresponsivity of β-Ga2O3 photodiodes with a graphene monolayer inserted in a W Schottky contact. After inserting the graphene monolayer, we found a reduction in the leakage current and ideality factor. The Schottky barrier height was also shown to be about 0.53 eV, which is close to an ideal value. This was attributed to a decrease in the interfacial state density and the strong suppression of metal Fermi-level pinning. Based on a W/graphene/β-Ga2O3 structure, the responsivity and external quantum efficiency reached 14.49 A/W and 7044%, respectively. These values were over 100 times greater than those of the W contact alone. The rise and delay times of the W/graphene/β-Ga2O3 Schottky barrier photodiodes significantly decreased to 139 and 200 ms, respectively, compared to those obtained without a graphene interlayer (2000 and 3000 ms). In addition, the W/graphene/β-Ga2O3 Schottky barrier photodiode was highly stable, even at 150 °C.
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Affiliation(s)
- Madani Labed
- Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone, Sejong University, Seoul 05006, Republic of Korea
- Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea
| | - Bo-In Park
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
- Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Jekyung Kim
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
- Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Jang Hyeok Park
- Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone, Sejong University, Seoul 05006, Republic of Korea
- Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea
| | - Ji Young Min
- Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone, Sejong University, Seoul 05006, Republic of Korea
- Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea
| | - Hee Jae Hwang
- Biomaterials Research Center, Korea Institution of Science and Technology, Seoul 02792, Republic of Korea
| | - Jeehwan Kim
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
- Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - You Seung Rim
- Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone, Sejong University, Seoul 05006, Republic of Korea
- Institute of Semiconductor and System IC, Sejong University, Seoul 05006, Republic of Korea
- Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
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Kim B, Kim S, Lee TH, Yang D, Lee D, Sohn W, Yoon E, Park Y, Jang HW. Enhancing Performance of Ultraviolet C Photodetectors Through Single-Domain Epitaxy of Monoclinic β-Ga 2 O 3 Films and Tailored Anti-Reflection Coating. SMALL METHODS 2023:e2300933. [PMID: 37882332 DOI: 10.1002/smtd.202300933] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/25/2023] [Revised: 09/16/2023] [Indexed: 10/27/2023]
Abstract
Implementing high-performance ultraviolet C photodetectors (UVC PDs) based on β-Ga2 O3 films is challenging owing to the anisotropic crystal symmetry between the epitaxial films and substrates. In this study, highly enhanced state-of-the-art photoelectrical performance is achieved using single-domain epitaxy of monoclinic β-Ga2 O3 films on a hexagonal sapphire substrate. Unlike 3D β-Ga2 O3 films with twin domains, 2D β-Ga2 O3 films exhibit a single domain with a smooth surface and low concentration of point defects, which enable efficient charge separation by suppressing boundary-induced recombination. Furthermore, a tailored anti-reflection coating (ARC) is adopted as a light-absorbing medium to improve charge generation. The tailored nanostructure, which features a gradient refractive index, not only substantially reduces the reflection, but also suppresses the surface leakage current as a passivation layer. This study provides fundamental insights into the single-domain epitaxy of β-Ga2 O3 films and the application of ARC for the development of high-performance UVC PDs.
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Affiliation(s)
- Byungsoo Kim
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
| | - Seungju Kim
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
| | - Tae Hyung Lee
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
| | - Duyoung Yang
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
| | - Dongyup Lee
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
| | - Woonbae Sohn
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
| | - Euijoon Yoon
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
| | - Yongjo Park
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
- Advanced Institute of Convergence Technology, Seoul National University, Suwon, 16229, Republic of Korea
| | - Ho Won Jang
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
- Advanced Institute of Convergence Technology, Seoul National University, Suwon, 16229, Republic of Korea
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Han Y, Wang Y, Xia D, Fu S, Gao C, Ma J, Xu H, Li B, Shen A, Liu Y. Rapid Response Solar Blind Deep UV Photodetector with High Detectivity Based On Graphene:N/βGa 2 O 3 :N/GaN p-i-n Heterojunction Fabricated by a Reversed Substitution Growth Method. SMALL METHODS 2023:e2300041. [PMID: 37096880 DOI: 10.1002/smtd.202300041] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/09/2023] [Revised: 03/23/2023] [Indexed: 05/03/2023]
Abstract
This work reports a high-detectivity solar-blind deep ultraviolet photodetector with a fast response speed, based on a nitrogen-doped graphene/βGa2 O3 /GaN p-i-n heterojunction. The i layer of βGa2 O3 with a Fermi level lower than the central level of the forbidden band of 0.2 eV is obtained by reversed substitution growth with oxygen replacing nitrogen in the GaN matrix, indicating the majority carrier is hole. X-ray diffractometershows that the transformation of GaN into βGa2 O3 with (-201) preferred orientation at temperature above 900 °C in an oxygen ambient. The heterojunction shows enhanced self-powered solar blind detection ability with a response time of 3.2 µs (rise)/0.02 ms (delay) and a detectivity exceeding 1012 Jones. Under a reverse bias of -5 V, the photoresponsivity is 8.3 A W-1 with a high Ilight /Idark ratio of over 106 and a detectivity of ≈9 × 1014 Jones. The excellent performance of the device is attributed to 1) the continuous conduction band without a potential energy barrier, 2) the larger built-in potential in the heterojunction because of the downward shift of Fermi energy level in β-Ga2 O3 , and 3) an enhanced built-in electric field in the βGa2 O3 due to introducing p-type graphene with a high hole concentration of up to ≈1020 cm-3 .
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Affiliation(s)
- Yurui Han
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Yuefei Wang
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Danyang Xia
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Shihao Fu
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Chong Gao
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Jiangang Ma
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Haiyang Xu
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Bingsheng Li
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
| | - Aidong Shen
- Department of Electrical Engineering, The City College of New York, New York, NY, 10031, USA
| | - Yichun Liu
- Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China
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Yoon Y, Park S, Park T, Kim H, Kim K, Hong J. Enhanced Responsivity and Optoelectronic Properties of Self-Powered Solar-Blind Ag 2O/β-Ga 2O 3 Heterojunction-Based Photodetector with Ag:AZO Co-Sputtered Electrode. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:1287. [PMID: 37049380 PMCID: PMC10096629 DOI: 10.3390/nano13071287] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/21/2023] [Revised: 04/03/2023] [Accepted: 04/03/2023] [Indexed: 06/19/2023]
Abstract
A Ag:AZO electrode was used as an electrode for a self-powered solar-blind ultraviolet photodetector based on a Ag2O/β-Ga2O3 heterojunction. The Ag:AZO electrode was fabricated by co-sputtering Ag and AZO heterogeneous targets using the structural characteristics of a Facing Targets Sputtering (FTS) system with two-facing targets, and the electrical, crystallographic, structural, and optical properties of the fabricated thin film were evaluated. A photodetector was fabricated and evaluated based on the research results that the surface roughness of the electrode can reduce the light energy loss by reducing the scattering and reflectance of incident light energy and improving the trapping phenomenon between interfaces. The thickness of the electrodes was varied from 20 nm to 50 nm depending on the sputtering time. The optoelectronic properties were measured under 254 nm UV-C light, the on/off ratio of the 20 nm Ag:AZO electrode with the lowest surface roughness was 2.01 × 108, and the responsivity and detectivity were 56 mA/W and 6.99 × 1011 Jones, respectively. The Ag2O/β-Ga2O3-based solar-blind photodetector with a newly fabricated top electrode exhibited improved response with self-powered characteristics.
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Park S, Yoon Y, Kim H, Park T, Kim K, Hong J. A Self-Powered High-Responsivity, Fast-Response-Speed Solar-Blind Ultraviolet Photodetector Based on CuO/β-Ga 2O 3 Heterojunction with Built-In Potential Control. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:954. [PMID: 36903832 PMCID: PMC10005126 DOI: 10.3390/nano13050954] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/21/2023] [Revised: 03/02/2023] [Accepted: 03/05/2023] [Indexed: 06/18/2023]
Abstract
Controlling built-in potential can enhance the photoresponse performance of self-powered photodetectors. Among the methods for controlling the built-in potential of self-powered devices, postannealing is simpler, more efficient, and less expensive than ion doping and alternative material research. In this study, a CuO film was deposited on a β-Ga2O3 epitaxial layer via reactive sputtering with an FTS system, and a self-powered solar-blind photodetector was fabricated through a CuO/β-Ga2O3 heterojunction and postannealed at different temperatures. The postannealing process reduced the defects and dislocations at the interface between each layer and affected the electrical and structural properties of the CuO film. After postannealing at 300 °C, the carrier concentration of the CuO film increased from 4.24 × 1018 to 1.36 × 1020 cm-3, bringing the Fermi level toward the valence band of the CuO film and increasing the built-in potential of the CuO/β-Ga2O3 heterojunction. Thus, the photogenerated carriers were rapidly separated, increasing the sensitivity and response speed of the photodetector. The as-fabricated photodetector with 300 °C postannealing exhibited a photo-to-dark current ratio of 1.07 × 103; responsivity and detectivity of 30.3 mA/W and 1.10 × 1012 Jones, respectively; and fast rise and decay times of 12 ms and 14 ms, respectively. After three months of storage in an open-air space, the photocurrent density of the photodetector was maintained, indicating good stability with aging. These results suggest that the photocharacteristics of CuO/β-Ga2O3 heterojunction self-powered solar-blind photodetectors can be improved through built-in potential control using a postannealing process.
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