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Yang J, Li Z, Wu Y, Shen Y, Zhang M, Chen B, Yuan G, Xiao S, Feng J, Zhang X, Tang Y, Ding S, Chen X, Wang T. Non-equilibrium compression achieving high sensitivity and linearity for iontronic pressure sensors. Sci Bull (Beijing) 2024; 69:2221-2230. [PMID: 38782658 DOI: 10.1016/j.scib.2024.05.001] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/08/2023] [Revised: 04/02/2024] [Accepted: 05/08/2024] [Indexed: 05/25/2024]
Abstract
Flexible pressure sensors with high sensitivity and linearity are highly desirable for robot sensing and human physiological signal detection. However, the current strategies for stabilizing axial microstructures (e.g., micro-pyramids) are mainly susceptible to structural stiffening during compression, thereby limiting the realization of high sensitivity and linearity. Here, we report a bending-induced non-equilibrium compression process that effectively enhances the compressibility of microstructures, thereby crucially improving the efficiency of interfacial area growth of electric double layer (EDL). Based on this principle, we fabricate an iontronic flexible pressure sensor with vertical graphene (VG) array electrodes. Ultra-high sensitivity (185.09 kPa-1) and linearity (R2 = 0.9999) are realized over a wide pressure range (0.49 Pa-66.67 kPa). It also exhibits remarkable mechanical stability during compression and bending. The sensor is successfully employed in a robotic gripping task to recognize the targets of different materials and shapes based on a multilayer perception (MLP) neural network. It opens the door to realizing haptic sensing capabilities for robotic hands and prosthetic limbs.
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Affiliation(s)
- Jing Yang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Zhibin Li
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Ying Wu
- School of Microelectronics, Southern University of Science and Technology, Shenzhen 518055, China
| | - Yong Shen
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Ming Zhang
- Key Laboratory for Micro/Nano Optoelectronic Devices of Ministry of Education, Engineering Research Center of Advanced Semiconductor Technology and Application of Ministry of Education, Changsha Semiconductor Technology and Application Innovation Research Institute, College of Semiconductors (College of Integrated Circuits), Hunan University, Changsha 410082, China
| | - Bin Chen
- School of Environmental and Chemical Engineering, Yanshan University, Qinhuangdao 066004, China
| | - Guojiang Yuan
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Songhua Xiao
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Jiansong Feng
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Xu Zhang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Yuwei Tang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Sunan Ding
- School of Integrated Circuits, Nanjing University, Suzhou 215163, China.
| | - Xiaolong Chen
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China.
| | - Taihong Wang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China; School of Microelectronics, Southern University of Science and Technology, Shenzhen 518055, China.
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2
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Yang J, Yuan G, Shen Y, Guo C, Li Z, Yan F, Chen X, Mei L, Wang T. Pushing Pressure Detection Sensitivity to New Limits by Modulus-Tunable Mechanism. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024:e2403779. [PMID: 38978349 DOI: 10.1002/advs.202403779] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/14/2024] [Revised: 06/15/2024] [Indexed: 07/10/2024]
Abstract
Only microstructures are used to improve the sensitivity of iontronic pressure sensors. By modulating the compressive modulus, a breakthrough in the sensitivity of the iontronic pressure sensor is achieved. Furthermore, it allows for programmatic tailoring of sensor performance according to the requirements of different applications. Such a new strategy pushes the sensitivity up to a record-high of 25 548.24 kPa-1 and expands the linear pressure range from 15 to 127 kPa. Additionally, the sensor demonstrates excellent mechanical stability over 10 000 compression-release cycles. Based on this, a well-controlled robotic hand that precisely tracks the pressure behavior inside a balloon to autonomously regulate the gripping angle is developed. This paves the way for the application of iontronic pressure sensors in precise sensing scenarios.
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Affiliation(s)
- Jing Yang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Guojiang Yuan
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Yong Shen
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Caili Guo
- State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan, 410083, P. R. China
| | - Zhibin Li
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Fengling Yan
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Xiaolong Chen
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Lin Mei
- State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan, 410083, P. R. China
| | - Taihong Wang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
- School of Microelectronics, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
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3
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Zhao Q, Fan L, Zhao N, He H, Zhang L, Tan Q. Synergistic advancements in high-performance flexible capacitive pressure sensors: structural modifications, AI integration, and diverse applications. NANOSCALE 2024. [PMID: 38415750 DOI: 10.1039/d3nr05155b] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/29/2024]
Abstract
The development of flexible pressure sensors for monitoring human motion and physiological signals has attracted extensive scientific research. However, achieving low monitoring limits, a wide detection range, large bending stresses, and excellent mechanical stability simultaneously remains a serious challenge. With the aim of developing a high-performance capacitive pressure sensor (CPS), this paper introduces the successful preparation of a single-walled carbon nanotube (SWNT)/polydimethylsiloxane (S-PDMS) composite dielectric with a foam-like structure (high permittivity and low elasticity modulus) and MXene/SWNT (S-MXene) composite film electrodes with a micro-crumpled structure. The above structurally modified CPS (SMCPS) demonstrated an excellent response output during pressure loading, achieving a wide pressure detection range (up to 700 kPa), a low detection limit (16.55 Pa), fast response/recovery characteristics (48/60 ms), enhanced sensitivity across a wide pressure range, long-term stability under repeated heavy loading and unloading (40 kPa, >2000 cycles), and reliable performance under various temperature and humidity conditions. The SMCPS demonstrated a precise and stable capacitive response in monitoring subtle physiological signals and detecting motion, owing to its unique electrode structure. The flexible device was integrated with an Internet of Things module to create a smart glove system that enables real-time tracking of dynamic gestures. This system demonstrates exceptional performance in gesture recognition and prediction with artificial intelligence analysis, highlighting the potential of the SMCPS in human-machine interface applications.
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Affiliation(s)
- Qiang Zhao
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China.
- Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Tai Yuan 030051, China
| | - Lei Fan
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China.
- Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Tai Yuan 030051, China
| | - Nan Zhao
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Haoyun He
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China.
- Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Tai Yuan 030051, China
| | - Lei Zhang
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China.
- Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Tai Yuan 030051, China
| | - Qiulin Tan
- Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China.
- Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Tai Yuan 030051, China
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Hong W, Guo X, Zhang T, Zhang A, Yan Z, Zhang X, Li X, Guan Y, Liao D, Lu H, Liu H, Hu J, Niu Y, Hong Q, Zhao Y. Flexible Capacitive Pressure Sensor with High Sensitivity and Wide Range Based on a Cheetah Leg Structure via 3D Printing. ACS APPLIED MATERIALS & INTERFACES 2023; 15:46347-46356. [PMID: 37733928 DOI: 10.1021/acsami.3c09841] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/23/2023]
Abstract
Flexible pressure sensors can be used in human-computer interaction and wearable electronic devices, but one main challenge is to fabricate capacitive sensors with a wide pressure range and high sensitivity. Here, we designed a capacitive pressure sensor based on a bionic cheetah leg microstructure, validated the benefits of the bionic microstructure design, and optimized the structural feature parameters using 3D printing technology. The pressure sensor inspired by the cheetah leg shape has a high sensitivity (0.75 kPa-1), a wide linear sensing range (0-280 kPa), a fast response time of roughly 80 ms, and outstanding durability (24,000 cycles). Furthermore, the sensor can recognize a finger-operated mouse, monitor human motion, and transmit Morse code information. This work demonstrates that bionic capacitive pressure sensors hold considerable promise for use in wearable devices.
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Affiliation(s)
- Weiqiang Hong
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
- State Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, P. R. China
- Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, P. R. China
| | - Xiaohui Guo
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Tianxu Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Anqi Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Zihao Yan
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Xinyi Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Xianghui Li
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Yuxin Guan
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Dongzhi Liao
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Haochen Lu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Hanyu Liu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Jiangtao Hu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Yongzheng Niu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Qi Hong
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Yunong Zhao
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
- School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan 430074, P. R. China
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5
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Li X, Jiang L, Yan M, Bi H, Wang Q. Highly stretchable, tough and conductive chitin nanofiber composite hydrogel as a wearable sensor. Int J Biol Macromol 2023; 242:124780. [PMID: 37172700 DOI: 10.1016/j.ijbiomac.2023.124780] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/20/2023] [Revised: 04/21/2023] [Accepted: 05/04/2023] [Indexed: 05/15/2023]
Abstract
To meet the requirements of eco-friendly and sustainability in the 21st century, hydrogels based on biopolymer with conductivity and stretchable property have attained increasing attention for strain sensor. However, the as-prepared of hydrogel sensor with excellent mechanical property and high strain sensitivity is still a challenge. In this study, chitin nanofiber (ChNF) reinforced composite hydrogels of PACF are fabricated via a facile one-pot method. The obtained PACF composite hydrogel exhibits good transparency (80.6 % at 800 nm)and excellent mechanical properties (tensile strength, 261.2 kPa; tensile strain as high as 550.3 %). Moreover, the composite hydrogels also demonstrate excellent anti-compression performance. The composite hydrogels own good conductivity (1.20 S/m) and strain sensitivity. Most importantly, the hydrogel can be assembled as a strain/pressure sensor for detecting large-scale and small-scale human motion. Therefore, flexible conductive hydrogel strain sensors will have broad application prospects in artificial intelligence, electronic skin, and personal health.
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Affiliation(s)
- Xiaomeng Li
- School of Chemistry and Chemical Engineering, Anhui University, Hefei 230601, China
| | - Lei Jiang
- School of Chemistry and Chemical Engineering, Anhui University, Hefei 230601, China
| | - Manqing Yan
- School of Chemistry and Chemical Engineering, Anhui University, Hefei 230601, China
| | - Hong Bi
- School of Chemistry and Chemical Engineering, Anhui University, Hefei 230601, China
| | - Qiyang Wang
- School of Chemistry and Chemical Engineering, Anhui University, Hefei 230601, China.
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