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Manoccio M, Tasco V, Todisco F, Passaseo A, Cuscuna M, Tarantini I, Gigli G, Esposito M. Surface Lattice Resonances in 3D Chiral Metacrystals for Plasmonic Sensing. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2023; 10:e2206930. [PMID: 36575146 PMCID: PMC9951338 DOI: 10.1002/advs.202206930] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/26/2022] [Indexed: 06/17/2023]
Abstract
Chiral lattice modes are hybrid states arising from the chiral plasmonic particles assembled in ordered arrays with opportune periodicity. These resonances exhibit dependence on excitation handedness, and their observation in plasmonic lattices is strictly related to the chiroptical features of the fundamental plasmonic unit. Here, the emergence of chiral surface lattice resonances (c-SLRs) is shown in properly engineered arrays of nanohelices (NHs), fully three dimensional (3D) chiral nano-objects fabricated by focused ion beam processing. By tuning the relative weight of plasmonic and photonic components in the hybrid mode, the physical mechanism of strong diffractive coupling leading to the emergence of the lattice modes is analyzed, opening the way to the engineering of chiral plasmonic systems for sensing applications. In particular, a coupling regime is identified where the combination of a large intrinsic circular dichroism (CD) of the plasmonic resonance with a well-defined balance between the photonic quality factor (Q factor) and the plasmonic field enhancement (M) maximizes the capability of the system to discriminate refractive index (RI) changes in the surrounding medium. The results lay the foundation for exploiting CD in plasmonic lattices to high performance refractometric sensing.
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Affiliation(s)
| | | | | | - Adriana Passaseo
- CNR NANOTEC Institute of NanotechnologyVia MonteroniLecce73100Italy
| | - Massimo Cuscuna
- CNR NANOTEC Institute of NanotechnologyVia MonteroniLecce73100Italy
| | - Iolena Tarantini
- Department of Mathematics and Physics Ennio De GiorgiUniversity of SalentoVia ArnesanoLecce73100Italy
| | - Giuseppe Gigli
- CNR NANOTEC Institute of NanotechnologyVia MonteroniLecce73100Italy
- Department of Mathematics and Physics Ennio De GiorgiUniversity of SalentoVia ArnesanoLecce73100Italy
| | - Marco Esposito
- CNR NANOTEC Institute of NanotechnologyVia MonteroniLecce73100Italy
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Manoccio M, Esposito M, Passaseo A, Cuscunà M, Tasco V. Focused Ion Beam Processing for 3D Chiral Photonics Nanostructures. MICROMACHINES 2020; 12:6. [PMID: 33374782 PMCID: PMC7823276 DOI: 10.3390/mi12010006] [Citation(s) in RCA: 18] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/29/2020] [Revised: 12/08/2020] [Accepted: 12/08/2020] [Indexed: 12/12/2022]
Abstract
The focused ion beam (FIB) is a powerful piece of technology which has enabled scientific and technological advances in the realization and study of micro- and nano-systems in many research areas, such as nanotechnology, material science, and the microelectronic industry. Recently, its applications have been extended to the photonics field, owing to the possibility of developing systems with complex shapes, including 3D chiral shapes. Indeed, micro-/nano-structured elements with precise geometrical features at the nanoscale can be realized by FIB processing, with sizes that can be tailored in order to tune optical responses over a broad spectral region. In this review, we give an overview of recent efforts in this field which have involved FIB processing as a nanofabrication tool for photonics applications. In particular, we focus on FIB-induced deposition and FIB milling, employed to build 3D nanostructures and metasurfaces exhibiting intrinsic chirality. We describe the fabrication strategies present in the literature and the chiro-optical behavior of the developed structures. The achieved results pave the way for the creation of novel and advanced nanophotonic devices for many fields of application, ranging from polarization control to integration in photonic circuits to subwavelength imaging.
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Affiliation(s)
- Mariachiara Manoccio
- Department of Mathematics and Physics Ennio De Giorgi, University of Salento, Via Arnesano, 73100 Lecce, Italy
- CNR NANOTEC Institute of Nanotechnology, Via Monteroni, 73100 Lecce, Italy; (A.P.); (M.C.); (V.T.)
| | - Marco Esposito
- CNR NANOTEC Institute of Nanotechnology, Via Monteroni, 73100 Lecce, Italy; (A.P.); (M.C.); (V.T.)
| | - Adriana Passaseo
- CNR NANOTEC Institute of Nanotechnology, Via Monteroni, 73100 Lecce, Italy; (A.P.); (M.C.); (V.T.)
| | - Massimo Cuscunà
- CNR NANOTEC Institute of Nanotechnology, Via Monteroni, 73100 Lecce, Italy; (A.P.); (M.C.); (V.T.)
| | - Vittorianna Tasco
- CNR NANOTEC Institute of Nanotechnology, Via Monteroni, 73100 Lecce, Italy; (A.P.); (M.C.); (V.T.)
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Ganjian M, Angeloni L, Mirzaali MJ, Modaresifar K, Hagen CW, Ghatkesar MK, Hagedoorn PL, Fratila-Apachitei LE, Zadpoor AA. Quantitative mechanics of 3D printed nanopillars interacting with bacterial cells. NANOSCALE 2020; 12:21988-22001. [PMID: 32914826 DOI: 10.1039/d0nr05984f] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/10/2023]
Abstract
One of the methods to create sub-10 nm resolution metal-composed 3D nanopillars is electron beam-induced deposition (EBID). Surface nanotopographies (e.g., nanopillars) could play an important role in the design and fabrication of implantable medical devices by preventing the infections that are caused by the bacterial colonization of the implant surface. The mechanical properties of such nanoscale structures can influence their bactericidal efficiency. In addition, these properties are key factors in determining the fate of stem cells. In this study, we quantified the relevant mechanical properties of EBID nanopillars interacting with Staphylococcus aureus (S. aureus) using atomic force microscopy (AFM). We first determined the elastic modulus (17.7 GPa) and the fracture stress (3.0 ± 0.3 GPa) of the nanopillars using the quantitative imaging (QI) mode and contact mode (CM) of AFM. The displacement of the nanopillars interacting with the bacteria cells was measured by scanning electron microscopy (50.3 ± 9.0 nm). Finite element method based simulations were then applied to obtain the force-displacement curve of the nanopillars (considering the specified dimensions and the measured value of the elastic modulus) based on which an interaction force of 88.7 ± 36.1 nN was determined. The maximum von Mises stress of the nanopillars subjected to these forces was also determined (3.2 ± 0.3 GPa). These values were close to the maximum (i.e., fracture) stress of the pillars as measured by AFM, indicating that the nanopillars were close to their breaking point while interacting with S. aureus. These findings reveal unique quantitative data regarding the mechanical properties of nanopillars interacting with bacterial cells and highlight the possibilities of enhancing the bactericidal activity of the investigated EBID nanopillars by adjusting both their geometry and mechanical properties.
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Affiliation(s)
- Mahya Ganjian
- Department of Biomechanical Engineering, Faculty of Mechanical, Maritime, and Materials Engineering, Delft University of Technology, Mekelweg 2, 2628CD, Delft, The Netherlands.
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Pulsed Laser-Assisted Helium Ion Nanomachining of Monolayer Graphene-Direct-Write Kirigami Patterns. NANOMATERIALS 2019; 9:nano9101394. [PMID: 31574915 PMCID: PMC6835536 DOI: 10.3390/nano9101394] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/12/2019] [Revised: 09/24/2019] [Accepted: 09/27/2019] [Indexed: 12/22/2022]
Abstract
A helium gas field ion source has been demonstrated to be capable of realizing higher milling resolution relative to liquid gallium ion sources. One drawback, however, is that the helium ion mass is prohibitively low for reasonable sputtering rates of bulk materials, requiring a dosage that may lead to significant subsurface damage. Manipulation of suspended graphene is, therefore, a logical application for He+ milling. We demonstrate that competitive ion beam-induced deposition from residual carbonaceous contamination can be thermally mitigated via a pulsed laser-assisted He+ milling. By optimizing pulsed laser power density, frequency, and pulse width, we reduce the carbonaceous byproducts and mill graphene gaps down to sub 10 nm in highly complex kiragami patterns.
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Wu Y, Liu C, Moore TM, Magel GA, Garfinkel DA, Camden JP, Stanford MG, Duscher G, Rack PD. Exploring Photothermal Pathways via in Situ Laser Heating in the Transmission Electron Microscope: Recrystallization, Grain Growth, Phase Separation, and Dewetting in Ag0.5Ni0.5 Thin Films. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2018; 24:647-656. [PMID: 30588914 DOI: 10.1017/s1431927618015465] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
A new optical delivery system has been developed for the (scanning) transmission electron microscope. Here we describe the in situ and "rapid ex situ" photothermal heating modality of the system, which delivers >200 mW of optical power from a fiber-coupled laser diode to a 3.7 μm radius spot on the sample. Selected thermal pathways can be accessed via judicious choices of the laser power, pulse width, number of pulses, and radial position. The long optical working distance mitigates any charging artifacts and tremendous thermal stability is observed in both pulsed and continuous wave conditions, notably, no drift correction is applied in any experiment. To demonstrate the optical delivery system's capability, we explore the recrystallization, grain growth, phase separation, and solid state dewetting of a Ag0.5Ni0.5 film. Finally, we demonstrate that the structural and chemical aspects of the resulting dewetted films was assessed.
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Affiliation(s)
- Yueying Wu
- 1Department of Chemistry and Biochemistry,University of Notre Dame,Notre Dame,IN46556,USA
| | - Chenze Liu
- 2Department of Materials Science and Engineering,University of Tennessee,Knoxville,TN 37996,USA
| | | | | | - David A Garfinkel
- 2Department of Materials Science and Engineering,University of Tennessee,Knoxville,TN 37996,USA
| | - Jon P Camden
- 1Department of Chemistry and Biochemistry,University of Notre Dame,Notre Dame,IN46556,USA
| | - Michael G Stanford
- 2Department of Materials Science and Engineering,University of Tennessee,Knoxville,TN 37996,USA
| | - Gerd Duscher
- 2Department of Materials Science and Engineering,University of Tennessee,Knoxville,TN 37996,USA
| | - Philip D Rack
- 2Department of Materials Science and Engineering,University of Tennessee,Knoxville,TN 37996,USA
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Belić D, Shawrav MM, Bertagnolli E, Wanzenboeck HD. Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2017; 8:2530-2543. [PMID: 29259868 PMCID: PMC5727840 DOI: 10.3762/bjnano.8.253] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/30/2017] [Accepted: 11/08/2017] [Indexed: 06/07/2023]
Abstract
This work presents a highly effective approach for the chemical purification of directly written 2D and 3D gold nanostructures suitable for plasmonics, biomolecule immobilisation, and nanoelectronics. Gold nano- and microstructures can be fabricated by one-step direct-write lithography process using focused electron beam induced deposition (FEBID). Typically, as-deposited gold nanostructures suffer from a low Au content and unacceptably high carbon contamination. We show that the undesirable carbon contamination can be diminished using a two-step process - a combination of optimized deposition followed by appropriate postdeposition cleaning. Starting from the common metal-organic precursor Me2-Au-tfac, it is demonstrated that the Au content in pristine FEBID nanostructures can be increased from 30 atom % to as much as 72 atom %, depending on the sustained electron beam dose. As a second step, oxygen-plasma treatment is established to further enhance the Au content in the structures, while preserving their morphology to a high degree. This two-step process represents a simple, feasible and high-throughput method for direct writing of purer gold nanostructures that can enable their future use for demanding applications.
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Affiliation(s)
- Domagoj Belić
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
- University of Liverpool, Department of Chemistry, Crown Street, Liverpool L69 7ZD, United Kingdom
| | - Mostafa M Shawrav
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
- Institute of Sensors & Actuator System, TU Wien, Gusshausstrasse 27–29, 1040 Vienna, Austria
| | - Emmerich Bertagnolli
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
| | - Heinz D Wanzenboeck
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
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Mansilla C, Zondag Y, Mulders JJL, Trompenaars PHF. Comparison of Pd electron beam induced deposition using two precursors and an oxygen purification strategy. NANOTECHNOLOGY 2017; 28:375302. [PMID: 28617672 DOI: 10.1088/1361-6528/aa79e8] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Focused electron beam induced deposition (FEBID) allows the creation of nanoscale structures through dissociation of an organo-metallic precursor by electrons at the beam impact point. The deposition of Pd can be interesting for its catalytic behavior and ability to contact carbon based materials. Two precursors were investigated-Pd(hfac)2 and (Cp)Pd(allyl)-and two deposition methods: with and without an in situ oxygen purification process. The deposition parameters can be tuned for the Pd(hfac)2 precursor to provide a deposition with 23 ± 2 at.% of Pd and a main component of C at 51 ± 3 at.% and minor components of O and F. An in situ purification process using O2 was much faster than expected and improved the Pd content to up to >65 at.% while reducing the C to ∼20 at.%, and avoiding the oxidation of Pd. The resistivity was ∼100 μOhm · cm and compares favorably with a bulk value of 10 μOhm · cm. The (Cp)Pd(allyl) precursor is interesting because it does not release fluorine during the deposition and hence it does not etch a possible substrate. Its FEBID deposition had a composition of 26 ± 5 at.% of Pd with 74 ± 5 at.% of C. The O2 purification process can improve the Pd content up to ∼60 at.% while reducing C to <20 at.%, but also increasing the O content to 18 at%, which was released afterwards. The best resistivity was measured at ∼1000 μOhm · cm, although better values can be anticipated for longer post treatment times.
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Hirt L, Reiser A, Spolenak R, Zambelli T. Additive Manufacturing of Metal Structures at the Micrometer Scale. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2017; 29. [PMID: 28052421 DOI: 10.1002/adma.201604211] [Citation(s) in RCA: 108] [Impact Index Per Article: 15.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/05/2016] [Revised: 11/03/2016] [Indexed: 05/06/2023]
Abstract
Currently, the focus of additive manufacturing (AM) is shifting from simple prototyping to actual production. One driving factor of this process is the ability of AM to build geometries that are not accessible by subtractive fabrication techniques. While these techniques often call for a geometry that is easiest to manufacture, AM enables the geometry required for best performance to be built by freeing the design process from restrictions imposed by traditional machining. At the micrometer scale, the design limitations of standard fabrication techniques are even more severe. Microscale AM thus holds great potential, as confirmed by the rapid success of commercial micro-stereolithography tools as an enabling technology for a broad range of scientific applications. For metals, however, there is still no established AM solution at small scales. To tackle the limited resolution of standard metal AM methods (a few tens of micrometers at best), various new techniques aimed at the micrometer scale and below are presently under development. Here, we review these recent efforts. Specifically, we feature the techniques of direct ink writing, electrohydrodynamic printing, laser-assisted electrophoretic deposition, laser-induced forward transfer, local electroplating methods, laser-induced photoreduction and focused electron or ion beam induced deposition. Although these methods have proven to facilitate the AM of metals with feature sizes in the range of 0.1-10 µm, they are still in a prototype stage and their potential is not fully explored yet. For instance, comprehensive studies of material availability and material properties are often lacking, yet compulsory for actual applications. We address these items while critically discussing and comparing the potential of current microscale metal AM techniques.
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Affiliation(s)
- Luca Hirt
- ETH and University of Zürich, Institute for Biomedical Engineering, Laboratory of Biosensors and Bioelectronics, Gloriastrasse 35, CH-8092, Zurich, Switzerland
| | - Alain Reiser
- ETH Zürich, Department of Materials, Laboratory for Nanometallurgy, Vladimir-Prelog-Weg 5, CH-8093, Zurich, Switzerland
| | - Ralph Spolenak
- ETH Zürich, Department of Materials, Laboratory for Nanometallurgy, Vladimir-Prelog-Weg 5, CH-8093, Zurich, Switzerland
| | - Tomaso Zambelli
- ETH and University of Zürich, Institute for Biomedical Engineering, Laboratory of Biosensors and Bioelectronics, Gloriastrasse 35, CH-8092, Zurich, Switzerland
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Lewis BB, Winkler R, Sang X, Pudasaini PR, Stanford MG, Plank H, Unocic RR, Fowlkes JD, Rack PD. 3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2017; 8:801-812. [PMID: 28487823 PMCID: PMC5389181 DOI: 10.3762/bjnano.8.83] [Citation(s) in RCA: 15] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/29/2016] [Accepted: 03/20/2017] [Indexed: 05/23/2023]
Abstract
We investigate the growth, purity, grain structure/morphology, and electrical resistivity of 3D platinum nanowires synthesized via electron beam induced deposition with and without an in situ pulsed laser assist process which photothermally couples to the growing Pt-C deposits. Notably, we demonstrate: 1) higher platinum concentration and a coalescence of the otherwise Pt-C nanogranular material, 2) a slight enhancement in the deposit resolution and 3) a 100-fold improvement in the conductivity of suspended nanowires grown with the in situ photothermal assist process, while retaining a high degree of shape fidelity.
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Affiliation(s)
- Brett B Lewis
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
| | - Robert Winkler
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | - Xiahan Sang
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
| | - Pushpa R Pudasaini
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
| | - Michael G Stanford
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
| | - Harald Plank
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
| | - Raymond R Unocic
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
| | - Jason D Fowlkes
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
| | - Philip D Rack
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA
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Stanford MG, Lewis BB, Iberi V, Fowlkes JD, Tan S, Livengood R, Rack PD. In Situ Mitigation of Subsurface and Peripheral Focused Ion Beam Damage via Simultaneous Pulsed Laser Heating. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2016; 12:1779-1787. [PMID: 26864147 DOI: 10.1002/smll.201503680] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/04/2015] [Revised: 01/08/2016] [Indexed: 06/05/2023]
Abstract
Focused helium and neon ion (He(+)/Ne(+)) beam processing has recently been used to push resolution limits of direct-write nanoscale synthesis. The ubiquitous insertion of focused He(+)/Ne(+) beams as the next-generation nanofabrication tool-of-choice is currently limited by deleterious subsurface and peripheral damage induced by the energetic ions in the underlying substrate. The in situ mitigation of subsurface damage induced by He(+)/Ne(+) ion exposures in silicon via a synchronized infrared pulsed laser-assisted process is demonstrated. The pulsed laser assist provides highly localized in situ photothermal energy which reduces the implantation and defect concentration by greater than 90%. The laser-assisted exposure process is also shown to reduce peripheral defects in He(+) patterned graphene, which makes this process an attractive candidate for direct-write patterning of 2D materials. These results offer a necessary solution for the applicability of high-resolution direct-write nanoscale material processing via focused ion beams.
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Affiliation(s)
- Michael G Stanford
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN, 37996, USA
| | - Brett B Lewis
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN, 37996, USA
| | - Vighter Iberi
- Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37381, USA
| | - Jason D Fowlkes
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN, 37996, USA
- Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37381, USA
| | - Shida Tan
- Intel Corporation Santa Clara, MS: SC9-68, 2200 Mission College Blvd, CA, 95054, USA
| | - Rick Livengood
- Intel Corporation Santa Clara, MS: SC9-68, 2200 Mission College Blvd, CA, 95054, USA
| | - Philip D Rack
- Materials Science and Engineering Department, University of Tennessee, Knoxville, TN, 37996, USA
- Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37381, USA
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