Reduction of Line Edge Roughness of Polystyrene-block-Poly(methyl methacrylate) Copolymer Nanopatterns By Introducing Hydrogen Bonding at the Junction Point of Two Block Chains

Lamellar Microphase Separation and Phase Transition of Hydrogen-Bonding/Crystalline Statistical Copolymers: Amide Functionalization at the Interface

Microphase separation of random copolymers, as well as that of high χ-low N block copolymers, is promising to construct sub-10-nm structures into materials. Herein, we designed statistical copolymers consisting of 2-hydroxyethyl acrylate (HEA) and N-octadecylacrylamide (ODAAm) to produce crystallization and hydrogen bond-assisted lamellar structure materials. The copolymers not only formed a crystalline lamellar structure with 3-4 nm domain spacing but also maintained an amorphous lamellar structure via phase transition above the melting temperature up to approximately 100 °C. The key is to introduce hydrogen-bonding amide junctions between the octadecyl groups and the polymer backbones, by which the polymer chains are physically fixed at the interface of lamellar structures even above the melting temperature. The stabilization of the lamellar structure by the amide units is also supported by the fact that the lamellar structure of all-acrylate random copolymers bearing hydroxyethyl and crystalline octadecyl groups is disordered above the melting temperature. By spin-coating on a silicon substrate, the HEA/ODAAm copolymer formed a multilayered lamellar thin film consisting of a hydrophilic hydroxyethyl/main chain phase and a hydrophobic octadecyl phase. The structure and order-disorder transition were analyzed by neutron reflectivity.

Enhanced etching resolution of self-assembled PS-b-PMMA block copolymer films by ionic liquid additives

Polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) is one of the most widely studied block copolymers for direct self-assembly because of its excellent compatibility with traditional processes. However, pattern transfer of PS-b-PMMA block copolymers (BCPs) remains a great challenge for its applications due to the insufficient etching resolution. In this study, the effect of ionic liquid 1-hexyl-3-methylimidazolium hexafluorophosphate (HMHF) additives on the line edge roughness (LER) performances of PS-b-PMMA self-assembled patterns was studied. Trace addition of HMHF kept the photolithography compatibility of PS-b-PMMA block copolymer films, but obviously increased their Flory-Huggins interaction parameter (χ) and enabled phase separation of disordered low molecular weight BCPs. LER value was effectively decreased by blending HMHF directly with PS-b-PMMA or from a supplying top layer of polyvinylpyrrolidone containing HMHF additives. This study shows an excellent strategy to improve the deficiencies of existing block copolymers.

Unidirectional Perpendicularly Aligned Lamella-Structured Oligosaccharide (A) ABA Triblock Elastomer (B) Thin Films Utilizing Triazolium+/TFSI- Ionic Nanochannels

We designed and synthesized high χ-low N-maltoheptaose-(triazolium+/N(SO2CF3)2-)-polyisoprene-(triazolium+/N(SO2CF3)2-)-maltoheptaose ABA triblock elastomers featuring triazolium+/N(SO2CF3)2- (TFSI-) counteranion ionic interfaces separating their constituting polymeric sub-blocks. Spin-coated and solvent-vapor-annealed (SVA) MH1.2k-(T+/TFSI-)-PI4.3k-(T+/TFSI-)-MH1.2k thin films demonstrate interface-induced charge cohesion through ca. 1 nm "thick" ionic nanochannels which facilitate the self-assembly of a perpendicularly aligned lamellar structure. Atomic force microscopy (AFM) and (grazing-incidence) small-angle X-ray scattering ((GI)SAXS) characterizations of MH1.2k-(T+/TFSI-)-PI4.3k-(T+/TFSI-)-MH1.2k and pristine triBCP analogous thin films revealed sub-10 nm block copolymer (BCP) self-assembly and unidirectionally aligned nanostructures developed over several μm2 areas. Solvated TFSI- counterions enhance the oligosaccharide sub-block packing during SVA. The overall BCP phase behavior was mapped through SAXS characterizations comparing di- vs triblock polymeric architectures, a middle PI sub-block with two different molecular masses, and TFSI- or I- counteranion effects. This work highlights the benefits of inducing single-point electrostatic interactions within chemical structures of block copolymers to master the long-range self-assembly of prescribed morphologies.

Modulating Microphase Separation of Lamellae-Forming Diblock Copolymers via Ionic Junctions

We present a molecular dynamics simulation study investigating the phase behavior of lamellae-forming diblock copolymers with a single ionic junction on the backbone. Our results show qualitative agreement with experimental findings regarding enhanced microphase separation with the introduction of an ionic junction at the conjunction point, while further revealing nonmonotonic changes in domain spacing and order-disorder transition as a function of the electrostatic interaction strength. This highlights the dominant roles of entropic and binding effects of counterions under weak and strong ionic correlations, respectively. The location of the ionic junction is found to effectively modulate the charge distribution and chain conformation in the ordered domains; its presence in the middle of a block promotes folding of the block, leading to a smaller domain size. These findings demonstrate the interplay of ionic coupling with steric hindrance and chain end effects, which enhances our understanding of the delicate control over the microphase domain features.

Quantification for the Mixing of Polymers on Microspheres in Waterborne Latex Films

Although tremendous efforts have been devoted to the structural analysis and understanding of the toughness of latex films, in which soft elastomer microspheres are interpenetrated, a method to quantitatively analyze the mixing of polymer chains at the microsphere surface, i.e., delocalization of hydrophilic charged group on the polymer chains by aging, has not yet been established. In this study, small-angle X-ray scattering was applied to characterize latex films by assuming a pseudo-two-phase system, which consists of an average-electron density microsphere core and a high-electron density interphase between the microsphere interfaces due to localized charged groups. The thus obtained parameter, i.e., the characteristic interfacial thickness (t_inter), quantitatively reflects the degree of mixing of polymer chains on the microsphere surface. We found that t_inter is strongly correlated to the fracture energy of the latex films. The proposed analysis method for the microscopic mixing of polymers on the microsphere surface in the film can thus be expected to shed light on design guidelines for industrial latex films and on the understanding of the mechanical properties of such films.

Characterisation of the PS-PMMA Interfaces in Microphase Separated Block Copolymer Thin Films by Analytical (S)TEM

Block copolymer (BCP) self-assembly is a promising tool for next generation lithography as microphase separated polymer domains in thin films can act as templates for surface nanopatterning with sub-20 nm features. The replicated patterns can, however, only be as precise as their templates. Thus, the investigation of the morphology of polymer domains is of great importance. Commonly used analytical techniques (neutron scattering, scanning force microscopy) either lack spatial information or nanoscale resolution. Using advanced analytical (scanning) transmission electron microscopy ((S)TEM), we provide real space information on polymer domain morphology and interfaces between polystyrene (PS) and polymethylmethacrylate (PMMA) in cylinder- and lamellae-forming BCPs at highest resolution. This allows us to correlate the internal structure of polymer domains with line edge roughnesses, interface widths and domain sizes. STEM is employed for high-resolution imaging, electron energy loss spectroscopy and energy filtered TEM (EFTEM) spectroscopic imaging for material identification and EFTEM thickness mapping for visualisation of material densities at defects. The volume fraction of non-phase separated polymer species can be analysed by EFTEM. These methods give new insights into the morphology of polymer domains the exact knowledge of which will allow to improve pattern quality for nanolithography.

Directed Self-Assembly of Liquid-Crystalline Molecular Building Blocks for Sub-5 nm Nanopatterning

The thin-film directed self-assembly of molecular building blocks into oriented nanostructure arrays enables next-generation lithography at the sub-5 nm scale. Currently, the fabrication of inorganic arrays from molecular building blocks is restricted by the limited long-range order and orientation of the materials, as well as suitable methodologies for creating lithographic templates at sub-5 nm dimensions. In recent years, higher-order liquid crystals have emerged as functional thin films for organic electronics, nanoporous membranes, and templated synthesis, which provide opportunities for their use as lithographic templates. By choosing examples from these fields, recent progress toward the design of molecular building blocks is highlighted, with an emphasis on liquid crystals, to access sub-5 nm features, their directed self-assembly into oriented thin films, and, importantly, the fabrication of inorganic arrays. Finally, future challenges regarding sub-5 nm patterning with liquid crystals are discussed.