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Liang L, Zhang H, Li T, Li W, Gao J, Zhang H, Guo M, Gao S, He Z, Liu F, Ning C, Cao H, Yuan G, Liu C. Addressing the Conflict between Mobility and Stability in Oxide Thin-film Transistors. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2023; 10:e2300373. [PMID: 36935362 DOI: 10.1002/advs.202300373] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/17/2023] [Revised: 02/28/2023] [Indexed: 05/18/2023]
Abstract
Amorphous oxide semiconductor thin-film transistors (AOS TFTs) are ever-increasingly utilized in displays. However, to bring high mobility and excellent stability together is a daunting challenge. Here, the carrier transport/relaxation bilayer stacked AOS TFTs are investigated to solve the mobility-stability conflict. The charge transport layer (CTL) is made of amorphous In-rich InSnZnO, which favors big average effective coordination number for all cations and more edge-shared structures for better charge transport. Praseodymium-doped InSnZnO is used as the charge relaxation layer (CRL), which substantially shortens the photoelectron lifetime as revealed by femtosecond transient absorption spectroscopy. The CTL and CRL with the thickness suitable for industrial production respectively afford minute potential barrier fluctuation for charge transport and fast relaxation for photo-generated carriers, resulting in transistors with an ultrahigh mobility (75.5 cm2 V-1 s-1 ) and small negative-bias-illumination-stress/positive-bias-temperature-stress voltage shifts (-1.64/0.76 V). The design concept provides a promising route to address the mobility-stability conflict for high-end displays.
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Affiliation(s)
- Lingyan Liang
- Laboratory of Advanced Nano Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, P. R. China
| | - Hengbo Zhang
- Laboratory of Advanced Nano Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, P. R. China
| | - Ting Li
- Laboratory of Advanced Nano Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, P. R. China
| | - Wanfa Li
- Laboratory of Advanced Nano Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, P. R. China
| | - Junhua Gao
- Laboratory of Advanced Nano Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, P. R. China
| | - Hongliang Zhang
- Laboratory of Advanced Nano Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, P. R. China
| | - Min Guo
- State Key Lab of Opto-Electronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou, 510275, P. R. China
| | - Shangpeng Gao
- Department of Materials Science, Fudan University, Shanghai, 200433, P. R. China
| | - Zirui He
- Department of Materials Science, Fudan University, Shanghai, 200433, P. R. China
| | - Fengjuan Liu
- Laboratory of Advanced Nano Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, P. R. China
| | - Ce Ning
- BOE Technology Group Co. Ltd., Beijing, 100176, P. R. China
| | - Hongtao Cao
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Guangcai Yuan
- BOE Technology Group Co. Ltd., Beijing, 100176, P. R. China
| | - Chuan Liu
- State Key Lab of Opto-Electronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou, 510275, P. R. China
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Lan L, Ding C, He P, Su H, Huang B, Xu J, Zhang S, Peng J. The Mechanism of the Photostability Enhancement of Thin-Film Transistors Based on Solution-Processed Oxide Semiconductors Doped with Tetravalent Lanthanides. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:nano12213902. [PMID: 36364678 PMCID: PMC9655621 DOI: 10.3390/nano12213902] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/05/2022] [Revised: 10/19/2022] [Accepted: 11/01/2022] [Indexed: 05/29/2023]
Abstract
The applications of thin-film transistors (TFTs) based on oxide semiconductors are limited due to instability under negative bias illumination stress (NBIS). Here, we report TFTs based on solution-processed In2O3 semiconductors doped with Pr4+ or Tb4+, which can effectively improve the NBIS stability. The differences between the Pr4+-doped In2O3 (Pr:In2O3) and Tb4+-doped In2O3 (Tb:In2O3) are investigated in detail. The undoped In2O3 TFTs with different annealing temperatures exhibit poor NBIS stability with serious turn-on voltage shift (ΔVon). After doping with Pr4+/Tb4+, the TFTs show greatly improved NBIS stability. As the annealing temperature increases, the Pr:In2O3 TFTs have poorer NBIS stability (ΔVon are -3.2, -4.8, and -4.8 V for annealing temperature of 300, 350, and 400 °C, respectively), while the Tb:In2O3 TFTs have better NBIS stability (ΔVon are -3.6, -3.6, and -1.2 V for annealing temperature of 300, 350, and 400 ℃, respectively). Further studies reveal that the improvement of the NBIS stability of the Pr4+/Tb4+:In2O3 TFTs is attributed to the absorption of the illuminated light by the Pr/Tb4fn-O2p6 to Pr/Tb 4fn+1-O2p5 charge transfer (CT) transition and downconversion of the light to nonradiative transition with a relatively short relaxation time compared to the ionization process of the oxygen vacancies. The higher NBIS stability of Tb:In2O3 TFTs compared to Pr:In2O3 TFTs is ascribed to the smaller ion radius of Tb4+ and the lower energy level of Tb 4f7 with a isotropic half-full configuration compared to that of Pr 4f1, which would make it easier for the Tb4+ to absorb the visible light than the Pr4+.
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Affiliation(s)
- Linfeng Lan
- State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China
| | - Chunchun Ding
- State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China
| | - Penghui He
- School of Physics and Electronics, Hunan University, Changsha 410082, China
| | - Huimin Su
- State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China
| | - Bo Huang
- State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China
| | - Jintao Xu
- State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China
| | - Shuguang Zhang
- State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China
| | - Junbiao Peng
- State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China
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Effect of Sputtering Oxygen Partial Pressure on the Praseodymium-Doped InZnO Thin Film Transistor Using Microwave Photoconductivity Decay Method. MICROMACHINES 2021; 12:mi12091044. [PMID: 34577688 PMCID: PMC8465624 DOI: 10.3390/mi12091044] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/23/2021] [Revised: 08/22/2021] [Accepted: 08/27/2021] [Indexed: 12/04/2022]
Abstract
The praseodymium-doped indium-zinc-oxide (PrIZO) thin film transistor (TFT) shows broad application prospects in the new generation of display technologies due to its high performance and high stability. However, traditional device performance evaluation methods need to be carried out after the end of the entire preparation process, which leads to the high-performance device preparation process that takes a lot of time and costs. Therefore, there is a lack of effective methods to optimize the device preparation process. In this paper, the effect of sputtering oxygen partial pressure on the properties of PrIZO thin film was studied, and the quality of PrIZO thin film was quickly evaluated by the microwave photoconductivity decay (µ-PCD) method. The μ-PCD results show that as the oxygen partial pressure increases, the peak first increases and then decreases, while the D value shows the opposite trend. The quality of PrIZO thin film prepared under 10% oxygen partial pressure is optimal due to its low localized defect states. The electric performance of PrIZO TFTs prepared under different oxygen partial pressures is consistent with the μ-PCD results. The optimal PrIZO TFT prepared under 10% oxygen partial pressure exhibits good electric performance with a threshold voltage (Vth) of 1.9 V, a mobility (µsat) of 24.4 cm2·V−1·s−1, an Ion/Ioff ratio of 2.03 × 107, and a subthreshold swing (SS) of 0.14 V·dec−1.
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Jeong J, Seo SG, Yu SM, Kang Y, Song J, Jin SH. Flexible Light-to-Frequency Conversion Circuits Built with Si-Based Frequency-to-Digital Converters via Complementary Photosensitive Ring Oscillators with p-Type SWNT and n-Type a-IGZO Thin Film Transistors. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2021; 17:e2008131. [PMID: 33969631 DOI: 10.1002/smll.202008131] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/27/2020] [Revised: 03/25/2021] [Indexed: 06/12/2023]
Abstract
In this study, as system-level photodetectors, light-to-frequency conversion circuits (LFCs) are realized by i) photosensitive ring oscillators (ROs) composed of amorphous indium-gallium-zinc-oxide/single-walled carbon nanotube (a-IGZO/SWNT) thin film transistors (TFTs) and ii) phase-locked-loop Si circuits built with frequency-to-digital converters (PFDC). The 3-stage ROs and logic gates based on a-IGZO/SWNT TFTs successfully demonstrate its performance on flexible substrates. Herein, along with the advantage of scalability, a-IGZO films are used as photosensitive n-type TFTs and SWNTs are employed as photo-insensitive p-type TFTs for better photosensitivity in circuit level. Through the controlling a post-annealing condition of a-IGZO film, responsivities and detectivities of a-IGZO TFTs are obtained as 36 AW-1 and 0.3 × 1012 Jones for red, 93 AW-1 and 3.1 × 1012 Jones for green, and 194 AW-1 and 11.7 × 1012 Jones for blue. Furthermore, as an advanced demonstration for practical application of LFCs, a unique circuit (i.e., PFDC) is designed to analyze the generated oscillation frequency (fosc ) from the LFC device and convert it to a digital code. As a result, the designed PFDC can exactly count the generated fosc from the flexible a-IGZO/SWNT ROs under light illumination with an outstanding sensitivity and assign input frequencies to respective digital code.
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Affiliation(s)
- Jinheon Jeong
- Department of Electronic Engineering, Incheon National University, Academy-ro 119, Yeongsu-gu, Incheon, 22012, Republic of Korea
| | - Seung Gi Seo
- Department of Electronic Engineering, Incheon National University, Academy-ro 119, Yeongsu-gu, Incheon, 22012, Republic of Korea
| | - Seung-Myeong Yu
- Department of Electronic Engineering, Incheon National University, Academy-ro 119, Yeongsu-gu, Incheon, 22012, Republic of Korea
| | - Yunha Kang
- Department of Electronic Engineering, Incheon National University, Academy-ro 119, Yeongsu-gu, Incheon, 22012, Republic of Korea
| | - Junyoung Song
- Department of Electronic Engineering, Incheon National University, Academy-ro 119, Yeongsu-gu, Incheon, 22012, Republic of Korea
| | - Sung Hun Jin
- Department of Electronic Engineering, Incheon National University, Academy-ro 119, Yeongsu-gu, Incheon, 22012, Republic of Korea
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Tiwari N, Nirmal A, Kulkarni MR, John RA, Mathews N. Enabling high performance n-type metal oxide semiconductors at low temperatures for thin film transistors. Inorg Chem Front 2020. [DOI: 10.1039/d0qi00038h] [Citation(s) in RCA: 23] [Impact Index Per Article: 5.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/29/2022]
Abstract
The review highlights low temperature activation processes for high performance n-type metal oxide semiconductors for TFTs.
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Affiliation(s)
- Nidhi Tiwari
- Energy Research Institute @ NTU (ERI@N)
- Nanyang Technological University
- Singapore 637553
| | - Amoolya Nirmal
- School of Materials Science and Engineering
- Nanyang Technological University
- Singapore 639798
| | | | - Rohit Abraham John
- School of Materials Science and Engineering
- Nanyang Technological University
- Singapore 639798
| | - Nripan Mathews
- Energy Research Institute @ NTU (ERI@N)
- Nanyang Technological University
- Singapore 637553
- School of Materials Science and Engineering
- Nanyang Technological University
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