1
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Wright AJ, Nasralla HH, Deshmukh R, Jamalzadeh M, Hannigan M, Patera A, Li Y, Manzo-Perez M, Parashar N, Huang Z, Udumulla T, Chen W, De Forni D, Weck M, de Peppo GM, Riedo E, Shahrjerdi D. Nanoscale-localized multiplexed biological activation of field effect transistors for biosensing applications. NANOSCALE 2024; 16:19620-19632. [PMID: 39324869 DOI: 10.1039/d4nr02535k] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/27/2024]
Abstract
The rise in antibiotic-resistant pathogens, highly infectious viruses, and chronic diseases has prompted the search for rapid and versatile medical tests that can be performed by the patient. Field-effect transistor (FET)-based electronic biosensing platforms are particularly attractive due to their sensitivity, fast turn-around time, potential for parallel detection of multiple pathogens, and compatibility with semiconductor manufacturing. However, an unmet critical need is a scalable, site-selective multiplexed biofunctionalization method with nanoscale precision for immobilizing different types of pathogen-specific bioreceptors on individual FETs, preventing parallel detection of multiple targets. Here, we propose a paradigm shift in FET biofunctionalization using thermal scanning probe lithography (tSPL) with a thermochemically sensitive polymer. This polymer can be spin-coated on fully-fabricated FET chips, making this approach applicable to any FET sensor material and technology. Crucially, we demonstrate the spatially selective multiplexed functionalization capability of this method by immobilizing different types of bioreceptors at prescribed locations on a chip with sub-20 nm resolution, paving the way for massively parallel FET detection of multiple pathogens. Antibody- and aptamer-modified graphene FET sensors are then realized, achieving ultra-sensitive detection of a minimum measured concentrations of 3 aM of SARS-CoV-2 spike proteins and 10 human SARS-CoV-2 infectious live virus particles per ml, and selectivity against human influenza A (H1N1) live virus.
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Affiliation(s)
- Alexander James Wright
- Department of Chemical and Biomolecular Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
- Department of Electrical and Computer Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
| | - Hashem Hassan Nasralla
- Department of Chemical and Biomolecular Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
| | - Rahul Deshmukh
- Department of Chemical and Biomolecular Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
- Department of Electrical and Computer Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
| | - Moeid Jamalzadeh
- Department of Electrical and Computer Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
| | - Matthew Hannigan
- Department of Chemistry, New York University, New York, NY, 10003, USA
| | - Andrew Patera
- Department of Cell Biology, SUNY Downstate Health Sciences University, Brooklyn, NY 11203, USA
- Mirimus, Inc, 760 Parkside Ave, Brooklyn, NY, 11226, USA
| | - Yanxiao Li
- Department of Chemical and Biomolecular Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
| | - Miguel Manzo-Perez
- Department of Electrical and Computer Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
| | - Nitika Parashar
- Department of Chemical and Biomolecular Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
| | - Zhujun Huang
- Department of Electrical and Computer Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
| | | | - Weiqiang Chen
- Department of Biomedical Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA
| | - Davide De Forni
- ViroStatics S.r.l., Viale Umberto I, 46, 07100 Sassari, Italy
| | - Marcus Weck
- Department of Chemistry, New York University, New York, NY, 10003, USA
| | | | - Elisa Riedo
- Department of Chemical and Biomolecular Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
| | - Davood Shahrjerdi
- Department of Electrical and Computer Engineering, Tandon School of Engineering, New York University, Brooklyn, NY, 11201, USA.
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2
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Ramò L, Giordano MC, Ferrando G, Canepa P, Telesio F, Repetto L, Buatier de Mongeot F, Canepa M, Bisio F. Thermal Scanning-Probe Lithography for Broad-Band On-Demand Plasmonic Nanostructures on Transparent Substrates. ACS APPLIED NANO MATERIALS 2023; 6:18623-18631. [PMID: 37854851 PMCID: PMC10580238 DOI: 10.1021/acsanm.3c04398] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/14/2023] [Accepted: 09/21/2023] [Indexed: 10/20/2023]
Abstract
Thermal scanning-probe lithography (t-SPL) is a high-resolution nanolithography technique that enables the nanopatterning of thermosensitive materials by means of a heated silicon tip. It does not require alignment markers and gives the possibility to assess the morphology of the sample in a noninvasive way before, during, and after the patterning. In order to exploit t-SPL at its peak performances, the writing process requires applying an electric bias between the scanning hot tip and the sample, thereby restricting its application to conductive, optically opaque, substrates. In this work, we show a t-SPL-based method, enabling the noninvasive high-resolution nanolithography of photonic nanostructures onto optically transparent substrates across a broad-band visible and near-infrared spectral range. This was possible by intercalating an ultrathin transparent conductive oxide film between the dielectric substrate and the sacrificial patterning layer. This way, nanolithography performances comparable with those typically observed on conventional semiconductor substrates are achieved without significant changes of the optical response of the final sample. We validated this innovative nanolithography approach by engineering periodic arrays of plasmonic nanoantennas and showing the capability to tune their plasmonic response over a broad-band visible and near-infrared spectral range. The optical properties of the obtained systems make them promising candidates for the fabrication of hybrid plasmonic metasurfaces supported onto fragile low-dimensional materials, thus enabling a variety of applications in nanophotonics, sensing, and thermoplasmonics.
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Affiliation(s)
- Lorenzo Ramò
- OptMatLab,
Dipartimento di Fisica, Università
di Genova, Via Dodecaneso 33, I-16146 Genova, Italy
| | - Maria Caterina Giordano
- LabNano,
Dipartimento di Fisica, Università
di Genova, Via Dodecaneso
33, I-16146 Genova, Italy
| | - Giulio Ferrando
- LabNano,
Dipartimento di Fisica, Università
di Genova, Via Dodecaneso
33, I-16146 Genova, Italy
| | - Paolo Canepa
- OptMatLab,
Dipartimento di Fisica, Università
di Genova, Via Dodecaneso 33, I-16146 Genova, Italy
| | - Francesca Telesio
- Dipartimento
di Fisica, Università di Genova, Via Dodecaneso 33, I-16146 Genova, Italy
| | - Luca Repetto
- Nanomed
Laboratories, Dipartimento di Fisica, Università
di Genova, Via Dodecaneso
33, I-16146 Genova, Italy
| | | | - Maurizio Canepa
- OptMatLab,
Dipartimento di Fisica, Università
di Genova, Via Dodecaneso 33, I-16146 Genova, Italy
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3
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Zanut A, Li R, Deng R, Liu X, Rejhon M, Chen W, Weck M, de Peppo GM, Riedo E. A Polymer Canvas with the Stiffness of the Bone Matrix to Study and Control Mesenchymal Stem Cell Response. Adv Healthc Mater 2022; 12:e2201503. [PMID: 36565136 DOI: 10.1002/adhm.202201503] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/22/2022] [Revised: 11/30/2022] [Indexed: 12/25/2022]
Abstract
Reproducing in vitro the complex multiscale physical features of human tissues creates novel biomedical opportunities and fundamental understanding of cell-environment interfaces and interactions. While stiffness has been recognized as a key driver of cell behavior, systematic studies on the role of stiffness have been limited to values in the KPa-MPa range, significantly below the stiffness of bone. Here, a platform enabling the tuning of the stiffness of a biocompatible polymeric interface up to values characteristic of human bone is reported, which are in the GPa range, by using extremely thin polymer films on glass and cross-linking the films using ultraviolet (UV) light irradiation. It is shown that a higher stiffness is related to better adhesion, proliferation, and osteogenic differentiation, and that it is possible to switch on/off cell attachment and growth by solely tuning the stiffness of the interface, without any surface chemistry or topography modification. Since the stiffness is tuned directly by UV irradiation, this platform is ideal for rapid and simple fabrication of stiffness patterns and gradients, thus representing an innovative tool for combinatorial studies of the synergistic effect of tissue environmental cues on cell behavior, and creates new opportunities for next-generation biosensors, single-cell patterning, and lab-on-a-chip devices.
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Affiliation(s)
- Alessandra Zanut
- Tandon School of Engineering, New York University, 6 Metrotech, Brooklyn, NY, 11201, USA
| | - Rui Li
- Tandon School of Engineering, New York University, 6 Metrotech, Brooklyn, NY, 11201, USA
| | - Ru Deng
- Department of Chemistry, New York University, Silver Center Block, 100 Washington Square E, New York, NY, 10003, USA
| | - Xiangyu Liu
- Tandon School of Engineering, New York University, 6 Metrotech, Brooklyn, NY, 11201, USA
| | - Martin Rejhon
- Tandon School of Engineering, New York University, 6 Metrotech, Brooklyn, NY, 11201, USA
| | - Weiqiang Chen
- Tandon School of Engineering, New York University, 6 Metrotech, Brooklyn, NY, 11201, USA
| | - Marcus Weck
- Department of Chemistry, New York University, Silver Center Block, 100 Washington Square E, New York, NY, 10003, USA
| | - Giuseppe Maria de Peppo
- Tandon School of Engineering, New York University, 6 Metrotech, Brooklyn, NY, 11201, USA.,The New York Stem Cell Foundation Research Institute, 619 West 54th Street, New York, NY, 10019, USA.,Mirimus, Inc, 760 Parkside Ave, Brooklyn, NY, 11226, USA
| | - Elisa Riedo
- Tandon School of Engineering, New York University, 6 Metrotech, Brooklyn, NY, 11201, USA
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4
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Handrea-Dragan IM, Botiz I, Tatar AS, Boca S. Patterning at the micro/nano-scale: Polymeric scaffolds for medical diagnostic and cell-surface interaction applications. Colloids Surf B Biointerfaces 2022; 218:112730. [DOI: 10.1016/j.colsurfb.2022.112730] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/23/2022] [Revised: 07/15/2022] [Accepted: 07/25/2022] [Indexed: 11/27/2022]
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5
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Zhao H, Chen T, Wu T, Xie L, Ma Y, Sha J. Strategy based on multiplexed brush architectures for regulating the spatiotemporal immobilization of biomolecules. BIOMATERIALS ADVANCES 2022; 141:213092. [PMID: 36191539 DOI: 10.1016/j.bioadv.2022.213092] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/18/2022] [Revised: 08/03/2022] [Accepted: 08/20/2022] [Indexed: 06/16/2023]
Abstract
Functional surfaces that enable both spatial and temporal control of biomolecules immobilization have attracted enormous attention for various fields including smart biointerface materials, high-throughput bioarrays, and fundamental research in the biosciences. Here, a flexible and promising method was presented for regulating the spatiotemporal arrangement of multiple biomolecules by constructing the topographically and chemically diverse polymer brushes patterned surfaces. A series of polymer brushes patterned surfaces, including antifouling brushes patterned surface, epoxy-presenting brushes patterned surface without and with antifouling background layer, were fabricated to control the spatial distribution of protein and cell adhesion through specific and nonspecific means. The fluorescence measurements demonstrated the effectiveness of spatially regulating the density of surface-immobilized protein through controlling the areal thickness of the poly (glycidyl methacrylate) (PGMA) brush patterns, leading to various complex patterns featuring well-defined biomolecule concentration gradients. Furthermore, a multiplexed surface bearing epoxy groups and azido groups with various areal densities was fabricated for regulating the spatiotemporal arrangement of different proteins, enabling binary biomolecules patterns with higher degrees of functionality and complexity. The presented strategy for the spatiotemporal control of biomolecules immobilization would boost the development of dynamic and multifunctional biosystems.
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Affiliation(s)
- Haili Zhao
- Faculty of Chemical Engineering, Kunming University of Science and Technology, Kunming 650504, China
| | - Tao Chen
- Faculty of Chemical Engineering, Kunming University of Science and Technology, Kunming 650504, China
| | - Tong Wu
- Center for Human Tissues and Organs Degeneration, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China
| | - Linsheng Xie
- School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai 200237, China
| | - Yulu Ma
- School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai 200237, China
| | - Jin Sha
- School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai 200237, China.
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6
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Tudureanu R, Handrea-Dragan IM, Boca S, Botiz I. Insight and Recent Advances into the Role of Topography on the Cell Differentiation and Proliferation on Biopolymeric Surfaces. Int J Mol Sci 2022; 23:7731. [PMID: 35887079 PMCID: PMC9315624 DOI: 10.3390/ijms23147731] [Citation(s) in RCA: 11] [Impact Index Per Article: 5.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/09/2022] [Revised: 07/11/2022] [Accepted: 07/11/2022] [Indexed: 01/27/2023] Open
Abstract
It is well known that surface topography plays an important role in cell behavior, including adhesion, migration, orientation, elongation, proliferation and differentiation. Studying these cell functions is essential in order to better understand and control specific characteristics of the cells and thus to enhance their potential in various biomedical applications. This review proposes to investigate the extent to which various surface relief patterns, imprinted in biopolymer films or in polymeric films coated with biopolymers, by utilizing specific lithographic techniques, influence cell behavior and development. We aim to understand how characteristics such as shape, dimension or chemical functionality of surface relief patterns alter the orientation and elongation of cells, and thus, finally make their mark on the cell proliferation and differentiation. We infer that such an insight is a prerequisite for pushing forward the comprehension of the methodologies and technologies used in tissue engineering applications and products, including skin or bone implants and wound or fracture healing.
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Affiliation(s)
- Raluca Tudureanu
- Interdisciplinary Research Institute in Bio-Nano-Sciences, Babeș-Bolyai University, 400271 Cluj-Napoca, Romania; (R.T.); (I.M.H.-D.); (S.B.)
- Faculty of Physics, Babeș-Bolyai University, 400084 Cluj-Napoca, Romania
| | - Iuliana M. Handrea-Dragan
- Interdisciplinary Research Institute in Bio-Nano-Sciences, Babeș-Bolyai University, 400271 Cluj-Napoca, Romania; (R.T.); (I.M.H.-D.); (S.B.)
- Faculty of Physics, Babeș-Bolyai University, 400084 Cluj-Napoca, Romania
| | - Sanda Boca
- Interdisciplinary Research Institute in Bio-Nano-Sciences, Babeș-Bolyai University, 400271 Cluj-Napoca, Romania; (R.T.); (I.M.H.-D.); (S.B.)
| | - Ioan Botiz
- Interdisciplinary Research Institute in Bio-Nano-Sciences, Babeș-Bolyai University, 400271 Cluj-Napoca, Romania; (R.T.); (I.M.H.-D.); (S.B.)
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7
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Kim BJ. Enzyme-Instructed Self-Assembly of Peptides: From Concept to Representative Applications. Chem Asian J 2022; 17:e202200094. [PMID: 35213091 DOI: 10.1002/asia.202200094] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/30/2022] [Revised: 02/23/2022] [Indexed: 11/11/2022]
Abstract
Enzyme-instructed self-assembly, integrating enzymatic reaction and molecular self-assembly, has drawn noticeable attention over the last decade with the intension of being used in valuable applications. Recent advances in the field allow it possible to spatiotemporally control peptide self-assembly in cellular milieu, broadening the potential applications of peptide assemblies to cancer therapy and subcellular delivery. In this minireview, the concept of enzyme-instructed self-assembly of peptide, containing enzymatic trigger and spatiotemporal control, is described. Representative applications in cells are also discussed, followed by outlook on the field of enzyme-instructed self-assembly.
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Affiliation(s)
- Beom Jin Kim
- University of Ulsan, Chemistry, 12, Techno Industrial Complex-ro, 55 beon-gil, 4776, Ulsan, KOREA, REPUBLIC OF
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8
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Handrea-Dragan M, Botiz I. Multifunctional Structured Platforms: From Patterning of Polymer-Based Films to Their Subsequent Filling with Various Nanomaterials. Polymers (Basel) 2021; 13:445. [PMID: 33573248 PMCID: PMC7866561 DOI: 10.3390/polym13030445] [Citation(s) in RCA: 10] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/16/2021] [Revised: 01/25/2021] [Accepted: 01/26/2021] [Indexed: 12/20/2022] Open
Abstract
There is an astonishing number of optoelectronic, photonic, biological, sensing, or storage media devices, just to name a few, that rely on a variety of extraordinary periodic surface relief miniaturized patterns fabricated on polymer-covered rigid or flexible substrates. Even more extraordinary is that these surface relief patterns can be further filled, in a more or less ordered fashion, with various functional nanomaterials and thus can lead to the realization of more complex structured architectures. These architectures can serve as multifunctional platforms for the design and the development of a multitude of novel, better performing nanotechnological applications. In this work, we aim to provide an extensive overview on how multifunctional structured platforms can be fabricated by outlining not only the main polymer patterning methodologies but also by emphasizing various deposition methods that can guide different structures of functional nanomaterials into periodic surface relief patterns. Our aim is to provide the readers with a toolbox of the most suitable patterning and deposition methodologies that could be easily identified and further combined when the fabrication of novel structured platforms exhibiting interesting properties is targeted.
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Affiliation(s)
- Madalina Handrea-Dragan
- Interdisciplinary Research Institute in Bio-Nano-Sciences, Babes-Bolyai University, 42 Treboniu Laurian Str. 400271 Cluj-Napoca, Romania;
- Faculty of Physics, Babes-Bolyai University, 1 M. Kogalniceanu Str. 400084 Cluj-Napoca, Romania
| | - Ioan Botiz
- Interdisciplinary Research Institute in Bio-Nano-Sciences, Babes-Bolyai University, 42 Treboniu Laurian Str. 400271 Cluj-Napoca, Romania;
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9
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Zhou Z, Ju X, Chen J, Wang R, Zhong Y, Li L. Charge-oriented strategies of tunable substrate affinity based on cellulase and biomass for improving in situ saccharification: A review. BIORESOURCE TECHNOLOGY 2021; 319:124159. [PMID: 33010717 DOI: 10.1016/j.biortech.2020.124159] [Citation(s) in RCA: 29] [Impact Index Per Article: 9.7] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/05/2020] [Revised: 09/17/2020] [Accepted: 09/18/2020] [Indexed: 06/11/2023]
Abstract
The intrinsic recalcitrance of lignocellulosic biomass makes it resistant to enzymatic hydrolysis. The electron-rich surface of the lignin and cellulose-alike structure of hemicellulose competitively absorb the cellulase. Thus, modifying the surface charge on biomass components to alter cellulase affinity is an urgent requisite. Developing charge tunable cellulase will alter substrate affinity. Also, charge-based immobilization generates controllable substrate affinity. Within immobilized cellulase involved in situ biomass saccharification, charge effects made a crucial contribution. In addition to affecting the interaction between immobilized cellulase and biomass, charge exerts an impact on cellulase to immobilize the materials, further investigation is essential. This study aims to review the charge effects on the cellulase affinity in biomass saccharification, strategies of charge tunable cellulase, and immobilized cellulase, thereby explaining the role of electrostatic interaction. In terms of electrostatic behavior, the pathways and plans to improve in situ biomass saccharification seem to be promising.
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Affiliation(s)
- Zheng Zhou
- College of Chemistry and Life Science, Suzhou University of Science and Technology, Suzhou 215009, PR China
| | - Xin Ju
- College of Chemistry and Life Science, Suzhou University of Science and Technology, Suzhou 215009, PR China
| | - Jiajia Chen
- College of Chemistry and Life Science, Suzhou University of Science and Technology, Suzhou 215009, PR China
| | - Rong Wang
- College of Chemistry and Life Science, Suzhou University of Science and Technology, Suzhou 215009, PR China
| | - Yuqing Zhong
- College of Chemistry and Life Science, Suzhou University of Science and Technology, Suzhou 215009, PR China
| | - Liangzhi Li
- College of Chemistry and Life Science, Suzhou University of Science and Technology, Suzhou 215009, PR China.
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10
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Kumar M, Son J, Huang RH, Sementa D, Lee M, O'Brien S, Ulijn RV. In Situ, Noncovalent Labeling and Stimulated Emission Depletion-Based Super-Resolution Imaging of Supramolecular Peptide Nanostructures. ACS NANO 2020; 14:15056-15063. [PMID: 33169979 DOI: 10.1021/acsnano.0c05029] [Citation(s) in RCA: 9] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Supramolecular materials have gained substantial interest for a number biological and nonbiological applications. However, for optimum utilization of these dynamic self-assembled materials, it is important to visualize and understand their structures at the nanoscale, in solution and in real time. Previous approaches for imaging these structures have utilized super-resolution optical imaging methods such as STORM, which has provided important insights, but suffers from drawbacks of complex sample preparation and slow acquisition times, thus limiting real-time in situ imaging of dynamic processes. We demonstrate a noncovalent fluorescent labeling design for STED-based super-resolution imaging of self-assembling peptides. This is achieved by in situ, electrostatic binding of anionic sulfonates of Alexa-488 dye to the cationic sites of lysine (or arginine) residues exposed on the peptide nanostructure surface. A direct, multiscale visualization of static structures reveals hierarchical organization of supramolecular fibers with sub-60 nm resolution. In addition, the degradation of nanofibers upon enzymatic hydrolysis of peptide could be directly imaged in real time, and although resolution was compromised in this dynamic process, it provided mechanistic insights into the enzymatic degradation process. Noncovalent Alexa-488 labeling and subsequent imaging of a range of cationic self-assembling peptides and peptide-functionalized gold nanoparticles demonstrated the versatility of the methodology for the imaging of cationic supramolecular structures. Overall, our approach presents a general and simple method for the electrostatic fluorescent labeling of cationic peptide nanostructures for nanoscale imaging under physiological conditions and probe dynamic processes in real time and in situ.
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Affiliation(s)
- Mohit Kumar
- Advanced Science Research Center (ASRC) at The Graduate Center, City University of New York, 85 St. Nicholas Terrace, New York, New York 10031, United States
| | - Jiye Son
- Advanced Science Research Center (ASRC) at The Graduate Center, City University of New York, 85 St. Nicholas Terrace, New York, New York 10031, United States
| | - Richard H Huang
- Advanced Science Research Center (ASRC) at The Graduate Center, City University of New York, 85 St. Nicholas Terrace, New York, New York 10031, United States
- Department of Chemistry, The Graduate Center, City University of New York, 365 Fifth Avenue, New York, New York 10016, United States
- Department of Chemistry and Biochemistry, The City College of New York, 1024 Marshak, 160 Convent Avenue, New York, New York 10031, United States
| | - Deborah Sementa
- Advanced Science Research Center (ASRC) at The Graduate Center, City University of New York, 85 St. Nicholas Terrace, New York, New York 10031, United States
| | - Magdelene Lee
- Advanced Science Research Center (ASRC) at The Graduate Center, City University of New York, 85 St. Nicholas Terrace, New York, New York 10031, United States
| | - Stephen O'Brien
- Advanced Science Research Center (ASRC) at The Graduate Center, City University of New York, 85 St. Nicholas Terrace, New York, New York 10031, United States
- Department of Chemistry, The Graduate Center, City University of New York, 365 Fifth Avenue, New York, New York 10016, United States
- Department of Chemistry and Biochemistry, The City College of New York, 1024 Marshak, 160 Convent Avenue, New York, New York 10031, United States
| | - Rein V Ulijn
- Advanced Science Research Center (ASRC) at The Graduate Center, City University of New York, 85 St. Nicholas Terrace, New York, New York 10031, United States
- Department of Chemistry, The Graduate Center, City University of New York, 365 Fifth Avenue, New York, New York 10016, United States
- Department of Chemistry, Hunter College, City University of New York, 695 Park Avenue, New York, New York 10065, United States
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11
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Howell ST, Grushina A, Holzner F, Brugger J. Thermal scanning probe lithography-a review. MICROSYSTEMS & NANOENGINEERING 2020; 6:21. [PMID: 34567636 PMCID: PMC8433166 DOI: 10.1038/s41378-019-0124-8] [Citation(s) in RCA: 39] [Impact Index Per Article: 9.8] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/12/2019] [Revised: 11/05/2019] [Accepted: 11/25/2019] [Indexed: 05/08/2023]
Abstract
Fundamental aspects and state-of-the-art results of thermal scanning probe lithography (t-SPL) are reviewed here. t-SPL is an emerging direct-write nanolithography method with many unique properties which enable original or improved nano-patterning in application fields ranging from quantum technologies to material science. In particular, ultrafast and highly localized thermal processing of surfaces can be achieved through the sharp heated tip in t-SPL to generate high-resolution patterns. We investigate t-SPL as a means of generating three types of material interaction: removal, conversion, and addition. Each of these categories is illustrated with process parameters and application examples, as well as their respective opportunities and challenges. Our intention is to provide a knowledge base of t-SPL capabilities and current limitations and to guide nanoengineers to the best-fitting approach of t-SPL for their challenges in nanofabrication or material science. Many potential applications of nanoscale modifications with thermal probes still wait to be explored, in particular when one can utilize the inherently ultrahigh heating and cooling rates.
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Affiliation(s)
- Samuel Tobias Howell
- Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
| | - Anya Grushina
- Heidelberg Instruments Nano - SwissLitho AG, Technoparkstrasse 1, 8005 Zürich, Switzerland
| | - Felix Holzner
- Heidelberg Instruments Nano - SwissLitho AG, Technoparkstrasse 1, 8005 Zürich, Switzerland
| | - Juergen Brugger
- Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
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