1
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Michelson A, Subramanian A, Kisslinger K, Tiwale N, Xiang S, Shen E, Kahn JS, Nykypanchuk D, Yan H, Nam CY, Gang O. Three-dimensional nanoscale metal, metal oxide, and semiconductor frameworks through DNA-programmable assembly and templating. SCIENCE ADVANCES 2024; 10:eadl0604. [PMID: 38198553 PMCID: PMC10780874 DOI: 10.1126/sciadv.adl0604] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/28/2023] [Accepted: 12/05/2023] [Indexed: 01/12/2024]
Abstract
Controlling the three-dimensional (3D) nanoarchitecture of inorganic materials is imperative for enabling their novel mechanical, optical, and electronic properties. Here, by exploiting DNA-programmable assembly, we establish a general approach for realizing designed 3D ordered inorganic frameworks. Through inorganic templating of DNA frameworks by liquid- and vapor-phase infiltrations, we demonstrate successful nanofabrication of diverse classes of inorganic frameworks from metal, metal oxide and semiconductor materials, as well as their combinations, including zinc, aluminum, copper, molybdenum, tungsten, indium, tin, and platinum, and composites such as aluminum-doped zinc oxide, indium tin oxide, and platinum/aluminum-doped zinc oxide. The open 3D frameworks have features on the order of nanometers with architecture prescribed by the DNA frames and self-assembled lattice. Structural and spectroscopic studies reveal the composition and organization of diverse inorganic frameworks, as well as the optoelectronic properties of selected materials. The work paves the road toward establishing a 3D nanoscale lithography.
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Affiliation(s)
- Aaron Michelson
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA
- Department of Applied Physics and Applied Mathematics, Columbia University, New York, NY 10027, USA
| | - Ashwanth Subramanian
- Department of Materials Science and Chemical Engineering, Stony Brook University, Stony Brook, NY 11794, USA
| | - Kim Kisslinger
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA
| | - Nikhil Tiwale
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA
| | - Shuting Xiang
- Department of Chemical Engineering, Columbia University, 817 SW Mudd, New York, NY 10027, USA
| | - Eric Shen
- Department of Chemical Engineering, Columbia University, 817 SW Mudd, New York, NY 10027, USA
| | - Jason S. Kahn
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA
| | - Dmytro Nykypanchuk
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA
| | - Hanfei Yan
- National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA
| | - Chang-Yong Nam
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA
- Department of Materials Science and Chemical Engineering, Stony Brook University, Stony Brook, NY 11794, USA
| | - Oleg Gang
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA
- Department of Applied Physics and Applied Mathematics, Columbia University, New York, NY 10027, USA
- Department of Chemical Engineering, Columbia University, 817 SW Mudd, New York, NY 10027, USA
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2
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Weisbord I, Segal-Peretz T. Revealing the 3D Structure of Block Copolymers with Electron Microscopy: Current Status and Future Directions. ACS APPLIED MATERIALS & INTERFACES 2023; 15:58003-58022. [PMID: 37338172 DOI: 10.1021/acsami.3c02956] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/21/2023]
Abstract
Block copolymers (BCPs) are considered model systems for understanding and utilizing self-assembly in soft matter. Their tunable nanometric structure and composition enable comprehensive studies of self-assembly processes as well as make them relevant materials in diverse applications. A key step in developing and controlling BCP nanostructures is a full understanding of their three-dimensional (3D) structure and how this structure is affected by the BCP chemistry, confinement, boundary conditions, and the self-assembly evolution and dynamics. Electron microscopy (EM) is a leading method in BCP 3D characterization owing to its high resolution in imaging nanosized structures. Here we discuss the two main 3D EM methods: namely, transmission EM tomography and slice and view scanning EM tomography. We present each method's principles, examine their strengths and weaknesses, and discuss ways researchers have devised to overcome some of the challenges in BCP 3D characterization with EM- from specimen preparation to imaging radiation-sensitive materials. Importantly, we review current and new cutting-edge EM methods such as direct electron detectors, energy dispersive X-ray spectroscopy of soft matter, high temporal rate imaging, and single-particle analysis that have great potential for expanding the BCP understanding through EM in the future.
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Affiliation(s)
- Inbal Weisbord
- Chemical Engineering Department, Technion-Israel Institute of Technology, Haifa 3200003, Israel
| | - Tamar Segal-Peretz
- Chemical Engineering Department, Technion-Israel Institute of Technology, Haifa 3200003, Israel
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3
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Nowak SR, Tiwale N, Doerk GS, Nam CY, Black CT, Yager KG. Responsive blends of block copolymers stabilize the hexagonally perforated lamellae morphology. SOFT MATTER 2023; 19:2594-2604. [PMID: 36947412 DOI: 10.1039/d3sm00142c] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Blends of block copolymers can form phases and exhibit features distinct from the constituent materials. We study thin film blends of cylinder-forming and lamellar-forming block copolymers across a range of substrate surface energies. Blend materials are responsive to interfacial energy, allowing selection of pure or coexisting phases based on surface chemistry. Blending stabilizes certain motifs that are typically metastable, and can be used to generate pure hexagonally perforated lamellar thin films across a range of film thicknesses and surface energies. This tolerant behavior is ascribed to the ability of blend materials to redistribute chains to stabilize otherwise high-energy defect structures. The blend responsiveness allows the morphology to be spatially defined through multi-tone chemical surface patterns.
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Affiliation(s)
- Samantha R Nowak
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
| | - Nikhil Tiwale
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
| | - Gregory S Doerk
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
| | - Chang-Yong Nam
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
| | - Charles T Black
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
| | - Kevin G Yager
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA.
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4
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Sun Z, Liu R, Su T, Huang H, Kawamoto K, Liang R, Liu B, Zhong M, Alexander-Katz A, Ross CA, Johnson JA. Emergence of layered nanoscale mesh networks through intrinsic molecular confinement self-assembly. NATURE NANOTECHNOLOGY 2023; 18:273-280. [PMID: 36624206 DOI: 10.1038/s41565-022-01293-z] [Citation(s) in RCA: 6] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/24/2022] [Accepted: 11/10/2022] [Indexed: 06/17/2023]
Abstract
Block copolymer self-assembly is a powerful tool for two-dimensional nanofabrication; however, the extension of this self-assembly concept to complex three-dimensional network structures is limited. Here we report a simple method to experimentally generate three-dimensional layered mesh morphologies through intrinsic molecular confinement self-assembly. We designed triblock bottlebrush polymers with two Janus domains: one perpendicular and one parallel to the polymer backbone. The former enforces a lamellar superstructure that intrinsically confines the intralayer self-assembly of the latter, giving rise to a mesh-like monoclinic (54°) M15 network substructure with excellent long-range order, as well as a tetragonal (90°) T131 mesh. Numerical simulations show that the spatial constraints exerted on the polymer backbone drive the assembly of M15 and yield T131 in the strong segregation regime. This work demonstrates that intrinsic molecular confinement is a viable path to bottom-up assembly of new geometrical phases of soft matter, extending the capabilities of block copolymer nanofabrication.
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Affiliation(s)
- Zehao Sun
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Runze Liu
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Tingyu Su
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Hejin Huang
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Ken Kawamoto
- Department of Chemistry, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Ruiqi Liang
- Department of Chemical and Environmental Engineering, Yale University, New Haven, CT, USA
| | - Bin Liu
- Department of Chemistry, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Mingjiang Zhong
- Department of Chemical and Environmental Engineering, Yale University, New Haven, CT, USA
| | - Alfredo Alexander-Katz
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Caroline A Ross
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA.
| | - Jeremiah A Johnson
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA.
- Department of Chemistry, Massachusetts Institute of Technology, Cambridge, MA, USA.
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5
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Liquid Phase Infiltration of Block Copolymers. Polymers (Basel) 2022; 14:polym14204317. [PMID: 36297895 PMCID: PMC9612101 DOI: 10.3390/polym14204317] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/23/2022] [Revised: 10/10/2022] [Accepted: 10/11/2022] [Indexed: 11/11/2022] Open
Abstract
Novel materials with defined composition and structures at the nanoscale are increasingly desired in several research fields spanning a wide range of applications. The development of new approaches of synthesis that provide such control is therefore required in order to relate the material properties to its functionalities. Self-assembling materials such as block copolymers (BCPs), in combination with liquid phase infiltration (LPI) processes, represent an ideal strategy for the synthesis of inorganic materials into even more complex and functional features. This review provides an overview of the mechanism involved in the LPI, outlining the role of the different polymer infiltration parameters on the resulting material properties. We report newly developed methodologies that extend the LPI to the realisation of multicomponent and 3D inorganic nanostructures. Finally, the recently reported implementation of LPI into different applications such as photonics, plasmonics and electronics are highlighted.
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6
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Seguini G, Motta A, Bigatti M, Caligiore FE, Rademaker G, Gharbi A, Tiron R, Tallarida G, Perego M, Cianci E. Al 2O 3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene- block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication. ACS APPLIED NANO MATERIALS 2022; 5:9818-9828. [PMID: 35937588 PMCID: PMC9344376 DOI: 10.1021/acsanm.2c02013] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/12/2023]
Abstract
Nanostructured organic templates originating from self-assembled block copolymers (BCPs) can be converted into inorganic nanostructures by sequential infiltration synthesis (SIS). This capability is particularly relevant within the framework of advanced lithographic applications because of the exploitation of the BCP-based nanostructures as hard masks. In this work, Al2O3 dot and antidot arrays were synthesized by sequential infiltration of trimethylaluminum and water precursors into perpendicularly oriented cylinder-forming poly(styrene-block-methyl methacrylate) (PS-b-PMMA) BCP thin films. The mechanism governing the effective incorporation of Al2O3 into the PMMA component of the BCP thin films was investigated evaluating the evolution of the lateral and vertical dimensions of Al2O3 dot and antidot arrays as a function of the SIS cycle number. The not-reactive PS component and the PS/PMMA interface in self-assembled PS-b-PMMA thin films result in additional paths for diffusion and supplementary surfaces for sorption of precursor molecules, respectively. Thus, the mass uptake of Al2O3 into the PMMA block of self-assembled PS-b-PMMA thin films is higher than that in pure PMMA thin films.
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Affiliation(s)
- Gabriele Seguini
- IMM-CNR,
Unit of Agrate Brianza, Via C. Olivetti 2, Agrate Brianza I-20864, Italy
| | - Alessia Motta
- IMM-CNR,
Unit of Agrate Brianza, Via C. Olivetti 2, Agrate Brianza I-20864, Italy
| | - Marco Bigatti
- IMM-CNR,
Unit of Agrate Brianza, Via C. Olivetti 2, Agrate Brianza I-20864, Italy
| | | | | | - Ahmed Gharbi
- Univ.
Grenoble Alpes, CEA, Leti, Grenoble F-38000, France
| | - Raluca Tiron
- Univ.
Grenoble Alpes, CEA, Leti, Grenoble F-38000, France
| | - Graziella Tallarida
- IMM-CNR,
Unit of Agrate Brianza, Via C. Olivetti 2, Agrate Brianza I-20864, Italy
| | - Michele Perego
- IMM-CNR,
Unit of Agrate Brianza, Via C. Olivetti 2, Agrate Brianza I-20864, Italy
| | - Elena Cianci
- IMM-CNR,
Unit of Agrate Brianza, Via C. Olivetti 2, Agrate Brianza I-20864, Italy
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7
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Kulkarni AA, Doerk GS. Hierarchical, Self-Assembled Metasurfaces via Exposure-Controlled Reflow of Block Copolymer-Derived Nanopatterns. ACS APPLIED MATERIALS & INTERFACES 2022; 14:27466-27475. [PMID: 35656598 DOI: 10.1021/acsami.2c05911] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Nanopatterning for the fabrication of optical metasurfaces entails a need for high-resolution approaches like electron beam lithography that cannot be readily scaled beyond prototyping demonstrations. Block copolymer thin film self-assembly offers an attractive alternative for producing periodic nanopatterns across large areas, yet the pattern feature sizes are fixed by the polymer molecular weight and composition. Here, a general strategy is reported which overcomes the limitation of the fixed feature size by treating the copolymer thin film as a hierarchical resist, in which the nanoscale pattern motif is defined by self-assembly. Feature sizes can then be tuned by thermal reflow controlled locally by irradiative cross-linking or chemical alteration using lithographic ultraviolet light or electron beam exposure. Using blends of polystyrene-block-poly(methylmethacrylate) (PS-b-PMMA) with PS and PMMA homopolymers, we demonstrate both self-assembled PS grating and hexagonal hole patterns; exposure-controlled reflow is then used to reduce the hole diameter by as much as 50% or increase the PS grating linewidth by more than 180%. Transferring these nanopatterns, or their inverse obtained by a lift-off approach, into silicon yields structural colors that may be prescriptively controlled based on the nanoscale feature size. Furthermore, patterned exposure enables area-selective feature size control, yielding uniform structural color patterns across centimeter square areas. Electron beam lithography is also used to show that the lithographic resolution of this selective-area control can be extended to the nanoscale dimensions of the self-assembled features. The exposure-controlled reflow approach demonstrated here takes a pivotal step toward fabricating complex, hierarchical optical metasurfaces using scalable self-assembly methods.
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Affiliation(s)
- Ashish A Kulkarni
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, United States
| | - Gregory S Doerk
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, United States
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8
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Kulkarni AA, Doerk GS. Thin film block copolymer self-assembly for nanophotonics. NANOTECHNOLOGY 2022; 33:292001. [PMID: 35358955 DOI: 10.1088/1361-6528/ac6315] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/19/2021] [Accepted: 03/31/2022] [Indexed: 06/14/2023]
Abstract
The nanophotonic engineering of light-matter interactions has profoundly changed research behind the design and fabrication of optical materials and devices. Metasurfaces-arrays of subwavelength nanostructures that interact resonantly with electromagnetic radiation-have emerged as an integral nanophotonic platform for a new generation of ultrathin lenses, displays, polarizers and other devices. Their success hinges on advances in lithography and nanofabrication in recent decades. While existing nanolithography techniques are suitable for basic research and prototyping, issues of cost, throughput, scalability, and substrate compatibility may preclude their use for many metasurface applications. Patterning via spontaneous self-assembly of block copolymer thin films offers an enticing alternative for nanophotonic manufacturing that is rapid, inexpensive, and applicable to large areas and diverse substrates. This review discusses the advantages and disadvantages of block copolymer-based nanopatterning and highlights recent progress in their use for broadband antireflection, surface enhanced Raman spectroscopy, and other nanophotonic applications. Recent advances in diversification of self-assembled block copolymer nanopatterns and improved processes for enhanced scalability of self-assembled nanopatterning using block copolymers are also discussed, with a spotlight on directions for future research that would enable a wider array of nanophotonic applications.
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Affiliation(s)
- Ashish A Kulkarni
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, United States of America
| | - Gregory S Doerk
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, United States of America
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9
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Shi LY, Subramanian A, Weng L, Lee S, Kisslinger K, Nam CY, Ross CA. Selective sequential infiltration synthesis of ZnO in the liquid crystalline phase of silicon-containing rod-coil block copolymers. NANOSCALE 2022; 14:1807-1813. [PMID: 35037005 DOI: 10.1039/d1nr06065a] [Citation(s) in RCA: 5] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
The combination of block copolymer (BCP) thin film self-assembly and selective infiltration synthesis of inorganic materials into one BCP block provides access to various organic-inorganic hybrids. Here, we apply sequential infiltration synthesis, a vapor-phase hybridization technique, to selectively introduce ZnO into the organic microdomains of silicon-containing rod-coil diblock copolymers and a triblock terpolymer, polydimethylsiloxane (PDMS)-b-poly{2,5-bis[(4-methoxyphenyl)-oxycarbonyl]styrene} (PDMS-b-PMPCS) and PDMS-b-polystyrene-b-PMPCS (PDMS-b-PS-b-PMPCS), in which the PMPCS rod block is a liquid crystalline polymer. The in-plane cylindrical PDMS-b-PMPCS and core-shell cylindrical and hexagonally perforated lamellar PDMS-b-PS-b-PMPCS films were infiltrated with ZnO with high selectivity to the PMPCS. The etching contrast between PDMS, PS and the ZnO-infused PMPCS enables the fabrication of ZnO/SiOx binary composites by plasma etching and reveals the core-shell morphology of the triblock terpolymer.
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Affiliation(s)
- Ling-Ying Shi
- College of Polymer Science and Engineering, Sichuan University, Chengdu 610065, China.
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA.
| | - Ashwanth Subramanian
- Department of Materials Science and Chemical Engineering, Stony Brook University, New York 11794, USA
| | - Lin Weng
- College of Polymer Science and Engineering, Sichuan University, Chengdu 610065, China.
| | - Sangho Lee
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA.
| | - Kim Kisslinger
- Center for Functional Nanomaterials, Brookhaven National Laboratory, New York 11973, USA.
| | - Chang-Yong Nam
- Department of Materials Science and Chemical Engineering, Stony Brook University, New York 11794, USA
- Center for Functional Nanomaterials, Brookhaven National Laboratory, New York 11973, USA.
| | - Caroline A Ross
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA.
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10
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Subramanian A, Tiwale N, Lee WI, Nam CY. Templating Functional Materials Using Self-Assembled Block Copolymer Thin-Film for Nanodevices. FRONTIERS IN NANOTECHNOLOGY 2021. [DOI: 10.3389/fnano.2021.766690] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022] Open
Abstract
The nanomorphologies and nanoarchitectures that can be synthesized using block copolymer (BCP) thin-film self-assembly have inspired a variety of new applications, which offer various advantages, such as, small device footprint, low operational power and enhanced device performance. Imperative for these applications, however, is the ability to transform these small polymeric patterns into useful inorganic structures. BCP-templated inorganic nanostructures have shown the potential for use as active materials in various electronic device applications, including, field-effect transistors, photodetectors, gas sensors and many more. This article reviews various strategies that have been implemented in the past decade to fabricate devices at nanoscale using block copolymer thin films.
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11
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Cho J, Hwang M, Shin M, Oh J, Cho J, Son JG, Yeom B. Chiral Plasmonic Nanowaves by Tilted Assembly of Unidirectionally Aligned Block Copolymers with Buckling-Induced Microwrinkles. ACS NANO 2021; 15:17463-17471. [PMID: 34606232 DOI: 10.1021/acsnano.1c03752] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Chiral-structured nanoscale materials exhibit chiroptical properties with preferential absorptions of circularly polarized light. The distinctive optical responses of chiral materials have great potential for advanced optical and biomedical applications. However, the fabrication of three-dimensional structures with mirrored nanoscale geometry is still challenging. This study introduces chiral plasmonic nanopatterns in wavy shapes based on the unidirectional alignment of block copolymer thin films and their tilted transfer, combined with buckling processes. The cylindrical nanodomains of polystyrene-block-poly(2-vinylpyridine) thin films were unidirectionally aligned over a large area by the shear-rolling process. The aligned block copolymer thin films were transferred onto uniaxially prestrained polydimethylsiloxane films at certain angles relative to the stretching directions. The strain was then released to induce buckling. The aligned nanopatterns across the axis of the formed microwrinkles were selectively infiltrated with gold ions. After reduction by plasma treatment, chiral plasmonic nanowave patterns were fabricated with the presence of mirror-reflected circular dichroism spectra. This fabrication method does not require any lithography processing or innately chiral biomaterials, which can be advantageous over other conventional fabrication methods for artificial nanoscale chiral materials.
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Affiliation(s)
- Junghyun Cho
- Soft Hybrid Materials Research Center, Korea Institute of Science and Technology (KIST), Seongbuk-gu, Seoul, 02792, Republic of Korea
| | - Myonghoo Hwang
- Department of Chemical Engineering, Hanyang University, Seongdong-gu, Seoul, 04763, Republic of Korea
| | - Minkyung Shin
- Soft Hybrid Materials Research Center, Korea Institute of Science and Technology (KIST), Seongbuk-gu, Seoul, 02792, Republic of Korea
- Department of Chemical Engineering, Hanyang University, Seongdong-gu, Seoul, 04763, Republic of Korea
| | - Jinwoo Oh
- Soft Hybrid Materials Research Center, Korea Institute of Science and Technology (KIST), Seongbuk-gu, Seoul, 02792, Republic of Korea
| | - Jinhan Cho
- Department of Chemical and Biological Engineering, Korea University, Seongbuk-gu, Seoul, 02841, Republic of Korea
- KU-KIST Graduate School of Converging Science and Technology, Korea University, Seongbuk-gu, Seoul, 02841, Republic of Korea
| | - Jeong Gon Son
- Soft Hybrid Materials Research Center, Korea Institute of Science and Technology (KIST), Seongbuk-gu, Seoul, 02792, Republic of Korea
- KU-KIST Graduate School of Converging Science and Technology, Korea University, Seongbuk-gu, Seoul, 02841, Republic of Korea
| | - Bongjun Yeom
- Department of Chemical Engineering, Hanyang University, Seongdong-gu, Seoul, 04763, Republic of Korea
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12
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Liu R, Huang H, Sun Z, Alexander-Katz A, Ross CA. Metallic Nanomeshes Fabricated by Multimechanism Directed Self-Assembly. ACS NANO 2021; 15:16266-16276. [PMID: 34647737 DOI: 10.1021/acsnano.1c05315] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
The directed self-assembly of block copolymers (BCPs) is a powerful motif for the continued scaling of feature sizes for nanoscale devices. A multimechanism directed self-assembly (MMDSA) method is described that generates orthogonal meshes from a polystyrene-b-poly-2-vinylpyridine BCP that is subsequently metallized with Pt. The MMDSA process takes advantage of three different mechanisms, trench wall guidance, edge nucleation, and underlayer guidance, to align the mesh with respect to substrate features. The mechanisms and their interactions are investigated via both experiments and dissipative particle dynamics simulations. MMDSA is applied to produce well-aligned conductive nanomeshes and then is extended to fabricate multicomponent metallic structures with 2D/3D hybrid morphologies.
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Affiliation(s)
- Runze Liu
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Hejin Huang
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Zehao Sun
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Alfredo Alexander-Katz
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Caroline A Ross
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
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13
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Toth K, Bae S, Osuji CO, Yager KG, Doerk GS. Film Thickness and Composition Effects in Symmetric Ternary Block Copolymer/Homopolymer Blend Films: Domain Spacing and Orientation. Macromolecules 2021. [DOI: 10.1021/acs.macromol.1c01032] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Kristof Toth
- Department of Chemical and Environmental Engineering, Yale University, New Haven, Connecticut 06520, United States
| | - Suwon Bae
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, United States
| | - Chinedum O. Osuji
- Department of Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Kevin G. Yager
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, United States
| | - Gregory S. Doerk
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, United States
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14
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Mullen E, Morris MA. Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective. NANOMATERIALS (BASEL, SWITZERLAND) 2021; 11:1085. [PMID: 33922231 PMCID: PMC8146645 DOI: 10.3390/nano11051085] [Citation(s) in RCA: 14] [Impact Index Per Article: 4.7] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/28/2021] [Revised: 04/06/2021] [Accepted: 04/09/2021] [Indexed: 12/24/2022]
Abstract
The turn of the 21st century heralded in the semiconductor age alongside the Anthropocene epoch, characterised by the ever-increasing human impact on the environment. The ecological consequences of semiconductor chip manufacturing are the most predominant within the electronics industry. This is due to current reliance upon large amounts of solvents, acids and gases that have numerous toxicological impacts. Management and assessment of hazardous chemicals is complicated by trade secrets and continual rapid change in the electronic manufacturing process. Of the many subprocesses involved in chip manufacturing, lithographic processes are of particular concern. Current developments in bottom-up lithography, such as directed self-assembly (DSA) of block copolymers (BCPs), are being considered as a next-generation technology for semiconductor chip production. These nanofabrication techniques present a novel opportunity for improving the sustainability of lithography by reducing the number of processing steps, energy and chemical waste products involved. At present, to the extent of our knowledge, there is no published life cycle assessment (LCA) evaluating the environmental impact of new bottom-up lithography versus conventional lithographic techniques. Quantification of this impact is central to verifying whether these new nanofabrication routes can replace conventional deposition techniques in industry as a more environmentally friendly option.
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Affiliation(s)
- Eleanor Mullen
- CRANN and AMBER Research Centres, School of Chemistry, Trinity College Dublin, D02 W085 Dublin, Ireland
| | - Michael A. Morris
- CRANN and AMBER Research Centres, School of Chemistry, Trinity College Dublin, D02 W085 Dublin, Ireland
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Saraswat V, Jacobberger RM, Arnold MS. Materials Science Challenges to Graphene Nanoribbon Electronics. ACS NANO 2021; 15:3674-3708. [PMID: 33656860 DOI: 10.1021/acsnano.0c07835] [Citation(s) in RCA: 43] [Impact Index Per Article: 14.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Graphene nanoribbons (GNRs) have recently emerged as promising candidates for channel materials in future nanoelectronic devices due to their exceptional electronic, thermal, and mechanical properties and chemical inertness. However, the adoption of GNRs in commercial technologies is currently hampered by materials science and integration challenges pertaining to synthesis and devices. In this Review, we present an overview of the current status of challenges, recent breakthroughs toward overcoming these challenges, and possible future directions for the field of GNR electronics. We motivate the need for exploration of scalable synthetic techniques that yield atomically precise, placed, registered, and oriented GNRs on CMOS-compatible substrates and stimulate ideas for contact and dielectric engineering to realize experimental performance close to theoretically predicted metrics. We also briefly discuss unconventional device architectures that could be experimentally investigated to harness the maximum potential of GNRs in future spintronic and quantum information technologies.
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Affiliation(s)
- Vivek Saraswat
- Department of Materials Science and Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, United States
| | - Robert M Jacobberger
- Department of Materials Science and Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, United States
| | - Michael S Arnold
- Department of Materials Science and Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, United States
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Handrea-Dragan M, Botiz I. Multifunctional Structured Platforms: From Patterning of Polymer-Based Films to Their Subsequent Filling with Various Nanomaterials. Polymers (Basel) 2021; 13:445. [PMID: 33573248 PMCID: PMC7866561 DOI: 10.3390/polym13030445] [Citation(s) in RCA: 10] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/16/2021] [Revised: 01/25/2021] [Accepted: 01/26/2021] [Indexed: 12/20/2022] Open
Abstract
There is an astonishing number of optoelectronic, photonic, biological, sensing, or storage media devices, just to name a few, that rely on a variety of extraordinary periodic surface relief miniaturized patterns fabricated on polymer-covered rigid or flexible substrates. Even more extraordinary is that these surface relief patterns can be further filled, in a more or less ordered fashion, with various functional nanomaterials and thus can lead to the realization of more complex structured architectures. These architectures can serve as multifunctional platforms for the design and the development of a multitude of novel, better performing nanotechnological applications. In this work, we aim to provide an extensive overview on how multifunctional structured platforms can be fabricated by outlining not only the main polymer patterning methodologies but also by emphasizing various deposition methods that can guide different structures of functional nanomaterials into periodic surface relief patterns. Our aim is to provide the readers with a toolbox of the most suitable patterning and deposition methodologies that could be easily identified and further combined when the fabrication of novel structured platforms exhibiting interesting properties is targeted.
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Affiliation(s)
- Madalina Handrea-Dragan
- Interdisciplinary Research Institute in Bio-Nano-Sciences, Babes-Bolyai University, 42 Treboniu Laurian Str. 400271 Cluj-Napoca, Romania;
- Faculty of Physics, Babes-Bolyai University, 1 M. Kogalniceanu Str. 400084 Cluj-Napoca, Romania
| | - Ioan Botiz
- Interdisciplinary Research Institute in Bio-Nano-Sciences, Babes-Bolyai University, 42 Treboniu Laurian Str. 400271 Cluj-Napoca, Romania;
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