Thin-Film Processing Routes for Combinatorial Materials Investigations-A Review

A high throughput synthetic workflow for solid state synthesis of oxides

High-throughput synthetic methods are well-established for chemistries involving liquid- or vapour-phase reagents and have been harnessed to prepare arrays of inorganic materials. The versatile but labour-intensive sub-solidus reaction pathway that is the backbone of the functional and electroceramics materials industries has proved more challenging to automate because of the use of solid-state reagents. We present a high-throughput sub-solidus synthesis workflow that permits rapid screening of oxide chemical space that will accelerate materials discovery by enabling simultaneous expansion of explored compositions and synthetic conditions. This increases throughput by using manual steps where actions are undertaken on multiple, rather than individual, samples which are then further combined with researcher-hands-free automated processes. We exemplify this by extending the BaYxSn1-xO3-x/2 solid solution beyond the reported limit to a previously unreported composition and by exploring the Nb-Al-P-O composition space showing the applicability of the workflow to polyanion-based compositions beyond oxides.

Annealing Effect on Mechanical and Tribological Behaviors of Nanoscale Mechanics of Zr60Cu25Al5Ag5Ni5 Thin-Layer Metallic Glasses for Engineering Materials Applications

A new and unique alloy formulation design strategy has been developed in order to fabricate thin-layered metallic glasses (TLMGs) with superior fracture resistance and low coefficient of friction (COF) during the nanoscratching test. Due to the outstanding properties, TFMG could be applied for different uses, such as for surface coating, biomedical, bioimprinting, electronic devices, spacecraft, and railway, all of which need surface fracture resistance. The fabricated Zr-based metallic glass was prepared from Zr, Al, Cu, Ni, and Ag above 99.9 Wt % in purity by arch melting techniques. TFMGs were coated on silicon wafer by sputtering the vapor deposition method from bulk metallic glass then annealed below glass transition temperature Tg ∼ 450 °C for 10, 30, and 60 min. Nanoindentation and nanoscratch tests were used to investigate nanomechanical and nanotribological properties, and atomic force microscopy (AFM) was used to examine the surface morphology and microstructures of TLMG. The nanoindentation data indicated that the average hardness of metallic glasses increased from 9.75 (as-cast MG) to 13.4 GPa (annealed for 60 min). Coefficients of friction for the cast sample, annealed for unannealed, 10, 30, and 60 min, were 0.062, 0.049, 0.039, and 0.03, respectively, as well as the wear depths were 201.56, 148.43, 37.32, and 25.27 nm, respectively. These studies show that the coefficient of friction and wear rate decreases when the annealing time increases as a result of atomic reordering and structural relaxation that occurred at longer annealing times. Furthermore, continuous wear process, wear depth, wear track volume, and contact area decrease with increasing annealing time. This study can be used to design protocols to prepare novel TLMGs, which have outstanding mechanical and tribological properties for engineering materials applications.

Molecular Thin Films Enable the Synthesis and Screening of Nanoparticle Megalibraries Containing Millions of Catalysts

Megalibraries are centimeter-scale chips containing millions of materials synthesized in parallel using scanning probe lithography. As such, they stand to accelerate how materials are discovered for applications spanning catalysis, optics, and more. However, a long-standing challenge is the availability of substrates compatible with megalibrary synthesis, which limits the structural and functional design space that can be explored. To address this challenge, thermally removable polystyrene films were developed as universal substrate coatings that decouple lithography-enabled nanoparticle synthesis from the underlying substrate chemistry, thus providing consistent lithography parameters on diverse substrates. Multi-spray inking of the scanning probe arrays with polymer solutions containing metal salts allows patterning of >56 million nanoreactors designed to vary in composition and size. These are subsequently converted to inorganic nanoparticles via reductive thermal annealing, which also removes the polystyrene to deposit the megalibrary. Megalibraries with mono-, bi-, and trimetallic materials were synthesized, and nanoparticle size was controlled between 5 and 35 nm by modulating the lithography speed. Importantly, the polystyrene coating can be used on conventional substrates like Si/SiO_x, as well as substrates typically more difficult to pattern on, such as glassy carbon, diamond, TiO_2, BN, W, or SiC. Finally, high-throughput materials discovery is performed in the context of photocatalytic degradation of organic pollutants using Au-Pd-Cu nanoparticle megalibraries on TiO₂ substrates with 2,250,000 unique composition/size combinations. The megalibrary was screened within 1 h by developing fluorescent thin-film coatings on top of the megalibrary as proxies for catalytic turnover, revealing Au_0.53Pd_0.38Cu_0.09-TiO₂ as the most active photocatalyst composition.

High-throughput printing of combinatorial materials from aerosols

The development of new materials and their compositional and microstructural optimization are essential in regard to next-generation technologies such as clean energy and environmental sustainability. However, materials discovery and optimization have been a frustratingly slow process. The Edisonian trial-and-error process is time consuming and resource inefficient, particularly when contrasted with vast materials design spaces1. Whereas traditional combinatorial deposition methods can generate material libraries2,3, these suffer from limited material options and inability to leverage major breakthroughs in nanomaterial synthesis. Here we report a high-throughput combinatorial printing method capable of fabricating materials with compositional gradients at microscale spatial resolution. In situ mixing and printing in the aerosol phase allows instantaneous tuning of the mixing ratio of a broad range of materials on the fly, which is an important feature unobtainable in conventional multimaterials printing using feedstocks in liquid-liquid or solid-solid phases4-6. We demonstrate a variety of high-throughput printing strategies and applications in combinatorial doping, functional grading and chemical reaction, enabling materials exploration of doped chalcogenides and compositionally graded materials with gradient properties. The ability to combine the top-down design freedom of additive manufacturing with bottom-up control over local material compositions promises the development of compositionally complex materials inaccessible via conventional manufacturing approaches.

A practical guide to pulsed laser deposition

Nanoscale thin films are widely implemented across a plethora of technological and scientific areas, and form the basis for many advancements that have driven human progress, owing to the high degree of functional tunability based on the chemical composition. Pulsed laser deposition is one of the multiple physical vapour deposition routes to fabricate thin films, employing laser energy to eject material from a target in the form of a plasma. A substrate, commonly a single-crystal oxide, is placed in the path of the plume and acts as a template for the arriving species from the target to coalesce and self-assemble into a thin film. This technique is tremendously useful to produce crystalline films, due to the wide range of atmospheric conditions and the extent of possible chemical complexity of the target. However, this flexibility results in a high degree of complexity, oftentimes requiring rigorous optimisation of the growth parameters to achieve high quality crystalline films with desired composition. In this tutorial review, we aim to reduce the complexity and the barrier to entry for the controlled growth of complex oxides by pulsed laser deposition. We present an overview of the fundamental and practical aspects of pulsed laser deposition, discuss the consequences of tailoring the growth parameters on the thin film properties, and describe in situ monitoring techniques that are useful in gaining a deeper understanding of the properties of the resultant films. Particular emphasis is placed on the general relationships between the growth parameters and the consequent structural, chemical and functional properties of the thin films. In the final section, we discuss the open questions within the field and possible directions to further expand the utility of pulsed laser deposition.

High-throughput growth of HfO2 films using temperature-gradient laser chemical vapor deposition

In this study, HfO2 films were grown using a highly efficient HT-LCVD process with a large gradient (100 K mm−1) temperature field, achieving four novel microstructures which appeared simultaneously on a high-throughput sample.

Investigation and Optimization of Mxene Functionalized Mesoporous Titania Films as Efficient Photoelectrodes

Three-dimensional mesoporous TiO2 scaffolds of anatase phase possess inherent eximious optical behavior that is beneficial for photoelectrodes used for solar energy conversion applications. In this regard; substantial efforts have been devoted to maximizing the UV and/or visible light absorption efficiency; and suppressing the annihilation of photogenerated charged species; in pristine mesoporous TiO2 structures for improved solar illumination conversion efficiency. This study provides fundamental insights into the use of Mxene functionalized mesoporous TiO2 as a photoelectrode. This novel combination of Mxene functionalized TiO2 electrodes with and without TiCl4 treatment was successfully optimized to intensify the process of photon absorption; charge segregation and photocurrent; resulting in superior photoelectrode performance. The photocurrent measurements of the prepared photoelectrodes were significantly enhanced with increased contents of Mxene due to improved absorption efficiency within the visible region; as verified by UV-Vis absorption spectroscopy. The anatase phase of TiO2 was significantly augmented due to increased contents of Mxene and postdeposition heat treatments; as evidenced by structural analysis. Consequently; an appreciable coverage of well-developed grains on the FTO surface was observed in SEM images. As such; these newly fabricated conductive mesoporous TiO2 photoelectrodes are potential candidates for photoinduced energy conversion and storage applications.

Combinatorial Screening of Cuprate Superconductors by Drop-On-Demand Inkjet Printing

Combinatorial and high-throughput experimentation (HTE) is achieving more relevance in material design, representing a turning point in the process of accelerated discovery, development, and optimization of materials based on data-driven approaches. The versatility of drop-on-demand inkjet printing (IJP) allows performing combinatorial studies through fabrication of compositionally graded materials with high spatial precision, here by mixing superconducting REBCO precursor solutions with different rare earth (RE) elements. The homogeneity of combinatorial Y1-xGdxBa2Cu3O7 samples was designed with computational methods and confirmed by energy-dispersive X-ray spectroscopy (EDX) and high-resolution X-ray diffraction (XRD). We reveal the advantages of this strategy in the optimization of the epitaxial growth of high-temperature REBCO superconducting films using the novel transient liquid-assisted growth method (TLAG). Advanced characterization methods, such as in situ synchrotron growth experiments, are tailored to suit the combinatorial approach and demonstrated to be essential for HTE schemes. The experimental strategy presented is key for the attainment of large datasets for the implementation of machine learning backed material design frameworks.

Recent advances in bioelectronics chemistry

Research in bioelectronics is highly interdisciplinary, with many new developments being based on techniques from across the physical and life sciences. Advances in our understanding of the fundamental chemistry underlying the materials used in bioelectronic applications have been a crucial component of many recent discoveries. In this review, we highlight ways in which a chemistry-oriented perspective may facilitate novel and deep insights into both the fundamental scientific understanding and the design of materials, which can in turn tune the functionality and biocompatibility of bioelectronic devices. We provide an in-depth examination of several developments in the field, organized by the chemical properties of the materials. We conclude by surveying how some of the latest major topics of chemical research may be further integrated with bioelectronics.

A novel gradient composition spreading and nanolayer stacking process for combinatorial thin-film materials library fabrication

A novel magnetron sputtering process is proposed to fabricate a combinatorial thin-film materials library with highly precise composition spreading. In order to produce a gradient composition spreading for a specific target, a moving shutter is used to cover the deposition substrate step by step with a fixed step-length. By rotating the substrate and repeating the step-by-step masked deposition with different targets in turn, a heterogeneous precursor structure is obtained with alternate stacking of different material layers, each of which is in a step-by-step wedge-shaped thickness cross section. By controlling the thickness of each layer at the nanometer scale, a multilayer structure is formed to facilitate the interlayer diffusion between different precursor layers. It may also define the boundaries of individual sample pixels, resulting in improved composition spreading resolutions for the prepared materials library. A combinatorial magnetron sputtering system is designed with reciprocating rectangular targets, a narrow slit between the substrate and the target, and a quartz crystal microbalance feedback to control the deposition uniformity, resulting in a variation better than 3% across a 76 × 76 mm substrate. Three individual deposition chambers are designed in an annular distribution with 90° angle between each other. Moreover, a step-by-step moving shutter and a rotating substrate holder are incorporated. Combinatorial materials libraries with more than 10 000 individual compositions could be obtained using this system. A Ti-Zr-Ni ternary alloy library was fabricated for demonstration in which the sheet resistance spreading diagram of the Ti-Zr-Ni library was studied as a function of the composition.