Directed Self-Assembly of High χ Poly(styrene-b-(lactic acid-alt-glycolic acid)) Block Copolymers on Chemical Patterns via Thermal Annealing

Optimized design of block copolymers with covarying properties for nanolithography

The ability to impart multiple covarying properties into a single material represents a grand challenge in manufacturing. In the design of block copolymers (BCPs) for directed self-assembly and nanolithography, materials often balance orthogonal properties to meet constraints related to processing, structure and defectivity. Although iterative synthesis strategies deliver BCPs with attractive properties, identifying materials with all the required attributes has been difficult. Here we report a high-throughput synthesis and characterization platform for the discovery and optimization of BCPs with A-block-(B-random-C) architectures for lithographic patterning in semiconductor manufacturing. Starting from a parent BCP and using thiol-epoxy 'click' chemistry, we synthesize a library of BCPs that cover a large and complex parameter space. This allows us to readily identify feature-size-dependent BCP chemistries for 8-20-nm-pitch patterns. These blocks have similar surface energies for directed self-assembly, and control over the segregation strength to optimize the structure (favoured at higher segregation strengths) and defectivity (favoured at lower segregation strengths).

Optimizing Chain Topology of Bottle Brush Copolymer for Promoting the Disorder-to-Order Transition

The order-disorder transitions (ODT) of core-shell bottle brush copolymer and its structural isomers were investigated by dissipative particle dynamics simulations and theoretically by random phase approximation. Introducing a chain topology parameter λ which parametrizes linking points between M diblock chains each with N monomers, the degree of incompatibility at ODT ((χN)ODT; χ being the Flory-Huggins interaction parameter between constituent monomers) was predicted as a function of chain topology parameter (λ) and the number of linked diblock chains per bottle brush copolymer (M). It was found that there exists an optimal chain topology about λ at which (χN)ODT gets a minimum while the domain spacing remains nearly unchanged. The prediction provides a theoretical guideline for designing an optimal copolymer architecture capable of forming sub-10 nm periodic structures even with non-high χ components.

Hierarchical self-assemblies of carnosine asymmetrically functioned perylene diimide with high optoelectronic response

HYPOTHESIS

Taking advantage of photoinduced electron transfer, one dimensional organic nanomaterials with tunable donor-acceptor (D-A) interface provide a promising avenue to get high optoelectric properties. However, strong charge transfer interaction between D and A segments impedes the formation of long-range ordered structure, which limits the charge transport through efficient π electronic delocalization. Incorporation of chiral peptide offering various hydrogen bonding (H-bonding) along with asymmetric molecular structure enables substantially controllable D-A interface and tunable organization of the π-conjugates.

EXPERIMENTS

A new amphiphilic perylene diimide (CUPDI) with PDI as an acceptor is designed and synthesized. A polar chiral dipeptide composed of β-alanine and l-histidine with the imidazole ring as the donor i.e., l-carnosine, is incorporated at one of imides. Transition of various supramolecular assemblies of CUPDI is realized by changing CUPDI concentration and solvents. The photoelectronic properties of the assemblies are investigated as well as their association with the microstructure of the nanomaterials.

FINDINGS

Delicately tuned hydrogen bonds between the peptides and π-π interaction between PDI cores in different solvents enable the formation of assemblies with multifarious microstructures such as small spherical aggregates, nanowires with uniform diameter, nanobelts, and irregular aggregates. The maximum amount of photocurrent enhancement is up to 1.08 µA observed for the nanobelt, four times higher than that of irregular aggregates. However, the nanowires show the best performance of 7.1-fold in response to ammonia. Thus, the photoelectric performances are strongly dependent on the the molecular arrangement within the nanomaterials.

Synthesis, Microstructure, and Properties of High-Molar-Mass Polyglycolide Copolymers with Isolated Methyl Defects

An efficient, fast, and reliable method for the synthesis of high-molar-mass polyglycolide (PGA) in bulk using bismuth (III) subsalicylate through ring-opening transesterification polymerization is described. The difference between the crystallization (T_c ≈ 180 °C)/degradation (T_d ≈ 245 °C) temperatures and the melting temperature (T_m ≈ 222 °C) significantly affects the ability to melt-process PGA homopolymer. To expand these windows, the effect of copolymer microstructure differences through incorporation of methyl groups in pairs using lactide or isolated using methyl glycolide (≤10% methyl) as comonomers on the thermal, mechanical, and barrier properties were studied. Structures of copolymers were characterized by nuclear magnetic resonance (¹H and ¹³C NMR) spectroscopies. Films of copolymers were obtained, and the microstructural and physical properties were analyzed. PGA homopolymers exhibited an approximately 30 °C difference between T_m and T_c, which increased to 68 °C by incorporating up to 10% methyl groups in the chain while maintaining overall thermal stability. Oxygen and water vapor permeation values of solvent-cast nonoriented films of PGA homopolymers were found to be 4.6 cc·mil·m^-2·d^-1·atm^-1 and 2.6 g·mil·m^-2·d^-1·atm^-1, respectively. Different methyl distributions in the copolymer sequence, provided through either lactide or methyl glycolide, affected the resulting gas barrier properties. At 10% methyl insertion, using lactide as a comonomer significantly increased both O₂ (32 cc·mil·m^-2·d^-1·atm^-1) and water vapor (12 g·mil·m^-2·d^-1·atm^-1) permeation. However, when methyl glycolide was utilized for methyl insertion at 10% Me content, excellent barrier properties for both O₂ (2.9 cc·mil·m^-2·d^-1·atm^-1) and water vapor (1.0 g·mil·m^-2·d^-1·atm^-1) were achieved.

Local Orientation of Polystyrene at the Interface with Poly(methyl methacrylate) in Block Copolymer

The local conformation of polystyrene (PS) at the phase-separated lamellar interface with poly(methyl methacrylate) (PMMA) in their diblock copolymer (BCP) was examined by sum-frequency generation spectroscopy in conjunction with a full-atomistic molecular dynamics simulation. While PS phenyl groups of BCP were oriented in the interfacial region, they were random in the bulk. Such an interfacial orientation of phenyl groups was not clear for the corresponding blend of PS and PMMA. The PS backbone of BCP was in-plane oriented and folded near to the chemical junction point located in the interfacial region and the orientation became random at several nanometers distant. No evidence for the chain folding at the interface was found for the blend system.

Perpendicularly aligned nanodomains on versatile substrates via rapid thermal annealing assisted by liquid crystalline ordering in block copolymer films

The highly ordered perpendicularly aligned cylindrical and lamellar microdomains within block copolymer (BCP) films have important applications in diverse fields. However, the fast normal orientation of self-assembled nanostructures on arbitrary substrates without tedious pre- and postprocessing has been a challenging issue in manufacturing miniaturized devices. Here, we outline the potential for extending the hierarchical self-assembly within azobenzene-containing PS-b-PMA(Az) films to inherently assist in the formation of normally aligned domains using a rapid thermal annealing process (140 °C for 5 min). Liquid crystalline (LC) mesogens in PS-b-PMA(Az) films self-assemble to form a parallelly aligned sematic phase after thermal annealing, as confirmed by grazing-incidence small-angle X-ray scattering (GISAXS), wide-angle X-ray diffraction (WAXD) and ultraviolet-visible (UV-vis) spectra. This sub-phase contributes to broadening of the PS-cylinder-phase window (0.083 ≤ f PS < 0.49) and ∼12 nm PS cylinder structures. Perpendicular cylinders or lamellae are observed on various substrates, such as silicon wafers, flexible polyethylene terephthalate (PET) sheets and conductive aluminum foils. Additionally, the good reactive ion etching (RIE) rate difference between the two blocks makes these BCPs more attractive for advancing the field of BCP lithographic applications for fabricating flexible microelectronic devices.

Synthesis of a Fluoromethacrylate Hydroxystyrene Block Copolymer Capable of Rapidly Forming Sub-5 nm Domains at Low Temperatures

A series of poly(pentadecafluorooctyl methacrylate)-block-polyhydroxystyrene (PPDFMA-b-PHS) block copolymers (BCPs) were synthesized via reversible addition-fragmentation chain-transfer polymerization and subsequent deprotection. Because of the high incompatibility between hydroxyl groups and fluoro groups, the interaction parameter (χ) of these BCPs, determined by temperature-resolved small-angle X-ray scattering (SAXS), was extremely high. The χ value of PPDFMA-b-PHS was 0.48 at 150 °C, 16× larger than the χ of polystyrene-block-poly(methyl methacrylate). The microphase behavior of PPDFMA-b-PHS with various volume fractions of PHS block was determined by SAXS, yielding ordered lamellar morphologies with different sizes of domain spacing (d), and further confirmed by transmission electron microscopy. The minimum d obtained was 9.8 nm annealed at a mild temperature for a short time (80 °C for 1 min) by SAXS analysis, indicating the width of each lamellar domains was <5 nm.

The effect of chain architecture on the phase behavior of A4B4 miktoarm block copolymers

Well-defined miktoarm (polystyrene)₄-(polylactic acid)₄ ((PS)₄-(PLA)₄) block copolymers were synthesized and their phase behaviors were compared with linear PS-b-PLA block copolymers, in which the miktoarm architecture enhanced the phase segregation.

Thermal Approaches to Perpendicular Block Copolymer Microdomains in Thin Films: A Review and Appraisal

Block copolymer thin films are highly versatile and accessible materials capable of producing nanofeatures in the size regime of a few to hundreds of nanometers by a simple spin-coating-and-anneal process. Unfortunately, this simple protocol usually leads to parallel microdomains, which limits the applicability of such nanofeatures. A great deal of effort has been put into achieving perpendicular microdomains, but those that incorporate thermal annealing are arguably the most practical and reproducible in the lab and industry. This review discusses the recent ongoing efforts on various thermal approaches to achieving perpendicular microdomains in order to provide the readers with a toolbox to work with.