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Zhou H, Li D, Ren Z, Xu C, Wang LF, Lee C. Surface plasmons-phonons for mid-infrared hyperspectral imaging. SCIENCE ADVANCES 2024; 10:eado3179. [PMID: 38809968 PMCID: PMC11135386 DOI: 10.1126/sciadv.ado3179] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/28/2024] [Accepted: 04/23/2024] [Indexed: 05/31/2024]
Abstract
Surface plasmons have proven their ability to boost the sensitivity of mid-infrared hyperspectral imaging by enhancing light-matter interactions. Surface phonons, a counterpart technology to plasmons, present unclear contributions to hyperspectral imaging. Here, we investigate this by developing a plasmon-phonon hyperspectral imaging system that uses asymmetric cross-shaped nanoantennas composed of stacked plasmon-phonon materials. The phonon modes within this system, controlled by light polarization, capture molecular refractive index intensity and lineshape features, distinct from those observed with plasmons, enabling more precise and sensitive molecule identification. In a deep learning-assisted imaging demonstration of severe acute respiratory syndrome coronavirus (SARS-CoV), phonons exhibit enhanced identification capabilities (230,400 spectra/s), facilitating the de-overlapping and observation of the spatial distribution of two mixed SARS-CoV spike proteins. In addition, the plasmon-phonon system demonstrates increased identification accuracy (93%), heightened sensitivity, and enhanced detection limits (down to molecule monolayers). These findings extend phonon polaritonics to hyperspectral imaging, promising applications in imaging-guided molecule screening and pharmaceutical analysis.
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Affiliation(s)
- Hong Zhou
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117583, Singapore
| | - Dongxiao Li
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117583, Singapore
| | - Zhihao Ren
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117583, Singapore
| | - Cheng Xu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117583, Singapore
| | - Lin-Fa Wang
- Programme in Emerging Infectious Diseases, Duke-NUS Medical School, Singapore, Singapore
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117583, Singapore
- NUS Suzhou Research Institute (NUSRI), Suzhou, Jiangsu 215123, China
- NUS Graduate School–Integrative Sciences and Engineering Programme (ISEP), National University of Singapore, Singapore 119077, Singapore
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2
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Hong H, Kim W, Kim W, Jeong JM, Kim S, Kim SS. Machine Learning-Driven Design Optimization of Buckling-Induced Quasi-Zero Stiffness Metastructures for Low-Frequency Vibration Isolation. ACS APPLIED MATERIALS & INTERFACES 2024; 16:17965-17972. [PMID: 38533594 PMCID: PMC11009906 DOI: 10.1021/acsami.3c18793] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/15/2023] [Revised: 03/04/2024] [Accepted: 03/18/2024] [Indexed: 03/28/2024]
Abstract
Metastructures, artificial arrangements of micro/macrostructures, possess unique properties and are of significant interest in aerospace, stealth technology, and various other applications. Recent studies have focused on quasi-zero stiffness metastructures, providing an outstanding vibration isolation capability. However, existing methods are constrained to low preloads and lack the consideration of structural analysis, despite their intended use in practical structures. This study introduces metastructures with quasi-zero stiffness characteristics under high preloads by inducing local buckling. An optimization framework combining deep reinforcement learning and finite-element analysis is employed to derive an optimal model that considers both structural safety and quasi-zero stiffness characteristics. To validate the optimization results, quasi-zero stiffness metastructures are fabricated via 3D printing, and compression and vibration experiments are conducted. The fabricated metastructures exhibit quasi-zero stiffness characteristics under a high target preload along with outstanding vibration reduction performance, even in the low-frequency range.
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Affiliation(s)
- Hyunsoo Hong
- Department of Mechanical
Engineering, Korea Advanced Institute of
Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 305-701, Republic of Korea
| | - Wonki Kim
- Department of Mechanical
Engineering, Korea Advanced Institute of
Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 305-701, Republic of Korea
| | - Wonvin Kim
- Department of Mechanical
Engineering, Korea Advanced Institute of
Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 305-701, Republic of Korea
| | - Jae-moon Jeong
- Department of Mechanical
Engineering, Korea Advanced Institute of
Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 305-701, Republic of Korea
| | - Samuel Kim
- Department of Mechanical
Engineering, Korea Advanced Institute of
Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 305-701, Republic of Korea
| | - Seong Su Kim
- Department of Mechanical
Engineering, Korea Advanced Institute of
Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 305-701, Republic of Korea
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3
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Liu X, Zhang Z, Zhou J, Liu W, Zhou G, Lee C. Artificial Intelligence-Enhanced Waveguide "Photonic Nose"- Augmented Sensing Platform for VOC Gases in Mid-Infrared. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024:e2400035. [PMID: 38576121 DOI: 10.1002/smll.202400035] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/03/2024] [Revised: 03/17/2024] [Indexed: 04/06/2024]
Abstract
On-chip nanophotonic waveguide sensor is a promising solution for miniaturization and label-free detection of gas mixtures utilizing the absorption fingerprints in the mid-infrared (MIR) region. However, the quantitative detection and analysis of organic gas mixtures is still challenging and less reported due to the overlapping of the absorption spectrum. Here,an Artificial-Intelligence (AI) assisted waveguide "Photonic nose" is presented as an augmented sensing platform for gas mixture analysis in MIR. With the subwavelength grating cladding supported waveguide design and the help of machine learning algorithms, the MIR absorption spectrum of the binary organic gas mixture is distinguished from arbitrary mixing ratio and decomposed to the single-component spectra for concentration prediction. As a result, the classification of 93.57% for 19 mixing ratios is realized. In addition, the gas mixture spectrum decomposition and concentration prediction show an average root-mean-square error of 2.44 vol%. The work proves the potential for broader sensing and analytical capabilities of the MIR waveguide platform for multiple organic gas components toward MIR on-chip spectroscopy.
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Affiliation(s)
- Xinmiao Liu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
- Department of Mechanical Engineering, National University of Singapore, Singapore, 117575, Singapore
| | - Zixuan Zhang
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
| | - Jingkai Zhou
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
| | - Weixin Liu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
| | - Guangya Zhou
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
- Department of Mechanical Engineering, National University of Singapore, Singapore, 117575, Singapore
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, 117583, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, 117608, Singapore
- NUS Suzhou Research Institute (NUSRI), Suzhou, Jiangsu, 215123, China
- NUS Graduate School's Integrative Sciences and Engineering Programme (ISEP), National University of Singapore, Singapore, 117583, Singapore
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4
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Weng X, Yan D, Qiu Y, Li X, Zhang L, Li J. Realization of multifunctional transformation based on the vanadium dioxide-assisted metamaterial structure. Phys Chem Chem Phys 2024; 26:8247-8254. [PMID: 38385499 DOI: 10.1039/d3cp06105a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/23/2024]
Abstract
In this paper, a multifunctional device and a design method are proposed based on the vanadium dioxide (VO2)-assisted metamaterial structure. The structure comprises several layers arranged from top to bottom, including a VO2 patch layer, a polyimide (PI) dielectric layer, an elliptical metal layer, a VO2 thin film layer, another PI dielectric layer, and a bottom metal layer. The research results show that the metamaterial structure enables linear-to-linear (LTL) polarization conversion and linear-to-circular (LTC) polarization conversion across multiple frequency bands when the VO2 is in the insulating state. Moreover, as the VO2 material undergoes a transition from the insulating state to the metallic state, the multifunctional structure can function as a broadband absorber, exhibiting an absorption rate of over 90% within the frequency range of 1.751-3.853 THz, with a relative bandwidth of 75%. This versatile conversion device holds great potential for applications in terahertz system and smart system fields.
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Affiliation(s)
- Xuehui Weng
- Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, Zhejiang, China.
| | - Dexian Yan
- Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, Zhejiang, China.
| | - Yu Qiu
- Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, Zhejiang, China.
| | - Xiangjun Li
- Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, Zhejiang, China.
| | - Le Zhang
- Key Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering, China Jiliang University, Hangzhou 310018, Zhejiang, China.
| | - Jining Li
- College of Precision Instrument and Optoelectronic Engineering, Tianjin University, Tianjin 300072, Tianjin, China
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Lian L, Zhang Q, Li W, Wang B, Liang Q. A shadow enabled non-invasive probe for multi-feature intelligent liquid surveillance system. NANOSCALE 2024; 16:1176-1187. [PMID: 38111989 DOI: 10.1039/d3nr04983c] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/20/2023]
Abstract
Liquid detection probes used to identify the features of liquids show great promise in a variety of important applications. However, some challenges, such as sample contamination by direct contact with the liquid, the requirement of additional signal emitters, and complex fabrication, hindered the development of liquid detection probes. Here, we developed a non-invasive shadow probe (SP) for a multi-feature intelligent liquid surveillance system (ILSS). The self-powered SP with the working mechanism of the shadow effect can detect the features of liquids by analyzing the variations of liquid shadows such as the area, wavelength, and brightness. The exact resolution (5 different colors, 6 different concentrations, 6 different levels, 100% accuracy) and fast response time (0.2 ms) are shown by the SP under ambient light conditions (even in 0.003 sun). The ILSS, which integrated the SPs with signal processing circuits and applied the artificial intelligence (AI) technique, successfully detects and synoptically learns about liquids simultaneously. The in-real time ILSS reaches a test accuracy of 99.3% for 10 types of liquids with multiple features. This work showcases a promising solution for non-invasive multi-feature liquid detection, displaying great potential for future applications.
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Affiliation(s)
- Lizhen Lian
- School of Materials, Shenzhen Campus of Sun Yat-sen University, No. 66, Gongchang Road, Guangming District, Shenzhen 518107, China.
- Songshan Lake Materials Laboratory, Songshan Lake Mat Lab, Dongguan 523808, China.
- School of Physics and Materials Science, Guangzhou University, No. 230, University Town Waihuan West Road, Guangzhou 510006, China.
| | - Qian Zhang
- School of Materials, Shenzhen Campus of Sun Yat-sen University, No. 66, Gongchang Road, Guangming District, Shenzhen 518107, China.
| | - Wenbo Li
- Songshan Lake Materials Laboratory, Songshan Lake Mat Lab, Dongguan 523808, China.
| | - Bin Wang
- School of Physics and Materials Science, Guangzhou University, No. 230, University Town Waihuan West Road, Guangzhou 510006, China.
| | - Qijie Liang
- Songshan Lake Materials Laboratory, Songshan Lake Mat Lab, Dongguan 523808, China.
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Li J, Sun C, Ma H, Tang B, Qi M, Jian J, Ju Z, Lin H, Li L. Ultra-compact scalable spectrometer with low power consumption. OPTICS EXPRESS 2023; 31:39606-39615. [PMID: 38041277 DOI: 10.1364/oe.499892] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/13/2023] [Accepted: 10/26/2023] [Indexed: 12/03/2023]
Abstract
An ultra-compact on-chip spectrometer was demonstrated based on an array of add-drop micro-donut resonators (MDRs). The filter array was thermally tuned by a single TiN microheater, enabling simultaneous spectral scanning across all physical channels. The MDR was designed to achieve large free spectral ranges with multimode waveguide bends and asymmetric coupling waveguides, covering a spectral range of 40 nm at the telecom waveband with five physical channels (which could be further expanded). Benefiting from the ultra-small device footprint of 150 µm2, the spectrometer achieved a low power consumption of 16 mW. Additionally, it is CMOS-compatible and enables mass fabrication, which may have potential applications in personal terminals and the consumer industry.
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Pang Y, Zhu X, Liu S, Lee C. A Natural Gradient Biological-Enabled Multimodal Triboelectric Nanogenerator for Driving Safety Monitoring. ACS NANO 2023; 17:21878-21892. [PMID: 37924297 DOI: 10.1021/acsnano.3c08102] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/06/2023]
Abstract
A key element to ensuring driving safety is to provide a sufficient braking distance. Inspired by the nature triply periodic minimal surface (TPMS), a gradient and multimodal triboelectric nanogenerator (GM-TENG) is proposed with high sensitivity and excellent multimodal monitoring. The gradient TPMS structure exhibits the multi-stage stress-strain properties of typical porous metamaterials. Significantly, the multimodal monitoring capability depends on the implicit function of the defined level constant c, which directly contributes to the multimodal driving safety monitoring. The mechanical and electrical responsive behavior of the GM-TENG is analyzed to identify the applied speed, load, and working mode. In addition, optimized peak open-circuit voltage (Voc) is demonstrated for self-awareness of the braking condition. The braking distance factor (L) is conceived to construct the self-aware equation of the friction coefficient based on the integration of Voc with respect to time. Importantly, R-squared up to 94.29 % can be obtained, which improves self-aware accuracy and real-time capabilities. This natural structure and self-aware device provide an effective strategy to improve driving safety, which contributes to the improvement of road safety and presents self-powered sensing with potential applications in an intelligent transportation system.
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Affiliation(s)
- Yafeng Pang
- Key Laboratory of Road and Traffic Engineering of Ministry of Education, Tongji University, Shanghai 200092, P. R. China
- Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore
- Center for Intelligent Sensors and MEMS, National University of Singapore, Block E6 #05-11, 5 Engineering Drive 1, Singapore 117608, Singapore
| | - Xingyi Zhu
- Key Laboratory of Road and Traffic Engineering of Ministry of Education, Tongji University, Shanghai 200092, P. R. China
| | - Shuainian Liu
- Key Laboratory of Road and Traffic Engineering of Ministry of Education, Tongji University, Shanghai 200092, P. R. China
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore
- Center for Intelligent Sensors and MEMS, National University of Singapore, Block E6 #05-11, 5 Engineering Drive 1, Singapore 117608, Singapore
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Hu Y, He W, Sun Y, Yi Q, Xing S, Yan Z, Xia L, Li T, Zhou P, Zhang J, Shen L, Zou Y. High-efficient subwavelength structure engineered grating couplers for 2-µm waveband high-speed data transmission. OPTICS EXPRESS 2023; 31:39079-39087. [PMID: 38017996 DOI: 10.1364/oe.501601] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/28/2023] [Accepted: 09/11/2023] [Indexed: 11/30/2023]
Abstract
The 2-µm waveband is becoming an emerging window for next-generation high-speed optical communication. To enable on-chip high-speed data transmission, improving the signal-to-noise ratio (SNR) by suppressing the coupling loss of a silicon chip is critical. Here, we report grating couplers for TE and TM polarized light at the 2-µm waveband. With a single-step fully etched process on the 340 nm silicon-on-insulator (SOI) platform, the devices experimentally demonstrate high coupling efficiency of -4.0 dB and 1-dB bandwidth of 70 nm for the TE polarized light, while -4.5 dB coupling efficiency and 58 nm 1-dB bandwidth for the TM polarized light. For comprehensive performance, both of them are among the best grating couplers operating in the 2-µm waveband so far. We also demonstrate 81Gbps high-speed on-chip data transmission using pulse amplitude modulation 8-level (PAM-8) signals.
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Li D, Xu C, Xie J, Lee C. Research Progress in Surface-Enhanced Infrared Absorption Spectroscopy: From Performance Optimization, Sensing Applications, to System Integration. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:2377. [PMID: 37630962 PMCID: PMC10458771 DOI: 10.3390/nano13162377] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/20/2023] [Revised: 08/13/2023] [Accepted: 08/17/2023] [Indexed: 08/27/2023]
Abstract
Infrared absorption spectroscopy is an effective tool for the detection and identification of molecules. However, its application is limited by the low infrared absorption cross-section of the molecule, resulting in low sensitivity and a poor signal-to-noise ratio. Surface-Enhanced Infrared Absorption (SEIRA) spectroscopy is a breakthrough technique that exploits the field-enhancing properties of periodic nanostructures to amplify the vibrational signals of trace molecules. The fascinating properties of SEIRA technology have aroused great interest, driving diverse sensing applications. In this review, we first discuss three ways for SEIRA performance optimization, including material selection, sensitivity enhancement, and bandwidth improvement. Subsequently, we discuss the potential applications of SEIRA technology in fields such as biomedicine and environmental monitoring. In recent years, we have ushered in a new era characterized by the Internet of Things, sensor networks, and wearable devices. These new demands spurred the pursuit of miniaturized and consolidated infrared spectroscopy systems and chips. In addition, the rise of machine learning has injected new vitality into SEIRA, bringing smart device design and data analysis to the foreground. The final section of this review explores the anticipated trajectory that SEIRA technology might take, highlighting future trends and possibilities.
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Affiliation(s)
- Dongxiao Li
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore; (D.L.); (C.X.); (J.X.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
| | - Cheng Xu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore; (D.L.); (C.X.); (J.X.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
| | - Junsheng Xie
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore; (D.L.); (C.X.); (J.X.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore; (D.L.); (C.X.); (J.X.)
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
- NUS Suzhou Research Institute (NUSRI), Suzhou 215123, China
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Wang C, He T, Zhou H, Zhang Z, Lee C. Artificial intelligence enhanced sensors - enabling technologies to next-generation healthcare and biomedical platform. Bioelectron Med 2023; 9:17. [PMID: 37528436 PMCID: PMC10394931 DOI: 10.1186/s42234-023-00118-1] [Citation(s) in RCA: 7] [Impact Index Per Article: 7.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/16/2023] [Accepted: 06/17/2023] [Indexed: 08/03/2023] Open
Abstract
The fourth industrial revolution has led to the development and application of health monitoring sensors that are characterized by digitalization and intelligence. These sensors have extensive applications in medical care, personal health management, elderly care, sports, and other fields, providing people with more convenient and real-time health services. However, these sensors face limitations such as noise and drift, difficulty in extracting useful information from large amounts of data, and lack of feedback or control signals. The development of artificial intelligence has provided powerful tools and algorithms for data processing and analysis, enabling intelligent health monitoring, and achieving high-precision predictions and decisions. By integrating the Internet of Things, artificial intelligence, and health monitoring sensors, it becomes possible to realize a closed-loop system with the functions of real-time monitoring, data collection, online analysis, diagnosis, and treatment recommendations. This review focuses on the development of healthcare artificial sensors enhanced by intelligent technologies from the aspects of materials, device structure, system integration, and application scenarios. Specifically, this review first introduces the great advances in wearable sensors for monitoring respiration rate, heart rate, pulse, sweat, and tears; implantable sensors for cardiovascular care, nerve signal acquisition, and neurotransmitter monitoring; soft wearable electronics for precise therapy. Then, the recent advances in volatile organic compound detection are highlighted. Next, the current developments of human-machine interfaces, AI-enhanced multimode sensors, and AI-enhanced self-sustainable systems are reviewed. Last, a perspective on future directions for further research development is also provided. In summary, the fusion of artificial intelligence and artificial sensors will provide more intelligent, convenient, and secure services for next-generation healthcare and biomedical applications.
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Affiliation(s)
- Chan Wang
- Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, 5 Engineering Drive 1, Singapore, 117608, Singapore
| | - Tianyiyi He
- Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, 5 Engineering Drive 1, Singapore, 117608, Singapore
| | - Hong Zhou
- Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, 5 Engineering Drive 1, Singapore, 117608, Singapore
| | - Zixuan Zhang
- Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, 117576, Singapore
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, 5 Engineering Drive 1, Singapore, 117608, Singapore
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, 117576, Singapore.
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, 5 Engineering Drive 1, Singapore, 117608, Singapore.
- NUS Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou, 215123, China.
- NUS Graduate School for Integrative Science and Engineering, National University of Singapore, Singapore, 117456, Singapore.
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