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Bucher T, Ruimy R, Tsesses S, Dahan R, Bartal G, Vanacore GM, Kaminer I. Free-electron Ramsey-type interferometry for enhanced amplitude and phase imaging of nearfields. SCIENCE ADVANCES 2023; 9:eadi5729. [PMID: 38134276 PMCID: PMC10745688 DOI: 10.1126/sciadv.adi5729] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/04/2023] [Accepted: 11/22/2023] [Indexed: 12/24/2023]
Abstract
The complex range of interactions between electrons and electromagnetic fields gave rise to countless scientific and technological advances. A prime example is photon-induced nearfield electron microscopy (PINEM), enabling the detection of confined electric fields in illuminated nanostructures with unprecedented spatial resolution. However, PINEM is limited by its dependence on strong fields, making it unsuitable for sensitive samples, and its inability to resolve complex phasor information. Here, we leverage the nonlinear, overconstrained nature of PINEM to present an algorithmic microscopy approach, achieving far superior nearfield imaging capabilities. Our algorithm relies on free-electron Ramsey-type interferometry to produce orders-of-magnitude improvement in sensitivity and ambiguity-immune nearfield phase reconstruction, both of which are optimal when the electron exhibits a fully quantum behavior. Our results demonstrate the potential of combining algorithmic approaches with state-of-the-art modalities in electron microscopy and may lead to various applications from imaging sensitive biological samples to performing full-field tomography of confined light.
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Affiliation(s)
- Tomer Bucher
- Andrew and Erna Viterbi Department of Electrical and Computer Engineering, Technion-Israel Institute of Technology, Haifa 3200003, Israel
- Solid State Institute, Technion-Israel Institute of Technology, Haifa 3200003, Israel
| | - Ron Ruimy
- Andrew and Erna Viterbi Department of Electrical and Computer Engineering, Technion-Israel Institute of Technology, Haifa 3200003, Israel
- Solid State Institute, Technion-Israel Institute of Technology, Haifa 3200003, Israel
| | - Shai Tsesses
- Andrew and Erna Viterbi Department of Electrical and Computer Engineering, Technion-Israel Institute of Technology, Haifa 3200003, Israel
- Department of Physics and Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
| | - Raphael Dahan
- Solid State Institute, Technion-Israel Institute of Technology, Haifa 3200003, Israel
| | - Guy Bartal
- Andrew and Erna Viterbi Department of Electrical and Computer Engineering, Technion-Israel Institute of Technology, Haifa 3200003, Israel
| | - Giovanni Maria Vanacore
- Department of Material Science, University of Milano-Bicocca, Via Cozzi 55, 20121 Milano, Italy
| | - Ido Kaminer
- Andrew and Erna Viterbi Department of Electrical and Computer Engineering, Technion-Israel Institute of Technology, Haifa 3200003, Israel
- Solid State Institute, Technion-Israel Institute of Technology, Haifa 3200003, Israel
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2
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Ribet SM, Zeltmann SE, Bustillo KC, Dhall R, Denes P, Minor AM, Dos Reis R, Dravid VP, Ophus C. Design of Electrostatic Aberration Correctors for Scanning Transmission Electron Microscopy. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2023; 29:1950-1960. [PMID: 37851063 DOI: 10.1093/micmic/ozad111] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/16/2023] [Revised: 08/29/2023] [Accepted: 09/24/2023] [Indexed: 10/19/2023]
Abstract
In a scanning transmission electron microscope (STEM), producing a high-resolution image generally requires an electron beam focused to the smallest point possible. However, the magnetic lenses used to focus the beam are unavoidably imperfect, introducing aberrations that limit resolution. Modern STEMs overcome this by using hardware aberration correctors comprised of many multipole elements, but these devices are complex, expensive, and can be difficult to tune. We demonstrate a design for an electrostatic phase plate that can act as an aberration corrector. The corrector is comprised of annular segments, each of which is an independent two-terminal device that can apply a constant or ramped phase shift to a portion of the electron beam. We show the improvement in image resolution using an electrostatic corrector. Engineering criteria impose that much of the beam within the probe-forming aperture be blocked by support bars, leading to large probe tails for the corrected probe that sample the specimen beyond the central lobe. We also show how this device can be used to create other STEM beam profiles such as vortex beams and probes with a high degree of phase diversity, which improve information transfer in ptychographic reconstructions.
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Affiliation(s)
- Stephanie M Ribet
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208, USA
- International Institute of Nanotechnology, Northwestern University, Evanston, IL 60208, USA
- National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
| | - Steven E Zeltmann
- Platform for the Accelerated Realization, Analysis, and Discovery of Interface Materials (PARADIM), Cornell University, Ithaca, NY 14853, USA
- Department of Materials Science and Engineering, University of California, Berkeley, Berkeley, CA 94720, USA
| | - Karen C Bustillo
- National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
| | - Rohan Dhall
- National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
| | - Peter Denes
- Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
| | - Andrew M Minor
- National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
- Department of Materials Science and Engineering, University of California, Berkeley, Berkeley, CA 94720, USA
| | - Roberto Dos Reis
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208, USA
- International Institute of Nanotechnology, Northwestern University, Evanston, IL 60208, USA
- The NUANCE Center, Northwestern University, Evanston, IL 60208, USA
| | - Vinayak P Dravid
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208, USA
- International Institute of Nanotechnology, Northwestern University, Evanston, IL 60208, USA
- The NUANCE Center, Northwestern University, Evanston, IL 60208, USA
| | - Colin Ophus
- National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
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3
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Kamal S, Hailstone RK. Need for Wavefront Sensing in Scanning Electron Microscopy. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2023; 29:491-492. [PMID: 37613224 DOI: 10.1093/micmic/ozad067.233] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/25/2023]
Affiliation(s)
- Surya Kamal
- Rochester Institute of Technology, Rochester, NY, United States
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4
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Tsesses S, Dahan R, Wang K, Bucher T, Cohen K, Reinhardt O, Bartal G, Kaminer I. Tunable photon-induced spatial modulation of free electrons. NATURE MATERIALS 2023; 22:345-352. [PMID: 36702889 DOI: 10.1038/s41563-022-01449-1] [Citation(s) in RCA: 6] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/07/2021] [Accepted: 11/26/2022] [Indexed: 06/18/2023]
Abstract
Spatial modulation of electron beams is an essential tool for various applications such as nanolithography and imaging, yet its conventional implementations are severely limited and inherently non-tunable. Conversely, proposals of light-driven electron spatial modulation promise tunable electron wavefront shaping, for example, using the mechanism of photon-induced near-field electron microscopy. Here we present tunable photon-induced spatial modulation of electrons through their interaction with externally controlled surface plasmon polaritons (SPPs). Using recently developed methods of shaping SPP patterns, we demonstrate a dynamic control of the electron beam with a variety of electron distributions and verify their coherence through electron diffraction. Finally, the nonlinearity stemming from energy post-selection provides us with another avenue for controlling the electron shape, generating electron features far below the SPP wavelength. Our work paves the way to on-demand electron wavefront shaping at ultrafast timescales, with prospects for aberration correction, nanofabrication and material characterization.
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Affiliation(s)
- Shai Tsesses
- Andrew and Erna Viterbi Department of Electrical Engineering, Technion, Israel Institute of Technology, Haifa, Israel
| | - Raphael Dahan
- Andrew and Erna Viterbi Department of Electrical Engineering, Technion, Israel Institute of Technology, Haifa, Israel
- Solid State Institute, Technion, Israel Institute of Technology, Haifa, Israel
| | - Kangpeng Wang
- Andrew and Erna Viterbi Department of Electrical Engineering, Technion, Israel Institute of Technology, Haifa, Israel
- Solid State Institute, Technion, Israel Institute of Technology, Haifa, Israel
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China
| | - Tomer Bucher
- Andrew and Erna Viterbi Department of Electrical Engineering, Technion, Israel Institute of Technology, Haifa, Israel
- Solid State Institute, Technion, Israel Institute of Technology, Haifa, Israel
| | - Kobi Cohen
- Andrew and Erna Viterbi Department of Electrical Engineering, Technion, Israel Institute of Technology, Haifa, Israel
| | - Ori Reinhardt
- Andrew and Erna Viterbi Department of Electrical Engineering, Technion, Israel Institute of Technology, Haifa, Israel
- Solid State Institute, Technion, Israel Institute of Technology, Haifa, Israel
| | - Guy Bartal
- Andrew and Erna Viterbi Department of Electrical Engineering, Technion, Israel Institute of Technology, Haifa, Israel
| | - Ido Kaminer
- Andrew and Erna Viterbi Department of Electrical Engineering, Technion, Israel Institute of Technology, Haifa, Israel.
- Solid State Institute, Technion, Israel Institute of Technology, Haifa, Israel.
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5
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Madan I, Leccese V, Mazur A, Barantani F, LaGrange T, Sapozhnik A, Tengdin PM, Gargiulo S, Rotunno E, Olaya JC, Kaminer I, Grillo V, de Abajo FJG, Carbone F, Vanacore GM. Ultrafast Transverse Modulation of Free Electrons by Interaction with Shaped Optical Fields. ACS PHOTONICS 2022; 9:3215-3224. [PMID: 36281329 PMCID: PMC9585634 DOI: 10.1021/acsphotonics.2c00850] [Citation(s) in RCA: 13] [Impact Index Per Article: 6.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/04/2022] [Indexed: 05/13/2023]
Abstract
Spatiotemporal electron-beam shaping is a bold frontier of electron microscopy. Over the past decade, shaping methods evolved from static phase plates to low-speed electrostatic and magnetostatic displays. Recently, a swift change of paradigm utilizing light to control free electrons has emerged. Here, we experimentally demonstrate arbitrary transverse modulation of electron beams without complicated electron-optics elements or material nanostructures, but rather using shaped light beams. On-demand spatial modulation of electron wavepackets is obtained via inelastic interaction with transversely shaped ultrafast light fields controlled by an external spatial light modulator. We illustrate this method for the cases of Hermite-Gaussian and Laguerre-Gaussian modulation and discuss their use in enhancing microscope sensitivity. Our approach dramatically widens the range of patterns that can be imprinted on the electron profile and greatly facilitates tailored electron-beam shaping.
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Affiliation(s)
- Ivan Madan
- Institute
of Physics, École Polytechnique Fédérale
de Lausanne, Lausanne, 1015, Switzerland
| | - Veronica Leccese
- Institute
of Physics, École Polytechnique Fédérale
de Lausanne, Lausanne, 1015, Switzerland
| | - Adam Mazur
- HOLOEYE
Photonics AG, Volmerstrasse 1, 12489 Berlin, Germany
| | - Francesco Barantani
- Institute
of Physics, École Polytechnique Fédérale
de Lausanne, Lausanne, 1015, Switzerland
- Department
of Quantum Matter Physics, University of
Geneva, 1211 Geneva, Switzerland
| | - Thomas LaGrange
- Institute
of Physics, École Polytechnique Fédérale
de Lausanne, Lausanne, 1015, Switzerland
| | - Alexey Sapozhnik
- Institute
of Physics, École Polytechnique Fédérale
de Lausanne, Lausanne, 1015, Switzerland
| | - Phoebe M. Tengdin
- Institute
of Physics, École Polytechnique Fédérale
de Lausanne, Lausanne, 1015, Switzerland
| | - Simone Gargiulo
- Institute
of Physics, École Polytechnique Fédérale
de Lausanne, Lausanne, 1015, Switzerland
| | - Enzo Rotunno
- Centro
S3, Istituto di Nanoscienze-CNR, 41125 Modena, Italy
| | | | - Ido Kaminer
- Department
of Electrical and Computer Engineering, Technion, Haifa 32000, Israel
| | | | - F. Javier García de Abajo
- ICFO-Institut
de Ciencies Fotoniques, The Barcelona Institute
of Science and Technology, 08860 Castelldefels (Barcelona), Spain
- ICREA-Institució
Catalana de Recerca i Estudis Avançats, Passeig Lluís Companys 23, 08010 Barcelona, Spain
| | - Fabrizio Carbone
- Institute
of Physics, École Polytechnique Fédérale
de Lausanne, Lausanne, 1015, Switzerland
| | - Giovanni Maria Vanacore
- Department
of Materials Science, University of Milano-Bicocca, Via Cozzi 55, 20126 Milano, Italy
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6
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Bourgeois MR, Nixon AG, Chalifour M, Beutler EK, Masiello DJ. Polarization-Resolved Electron Energy Gain Nanospectroscopy With Phase-Structured Electron Beams. NANO LETTERS 2022; 22:7158-7165. [PMID: 36036765 DOI: 10.1021/acs.nanolett.2c02375] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Free-electron-based measurements in scanning transmission electron microscopes (STEMs) reveal valuable information on the broadband spectral responses of nanoscale systems with deeply subdiffraction limited spatial resolution. Leveraging recent advances in manipulating the spatial phase profile of the transverse electron wavefront, we theoretically describe interactions between the electron probe and optically stimulated nanophotonic targets in which the probe gains energy while simultaneously transitioning between transverse states with distinct phase profiles. Exploiting the selection rules governing such transitions, we propose phase-shaped electron energy gain nanospectroscopy for probing the 3D polarization-resolved response field of an optically excited target with nanoscale spatial resolution. Considering ongoing instrumental developments, polarized generalizations of STEM electron energy loss and gain measurements hold the potential to become powerful tools for fundamental studies of quantum materials and their interaction with nearby nanostructures supporting localized surface plasmon or phonon polaritons as well as for noninvasive imaging and nanoscale 3D field tomography.
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Affiliation(s)
- Marc R Bourgeois
- Department of Chemistry, University of Washington, Seattle, Washington 98195, United States
| | - Austin G Nixon
- Department of Chemistry, University of Washington, Seattle, Washington 98195, United States
| | - Matthieu Chalifour
- Department of Physics, University of Washington, Seattle, Washington 98195, United States
| | - Elliot K Beutler
- Department of Chemistry, University of Washington, Seattle, Washington 98195, United States
| | - David J Masiello
- Department of Chemistry, University of Washington, Seattle, Washington 98195, United States
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