Fabrication of antireflective compound eyes by imprinting

Asymmetric Plasmonic Moth-Eye Nanoarrays with Side Opening for Broadband Incident-Angle-Insensitive Antireflection and Absorption

Plasmonic absorbers with broadband angle-insensitive antireflection have attracted intense interests because of its wide applications in optical devices. Hybrid surfaces with multiple different sub-wavelength array units can provide broadened antireflection, while many of these antireflective surfaces only work for specific angles and require high complexity of nanofabrication. Here, a plasmonic asymmetric nanostructure composed of the moth-eye dielectric nanoarray partially modified with the top Ag nanoshell providing a side opening for broadband incident-angle-insensitive antireflection and absorption, is rationally designed by nanoimprinting lithography and oblique angle deposition. This study illustrates that the plasmonic asymmetric nanostructure not only excites strong plasmonic resonance, but also induces more light entry into the dielectric nanocavity and then enhances the internal scattering, leading to optimized light localization. Hence, the asymmetric nanostructure can effectively enhance light confinement at different incident angles and exhibit better antireflection and the corresponding absorption performance than that of symmetric nanostructure over the visible wavelengths, especially suppressing at least 16.4% lower reflectance in the range of 645-800 nm at normal incidence.Moreover, the reflectance variance of asymmetric nanostructure with the incident angle changing from 5° to 60° is much smaller than that of symmetric nanostructure, making our approach relevant for various applications in photocatalysis, photothermal conversion, and so on.

Superhydrophobic and easy-to-clean full-packing nanopatterned microlens array with high-quality imaging

The high-quality imaging and easy cleaning property of microlens array (MLA) are two very important factors for its outdoor work. Herein, a superhydrophobic and easy-to-clean full-packing nanopatterned MLA with high-quality imaging is prepared by thermal reflow together with sputter deposition. Scanning electronic microscopy (SEM) images demonstrate that the sputter deposition method can improve 84% packing density of MLA prepared by thermal reflow to 100% and add nanopattern on the surface of microlens. The prepared full-packing nanopatterned MLA (npMLA) possess clear imaging with a significant increase of signal-to-noise ratio and higher transparency compared with the MLA prepared by thermal reflow. Besides for excellent optical properties, the full-packing surface displays a superhydrophobic property with a contact angle of 151.3°. Further, the full-packing contaminated by chalk dust become easier to be cleaned by nitrogen blowing and deionized water. As a result, the prepared full-packing is considered to be potential for various applications in the outdoor.

Bioinspired Compound Eyes for Diffused Light-Harvesting Application

Natural compound eyes endow arthropods with wide-field high-performance light-harvesting capability that enables them to capture prey and avoid natural enemies in dim light. Inspired by natural compound eyes, a curved artificial-compound-eye (cACE) photodetector for diffused light harvesting is proposed and fabricated, and its light-harvesting capability is systematically investigated. The cACE photodetector is fabricated by introducing a cACE as a light-harvesting layer on the surface of a silicon-based photodetector, with the cACE being prepared via planar artificial-compound-eye (pACE) template deformation. The distinctive geometric morphology of the as-prepared cACE effectively reduces its surface reflection and the dependence of the projected area on the incident light direction, thereby significantly improving the light-harvesting ability and output photocurrent of the silicon-based photodetector. Furthermore, the performances of cACE, pACE, and bare polydimethylsiloxane (PDMS)-attached photodetectors as diffused light detectors are investigated under different luminances. The cACE-photodetector output photocurrent is 1.395 and 1.29 times those of the bare PDMS-attached and pACE photodetectors, respectively. Moreover, this photodetector has a desirable geometric shape. Thus, the proposed cACE photodetector will facilitate development of high-performance photodetectors for luminance sensing.

Hierarchical Artificial Compound Eyes with Wide Field-of-View and Antireflection Properties Prepared by Nanotip-Focused Electrohydrodynamic Jet Printing

Artificial compound eyes (ACEs) endowed with durable superhydrophobicity, wide field-of-view (FOV), and antireflection properties are extremely appealing in advanced micro-optical systems. However, the simple and high-efficiency fabrication of ACEs with these functions is still a major challenge. Herein, inspired by moth eyes, ACEs with hierarchical macro/micro/nano structures were fabricated using the combination of nanotip-focused electrohydrodynamic jet (NFEJ) printing and air-assisted deformation processes. The NFEJ printing enables the direct and maskless fabrication of hierarchical micro/nanolens arrays (M/NLAs) without intermediate steps. The introduction of M/NLAs on the eye surface significantly improves the water hydrophobic performance with a water contact angle of 161.1° and contact angle hysteresis (CAH) of 4.2° and generally decreases the reflectance by 51% in the wavelength range of 350-1600 nm in comparison to the macroeye without any structures. The contact angle remains almost unchanged, and the CAH slightly increases from 4.2° to 8.7° after water jet impact for 20 min, indicating a durable superhydrophobicity. Moreover, the results confirm that the durable superhydrophobic ACEs with antireflection properties exhibit excellent imaging quality and a large FOV of up to 160° without distortion.

Superhydrophobic Artificial Compound Eye with High Transparency

Natural compound eyes have inspired the development of self-cleaning, waterproof, and antifog optical devices. However, the traditional methods generally sacrifice the transparency of optical units to introduce hydrophobicity, which significantly limits the practical applications of state-of-the-art hydrophobic technologies. This work aims to fabricate a microimaging system by combining photolithography, inkjet printing, and chemical growth. Herein, an artificial compound eye (ACE) is endowed with stable superhydrophobicity and high transparency without affecting its optical performance. The obtained ACE system possesses good static and dynamic dewetting properties along with excellent optical performance. Its static contact angle exceeds 160°, whereas the sliding angle and contact angle hysteresis values are ∼5.5° and ∼3.8°, respectively. Furthermore, the contact time is found to be 11.97 s for the Weber number of 12. The droplet undergoes a reversible process during compressing and stretching, and the ACE exhibits no adhesion under a pressure load of 4 mN. This proves that the introduction of nonwetting nanohairs on the sidewalls of the microcone arrays significantly improves the dynamic dewetting of the system. More importantly, the properly designed position of nanohairs ensures that the optical performance of ACE is maintained at a level of ∼95% compared to that of the bare glass. The superhydrophobic ACE exhibits low adhesion and great transparency. This rationally designed ACE may provide useful guidelines for fabrication of superhydrophobic optical devices with high transparency and enable potential applications in military, medical, and some outdoor activity fields.

Photonic Metamaterial Absorbers: Morphology Engineering and Interdisciplinary Applications

Recent advances in nanofabrication technologies have spurred many breakthroughs in the field of photonic metamaterials that provide efficient ways of manipulating light-matter interaction at subwavelength scales. As one of the most important applications, photonic metamaterials can be used to implement novel optical absorbers. First the morphology engineering of various photonic metamaterial absorbers is discussed, which is highly associated with impendence matching conditions and resonance modes of the absorbers, thus directly determines their absorption efficiency, operational bandwidth, incident angle, and polarization dependence. Then, the recent achievements of various interdisciplinary applications based on photonic metamaterial absorbers, including structural color generation, ultrasensitive optical sensing, solar steam generation, and highly responsive photodetection, are reviewed. This report is expected to provide an overview and vision for the future development of photonic metamaterial absorbers and their applications in novel nanophotonic systems.

Investigation and Prediction on Regulation of Hydrophobicity of Polymethyl Methacrylate (PMMA) Surface by Femtosecond Laser Irradiation

This study presents the contact angle prediction model of a trapezoidal groove structure based on the laser irradiation on polymethyl methacrylate (PMMA). The trapezoidal groove structure was designed and proposed according to the characteristics of a femtosecond laser. First, the complete wetting model and incomplete wetting model which were compatible with the characteristics of the laser mechanism were constructed based on the Gibbs free energy and the structural parameters of the trapezoidal groove structure. Then, based on the contact angle prediction models constructed, the samples were divided into two groups according to the designed structural parameters, and the experimental investigations were carried out. The result demonstrated that the incomplete wetting prediction model was more in line with the actual situation. The convex width and the top edge length of spacing of the trapezoidal groove structure both affected the contact angle prediction results. From both the experimental contact angles and the contact angles predicted by the incomplete wetting model, it could be known that the contact angle reached 138.09° when the ratio of the convex width to the top edge length of spacing was 0.25, indicating that the smaller the ratio of the convex width to the top edge length of spacing, the better the hydrophobicity of PMMA.

Construction of Carbon Nanotube Sponges to Have High Optical Antireflection and Mechanical Stability

Antireflective (AR) materials are required to possess high optical antireflection and mechanical stability for their practical applications in optical, opto-electronic, and electron-optical devices. However, the AR materials developed so far can hardly meet these requirements. Here, we report the construction of a highly porous and sponge-like material based on carbon nanotubes (CNTs). This is achieved by continuous winding of a hollow cylindrical CNT assembly and subsequent modification with amorphous carbon (AC). The resultant material is shown to have very low optical reflectance at the visible and infra-red wavelengths over a wide range of incident angles and undergoes little degradation even after long-lasting compressive cycling between 0 and 90% strains or a large change of environmental temperature from -196 to 300 °C. Besides, the AR sponge material can recover fast after bending, stretching, and compression from high elastic strains. Such an excellent combination of broadband and omnidirectional antireflection, mechanical stability, and elastic flexibility results from the strong light absorption by the highly porous CNT structures strengthened by AC deposition on CNT surfaces and junctions, and the new AR material has potential applications in the renewable energy and military fields.

Biologically inspired artificial eyes and photonics

Natural visual systems have inspired scientists and engineers to mimic their intriguing features for the development of advanced photonic devices that can provide better solutions than conventional ones. Among various kinds of natural eyes, researchers have had intensive interest in mammal eyes and compound eyes due to their advantages in optical properties such as focal length tunability, high-resolution imaging, light intensity modulation, wide field of view, high light sensitivity, and efficient light management. A variety of different approaches in the broad field of science and technology have been tried and succeeded to duplicate the functions of natural eyes and develop bioinspired photonic devices for various applications. In this review, we present a comprehensive overview of bioinspired artificial eyes and photonic devices that mimic functions of natural eyes. After we briefly introduce visual systems in nature, we discuss optical components inspired by the mammal eyes, including tunable lenses actuated with different mechanisms, curved image sensors with low aberration, and light intensity modulators. Next, compound eye inspired photonic devices are presented, such as microlenses and micromirror arrays, imaging sensor arrays on curved surfaces, self-written waveguides with microlens arrays, and antireflective nanostructures (ARS). Subsequently, compound eyes with focal length tunability, photosensitivity enhancers, and polarization imaging sensors are described.

Fabrication of Artificial Compound Eye with Controllable Field of View and Improved Imaging

Many arthropods have compound eyes, which are made up of numerous separate visual units (microlenses) or ommatidia. These natural compound eyes have exceptional optical properties such as wide field of view (FOV), low aberration, and fast motion tracking capability. In this paper, a large-scale artificial compound eye (ACE) is fabricated efficiently using a combination of inkjet printing and air-assisted deformation processes. Both size and geometry of the microlens are controlled via superposed drops on the substrate. The simulation results show that the light intensity of the ACE follows a systematic distribution for tilted incident light, which represents a significant improvement, compared to planar distributed microlenses. We then manufacture ACEs with different heights and diameters, and their FOVs are compared with the theoretically predicted results. The measured FOV was 50°-140°. The acceptance angles for the different ACEs are determined, and their relationship with the ratio of height to radius (H/r) of the microlens is investigated in more detail. Furthermore, the imaging properties of the microlenses with different angles of incidences are studied, which suggest a FOV up to 140° and an acceptance angle of about 50°. The microlens captures images even at an angle of incidence of about 60°. The corresponding distortion in both the x and y directions is also investigated. Our findings provide guidelines for the development and fabrication of ACEs with large FOVs and acceptance angles, which may find applications in military, robotics, medical imaging, and astronomy.

Fabrication of Hierarchical Micro/Nano Compound Eyes

Fabrication of a hierarchical macro-/micro-/nano compound eye is presented in this paper. This bioinspired compound (BIC) eye is obtained by an integrated manufacturing technology that combines (i) nanoimprinting, (ii) picosecond laser swelling, and (iii) air-assisted deformation. The diameter and height of nanopillars, microlens, and macrobase can be controlled precisely by fine-tuning the process parameters. The multifunctional properties of the BIC eye, such as superhydrophobicity, antireflection, and other optical characteristics, are investigated. It is found that the microlens with nanopillars can effectively improve the surface wettability with a contact angle of 152° and contact angle hysteresis of 12°, and enhance transmittance by 2% over the wavelength range of 200-1200 nm. Moreover, the final hierarchical compound eye exhibits the excellent imaging properties and a wide field-of-view of 120° without distortion. These multifunctional properties will enable the widespread application of the compound eye in diverse real-time environmental conditions.

Nanostructures for Light Trapping in Thin Film Solar Cells

Thin film solar cells are one of the important candidates utilized to reduce the cost of photovoltaic production by minimizing the usage of active materials. However, low light absorption due to low absorption coefficient and/or insufficient active layer thickness can limit the performance of thin film solar cells. Increasing the absorption of light that can be converted into electrical current in thin film solar cells is crucial for enhancing the overall efficiency and in reducing the cost. Therefore, light trapping strategies play a significant role in achieving this goal. The main objectives of light trapping techniques are to decrease incident light reflection, increase the light absorption, and modify the optical response of the device for use in different applications. Nanostructures utilize key sets of approaches to achieve these objectives, including gradual refractive index matching, and coupling incident light into guided modes and localized plasmon resonances, as well as surface plasmon polariton modes. In this review, we discuss some of the recent developments in the design and implementation of nanostructures for light trapping in solar cells. These include the development of solar cells containing photonic and plasmonic nanostructures. The distinct benefits and challenges of these schemes are also explained and discussed.

Design and Fabrication of Wafer-Level Microlens Array with Moth-Eye Antireflective Nanostructures

Wafer-level packaging (WLP) based camera module production has attracted widespread industrial interest because it offers high production efficiency and compact modules. However, suppressing the surface Fresnel reflection losses is challenging for wafer-level microlens arrays. Traditional dielectric antireflection (AR) coatings can cause wafer warpage and coating fractures during wafer lens coating and reflow. In this paper, we present the fabrication of a multiscale functional structure-based wafer-level lens array incorporating moth-eye nanostructures for AR effects, hundred-micrometer-level aspherical lenses for camera imaging, and a wafer-level substrate for wafer assembly. The proposed fabrication process includes manufacturing a wafer lens array metal mold using ultraprecise machining, chemically generating a nanopore array layer, and replicating the multiscale wafer lens array using ultraviolet nanoimprint lithography. A 50-mm-diameter wafer lens array is fabricated containing 437 accurate aspherical microlenses with diameters of 1.0 mm; each lens surface possesses nanostructures with an average period of ~120 nm. The microlens quality is sufficient for imaging in terms of profile accuracy and roughness. Compared to lenses without AR nanostructures, the transmittance of the fabricated multiscale lens is increased by ~3% under wavelengths of 400-750 nm. This research provides a foundation for the high-throughput and low-cost industrial application of wafer-level arrays with AR nanostructures.

Flexible Self-Cleaning Broadband Antireflective Film Inspired by the Transparent Cicada Wings

Cicada wings, covered with arranged nanostructures, were widely studied owing to their high transparency and low reflection. However, limited by technologies, their exquisite surface structures and multifunctional features were not inherited and applied by most artificial materials adequately. Here, the excellent optical properties of the cicada wing were investigated in detail experimentally and theoretically. Besides, a flexible self-cleaning broadband antireflective film inspired by the cicada wing has been successfully fabricated by a well-designed biological template method and sol-gel process. The cicada wing ( Megapomponia intermedia) was selected as the original template directly, and a SiO₂ negative replica was obtained by a sol-gel process. Then, chemical corrosion was used to remove the original template, retaining the pure negative replica. Subsequently, the polymethyl methacrylate (PMMA) positive replica could be rebuilt after another sol-gel process. Compared with a flat PMMA film, the average reflectivity of the structured PMMA film over the visible region was reduced from 10 to 2%. Besides, the bio-inspired film with a thickness of 0.18 mm exhibited satisfactory comprehensive performances with low reflectance (≤2%) in most of the visible region, as well as superhydrophobic property and perfect flexibility. Our results offered a quick and simple method to rebuild the nanostructured functional materials, promoting the practical applications of the bionic nanostructured materials. Meanwhile, the modified biomimetic fabrication method provides a solution for rebuilding exquisite biological materials and designing multifunctional surfaces. Moreover, the multifunctional antireflective film with wider universality will exhibit an enormous potential application value in optical communications, photoelectric devices, flexible display screens, and antidazzle glasses.

Realization of perfect selective absorber based on multipole modes in all-dielectric moth-eye structure

Perfect absorbers play crucial roles in optical functional devices. Among various types of absorbers, moth-eye structures are known for their excellent absorbing efficiency. In this paper, we apply an electromagnetic multipole expansion method to treat an isolated all-dielectric moth-eye structure as a large particle and calculate various electric and magnetic multipole modes within the moth-eye structure. In periodical array, the multipole modes within each particle interact with each other. These constructive or destructive interactions cause shifts in the multipole resonant peaks. The multipole modes inside the particle array introduce reflecting peaks for loss-less materials. The absorption enhancement inside moth-eye structures can be attributed to the electric field enhancement resulting from these electric and magnetic multipole modes. Based on our theoretical study, we propose a near-ideal selective absorber based on moth-eye array, which achieves near 100% absorption within wavelength range from 400 nm to 1500 nm while achieving near 0% absorption over about 1700 nm.

Artificial Compound Eyes Prepared by a Combination of Air-Assisted Deformation, Modified Laser Swelling, and Controlled Crystal Growth

This study presents the manufacturing process of bioinspired compound (BIC) eyes. The hierarchical eyes were accomplished by a combination of (i) modified laser swelling, (ii) air-assisted deformation, and (iii) controlled crystal growth. The results show that the addition of nanostructures on the surface effectively improved the water repellent performance with a contact angle (CA) of ∼160° and generally decreased the reflection by ∼25% in the wavelength range of 400-800 nm than the planar surface. Apart from these properties, the BIC eyes showed good optical performance. The convex structure has a circular shape and aspherical profile; this provides optical uniformity and constant resolution (full width at half-maximum = 1.9 μm) in all the directions. Furthermore, the BIC eyes reduced the imaging distortion by 1.5/3.4 and 2.3/3.1 times along the x and y axes, respectively, under 10° and 20° incident lights than a single lens. In the light acceptance range, the image displays almost no distortion.

Fabrication of large micro-structured high-numerical-aperture optofluidic compound eyes with tunable angle of view

A large optofluidic compound eye is developed by using a straightforward, rapid, and low-cost technique. The compound eye's angle of view can be adjusted by injecting deionized water/calcium chloride solution of different volume into the optofluidic chip. Optofluidic compound eyes containing about 78,000 microlenses of 50 μm diameter are fabricated for analysis. The angle of view can be tuned up to 104°. With the compound eye's deformation, the microlenses' focal length increases, due to the variation in profile. Owing to the non-uniform strain over the compound eye, the central lenses experience more variation. Furthermore, optical imaging of the compound eye is demonstrated and sharp images can be obtained from the omnidirectional microlenses.

Design and Fabrication of Moth-Eye Subwavelength Structure with a Waist on Silicon for Broadband and Wide-Angle Anti-Reflection Property

Reflection loss on the optical component surface is detrimental to performance. Several researchers have discovered that the eyes of moths are covered with micro- and nanostructured films that reduce broadband and wide-angle light reflection. This research proposes a new type of moth-eye subwavelength structure with a waist, which is equivalent to a gradient refractive index film layer with high–low–high hyperbolic-type fill factor distribution. The diffraction order characteristics of a moth-eye subwavelength structure are first analyzed using a rigorous coupled wave analysis. The moth-eye structural parameters are optimized within the spectral range of 2–5 μm using the finite-difference time-domain method. The experimental fabrication of the moth-eye structure with a waist array upon a silicon substrate is demonstrated by using three-beam laser interferometric lithography and an inductively coupled plasma process. The experimental and simulation results show good agreement. The experimental results show that the reflectivity of the moth-eye structure with a waist is less than 1.3% when the incidence angle is less than 30°, and less than 4% when the incidence angle is less than 60°. This research can guide the development of AR broadband optical components and wide-angle applications.

Rapid fabrication of bio-inspired nanostructure with hydrophobicity and antireflectivity on polystyrene surface replicating from cicada wings

The fine nanostructure on the cicada wing of Cryptotympana atrata fabricius, which exhibits hydrophobicity and antireflectivity, is carefully examined. A promising strategy is proposed for facilely and successively replicating the natural functional nanostructure of the cicada wing onto polystyrene (PS) surfaces. First, a nickel replica with tapered nanopores is fabricated by combining electroless plating and subsequent electroplating with the natural cicada wing as an original template. Then, using microinjection compression molding, with the nickel replica as a template, the tapered nanopores are transcribed onto the PS surface, resulting in orderly and densely arranged nanopillars with a mean diameter of about 156 nm and a mean pitch of about 180 nm. The natural cicada wing and fabricated nickel replica are reusable. Interestingly, the PS replica surface exhibits a water contact angle of 143° ± 2° and a reflectance of about 4% in the wavelength range of 400-1000 nm. These results mean that the bionic PS replica not only inherits the nanostructure of the natural wing, but also its hydrophobic and antireflective properties. The mechanisms for the hydrophobic and antireflective properties are revealed via composite wetting interface and effective medium layer on the replica surface, respectively. The proposed fast and efficient replication strategy can be an excellent candidate for mimicking bio-inspired functional micro/nanostructures without complicated procedures and expensive materials.

Optimization and continuous fabrication of moth-eye nanostructure array on flexible polyethylene terephthalate substrate towards broadband antireflection

Reflection loss can cause harmful effects on the performance of optoelectronic devices, such as cell phones, notebooks, displays, solar cells, and light-emitting diode (LED) devices. In order to obtain broadband antireflection (AR) properties, many researchers have utilized surface texture techniques to produce AR subwavelength structures on the interfaces. Among the AR subwavelength structures, the moth-eye nanostructure is one of the most promising structures, with the potential for commercialization in the near future. In this research, to obtain broadband AR performance, the optimization of moth-eye nanostructures was first carried out using the finite difference time domain method within the spectral ranges of 400-800 nm, including the optimization of shape, height, pitch, and residual layer thickness. In addition, the continuous production of moth-eye nanostructure array upon a flexible polyethylene terephthalate substrate was demonstrated by using the roll-to-roll ultraviolet nanoimprint lithography (R2R UV-NIL) process and anodic aluminum oxide mold, which provided a solution for the cost-effective fabrication of moth-eye nanostructure array. The AR performance of moth-eye nanostructure array obtained by the R2R UV-NIL process was also investigated experimentally, and good consistence was shown with the simulated results. This research can provide a beneficial direction for the optimization and cost-effective production of the moth-eye nanostructure array.

Electrochemical micro/nano-machining: principles and practices

Micro/nano-machining (MNM) is becoming the cutting-edge of high-tech manufacturing because of the ever increasing industrial demands for super smooth surfaces and functional three-dimensional micro/nano-structures in miniaturized and integrate devices, and electrochemistry plays an irreplaceable role in MNM.

Versatile Antireflection Coating for Plastics: Partial Embedding of Mesoporous Silica Nanoparticles onto Substrate Surface

Antireflection (AR) coating for transparent plastic substrates is constructed by partially embedding mesoporous silica nanoparticles (MSNs) onto the surface of the substrates. Simulation of optical properties of polymer substrates coated with a single-particle MSN layer indicates that the surface has a low and graded refractive index in the direction of the thickness and effectively decreases the reflectance of visible light. The MSN-coated surfaces can be prepared by exposure of the MSN-painted substrates to a solvent vapor, irrespective of the shape of the polymer substrates. The plastic substrates with a single-particle layer of MSNs with diameters of 145-165 nm exhibit high transparency and good AR behavior as simulated. The mesoporous structures of MSNs play important roles not only in decreasing the refractive index but also in strengthening the adhesion between MSNs and substrate surfaces. Moreover, fixation of MSNs onto a thermosetting epoxy resin is successfully achieved by transfer of a single layer of MSNs from flexible films for which MSNs are weakly bonded. The present simple AR coating is applicable to a wide range of substrates with various materials and shapes, and useful for various applications such as optical devices, displays, and solar cells.

Perforating domed plasmonic films for broadband and omnidirectional antireflection

Domed Ag nano-hole/disk array films exhibit a reflectivity of less than 0.7% over a wide spectral range (400-1000 nm) and even lower values down to 0.05% with an oblique incidence angle; this unique optical response is attributed to three key factors: diffractive scattering loss on nanostructures, localized plasmonic absorption and curved surface (domed units).

Generation of Hierarchically Ordered Structures on a Polymer Film by Electrohydrodynamic Structure Formation

The extensive applications of hierarchical structures in optoelectronics, micro/nanofluidics, energy conservation, etc., have led to the development of a variety of approaches for their fabrication, which can be categorized as bottom-up or top-down strategies. Current bottom-up and top-down strategies bear a complementary relationship to each other due to their processing characteristics, i.e., the advantages of one method correspond to the disadvantages of the other, and vice versa. Here we propose a novel method based on electrohydrodynamic structure formation, aimed at combining the main advantages of the two strategies. The method allows the fabrication of a hierarchically ordered structure with well-defined geometry and high mechanical durability on a polymer film, through a simple and low-cost process also suitable for mass-production. In this approach, upon application of an electric field between a template and a substrate sandwiching an air gap and a polymer film, the polymer is pulled toward the template and further flows into the template cavities, resulting in a hierarchical structure with primary and secondary patterns determined by electrohydrodynamic instability and by the template features, respectively. In this work, the fabrication of a hierarchical structure by electrohydrodynamic structure formation is studied using numerical simulations and experimental tests. The proposed method is then employed for the one-step fabrication of a hierarchical structure exhibiting a gradual transition in the periodicity of the primary structure using a slant template and a flat polymer film, which presents an excellent performance on controllable wettability.

Fabrication of a resist pattern based on plasma–polystyrene interactions

An ultrathin resist pattern of high selectivity is fabricated based on plasma–polystyrene interaction within several minutes.

Multiscale Micro-Nano Nested Structures: Engineered Surface Morphology for Efficient Light Escaping in Organic Light-Emitting Diodes

Various micro-to-nanometer scale structures are extremely attractive for light escaping in organic light-emitting diodes. To develop and optimize such structures, an innovative approach was demonstrated for the first time to fabricate multiscale micro-nano nested structures by photolithography with a well-designed mask pattern followed by a controllable thermal reflow process. The experimental and theoretical characterizations verify that these unique nested structures hold the capability of light concentration, noticeable low haze, and efficient antireflection. As a proof-of-concept, the incorporation of this pattern onto the glass substrate efficiently facilitates light escaping from the device, resulting in current efficiency 1.60 times and external quantum efficiency 1.63 times that of a control flat device, respectively. Moreover, compared to a hexagonally arranged microlens array and quasi-random biomimetic moth eye nanostructures, the nested structures proposed here can magically tune the spatial emission profile to comply with the Lambertian radiation pattern. Hence, this novel structure is expected to be of great potential in related ubiquitous optoelectronic applications and provide scientific inspiration to other novel multiscale micro-nanostructure research.

A luminescent down-shifting and moth-eyed anti-reflective film for highly efficient photovoltaic devices

Adhesive polydimethylsiloxane (PDMS) films were developed to increase the performance of photovoltaic devices. The films combined two separate features of moth-eye patterns to reduce the reflection of incident light at the film surface and luminescent down-shifting (LDS) CdZnS/ZnS-core/shell quantum dots (QDs) to convert ultraviolet (UV) radiation into visible light at 445 nm. The films were both flexible and self-adhesive, easily attachable to any surface of a solar cell module. By simply attaching the developed films on high-efficiency GaAs solar cells, the short circuit current density and power conversion efficiency of the solar cells increased to 33.8 mA cm(-2) and 28.7%, by 1.1 mA cm(-2) and 0.9 percentage points in absolute values, respectively. We showed that the enhancement of the GaAs solar cells was attributed to both the anti-reflection (AR) properties of the moth-eye patterns and the LDS of QDs using a scattering matrix method and external quantum efficiency measurements. The developed films are versatile in application for solar cells, and expected to aid in overcoming limits of material absorption and device structures.

Hierarchical Nanoporous Silica Films for Wear Resistant Antireflection Coatings

High-performance antireflection (AR) layers were prepared by depositing hierarchical nanoporous silica films on glass substrates. We designed a composite layer consisting of mesoporous silica nanoparticles (MSNs) and a mesoporous silica matrix. The introduction of bimodal nanoporous structures, i.e., independent nanopore formation within the MSN and within the matrix, was achieved by using surface-protected MSNs and a polymeric nonionic surfactant template during the fabrication process. A porosity of more than 40% was achieved for composite AR materials. The protrusion of MSNs from the matrix led to spontaneous formation of nanoscale roughness on the surface of the coatings, which enhanced the AR properties. The solid bonding of the MSNs to the nanoporous matrices played an important role in the achievement of high mechanical durability. The optimal nanoporous coating, which contained ca. 50 wt % MSN, exhibited high transparency (91.5-97.5%) and low reflectance (<2.2%), over the whole range of visible light wavelengths, and sufficient wear resistance.

Improving the sensing performance of double gold gratings by oblique incident light

Here we demonstrate a simple method to improve the plasmonic sensing performance of gold gratings. The gratings consist of periodic polymer gratings covered with a gold layer, created by nanoimprint lithography and metal deposition. We investigated the effect of gold thickness and the incident angles on the plasmonic sensing performance. With the optimized gold layer, the full-width at half maximum of this grating was reduced by 60% by using the oblique incident light instead of the normal incident light. A maximum value of the figure of merit at oblique incidence is 12, which is double the one at normal incidence.

Biocompatible slippery fluid-infused films composed of chitosan and alginate via layer-by-layer self-assembly and their antithrombogenicity

Antifouling super-repellent surfaces inspired by Nepenthes, the pitcher plant, were designed and named slippery liquid-infused porous surfaces (SLIPS). These surfaces repel various simple and complex liquids including water and blood by maintaining a low sliding angle. Previous studies have reported the development of fluorinated SLIPS that are not biocompatible. Here, we fabricated fluid-infused films composed of biodegradable materials and a biocompatible lubricant liquid. The film was constructed using a combination of electrostatic interactions between chitosan and alginate and hydrogen-bonding between alginate and polyvinylpyrrolidone (PVPON) via the layer-by-layer self-assembly method. After chitosan and alginate were cross-linked, the PVPON was removed by increasing the pH to generate porosity from the deconstruction of the hydrogen-bonding. The porous underlayer was hydrophobized and covered by biocompatible almond oil. Blood easily flowed over this biodegradable and biocompatible SLIPS without leaving stains on the surface, and the material is environmentally durable, has a high transmittance of about 90%, and is antithrombogenic. The results of this study suggest that this SLIPS may facilitate the creation of nonfouling medical devices through a low-cost, eco-friendly, and simple process.

Multiscale ommatidial arrays with broadband and omnidirectional antireflection and antifogging properties by sacrificial layer mediated nanoimprinting

Moth's eye inspired multiscale ommatidial arrays offer multifunctional properties of great significance in optoelectronic devices. However, a major challenge remains in fabricating these arrays on large-area substrates using a simple and scalable technique. Here we present the fabrication of these multiscale ommatidial arrays over large areas by a distinct approach called sacrificial layer mediated nanoimprinting, which involves nanoimprinting aided by a sacrificial layer. The fabricated arrays exhibited excellent pattern uniformity over the entire patterned area. Optimum dimensions of the multiscale ommatidial arrays determined by the finite-difference time domain simulations served as the design parameters for replicating the arrays on glass. A broadband suppression of reflectance to a minimum of ∼1.4% and omnidirectional antireflection for highly oblique angles of incidence up to 70° were achieved. In addition, superhydrophobicity and superior antifogging characteristics enabled the retention of optical properties even in wet and humid conditions, suggesting reliable optical performance in practical outdoor conditions. We anticipate that these properties could potentially enhance the performance of optoelectronic devices and minimize the influence of in-service conditions. Additionally, as our technique is solely nanoimprinting-based, it may enable scalable and high-throughput fabrication of multiscale ommatidial arrays.

Fabrication of biomimetic patterns for high transmission and antifogging property

A simple method was presented to increase the transmission by preparing multiscale tapered pillars on both surfaces of quartz slides.