Ultrathin suspended nanopores with surface plasmon resonance fabricated by combined colloidal lithography and film transfer

Controllable Chiral Light Generation and Vortex Field Investigation Using Plasmonic Holes Revealed by Cathodoluminescence

Control of the angular momentum of light is a key technology for next-generation nano-optical devices and optical communications, including quantum communication and encoding. We propose an approach to controllably generate circularly polarized light from a circular hole in a metal film using an electron beam by coherently exciting transition radiation and light scattering from the hole through surface plasmon polaritons. The circularly polarized light generation is confirmed by fully polarimetric four-dimensional cathodoluminescence mapping, where angle-resolved spectra are simultaneously obtained. The obtained intensity and Stokes maps show clear interference fringes as well as almost fully circularly polarized light generation with controllable parities by the electron beam position. By applying this approach to a three-hole system, a vortex field with a phase singularity is visualized in the middle of three holes.

Focused light introduction into transmission electron microscope via parabolic mirror

We developed a novel light optics system installed in a scanning transmission electron microscope (STEM) to introduce a focused light accurately adjusted at the electron beam irradiation position using a parabolic mirror. With a parabolic mirror covering both the upper and lower sides of the sample, the position and focus of the light beam can be evaluated by imaging the angular distribution of the transmitted light. By comparing the light image and the electron micrograph, the irradiation positions of the electron beam and the laser beam can be accurately adjusted to each other. The size of the focused light was confirmed to be within a few microns from the light Ronchigram, which is consistent with the simulated light spot size. The spot size and position alignment were further confirmed by laser-ablating only a targeted polystyrene particle without damaging the surrounding particles. When using a halogen lamp as the light source, this system allows investigating optical spectra in comparison with cathodoluminescence (CL) spectra at exactly the same location.

Simultaneous Nanoscale Excitation and Emission Mapping by Cathodoluminescence

Free-electron-based spectroscopies can reveal the nanoscale optical properties of semiconductor materials and nanophotonic devices with a spatial resolution far beyond the diffraction limit of light. However, the retrieved spatial information is constrained to the excitation space defined by the electron beam position, while information on the delocalization associated with the spatial extension of the probed optical modes in the specimen has so far been missing, despite its relevance in ruling the optical properties of nanostructures. In this study, we demonstrate a cathodoluminescence method that can access both excitation and emission spaces at the nanoscale, illustrating the power of such a simultaneous excitation and emission mapping technique by revealing a subwavelength emission position modulation as well as by visualizing electromagnetic energy transport in nanoplasmonic systems. Besides the fundamental interest of these results, our technique grants us access into previously inaccessible nanoscale optical properties.

Field localization of hexagonal and short-range ordered plasmonic nanoholes investigated by cathodoluminescence

Plasmonic nanoholes have attracted significant attention among nanoplasmonic devices, especially as biosensing platforms, where nanohole arrays can efficiently enhance and confine the electromagnetic field through surface plasmon polaritons, providing a sensitive detection. In nanohole arrays, the optical resonances are typically determined by the inter-hole distance or periodicity with respect to the surface plasmon wavelength. However, for short-range ordered (SRO) arrays, the inter-hole distance varies locally, so the plasmon resonance changes. In this study, we investigate the local resonance of SRO nanoholes using a cathodoluminescence technique and compare it with hexagonally ordered nanoholes. The cathodoluminescence photon maps and resonance peak analysis reveal that the electric fields are confined at the edges of holes and that their resonances are determined by inter-hole distances as well as by their distributions. This demonstrates the Anderson localization of the electromagnetic waves showing locally enhanced electromagnetic local density of states in SRO nanoholes.

Optical properties of plasmonic nanopore arrays prepared by electron beam and colloidal lithography

Solid state nanopores are central structures for many applications. To date, much effort has been spent on controlled fabrication of single nanopores, while relatively little work has focused on large scale fabrication of arrays of nanopores. In this work we show wafer-scale fabrication of plasmonic nanopores in 50 nm thick silicon nitride membranes with one or two 30 nm gold films, using electron beam lithography with a negative resist or a new version of colloidal lithography. Both approaches offer good control of pore diameter (even below 100 nm) and with high yield (>90%) of intact membranes. Colloidal lithography has the advantage of parallel patterning without expensive equipment. Despite its serial nature, electron beam lithography provides high throughput and can make arbitrary array patterns. Importantly, both methods prevent metal from ending up on the membrane pore sidewalls. The new fabrication methods make it possible to compare the optical properties of structurally identical plasmonic nanopore arrays with either long-range order (e-beam) or short-range order (colloidal). The resonance features in the extinction spectrum are very similar for both structures when the pitch is the same as the characteristic spacing in the self-assembled colloidal pattern. Long-range ordering slightly enhances the magnitude of the extinction maximum and blueshift the transmission maximum by tens of nm. Upon reducing the diameter in long-range ordered arrays, the resonance is reduced in magnitude and the transmission maximum is further blue shifted, just like for short-range ordered arrays. These effects are well explained by interpreting the spectra as Fano interference between the grating-type excitation of propagating surface plasmons and the broad transmission via individual pores in the metal film. Furthermore, we find that only the short-range ordered arrays scatter light, which we attribute to the highly limited effective period in the short-range ordered system and the corresponding lack of coherent suppression of scattering by interference effects.

Variable Thickness Porous Anodic Alumina/Metal Film Bilayers for Optimization of Plasmonic Scattering by Nanoholes on Mirror

Continuously variable thickness porous anodic aluminum oxide (PAAO) films were obtained using electrochemical oxidation of bulk aluminum sheet while both electrodes were simultaneously withdrawn from the electrolyte solution. The thickness gradient was controlled by the withdrawal rate (1-10 mm/min range) and thickness variation demonstrated from below 50 nm to above 1 micrometer. The thickness increased linearly with the sample lateral coordinate, whereas the nanopore structure (diameter and interpore distance) remained unchanged. Effects of the initial pore growth and capillary forces are discussed. The presented method can be used for tuning optimal PAAO thickness for optical and other applications as exemplified by finding maximum plasmonic scattering in structured Al-PAAO-Au multilayers. Enhanced scattering from porous gold film separated by a specific-thickness PAAO layer from aluminum mirror surface is demonstrated.

Nanoplasmonic sensors for biointerfacial science

In recent years, nanoplasmonic sensors have become widely used for the label-free detection of biomolecules across medical, biotechnology, and environmental science applications. To date, many nanoplasmonic sensing strategies have been developed with outstanding measurement capabilities, enabling detection down to the single-molecule level. One of the most promising directions has been surface-based nanoplasmonic sensors, and the potential of such technologies is still emerging. Going beyond detection, surface-based nanoplasmonic sensors open the door to enhanced, quantitative measurement capabilities across the biointerfacial sciences by taking advantage of high surface sensitivity that pairs well with the size of medically important biomacromolecules and biological particulates such as viruses and exosomes. The goal of this review is to introduce the latest advances in nanoplasmonic sensors for the biointerfacial sciences, including ongoing development of nanoparticle and nanohole arrays for exploring different classes of biomacromolecules interacting at solid-liquid interfaces. The measurement principles for nanoplasmonic sensors based on utilizing the localized surface plasmon resonance (LSPR) and extraordinary optical transmission (EOT) phenomena are first introduced. The following sections are then categorized around different themes within the biointerfacial sciences, specifically protein binding and conformational changes, lipid membrane fabrication, membrane-protein interactions, exosome and virus detection and analysis, and probing nucleic acid conformations and binding interactions. Across these themes, we discuss the growing trend to utilize nanoplasmonic sensors for advanced measurement capabilities, including positional sensing, biomacromolecular conformation analysis, and real-time kinetic monitoring of complex biological interactions. Altogether, these advances highlight the rich potential of nanoplasmonic sensors and the future growth prospects of the community as a whole. With ongoing development of commercial nanoplasmonic sensors and analytical models to interpret corresponding measurement data in the context of biologically relevant interactions, there is significant opportunity to utilize nanoplasmonic sensing strategies for not only fundamental biointerfacial science, but also translational science applications related to clinical medicine and pharmaceutical drug development among countless possibilities.

Fabrication and Characterization of Plasmonic Nanopores with Cavities in the Solid Support

Plasmonic nanostructures are widely used for various sensing applications by monitoring changes in refractive index through optical spectroscopy or as substrates for surface enhanced Raman spectroscopy. However, in most practical situations conventional surface plasmon resonance is preferred for biomolecular interaction analysis because of its high resolution in surface coverage and the simple single-material planar interface. Still, plasmonic nanostructures may find unique sensing applications, for instance when the nanoscale geometry itself is of interest. This calls for new methods to prepare nanoscale particles and cavities with controllable dimensions and curvature. In this work, we present two types of plasmonic nanopores where the solid support underneath a nanohole array has been etched, thereby creating cavities denoted as ‘nanowells’ or ‘nanocaves’ depending on the degree of anisotropy (dry or wet etch). The refractometric sensitivity is shown to be enhanced upon removing the solid support because of an increased probing volume and a shift of the asymmetric plasmonic field towards the liquid side of the finite gold film. Furthermore, the structures exhibit different spectral changes upon binding inside the cavities compared to the gold surface, which means that the structures can be used for location-specific detection. Other sensing applications are also suggested.

Nanocuvette: A Functional Ultrathin Liquid Container for Transmission Electron Microscopy

Advances in TEM techniques have spurred a renewed interest in a wide variety of research fields. A rather recent track within these endeavors is the use of TEM for in situ imaging in liquids. In this article, we show the fabrication of a liquid cell for TEM observations which we call the nanocuvette. The structure consists of a nanohole film sandwiched by carbon films, sealing liquid in the holes. The hole film can be produced using a variety of materials, tailored for the desired application. Since the fabrication is based on self-assembly, it is both cheap and straightforward. Compared to previously reported liquid cells, this structure allows for thinner liquid layers with better controlled cell structures, making it possible to achieve a high resolution even at lower acceleration voltages and electron doses. We demonstrate a resolution corresponding to an information transfer up to ∼2 nm at 100 kV for molecular imaging. Apart from the advantages arising from the thin liquid layer, the nanocuvette also enables the possibility to study liquid-solid interfaces at the side walls of the nanoholes. We illustrate the possibilities of the nanocuvette by studying several model systems: electron beam induced growth dynamics of silver nanoparticles in salt solution, polymer deposition from solution, and imaging of nonstained antibodies in solution. Finally, we show how the inclusion of a plasmonically active gold layer in the nanocuvette structure enables optical confirmation of successful liquid encapsulation prior to TEM studies. The nanocuvette provides an easily fabricated and flexible platform which can help further the understanding of reactions, processes, and conformation of molecules and atoms in liquid environments.

Coupling of plasmonic nanopore pairs: facing dipoles attract each other

Control of the optical properties of nano-plasmonic structures is essential for next-generation optical circuits and high-throughput biosensing platforms. Realization of such nano-optical devices requires optical couplings of various nanostructured elements and field confinement at the nanoscale. In particular, symmetric coupling modes, also referred to as dark modes, have recently received considerable attention because these modes can confine light energy to small spaces. Although the coupling behavior of plasmonic nanoparticles has been relatively well studied, couplings of inverse structures, that is, holes and pores, remain partially unexplored. Even for the most fundamental coupling system of two dipolar holes, comparison of the symmetric and anti-symmetric coupling modes has not been performed. Here we present, for the first time, a systematic study of the symmetric and anti-symmetric coupling of nanopore pairs using cathodoluminescence by scanning transmission electron microscopy and electromagnetic simulation. The symmetric coupling mode, approximated as a pair of facing dipoles, is observed at a lower energy than that of the anti-symmetric coupling mode, indicating that the facing dipoles attract each other. The anti-symmetric coupling mode splits into the inner- and outer-edge localized modes as the coupling distance decreases. These coupling behaviors cannot be fully explained as inverses of coupled disks. Symmetric and anti-symmetric coupling modes are also observed in a short-range ordered pore array, where one pore supports multiple local resonance modes, depending on the distance to the neighboring pore. Accessibility to the observed symmetric modes by far field is also discussed, which is important for nanophotonic device applications.

From Nanowires to Nanopores: A Versatile Method for Electroless Deposition of Nanostructures on Micropatterned Organic Substrates

We demonstrate a fast, flexible, parallel, and highly controllable method by which to synthesize a variety of nanoscale and mesoscale structures. This method addresses one of the most significant challenges in nanoscience: the in situ parallel placement and synthesis of nano-objects over the mesoscale. The method is based on electroless nanowire deposition on micropatterned substrates (ENDOM). In ENDOM nanostructures are produced at the boundary between two unlike materials if two conditions are met: (a) deposition is kinetically preferred on one of the materials while (b) transport of reactants is favored on the other. In this study, copper structures were deposited on patterned -OH/-CH3-terminated alkanethiolate self-assembled monolayers (SAMs) by exploiting the different reaction rates of electroless deposition on these using the reducing agent dimethylamine borane (DMAB). We demonstrate production of nanowires (width < 100 nm), mesowires (100 nm < width < ∼3000 nm), nanorings, nanopores, and nanochannels. We show that a variety of experimental conditions can be employed, making this method compatible with many substrates. We have also studied the nucleation and growth kinetics of the ENDOM process. The width of the deposit grows exponentially with deposition time and can be modeled using classical nucleation theory. Although the deposit width increases, the height and grain size of the copper deposit is constant (to within experimental uncertainty) with deposition time. These observations indicate that the minimum deposit width is controlled by the nanoparticle dimensions and so can be controlled using the reaction conditions.

Sensing applications based on plasmonic nanopores: The hole story

A review of sensing applications based on plasmonic nanopores is given. Many new types of plasmonic nanopores have recently been fabricated, including pores penetrating multilayers of thin films, using a great variety of fabrication techniques based on either serial nanolithography or self-assembly. One unique advantage with nanopores compared to other plasmonic sensors is that sample liquids can flow through the surface, which increases the rate of binding and improves the detection limit under certain conditions. Also, by utilizing the continuous metal films, electrical control can be implemented for electrochemistry, dielectrophoresis and resistive heating. Much effort is still spent on trying to improve sensor performance in various ways, but the literature uses inconsistent benchmark parameters. Recently plasmonic nanopores have been used to analyse targets of high clinical or academic interest. Although this is an important step forward, one should probably reflect upon whether the same results could have been achieved with another optical technique. Overall, this critical review suggests that the research field would benefit by focusing on applications where plasmonic nanopores truly can offer unique advantages over similar techniques.

Multi-pore carbon phase plate for phase-contrast transmission electron microscopy

A new fabrication method of carbon based phase plates for phase-contrast transmission electron microscopy is presented. This method utilizes colloidal masks to produce pores as well as disks on thin carbon membranes for phase modulation. Since no serial process is involved, carbon phase plate membranes containing hundreds of pores can be mass-produced on a large scale, which allows "disposal" of contaminated or degraded phase modulating objects after use. Due to the spherical shape of the mask colloid particles, the produced pores are perfectly circular. The pore size and distribution can be easily tuned by the mask colloid size and deposition condition. By using the stencil method, disk type phase plates can also be fabricated on a pore type phase plate. Both pore and disk type phase plates were tested by measuring amorphous samples and confirmed to convert the sinus phase contrast transfer function to the cosine shape.