Role of Surface Chemistry in Semiconductor Thin Film Processing

The p-block challenge: assessing quantum chemistry methods for inorganic heterocycle dimerizations

The elements of the p-block of the periodic table are of high interest in various chemical and technical applications like frustrated Lewis-pairs (FLP) or opto-electronics. However, high-quality benchmark data to assess approximate density functional theory (DFT) for their theoretical description are sparse. In this work, we present a benchmark set of 604 dimerization energies of 302 "inorganic benzenes" composed of all non-carbon p-block elements of main groups III to VI up to polonium. This so-called IHD302 test set comprises two classes of structures formed by covalent bonding and by weaker donor-acceptor (WDA) interactions, respectively. Generating reliable reference data with ab initio methods is challenging due to large electron correlation contributions, core-valence correlation effects, and especially the slow basis set convergence. To compute reference values for these dimerization reactions, after thorough testing, we applied a computational protocol using state-of-the-art explicitly correlated local coupled cluster theory termed PNO-LCCSD(T)-F12/cc-VTZ-PP-F12(corr.). It includes a basis set correction at the PNO-LMP2-F12/aug-cc-pwCVTZ level. Based on these reference data, we assess 26 DFT methods in combination with three different dispersion corrections and the def2-QZVPP basis set, five composite DFT approaches, and five semi-empirical quantum mechanical methods. For the covalent dimerizations, the r2SCAN-D4 meta-GGA, the r2SCAN0-D4 and ωB97M-V hybrids, and the revDSD-PBEP86-D4 double-hybrid functional are found to be the best-performing methods among the evaluated functionals of the respective class. However, since def2 basis sets for the 4th period are not associated to relativistic pseudo-potentials, we obtained significant errors in the covalent dimerization energies (up to 6 kcal mol-1) for molecules containing p-block elements of the 4th period. Significant improvements were achieved for systems containing 4th row elements by using ECP10MDF pseudopotentials along with re-contracted aug-cc-pVQZ-PP-KS basis sets introduced in this work with the contraction coefficients taken from atomic DFT (PBE0) calculations. Overall, the IHD302 set represents a challenge to contemporary quantum chemical methods. This is due to a large number of spatially close p-element bonds which are underrepresented in other benchmark sets, and the partial covalent bonding character for the WDA interactions. The IHD302 set may be helpful to develop more robust and transferable approximate quantum chemical methods in the future.

Acoustic resonant imaging technique for visualizing the acoustic properties and thickness of polymer film on substrate

This paper proposes an acoustic resonant imaging technique for visualizing the acoustic properties and thickness of a polymer film on a substrate. When ultrasound passes through a thin layer, transmission and reflection coefficients of sound pressure attain their extreme values at the resonant frequency. By obtaining the area information of the extreme value and resonant frequency and matching them with a theoretical model, the acoustic properties and thicknesses of a polymer film on a substrate can be visualized. Herein, this technique was applied to a photoresist film coated on a Si wafer, and in addition to visualizing fluctuations in film thickness, the differences in the film hardness that may have occurred during the curing process were successfully detected as the differences in the acoustic impedance of the film. The acoustic resonant imaging technique was successfully used to determine the frequency dependence of both the transmission and reflection coefficients.

Synthesis and surface characterization of new triplex polymer of Ag(I) and mixture nucleosides: cytidine and 8-bromoguanosine

In this work one-dimensional (1D) triplex polymer of silver (I): mixture nucleosides of cytidine and 8-bromoguanosine was synthesised. The polymer showed high stability due to the presence Ag(I) ions in the structure of the polymer in addition to the stability that produces from the effect of Hoogsteen hydrogen bonding in the triplex CGC. Atomic Force Microscopy (AFM) and transmission electron microscopy (TEM) were used to investigate the morphology of the polymer. The AFM images revealed formation of nanofibres extending many microns in length with height in the range of 2-3 nm. Statistical analyses carried out to analyse the AFM images to determine the height of the loops that formed in the polymer. The data displayed that the height value was in the range between 10 nm to 15 nm. The data of TEM images were consistent with the data of AFM images by displaying a very long fibre. Gwyddion software program was used to investigate surface parameters (roughness and waviness), diameter (size distribution), and probability density of the fibre. The data showed that the diameter of the fibre was ∼0.4 nm.

Group 14 hydrides with low valent elements for activation of small molecules

Transition metal compounds are well known as activators of small molecules, and they serve as efficient catalysts for a variety of homogeneous and heterogeneous transformations. In contrast, there is a general feeling that main group compounds cannot act as efficient catalysts because of their inability to activate small molecules. Traditionally, the activation of small molecules is considered one of the key steps during a catalytic cycle with transition metals. As a consequence, researchers have long neglected the full range of possibilities in harnessing main group elements for the design of efficient catalysts. Recent developments, however, have made it possible to synthesize main group compounds with low-valent elements capable of activating small molecules. In particular, the judicious use of sterically appropriate ligands has been successful in preparing and stabilizing a variety of Group 14 hydrides with low-valent elements. In this Account, we discuss recent advances in the synthesis of Group 14 hydrides with low-valent elements and assess their potential as small-molecule activators. Group 14, which comprises the nonmetal C, the semimetals Si and Ge, and the metals Sn and Pb, was for years a source of hydrides with the Group 14 element almost exclusively in tetravalent form. Synthetic difficulties and the low stability of Group 14 hydrides in lower oxidation states were difficult to overcome. But in 2000, a divalent Sn(II) hydride was prepared as a stable compound through the incorporation of sterically encumbered aromatic ligands. More recently, the stabilization of GeH(2) and SnH(2) complexes using an N-heterocyclic carbene (NHC) as a donor and BH(3) or a metal carbonyl complex as an acceptor was reported. A similar strategy was also employed to synthesize the Si(II) hydride. This class of hydrides may be considered coordinatively saturated, with the lone pair of electrons on the Group 14 elements taking part in coordination. We discuss the large-scale synthesis of hydrides of the form LMH (where M is Ge or Sn, L is CH(N(Ar)(CMe))(2), and Ar is 2,6-iPr(2)C(6)H(3)), which has made it possible to test their reactivity in the activation of small molecules. Unlike the tetravalent Group 14 hydrides, the Ge(II) and Sn(II) hydrides were found to be able to activate a number of small molecules in the absence of any externally added catalyst. For example, the Ge(II) hydride and Sn(II) hydride can activate CO(2), and the reaction results in the formation of Ge(II) and Sn(II) esters of formic acid. This product represents a prototype of a new class of compounds of Group 14 elements. Moreover, we examined the activation of carbonyl compounds, alkynes, diazo and azo compounds, azides, and compounds containing the C═N bond. These Group 14 hydrides with low-valent elements are shown to be able to activate a number of important small molecules with C≡C, C═O, N═N, and C═N bonds. The activation of small molecules is an important step forward in the realization of main group catalyst development. Although it is not yet customary to assay the potential of newly synthesized main group compounds for small-molecule activation, our results offer good reason to do so.

Impact of surface chemistry

The applications of molecular surface chemistry in heterogeneous catalyst technology, semiconductor-based technology, medical technology, anticorrosion and lubricant technology, and nanotechnology are highlighted in this perspective. The evolution of surface chemistry at the molecular level is reviewed, and the key roles of surface instrumentation developments for in situ studies of the gas-solid, liquid-solid, and solid-solid interfaces under reaction conditions are emphasized.

Ion chemistry in germane/fluorocompounds gaseous mixtures: a mass spectrometric and theoretical study

The ion-molecule reactions occurring in GeH(4)/NF(3), GeH(4)/SF(6), and GeH(4)/SiF(4) gaseous mixtures have been investigated by ion trap mass spectrometry and ab initio calculations. While the NF(x)(+) (x=1-3) react with GeH(4) mainly by the exothermic charge transfer, the open-shell Ge(+) and GeH(2)(+) undergo the efficient F-atom abstraction from NF(3) and form GeF(+) and F-GeH(2)(+) as the only ionic products. The mechanisms of these two processes are quite similar and involve the formation of the fluorine-coordinated complexes Ge-F-NF(2)(+) and H(2)Ge-F-NF(2)(+), their subsequent crossing to the significantly more stable isomers FGe-NF(2)(+) and F-GeH(2)-NF(2)(+), and the eventual dissociation of these ions into GeF(+) (or F-GeH(2)(+)) and NF(2). The closed-shell GeH(+) and GeH(3)(+) are instead much less reactive towards NF(3), and the only observed process is the less efficient formation of GeF(+) from GeH(+). The theoretical investigation of this unusual H/F exchange reaction suggests the involvement of vibrationally-hot GeH(+). Passing from NF(3) to SF(6) and SiF(4), the average strength of the M-F bond increases from 70 to 79 and 142 kcal mol(-1), and in fact the only process observed by reacting GeH(n)(+) (n=0-3) with SF(6) and SiF(4) is the little efficient F-atom abstraction from SF(6) by Ge(+). Irrespective of the experimental conditions, we did not observe any ionic product of Ge-N, Ge-S, or Ge-Si connectivity. This is in line with the previously observed exclusive formation of GeF(+) from the reaction between Ge(+) and C-F compounds such as CH(3)F. Additionally observed processes include in particular the conceivable formation of the elusive thiohypofluorous acid FSH from the reaction between SF(+) and GeH(4).

Chemistry of Organometallic Compounds on Silicon: The First Step in Film Growth

The continuous decrease in size of electronic devices has reached a critical point at which the molecular-level understanding of chemical processes is imperative. Metal-containing films, an important part of every circuit, are currently deposited from a myriad of organometallic compounds, in order to control the first stages of film growth and ultimately produce an atomically defined interface. This article outlines recent molecular-level investigations on reactions of organometallic compounds with silicon surfaces. The role of surface structure and chemical state is placed in a framework of future challenges and opportunities for applications in electronics.

Gas-phase ion chemistry of GeH(4)/B(2)H(6) mixtures

The gas phase ion-molecule reactions in positively and negatively ionized germane/diborane mixtures have been studied by ion trap mass spectrometry. Reaction sequences and rate constants for the most interesting processes have been determined. In positive ionization, formation of Ge-B bonds exclusively occurs through condensation reactions of B(n)H(m)(+) ions with germane, followed by H(2) or BH(3) loss. No reactions of ions from germane with B(2)H(6) were observed under the experimental conditions used here. In negative ionization, the Ge(n)H(m)(-) (n = 1, 2) ion families react with diborane to yield the Ge(n)B(p)H(q)(-) (p = 1, 2) ions, again via dehydrogenation and BH(3) loss, while diborane anions proved to be unreactive. In both positive and negative ionization, Ge-B ions reach appreciable abundances. The present results afford fundamental information about the intrinsic reactivity of gas-phase ions and provide valuable indications about the first nucleation steps ultimately leading to amorphous Ge and B-doped semiconductor materials by chemical vapor deposition methods.

Gas-phase ion chemistry in XH4--C3H4--ZH3 (X==Si, Ge; Z==N, P) mixtures

The gas-phase ion chemistry of silane-allene-ammonia, germane-allene (or propyne)-ammonia (or phosphine) systems was studied by ion trap mass spectrometry. Reaction sequences were determined and rate constants were measured for the main processes observed. The mixture containing silane displays higher reactivity with respect to that with germane. Comparison with analogous systems provides useful information about the reactivity of different hydrocarbon molecules and the different affinities of silicon and germanium towards nitrogen and phosphorus. The most interesting product ions observed are those containing Si (or Ge), C and N (or P) elements together, as these ion species may be considered precursors of doped amorphous carbides, which are widely used in semiconductor devices.

Attachment of styrene and phenylacetylene on Si(111)-7 x 7: the influence of substitution groups on the reaction mechanism and formation of pi-conjugated skeletons

The interactions of styrene and phenylacetylene and their isotope substitutions with a Si(111)-7 x 7 surface have been studied as model systems to mechanistically understand the chemical binding of conjugated pi-electron systems to di-radical-like silicon dangling bonds of the adjacent adatom-rest atom pair. Vibrational studies show that styrene mainly binds to the surface through a diradical reaction involving both the external C=C and its conjugated internal C=C of the phenyl ring with an adjacent adatom-rest atom pair, forming a 5-ethylidene-1,3-cyclohexadiene-like skeleton. On the other hand, phenylacetylene was shown to be covalently attached to Si(111)-7 x 7 through the external C[triple bond]C, forming a styrene-like conjugation system. These experimental results are consistent with density functional theory calculations. The different binding mechanisms for styrene and phenylacetylene clearly demonstrate that reaction channels for multifunctional organic molecules are strongly dependent on the chemical and physical properties of the functional groups. The resulting pi-electron conjugation structures may possibly be employed as intermediates for further organic syntheses and fabrication of multilayer organic films on semiconductor surfaces.

"True" inorganic heterocycles: structures and stability of group 13-15 analogues of benzene and their dimers

Group 13-15 inorganic analogues of benzene, [HMYH](3) (M = B, Al, Ga; Y = N, P, As), mixed heterocycles of the type [BAlGaNPAs]H(6) and their dimers have been theoretically examined at the B3LYP/TZVP level of theory. Six different isomers have been structurally characterized for the mixed compounds [BAlGaNPAs]H(6). B-N bonding strongly (about approximately 90-100 kJ mol(-)(1)) stabilizes the mixed heterocycles, followed by the preference of the Al-N bonded structures over Ga-N bonded ( approximately 30-40 kJ mol(-1)), while B-P bonding is slightly (5-10 kJ mol(-1)) more favorable compared to B-As. Thus, the bonding pattern is predicted to be the most stable, followed by the core. Processes of [HMYH](3) formation from donor-acceptor complexes H(3)MYH(3) are predicted to be thermodynamically favorable for all MY combinations. Dimerization reactions of the coordinationally unsaturated [HMYH](3) heterocycles yielding hexamer clusters [HMYH](6) are found to be exothermic, with the exception of borazine, for which, as for benzene, dimerization is strongly endothermic due to the aromaticity of C(6)H(6) and [HBNH](3). Despite the high endothermicity of [HBNH](3) dimerization, the B-N bond formation is the driving force of the dimerization of mixed species [BAlGaNPAs]H(6). The dimerization enthalpies of [BAlGaNPAs]H(6) may be both exo- and endothermic, depending on the bonding pattern of the isomers. A complete set of mean MY bond energies in four- and six-membered cycles of [HMYH](6) was derived. The MY energies were found to be transferable quantities and may serve for a qualitative prediction of the relative stability of different isomers of mixed cluster compounds. [BAlGaNPAs](2)H(12) clusters are promising synthetic targets, they are expected to serve as single-source precursors for the stoichiometry-controlled CVD processes of the group 13-15 composites. A strategy of their synthesis and the most suitable starting systems have been also predicted.

From "parasitic" association reactions toward the stoichiometry controlled gas phase synthesis of nanoparticles: a theoretically driven challenge for experimentalists

In the present record a model for the gas-phase reactions during the chemical vapor deposition (CVD) processes of group 13-15 materials is presented, based on the results of extensive quantum-chemical modeling. Thermodynamic criteria have been introduced to evaluate the importance of a range of association reactions. For the organometallic and hydride derivatives, association processes are found to be favorable both thermodynamically and kinetically. Formation of high mass association products takes place under CVD conditions, including laser-assisted CVD. Structural and thermodynamic properties of the most important ring and cluster intermediates have been predicted. The stoichiometry-controlled synthesis of the 13-15 ternary alloys and nanoparticles using cluster compounds as single-source precursors is predicted to be viable. The association pathway described may be generalized to the CVD reactions of many binary materials (12-16, 13-16, 13-15, 14-15, 14-16).

Gas-phase ion chemistry in germane-propane and germane-propene mixtures

Germane-propane and germane-propene gaseous mixtures were studied by ion trap mass spectrometry. Variations of ion abundances observed under different partial pressure ratios and mechanisms of ion-molecule reactions elucidated by multiple isolation steps are reported. In addition, the rate constants for the main reactions were experimentally determined and compared with the collisional rate constants to obtain the reaction efficiencies. The yield of ions containing both Ge and C atoms is higher in the germane-propene than in the germane-propane system. In the former mixture, chain propagation takes place starting from germane ions reacting with propene and proceeds with the formation of clusters such as Ge(2)C(4)H(n) (+) and Ge(3)CH(n) (+).