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Agnew SA, Tiwari AP, Ong SW, Rahman MS, Scheideler WJ. Hypoeutectic Liquid Metal Printing of 2D Indium Gallium Oxide Transistors. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024; 20:e2403801. [PMID: 39051520 DOI: 10.1002/smll.202403801] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/10/2024] [Revised: 06/18/2024] [Indexed: 07/27/2024]
Abstract
2D native surface oxides formed on low melting temperature metals such as indium and gallium offer unique opportunities for fabricating high-performance flexible electronics and optoelectronics based on a new class of liquid metal printing (LMP). An inherent property of these Cabrera-Mott 2D oxides is their suboxide nature (e.g., In2O3-x), which leads high mobility LMP semiconductors to exhibit high electron concentrations (ne > 1019 cm-3) limiting electrostatic control. Binary alloying of the molten precursor can produce doped, ternary metal oxides such as In-X-O with enhanced electronic performance and greater bias-stress stability, though this approach demands a deeper understanding of the native oxides of alloys. This work presents an approach for hypoeutectic rapid LMP of crystalline InGaOx (IGO) at ultralow process temperatures (180 °C) beyond the state of the art to fabricate transistors with 10X steeper subthreshold slope and high mobility (≈18 cm2 Vs-1). Detailed characterization of IGO crystallinity, composition, and morphology, as well as measurements of its electronic density of states (DOS), show the impact of Ga-doping and reveal the limits of doping induced amorphization from hypoeutectic precursors. The ultralow process temperatures and compatibility with high-k Al2O3 dielectrics shown here indicate potential for 2D IGO to drive low-power flexible transparent electronics.
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Affiliation(s)
- Simon A Agnew
- Thayer School of Engineering, Dartmouth College, Hanover, NH, 03755, USA
| | - Anand P Tiwari
- Thayer School of Engineering, Dartmouth College, Hanover, NH, 03755, USA
| | - Samuel W Ong
- Thayer School of Engineering, Dartmouth College, Hanover, NH, 03755, USA
| | - Md Saifur Rahman
- Thayer School of Engineering, Dartmouth College, Hanover, NH, 03755, USA
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2
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Xu W, Xu C, Zhang Z, Huang W, Lin Q, Zhuo S, Xu F, Liu X, Zhu D, Zhao C. Water-Induced Nanometer-Thin Crystalline Indium-Praseodymium Oxide Channel Layers for Thin-Film Transistors. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:2880. [PMID: 36014745 PMCID: PMC9415306 DOI: 10.3390/nano12162880] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/07/2022] [Revised: 08/15/2022] [Accepted: 08/18/2022] [Indexed: 06/15/2023]
Abstract
We report water-induced nanometer-thin crystalline indium praseodymium oxide (In-Pr-O) thin-film transistors (TFTs) for the first time. This aqueous route enables the formation of dense ultrathin (~6 nm) In-Pr-O thin films with near-atomic smoothness (~0.2 nm). The role of Pr doping is investigated by a battery of experimental techniques. It is revealed that as the Pr doping ratio increases from 0 to 10%, the oxygen vacancy-related defects could be greatly suppressed, leading to the improvement of TFT device characteristics and durability. The optimized In-Pr-O TFT demonstrates state-of-the-art electrical performance with mobility of 17.03 ± 1.19 cm2/Vs and on/off current ratio of ~106 based on Si/SiO2 substrate. This achievement is due to the low electronegativity and standard electrode potential of Pr, the high bond strength of Pr-O, same bixbyite structure of Pr2O3 and In2O3, and In-Pr-O channel's nanometer-thin and ultrasmooth nature. Therefore, the designed In-Pr-O channel holds great promise for next-generation transistors.
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Affiliation(s)
- Wangying Xu
- Department of Physics, School of Science, Jimei University, Xiamen 361021, China
| | - Chuyu Xu
- College of Materials Science and Engineering, Shenzhen University, Shenzhen 518000, China
| | - Zhibo Zhang
- College of Materials Science and Engineering, Shenzhen University, Shenzhen 518000, China
| | - Weicheng Huang
- Department of Physics, School of Science, Jimei University, Xiamen 361021, China
| | - Qiubao Lin
- Department of Physics, School of Science, Jimei University, Xiamen 361021, China
| | - Shuangmu Zhuo
- Department of Physics, School of Science, Jimei University, Xiamen 361021, China
| | - Fang Xu
- Shenzhen Key Laboratory of Ultraintense Laser and Advanced Material Technology, Center for Advanced Material Diagnostic Technology, and College of Engineering Physics, Shenzhen Technology University, Shenzhen 518118, China
| | - Xinke Liu
- College of Materials Science and Engineering, Shenzhen University, Shenzhen 518000, China
| | - Deliang Zhu
- College of Materials Science and Engineering, Shenzhen University, Shenzhen 518000, China
| | - Chun Zhao
- Department of Electrical and Electronic Engineering, Xi’an Jiaotong-Liverpool University, Suzhou 215123, China
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Huang CH, Zhang Y, Nomura K. Reconfigurable Artificial Synapses with Excitatory and Inhibitory Response Enabled by an Ambipolar Oxide Thin-Film Transistor. ACS APPLIED MATERIALS & INTERFACES 2022; 14:22252-22262. [PMID: 35522905 DOI: 10.1021/acsami.1c24327] [Citation(s) in RCA: 7] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
A gate-tunable synaptic device controlling dynamically reconfigurable excitatory and inhibitory synaptic responses, which can emulate the fundamental synaptic responses for developing diverse functionalities of the biological nervous system, was developed using ambipolar oxide semiconductor thin-film transistors (TFTs). Since the balanced ambipolarity is significant, a boron-incorporated SnO (SnO:B) oxide semiconductor channel was newly developed to improve the ambipolar charge transports by reducing the subgap defect density, which was reduced to less than 1017 cm-3. The ambipolar SnO:B-TFT could be fabricated with a good reproductivity at the maximum process temperature of 250 °C and exhibited good TFT performances, such as a nearly zero switching voltage, the saturation mobility of ∼1.3 cm2 V-1 s-1, s-value of ∼1.1 V decade-1, and an on/off-current ratio of ∼8 × 103 for the p-channel mode, while ∼0.14 cm2 V-1 s-1, ∼2.2 V decade-1and ∼1 × 103 for n-channel modes, respectively. The ambipolar device imitated potentiation/depression behaviors in both excitatory and inhibitory synaptic responses by using the p- and n-channel transports by tuning a gate bias. The low-power consumptions of <20 and <2 nJ per pulse for the excitatory and inhibitory operations, respectively, were also achieved. The presented device operated under an ambient atmosphere and confirmed a good operation reliability over 5000 pulses and a long-term air environmental stability. The study presents the high potential of an ambipolar oxide-TFT-based synaptic device with a good manufacturability to develop emerging neuromorphic perception and computing hardware for next-generation artificial intelligence systems.
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Affiliation(s)
- Chi-Hsin Huang
- Department of Electrical and Computer Engineering, University of California San Diego, La Jolla, California 92093, United States
| | - Yong Zhang
- Department of Electrical and Computer Engineering, University of California San Diego, La Jolla, California 92093, United States
| | - Kenji Nomura
- Department of Electrical and Computer Engineering, University of California San Diego, La Jolla, California 92093, United States
- Material Science and Engineering Program, University of California San Diego, La Jolla, California 92093, United States
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Xu W, Xu C, Hong L, Xu F, Zhao C, Zhang Y, Fang M, Han S, Cao P, Lu Y, Liu W, Zhu D. Aqueous Solution-Processed Nanometer-Thin Crystalline Indium Ytterbium Oxide Thin-Film Transistors. NANOMATERIALS 2022; 12:nano12071216. [PMID: 35407335 PMCID: PMC9000645 DOI: 10.3390/nano12071216] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/04/2022] [Revised: 03/29/2022] [Accepted: 04/02/2022] [Indexed: 11/30/2022]
Abstract
We demonstrate the growth of ultra-thin (~5 nm) indium ytterbium oxide (In-Yb-O) thin film using a simple vacuum-free aqueous solution approach for the first time. The influences of Yb addition on the microstructural, chemical, optical, and electrical properties of In2O3 are well investigated. The analyses indicate that Yb dopant could suppress oxygen vacancy defects effectively owing to the lower standard electrode potential, lower electronegativity, and stronger metal-oxide bond strength than that of In. The optimized In-Yb-O thin-film transistors (TFTs) exhibit excellent electrical performance (mobility of 8 cm2/Vs and on/off ratio of ~108) and enhanced stability. The triumph of In-Yb-O TFTs is owing to the high quality In2O3 matrix, the remarkable suppressor of Yb, and the nanometer-thin and atomically smooth nature (RMS: ~0.26 nm) of channel layer. Therefore, the eco-friendly water-induced ultra-thin In-Yb-O channel provides an excellent opportunity for future large-scale and cost-effective electronic applications.
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Affiliation(s)
- Wangying Xu
- College of Materials Science and Engineering, Shenzhen University, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials, Shenzhen 518000, China; (C.X.); (L.H.); (M.F.); (S.H.); (P.C.); (Y.L.); (W.L.)
- Correspondence: (W.X.); (F.X.); (D.Z.)
| | - Chuyu Xu
- College of Materials Science and Engineering, Shenzhen University, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials, Shenzhen 518000, China; (C.X.); (L.H.); (M.F.); (S.H.); (P.C.); (Y.L.); (W.L.)
| | - Liping Hong
- College of Materials Science and Engineering, Shenzhen University, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials, Shenzhen 518000, China; (C.X.); (L.H.); (M.F.); (S.H.); (P.C.); (Y.L.); (W.L.)
| | - Fang Xu
- Shenzhen Key Laboratory of Ultraintense Laser and Advanced Material Technology, Center for Advanced Material Diagnostic Technology, and College of Engineering Physics, Shenzhen Technology University, Shenzhen 518118, China
- Correspondence: (W.X.); (F.X.); (D.Z.)
| | - Chun Zhao
- Department of Electrical and Electronic Engineering, Xi’an Jiaotong-Liverpool University, Suzhou 215123, China;
| | - Yu Zhang
- Department of Electronic and Communication Engineering, Shenzhen Polytechnic, Shenzhen 518055, China;
| | - Ming Fang
- College of Materials Science and Engineering, Shenzhen University, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials, Shenzhen 518000, China; (C.X.); (L.H.); (M.F.); (S.H.); (P.C.); (Y.L.); (W.L.)
| | - Shun Han
- College of Materials Science and Engineering, Shenzhen University, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials, Shenzhen 518000, China; (C.X.); (L.H.); (M.F.); (S.H.); (P.C.); (Y.L.); (W.L.)
| | - Peijiang Cao
- College of Materials Science and Engineering, Shenzhen University, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials, Shenzhen 518000, China; (C.X.); (L.H.); (M.F.); (S.H.); (P.C.); (Y.L.); (W.L.)
| | - Youming Lu
- College of Materials Science and Engineering, Shenzhen University, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials, Shenzhen 518000, China; (C.X.); (L.H.); (M.F.); (S.H.); (P.C.); (Y.L.); (W.L.)
| | - Wenjun Liu
- College of Materials Science and Engineering, Shenzhen University, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials, Shenzhen 518000, China; (C.X.); (L.H.); (M.F.); (S.H.); (P.C.); (Y.L.); (W.L.)
| | - Deliang Zhu
- College of Materials Science and Engineering, Shenzhen University, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials, Shenzhen 518000, China; (C.X.); (L.H.); (M.F.); (S.H.); (P.C.); (Y.L.); (W.L.)
- Correspondence: (W.X.); (F.X.); (D.Z.)
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5
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Zhang Y, He G, Wang L, Wang W, Xu X, Liu W. Ultraviolet-Assisted Low-Thermal-Budget-Driven α-InGaZnO Thin Films for High-Performance Transistors and Logic Circuits. ACS NANO 2022; 16:4961-4971. [PMID: 35274929 DOI: 10.1021/acsnano.2c01286] [Citation(s) in RCA: 7] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Developing a low-temperature fabrication strategy of an amorphous InGaZnO (α-IGZO) channel layer is a prerequisite for high-performance oxide-based thin film transistor (TFT) flexible device applications. Herein, an ultraviolet-assisted oxygen ambient rapid thermal annealing method (UV-ORTA), which combines ultraviolet irradiation with rapid annealing treatment in an oxygen atmosphere, was proposed to realize the achievement of high-performance α-IGZO TFTs at low temperature. Experimental results have confirmed that UV-ORTA treatment has the ability to suppress defects and obtain high-quality films similar to high-temperature-annealing-treated samples. α-IGZO/HfAlO TFTs with high-performance and low-voltage operating have been achieved at a low temperature of 180 °C for 200 s, including a high μsat of 23.12 cm2 V-1 S-1, large Ion/off of 1.1 × 108, small subthreshold swing of 0.08 V/decade, and reliable stability under bias stress, respectively. As a demonstration of complex logic applications, a low-voltage resistor-loaded unipolar inverter based on an α-IGZO/HfAlO TFT has been built, demonstrating full swing characteristics and a high gain of 13.8. Low-frequency noise (LFN) characteristics of α-IGZO/HfAlO TFTs have been presented and concluded that the noise source tended to a carrier number fluctuation (ΔN) model from a carrier number and correlated mobility fluctuation (ΔN-Δμ) model. As a result, it can be inferred that the low-temperature UV-ORTA technique to improve α-IGZO thin film quality provides a facile and designable process for the integration of α-IGZO TFTs into a flexible electronic system.
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Affiliation(s)
- Yongchun Zhang
- School of Materials Science and Engineering, Anhui University, Hefei 230601, China
- School of Mechanical and Electrical Engineering, Chuzhou University, Chuzhou 239000, China
| | - Gang He
- School of Materials Science and Engineering, Anhui University, Hefei 230601, China
- Institute of Physical Science and Information Technology, Anhui University, Hefei 230601, China
| | - Leini Wang
- School of Materials Science and Engineering, Anhui University, Hefei 230601, China
| | - Wenhao Wang
- School of Materials Science and Engineering, Anhui University, Hefei 230601, China
| | - Xiaofen Xu
- School of Materials Science and Engineering, Anhui University, Hefei 230601, China
| | - Wenjun Liu
- State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China
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6
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Wang B, Huang W, Bedzyk MJ, Dravid VP, Hu YY, Marks TJ, Facchetti A. Combustion Synthesis and Polymer Doping of Metal Oxides for High-Performance Electronic Circuitry. Acc Chem Res 2022; 55:429-441. [PMID: 35044167 DOI: 10.1021/acs.accounts.1c00671] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Abstract
ConspectusTransparent conducting oxides (TCOs) are inorganic electrical conductors with optical band gaps greater than 3.3 eV. TCOs have been extensively explored in functional windows, touch screen applications, transparent displays, solar cells, and even electronic circuits. Amorphous metal oxide (a-MO) semiconductors are a TCO class that has made impressive progress since the first 2004 demonstration of their utility as the semiconducting layer in thin-film transistors (TFTs). Their excellent counterintuitive electron mobilities in the amorphous state fill the performance gap between amorphous silicon and polysilicon, widening TFT applicability to high-value products such as high-resolution flat panel displays and emerging flexible/wearable electronics. The possibility of solution processing MO "inks" from air-stable precursors, via roll-to-roll and high-throughput printing, further expands their appeal. However, most MO TFTs fabricated using solution-processing require postdeposition film annealing at elevated temperatures (>400 °C) to ensure high-quality films and stable charge transport. Thus, MO fabrication on and TFT integration with inexpensive and typically temperature-sensitive flexible polymer substrates remains challenging, as does reducing MO processing times to those acceptable for high-throughput semiconductor circuit manufacture. Consequently, new MO film processing methodologies are being developed to meet these requirements. Among them, science-based combustion synthesis (CS) and polymer doping are promising complementary approaches to optimize materials quality and manufacturing efficiency; they are the topic of this Account.This Account summarizes the progress in CS and MO polymer doping research, made largely at Northwestern University over the past decade, to create high-performance MO TFTs. Regarding CS, we begin with an overview of combustion precursor chemistry that strongly affects the resulting film quality and device performance. Then, single fuel and dual fuel combustion syntheses for diverse MO systems are discussed. Representative examples highlight recent advances, with a focus on the relationship between (co)fuel-oxidizer types/amounts, thermal behavior, film microstructure, and TFT performance. Next, the discussion focuses on polymer doping of several MO matrices as a new approach to achieve semiconducting MO compositions with excellent performance and mechanical flexibility. Thus, the effect of the polymer architecture and content in the MO precursor formulations on the MO film composition, microstructure, electronic structure, and charge transport are discussed. The concluding remarks highlight challenges and emerging opportunities.
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Affiliation(s)
- Binghao Wang
- Joint International Research Laboratory of Information Display and Visualization, School of Electronic Science and Engineering, Southeast University, 2 Sipailou, Nanjing, Jiangsu 210096, China
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Wei Huang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
- School of Automation Engineering, University of Electronic Science and Technology of China (UESTC), Chengdu, Sichuan 611731, China
| | - Michael J. Bedzyk
- Applied Physics Program, Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
- Department of Materials Science and Engineering, and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Vinayak P. Dravid
- Department of Materials Science and Engineering, and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Yan-Yan Hu
- Department of Chemistry and Biochemistry, Florida State University, Tallahassee, Florida 32306, United States
| | - Tobin J. Marks
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
- Department of Materials Science and Engineering, and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Antonio Facchetti
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
- Flexterra Corporation, 8025 Lamon Avenue, Skokie, Illinois 60077, United States
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Vardhan RV, Kumar S, Mandal S. Fabrication of minimal capital‐intensive scratch‐resistant and hydrophobic tungsten oxide film on stainless steel through spray pyrolysis. SURF INTERFACE ANAL 2022. [DOI: 10.1002/sia.7061] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
Affiliation(s)
- Robbi Vivek Vardhan
- Department of Metallurgical and Materials Engineering National Institute of Technology Karnataka (NITK) Surathkal 575025 India
| | - Subodh Kumar
- Department of Metallurgical and Materials Engineering National Institute of Technology Karnataka (NITK) Surathkal 575025 India
| | - Saumen Mandal
- Department of Metallurgical and Materials Engineering National Institute of Technology Karnataka (NITK) Surathkal 575025 India
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Thermal Analysis of Metal-Organic Precursors for Functional Cu:ΝiOx Hole Transporting Layer in Inverted Perovskite Solar Cells: Role of Solution Combustion Chemistry in Cu:ΝiOx Thin Films Processing. NANOMATERIALS 2021; 11:nano11113074. [PMID: 34835837 PMCID: PMC8618520 DOI: 10.3390/nano11113074] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/08/2021] [Revised: 10/27/2021] [Accepted: 11/12/2021] [Indexed: 11/17/2022]
Abstract
Low temperature solution combustion synthesis emerges as a facile method for the synthesis of functional metal oxides thin films for electronic applications. We study the solution combustion synthesis process of Cu:NiOx using different molar ratios (w/o, 0.1 and 1.5) of fuel acetylacetone (Acac) to oxidizer (Cu, Ni Nitrates) as a function of thermal annealing temperatures 150, 200, and 300 °C. The solution combustion synthesis process, in both thin films and bulk Cu:NiOx, is investigated. Thermal analysis studies using TGA and DTA reveal that the Cu:NiOx thin films show a more gradual mass loss while the bulk Cu:NiOx exhibits a distinct combustion process. The thin films can crystallize to Cu:NiOx at an annealing temperature of 300 °C, irrespective of the Acac/Oxidizer ratio, whereas lower annealing temperatures (150 and 200 °C) produce amorphous materials. A detail characterization study of solution combustion synthesized Cu:NiOx, including XPS, UV-Vis, AFM, and Contact angle measurements, is presented. Finally, 50 nm Cu:NiOx thin films are introduced as HTLs within the inverted perovskite solar cell device architecture. The Cu:NiOx HTL annealed at 150 and 200 °C provided PVSCs with limited functionality, whereas efficient triple-cation Cs0.04(MA0.17FA0.83)0.96 Pb(I0.83Br0.17)3-based PVSCs achieved for Cu:NiOx HTLs for annealing temperature of 300 °C.
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Fang Y, Zhao C, Mitrovic IZ, Zhao C. High-Performance and Radiation-Hardened Solution-Processed ZrLaO Gate Dielectrics for Large-Area Applications. ACS APPLIED MATERIALS & INTERFACES 2021; 13:50101-50110. [PMID: 34636544 DOI: 10.1021/acsami.1c13633] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Radiation hardness is important for electronics operating in harsh radiation environments such as outer space and nuclear energy industries. In this work, radiation-hardened solution-processed ZrLaO thin films are demonstrated. The radiation effects on solution-processed ZrLaO thin films and InOx/ZrLaO thin-film transistors (TFTs) were systemically investigated. The Zr0.9La0.1Oy thin films demonstrated excellent radiation hardness with negligible roughness, composition, electrical property, and bias-stress stability degradation after radiation exposure. The metal-oxide-semiconductor capacitors (MOSCAPs) based on Zr0.9La0.1Oy gate dielectrics exhibited an ultralow flat band-voltage (VFB) sensitivity of 0.11 mV/krad and 0.19 mV/krad under low dose and high dose gamma irradiation conditions, respectively. The low dose condition had a 103 krad (SiO2) total dose and a 0.12 rad/s low dose rate, whereas the high dose condition had a 580 krad total dose and a 278 rad/s high dose rate. Furthermore, InOx/Zr0.9La0.1Oy thin-film transistors (TFTs) exhibited a large Ion/Ioff of 2 × 106, a small subthreshold swing (SS) of 0.11 V/dec, a small interface trap density (Dit) of 1 × 1012 cm-2, and a 0.16 V threshold shift (ΔVTH) under 3600 s positive bias-stress (PBS). InOx/Zr0.9La0.1Oy TFT-based resistor-loaded inverters demonstrated complete swing behavior, a static output gain of 13.3 under 4 V VDD, and an ∼9% radiation-induced degradation. Through separate investigation of the radiation-induced degradation on the semiconductor layer and dielectric layer of TFTs, it was found that radiation exposure mainly generated oxygen vacancies (Vo) and increased electron concentration among gate oxide. Nevertheless, the radiation-induced TFT instability was mainly related to the semiconductor layer degradation, which could be possibly suppressed by back-channel passivation. The demonstrated results indicate that solution-processed ZrLaO is a high-potential candidate for large-area electronics and circuits applied in harsh radiation environments. In addition, the detailed investigation of radiation-induced degradation on solution-processed high-k dielectrics in this work provided clear inspiration for developing novel flexible rad-hard dielectrics.
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Affiliation(s)
- Yuxiao Fang
- Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool L69 3GJ, United Kingdom
- Printable Electronics Research Center, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
| | - Chun Zhao
- Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool L69 3GJ, United Kingdom
- Department of Electrical and Electronic Engineering, Xi'an Jiaotong-Liverpool University, Suzhou 215123, China
| | - Ivona Z Mitrovic
- Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool L69 3GJ, United Kingdom
| | - Cezhou Zhao
- Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool L69 3GJ, United Kingdom
- Department of Electrical and Electronic Engineering, Xi'an Jiaotong-Liverpool University, Suzhou 215123, China
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10
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Bukke RN, Jang J. Gel-based precursors for the high-performance of n-channel GaInSnZnO and p-channel CuGaSnSO thin-film transistors. RSC Adv 2021; 11:34392-34401. [PMID: 35497315 PMCID: PMC9042381 DOI: 10.1039/d1ra04787f] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/21/2021] [Accepted: 10/05/2021] [Indexed: 02/05/2023] Open
Abstract
The performance of metal-oxide thin-film transistors (TFTs) should be further improved for the applications of next-generation displays. Here, the developments of gel-derived gallium-indium-tin-zinc oxide (GITZO) for n-channel and copper-gallium-tin-sulfide oxide (CGTSO) for p-channel TFTs are demonstrated. The a-GITZO film by gel-based precursor gives an excellent interface with ZrO x compared to the GITZO deposited using pristine or purified precursor. The gel-derived GITZO TFT exhibits the saturation mobility (μ sat) of 28.6 ± 2.15 cm2 V-1 s-1, three-fold higher than the pristine one, and excellent bias stability. The boost in GITZO TFT performances is due to the purity of the metal oxide material and higher film density with smooth surface morphology. In addition, the field-effect mobility (μ FE) of the p-channel copper-tin-sulfide-gallium oxide (CGTSO) TFT could be increased from 1.71 to 4.25 cm2 V-1 s-1 using a gel-derived precursor solution. Therefore, these results demonstrate that the gel-derived metal-oxide precursor by the solution process is a promising one for the high performance of the TFT backplane.
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Affiliation(s)
- Ravindra Naik Bukke
- Advanced Display Research Center, Department of Information Display, Kyung Hee University Hoegi-dong, Dongdaemun-gu Seoul 130-701 South Korea
| | - Jin Jang
- Advanced Display Research Center, Department of Information Display, Kyung Hee University Hoegi-dong, Dongdaemun-gu Seoul 130-701 South Korea
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Lee S, Kim M, Mun G, Ko J, Yeom HI, Lee GH, Shong B, Park SHK. Effects of Al Precursors on the Characteristics of Indium-Aluminum Oxide Semiconductor Grown by Plasma-Enhanced Atomic Layer Deposition. ACS APPLIED MATERIALS & INTERFACES 2021; 13:40134-40144. [PMID: 34396768 DOI: 10.1021/acsami.1c11304] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Atomic layer deposition (ALD) has attracted much attention, particularly for applications in nanoelectronics because of its atomic-level controllability and high-quality products. In this study, we developed a plasma-enhanced atomic layer deposition (PEALD) process to fabricate a homogeneous indium aluminum oxide (IAO) semiconductor film. Trimethylaluminum (TMA) and dimethylaluminum isopropoxide (DMAI) were used as Al precursors, which yielded different compositions. Density functional theory (DFT) calculations on the surface reactions between indium and aluminum precursors showed that while highly reactive TMA would etch In, DMAI with lower reactivity would allow indium to persist in the films, resulting in a more controlled doping of Al. The In/Al composition ratio could be further precisely controlled by adjusting the indium precursor dose time to sub-saturation. IAO based on DMAI was applied to fabricate thin-film transistors (TFTs), showing that Al can be a carrier suppressor of indium oxide. TFTs with PEALD IAO containing 3.8 atomic % Al showed a turn-on voltage of -0.4 ± 0.3 V, a subthreshold slope of 0.09 V/decade, and a field effect mobility of 18.9 cm2/(V s).
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Affiliation(s)
- Seunghee Lee
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Miso Kim
- Department of Chemical Engineering, Hongik University, 94 Wausan-ro, Mapo-gu, Seoul 04066, Republic of Korea
| | - Geumbi Mun
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Jongbeom Ko
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Hye-In Yeom
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Gwang-Heum Lee
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Bonggeun Shong
- Department of Chemical Engineering, Hongik University, 94 Wausan-ro, Mapo-gu, Seoul 04066, Republic of Korea
| | - Sang-Hee Ko Park
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
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12
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Stallings K, Smith J, Chen Y, Zeng L, Wang B, Di Carlo G, Bedzyk MJ, Facchetti A, Marks TJ. Self-Assembled Nanodielectrics for Solution-Processed Top-Gate Amorphous IGZO Thin-Film Transistors. ACS APPLIED MATERIALS & INTERFACES 2021; 13:15399-15408. [PMID: 33779161 DOI: 10.1021/acsami.1c00249] [Citation(s) in RCA: 10] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Metal oxide semiconductors, such as amorphous indium gallium zinc oxide (a-IGZO), have made impressive strides as alternatives to amorphous silicon for electronics applications. However, to achieve the full potential of these semiconductors, compatible unconventional gate dielectric materials must also be developed. To this end, solution-processable self-assembled nanodielectrics (SANDs) composed of structurally well-defined and durable nanoscopic alternating organic (e.g., stilbazolium) and inorganic oxide (e.g., ZrOx and HfOx) layers offer impressive capacitances and low processing temperatures (T ≤ 200 °C). While SANDs have been paired with diverse semiconductors and have yielded excellent device metrics, they have never been implemented in the most technologically relevant top-gate thin-film transistor (TFT) architecture. Here, we combine solution-processed a-IGZO with solution-processed four-layer Hf-SAND to fabricate top-gate TFTs, which exhibit impressive electron mobilities (μSAT = 19.4 cm2 V-1 s-1) and low threshold voltages (Vth = 0.83 V), subthreshold slopes (SS = 293 mV/dec), and gate leakage currents (10-10 A) as well as high bias stress stability.
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Affiliation(s)
- Katie Stallings
- Department of Chemistry and Materials Research Center, Northwestern University, Evanston, Illinois 60208, United States
| | - Jeremy Smith
- Department of Chemistry and Materials Research Center, Northwestern University, Evanston, Illinois 60208, United States
| | - Yao Chen
- Department of Chemistry and Materials Research Center, Northwestern University, Evanston, Illinois 60208, United States
| | - Li Zeng
- Applied Physics Program and the Materials Research Center, Northwestern University, Evanston, Illinois 60208, United States
| | - Binghao Wang
- Department of Chemistry and Materials Research Center, Northwestern University, Evanston, Illinois 60208, United States
| | - Gabriele Di Carlo
- Department of Chemistry and Materials Research Center, Northwestern University, Evanston, Illinois 60208, United States
| | - Michael J Bedzyk
- Department of Materials Science and Engineering, Applied Physics Program and the Materials Research Center, Northwestern University, Evanston, Illinois 60208, United States
| | - Antonio Facchetti
- Department of Chemistry and Materials Research Center, Northwestern University, Evanston, Illinois 60208, United States
- Flexterra Inc., 8025 Lamon Avenue, Skokie, Illinois 60077, United States
| | - Tobin J Marks
- Department of Chemistry and Materials Research Center, Northwestern University, Evanston, Illinois 60208, United States
- Department of Materials Science and Engineering and Materials Research Center, Northwestern University, Evanston, Illinois 60208, United States
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13
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Lee EG, Gong YJ, Lee SE, Na HJ, Im C, Kim H, Kim YS. Conductive Polymer-Assisted Metal Oxide Hybrid Semiconductors for High-Performance Thin-Film Transistors. ACS APPLIED MATERIALS & INTERFACES 2021; 13:8552-8562. [PMID: 33566562 DOI: 10.1021/acsami.0c21134] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Metal oxide semiconductors doped with additional inorganic cations have insufficient electron mobility for next-generation electronic devices so strategies to realize the semiconductors exhibiting stability and high performance are required. To overcome the limitations of conventional inorganic cation doping to improve the electrical characteristics and stability of metal oxide semiconductors, we propose solution-processed high-performance metal oxide thin-film transistors (TFTs) by incorporating polyaniline (PANI), a conductive polymer, in a metal oxide matrix. The chemical interaction between the metal oxide and PANI demonstrated that the defect sites and crystallinity of the semiconductor layer are controllable. In addition, the change in oxygen-related chemical bonding of PANI-doped indium oxide (InOx) TFTs induces superior electrical characteristics compared to pristine InOx TFTs, even though trace amounts of PANI are doped in the semiconductor. In particular, the average field-effect mobility remarkably enhanced from 15.02 to 26.58 cm2 V-1 s-1, the on/off current ratio improved from 108 to 109, and the threshold voltage became close to 0 V actually from -7.9 to -1.4 V.
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Affiliation(s)
- Eun Goo Lee
- Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea
- Samsung Display Company, Ltd, 1 Samsung-ro, Giheung-gu, Yongin-si, Gyeonggi-Do 17113, Republic of Korea
| | - Yong Jun Gong
- Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea
| | - Sung-Eun Lee
- Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea
- Samsung Display Company, Ltd, 1 Samsung-ro, Giheung-gu, Yongin-si, Gyeonggi-Do 17113, Republic of Korea
| | - Hyun-Jae Na
- Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea
- Samsung Display Company, Ltd, 1 Samsung-ro, Giheung-gu, Yongin-si, Gyeonggi-Do 17113, Republic of Korea
| | - Changik Im
- Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea
| | - Heebae Kim
- Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea
| | - Youn Sang Kim
- Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea
- School of Chemical & Biological Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea
- Advanced Institute of Convergence Technology, 145 Gwanggyo-ro, Yeongtong-gu, Suwon 16229, Republic of Korea
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Jeon SP, Heo JS, Kim I, Kim YH, Park SK. Enhanced Interfacial Integrity of Amorphous Oxide Thin-Film Transistors by Elemental Diffusion of Ternary Oxide Semiconductors. ACS APPLIED MATERIALS & INTERFACES 2020; 12:57996-58004. [PMID: 33332113 DOI: 10.1021/acsami.0c16068] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Low-temperature solution-processed oxide semiconductor and dielectric films typically possess a substantial number of defects and impurities due to incomplete metal-oxygen bond formation, causing poor electrical performance and stability. Here, we exploit a facile route to improve the film quality and the interfacial property of low-temperature solution-processed oxide thin films via elemental diffusion between metallic ion-doped InOx (M:InOx) ternary oxide semiconductor and AlOx gate dielectric layers. Particularly, it was revealed that metallic dopants such as magnesium (Mg) and hafnium (Hf) having a small ionic radius, a high Gibbs energy of oxidation, and bonding dissociation energy could successfully diffuse into the low-quality AlOx gate dielectric layer and effectively reduce the structural defects and residual impurities present in the bulk and at the semiconductor/dielectric interface. Through an extensive investigation on the compositional, structural, and electrical properties of M:InOx/AlOx thin-film transistors (TFTs), we provide direct evidences of elemental diffusion occurred between M:InOx and AlOx layers as well as its contribution to the electrical performance and operational stability. Using the elemental diffusion process, we demonstrate solution-processed Hf:InOx TFTs using a low-temperature (180 °C) AlOx gate dielectric having a field-effect mobility of 2.83 cm2 V-1·s-1 and improved bias stability. Based on these results, it is concluded that the elemental diffusion between oxide semiconductor and gate dielectric layers can play a crucial role in realizing oxide TFTs with enhanced structural and interfacial integrity.
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Affiliation(s)
- Seong-Pil Jeon
- School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 06980, Korea
| | - Jae Sang Heo
- Department of Medicine, University of Connecticut School of Medicine, Farmington, Connecticut 06030, United States
- School of Advanced Materials Science and Engineering and SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 16419, Korea
| | - Insoo Kim
- Department of Medicine, University of Connecticut School of Medicine, Farmington, Connecticut 06030, United States
| | - Yong-Hoon Kim
- School of Advanced Materials Science and Engineering and SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 16419, Korea
| | - Sung Kyu Park
- School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 06980, Korea
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15
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Experimental and theoretical evidence for hydrogen doping in polymer solution-processed indium gallium oxide. Proc Natl Acad Sci U S A 2020; 117:18231-18239. [PMID: 32703807 DOI: 10.1073/pnas.2007897117] [Citation(s) in RCA: 20] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022] Open
Abstract
The field-effect electron mobility of aqueous solution-processed indium gallium oxide (IGO) thin-film transistors (TFTs) is significantly enhanced by polyvinyl alcohol (PVA) addition to the precursor solution, a >70-fold increase to 7.9 cm2/Vs. To understand the origin of this remarkable phenomenon, microstructure, electronic structure, and charge transport of IGO:PVA film are investigated by a battery of experimental and theoretical techniques, including In K-edge and Ga K-edge extended X-ray absorption fine structure (EXAFS); resonant soft X-ray scattering (R-SoXS); ultraviolet photoelectron spectroscopy (UPS); Fourier transform-infrared (FT-IR) spectroscopy; time-of-flight secondary-ion mass spectrometry (ToF-SIMS); composition-/processing-dependent TFT properties; high-resolution solid-state 1H, 71Ga, and 115In NMR spectroscopy; and discrete Fourier transform (DFT) analysis with ab initio molecular dynamics (MD) liquid-quench simulations. The 71Ga{1H} rotational-echo double-resonance (REDOR) NMR and other data indicate that PVA achieves optimal H doping with a Ga···H distance of ∼3.4 Å and conversion from six- to four-coordinate Ga, which together suppress deep trap defect localization. This reduces metal-oxide polyhedral distortion, thereby increasing the electron mobility. Hydroxyl polymer doping thus offers a pathway for efficient H doping in green solvent-processed metal oxide films and the promise of high-performance, ultra-stable metal oxide semiconductor electronics with simple binary compositions.
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16
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Shin JC, Kwon SM, Kang J, Jeon SP, Heo JS, Kim YH, Cho SW, Park SK. Catalytic Metal-Accelerated Crystallization of High-Performance Solution-Processed Earth-Abundant Metal Oxide Semiconductors. ACS APPLIED MATERIALS & INTERFACES 2020; 12:25000-25010. [PMID: 32394695 DOI: 10.1021/acsami.0c04401] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
As an alternative strategy for conventional high-temperature crystallization of metal oxide (MO) channel layers, the catalytic metal-accelerated crystallization (CMAC) process using a metal seed layer is demonstrated for low-temperature crystallization of solution-processed MO semiconductors. In the CMAC process, the catalytic metal layer plays the role of seed sites for initiating and accelerating the crystallization of amorphous MO films. Generally, the solution-processed crystalline-TiO2 (c-TiO2) films required high-temperature crystallization conditions (≥500-600 °C), showing low electrical performance with a high defect density. In contrast, the suggested CMAC process could effectively lower crystallization temperature of the a-TiO2 films, enabling high-quality c-TiO2 films with well-aligned anatase grains and low-defect density. The various crystalline catalytic layers were deposited over the earth-abundant n-type amorphous titanium oxide (a-TiO2) films. Also, then, the CMAC process was performed for facile low-temperature translation of solution-processed a-TiO2 to a highly crystallized state. In particular, the Al-CMAC process using the crystalline thin-aluminum (Al) catalytic metal seed layer facilitates low-temperature (≥300 °C) crystallization of the solution-processed a-TiO2 films and the fabrication of high-performance solution-processed c-TiO2 thin-film transistors with superior field-effect mobility, good on/off switching behavior, and improved operational stability.
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Affiliation(s)
- Jae Cheol Shin
- School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Sung Min Kwon
- School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Jingu Kang
- School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Seong Pil Jeon
- School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Jae-Sang Heo
- Department of Medicine, University of Connecticut School of Medicine, Farmington, Connecticut 06030, United States
| | - Yong-Hoon Kim
- School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea
- SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Sung Woon Cho
- Department of Printed Electronics Engineering, Sunchon National University, Sunchon, Jeonnam 57922, Republic of Korea
| | - Sung Kyu Park
- School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 06974, Republic of Korea
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17
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Recent Advances of Solution-Processed Heterojunction Oxide Thin-Film Transistors. NANOMATERIALS 2020; 10:nano10050965. [PMID: 32443597 PMCID: PMC7325575 DOI: 10.3390/nano10050965] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/19/2020] [Revised: 05/13/2020] [Accepted: 05/13/2020] [Indexed: 01/27/2023]
Abstract
Thin-film transistors (TFTs) made of metal oxide semiconductors are now increasingly used in flat-panel displays. Metal oxides are mainly fabricated via vacuum-based technologies, but solution approaches are of great interest due to the advantages of low-cost and high-throughput manufacturing. Unfortunately, solution-processed oxide TFTs suffer from relatively poor electrical performance, hindering further development. Recent studies suggest that this issue could be solved by introducing a novel heterojunction strategy. This article reviews the recent advances in solution-processed heterojunction oxide TFTs, with a specific focus on the latest developments over the past five years. Two of the most prominent advantages of heterostructure oxide TFTs are discussed, namely electrical-property modulation and mobility enhancement by forming 2D electron gas. It is expected that this review will manifest the strong potential of solution-based heterojunction oxide TFTs towards high performance and large-scale electronics.
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Carlos E, Martins R, Fortunato E, Branquinho R. Solution Combustion Synthesis: Towards a Sustainable Approach for Metal Oxides. Chemistry 2020; 26:9099-9125. [DOI: 10.1002/chem.202000678] [Citation(s) in RCA: 61] [Impact Index Per Article: 12.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/07/2020] [Indexed: 12/26/2022]
Affiliation(s)
- Emanuel Carlos
- Materials Science DepartmentCENIMAT/i3N, Faculdade de Ciências e Tecnologia (FCT)Universidade NOVA de Lisboa (UNL) and CEMOP/UNINOVA 2829-516 Caparica Portugal
| | - Rodrigo Martins
- Materials Science DepartmentCENIMAT/i3N, Faculdade de Ciências e Tecnologia (FCT)Universidade NOVA de Lisboa (UNL) and CEMOP/UNINOVA 2829-516 Caparica Portugal
| | - Elvira Fortunato
- Materials Science DepartmentCENIMAT/i3N, Faculdade de Ciências e Tecnologia (FCT)Universidade NOVA de Lisboa (UNL) and CEMOP/UNINOVA 2829-516 Caparica Portugal
| | - Rita Branquinho
- Materials Science DepartmentCENIMAT/i3N, Faculdade de Ciências e Tecnologia (FCT)Universidade NOVA de Lisboa (UNL) and CEMOP/UNINOVA 2829-516 Caparica Portugal
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Jeong JW, Hwang HS, Choi D, Ma BC, Jung J, Chang M. Hybrid Polymer/Metal Oxide Thin Films for High Performance, Flexible Transistors. MICROMACHINES 2020; 11:mi11030264. [PMID: 32143449 PMCID: PMC7143309 DOI: 10.3390/mi11030264] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/05/2020] [Revised: 02/28/2020] [Accepted: 03/03/2020] [Indexed: 01/26/2023]
Abstract
Metal oxides (MOs) have garnered significant attention in a variety of research fields, particularly in flexible electronics such as wearable devices, due to their superior electronic properties. Meanwhile, polymers exhibit excellent mechanical properties such as flexibility and durability, besides enabling economic solution-based fabrication. Therefore, MO/polymer nanocomposites are excellent electronic materials for use in flexible electronics owing to the confluence of the merits of their components. In this article, we review recent developments in the synthesis and fabrication techniques for MO/polymer nanocomposite-based flexible transistors. In particular, representative MO/polymer nanocomposites for flexible and transparent channel layers and gate dielectrics are introduced and their electronic properties-such as mobilities and dielectric constant-are presented. Finally, we highlight the advances in interface engineering and its influence on device electronics.
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Affiliation(s)
- Jae Won Jeong
- Department of Polymer Engineering, Graduate School, Chonnam National University, Gwangju 61186, Korea;
| | - Hye Suk Hwang
- Alan G. MacDiarmid Energy Research Institute, Chonnam National University, Gwangju 61186, Korea;
| | - Dalsu Choi
- Department of Chemical Engineering, Myongji University, Yongin-si, Gyeonggido 17058, Korea;
| | - Byung Chol Ma
- School of Chemical Engineering, Chonnam National University, Gwangju 61186, Korea
- Correspondence: (B.C.M.); (J.J.); (M.C.); Tel.: +82-62-530-1815 (B.C.M.); +82-62-530-1771 (J.J. & M.C.)
| | - Jaehan Jung
- Department of Materials Science and Engineering, Hongik University, Sejong 30016, Korea
- Correspondence: (B.C.M.); (J.J.); (M.C.); Tel.: +82-62-530-1815 (B.C.M.); +82-62-530-1771 (J.J. & M.C.)
| | - Mincheol Chang
- Department of Polymer Engineering, Graduate School, Chonnam National University, Gwangju 61186, Korea;
- Alan G. MacDiarmid Energy Research Institute, Chonnam National University, Gwangju 61186, Korea;
- School of Polymer Science and Engineering, Chonnam National University, Gwangju 61186, Korea
- Correspondence: (B.C.M.); (J.J.); (M.C.); Tel.: +82-62-530-1815 (B.C.M.); +82-62-530-1771 (J.J. & M.C.)
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20
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Fazio M, Yang L, Markosyan A, Bassiri R, Fejer MM, Menoni CS. Growth and characterization of Sc 2O 3 doped Ta 2O 5 thin films. APPLIED OPTICS 2020; 59:A106-A111. [PMID: 32225358 DOI: 10.1364/ao.59.00a106] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/18/2019] [Accepted: 11/15/2019] [Indexed: 06/10/2023]
Abstract
We present the optical and structural characterization of films of Ta2O5, Sc2O3, and Sc2O3 doped Ta2O5 with a cation ratio around 0.1 grown by reactive sputtering. The addition of Sc2O3 as a dopant induces the formation of tantalum suboxide due to the "oxygen getter" property of scandium. The presence of tantalum suboxide greatly affects the optical properties of the coating, resulting in higher absorption loss at λ=1064nm. The refractive index and optical band gap of the mixed film do not correspond to those of a mixture of Ta2O5 and Sc2O3, given the profound structural modifications induced by the dopant.
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21
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Song L, Dou K, Wang R, Leng P, Luo L, Xi Y, Kaun CC, Han N, Wang F, Chen Y. Sr-Doped Cubic In 2O 3/Rhombohedral In 2O 3 Homojunction Nanowires for Highly Sensitive and Selective Breath Ethanol Sensing: Experiment and DFT Simulation Studies. ACS APPLIED MATERIALS & INTERFACES 2020; 12:1270-1279. [PMID: 31822058 DOI: 10.1021/acsami.9b15928] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
In recent years, it is urgent and challenging to fabricate highly sensitive and selective gas sensors for breath analyses. In this work, Sr-doped cubic In2O3/rhombohedral In2O3 homojunction nanowires (NWs) are synthesized by one-step electrospun technology. The Sr doping alters the cubic phase of pure In2O3 into the rhombohedral phase, which is verified by the high-resolution transmittance electron microscopy, X-ray diffraction, and Raman spectroscopy, and is attributable to the low cohesive energy as calculated by the density functional theory (DFT). As a proof-of-concept of fatty liver biomarker sensing, ethanol sensors are fabricated using the electrospun In2O3 NWs. The results show that 8 wt % Sr-doped In2O3 shows the highest ethanol sensing performance with a high response of 21-1 ppm, a high selectivity over other interfering gases such as methanol, acetone, formaldehyde, toluene, xylene, and benzene, a high stability measured in 6 weeks, and also a high resistance to high humidity of 80%. The outstanding ethanol sensing performance is attributable to the enhanced ethanol adsorption by Sr doping as calculated by DFT, the stable rhombohedral phase and the preferred (104) facet exposure, and the formed homojunctions favoring the electron transfer. All these results show the effective structural modification of In2O3 by Sr doping, and also the great potency of the homojunction Sr-doped In2O3 NWs for highly sensitive, selective, and stable breath ethanol sensing.
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Affiliation(s)
- Longfei Song
- College of Physics and Cultivation Base for State Key Laboratory , Qingdao University , Qingdao 266071 , China
- State Key Laboratory of Multiphase Complex Systems , Institute of Process Engineering, Chinese Academy of Sciences , Beijing 100190 , China
| | - Kunpeng Dou
- College of Information Science and Engineering , Ocean University of China , Qingdao 266100 , China
| | - Rongrong Wang
- Department of Pharmacy , The Affiliated Hospital of Qingdao University , Qingdao 266003 , China
| | - Ping Leng
- Department of Pharmacy , The Affiliated Hospital of Qingdao University , Qingdao 266003 , China
| | - Linqu Luo
- College of Physics and Cultivation Base for State Key Laboratory , Qingdao University , Qingdao 266071 , China
| | - Yan Xi
- College of Physics and Cultivation Base for State Key Laboratory , Qingdao University , Qingdao 266071 , China
| | - Chao-Cheng Kaun
- Research Center for Applied Sciences , Academia Sinica , Taipei 11529 , Taiwan
| | - Ning Han
- State Key Laboratory of Multiphase Complex Systems , Institute of Process Engineering, Chinese Academy of Sciences , Beijing 100190 , China
| | - Fengyun Wang
- College of Physics and Cultivation Base for State Key Laboratory , Qingdao University , Qingdao 266071 , China
| | - Yunfa Chen
- State Key Laboratory of Multiphase Complex Systems , Institute of Process Engineering, Chinese Academy of Sciences , Beijing 100190 , China
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22
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Kirmani AR, Roe EF, Stafford CM, Richter LJ. Role of the electronically-active amorphous state in low-temperature processed In 2O 3 thin-film transistors. MATERIALS ADVANCES 2020; 1:10.1039/d0ma00072h. [PMID: 38711924 PMCID: PMC11070975 DOI: 10.1039/d0ma00072h] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/08/2024]
Abstract
Metal oxide (MO) thin-film transistors (TFTs) are expected to enable low-cost flexible and printed electronics, given their excellent charge transport, low processing temperatures and solution processability. However, achieving adequate mobility when processed scalably at low temperatures compatible with plastic electronics is a challenge. Here, we explore process-structure-transport relationships in blade-coated indium oxide (In2O3) TFTs via both sol-gel and combustion chemistries. We find that the sol-gel chemistry enables n-type TFTs when annealed at 200 °C to 225 °C with noticeable electron mobility ((3.4 ± 1.3) cm2V-1s-1) yet minimal In2O3 crystallinity and surprisingly low levels of the metal-oxygen-metal (M-O-M) lattice content (≈46 %). Increased annealing temperatures result in the appearance of nanocrystalline domains and an increase in M-O-M content to ≈70 %, without any further increase in mobility. An actetylacetone combustion-assisted ink lowers the external thermal budget required for In2O3 crystallization but bypasses the electronically-active amorphous state and underperforms the sol-gel ink at low temperatures. Grain boundary formation and nanocrystalline inclusions in these films due to rapid combustion-assisted crystallization are suggested to be the likely origin behind the significantly compromised charge transport at low-temperatures. Overall, this study emphasizes the need to understand the complex interplay between local order (nanocrystallinity) and connectivity (grain boundary, amorphous phases) when optimizing low-temperature processed MO thin films.
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Affiliation(s)
- Ahmad R Kirmani
- Materials Science and Engineering Division, National Institute of Standards and Technology (NIST), Gaithersburg, MD, 20899 USA
| | - Emily F Roe
- Materials Science and Engineering Division, National Institute of Standards and Technology (NIST), Gaithersburg, MD, 20899 USA
| | - Christopher M Stafford
- Materials Science and Engineering Division, National Institute of Standards and Technology (NIST), Gaithersburg, MD, 20899 USA
| | - Lee J Richter
- Materials Science and Engineering Division, National Institute of Standards and Technology (NIST), Gaithersburg, MD, 20899 USA
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23
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Tailoring IGZO Composition for Enhanced Fully Solution-Based Thin Film Transistors. NANOMATERIALS 2019; 9:nano9091273. [PMID: 31500167 PMCID: PMC6781023 DOI: 10.3390/nano9091273] [Citation(s) in RCA: 27] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/04/2019] [Revised: 08/31/2019] [Accepted: 09/03/2019] [Indexed: 01/01/2023]
Abstract
Solution-processed metal oxides have been investigated as an alternative to vacuum-based oxides to implement low-cost, high-performance electronic devices on flexible transparent substrates. However, their electrical properties need to be enhanced to apply at industrial scale. Amorphous indium-gallium-zinc oxide (a-IGZO) is the most-used transparent semiconductor metal oxide as an active channel layer in thin-film transistors (TFTs), due to its superior electrical properties. The present work evaluates the influence of composition, thickness and ageing on the electrical properties of solution a-IGZO TFTs, using solution combustion synthesis method, with urea as fuel. After optimizing the semiconductor properties, low-voltage TFTs were obtained by implementing a back-surface passivated 3-layer In:Ga:Zn 3:1:1 with a solution-processed high-к dielectric; AlOx. The devices show saturation mobility of 3.2 cm2 V−1 s−1, IOn/IOff of 106, SS of 73 mV dec−1 and VOn of 0.18 V, thus demonstrating promising features for low-cost circuit applications.
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24
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Zhu Z, Zhang J, Wang Y, Ning H, Guo D, Cai W, Zhou S, Liang Z, Yao R, Peng J. Polymer-Doped Ink System for Threshold Voltage Modulation in Printed Metal Oxide Thin Film Transistors. J Phys Chem Lett 2019; 10:3415-3419. [PMID: 31181931 DOI: 10.1021/acs.jpclett.9b01206] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
A polymer-doped ink system was applied to a printed InO x thin film transistor (TFT), and enhancement mode devices were obtained with an appropriate polymer doping amount. As the polymer doping concentration (PDC) increases, the threshold voltage of thin film transistor shifts positively, while the mobility and subthreshold slope show only an insignificant degradation. The microanalysis shows that the polymer doping can generate traps and defects in the oxide lattice, thus shifting the threshold voltage positively and degrading the mobility and subthreshold slope. Meanwhile, the doping can also facilitate the formation of an oxide lattice in the local region, which counterbalances the effect of doping on the mobility and subthreshold slope. The InO x, the TFT shows good electrical performance at an optimal PDC of 0.3 wt %, with a mobility of 4.2 cm2 V-1 s-1, a threshold voltage of 0.7 V, an on/off ratio of 106, and a subthreshold slope of 0.30 V/dec.
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Affiliation(s)
- Zhennan Zhu
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices , South China University of Technology , Guangzhou 510640 , China
| | - Jianhua Zhang
- Key Laboratory of Advanced Display and System Applications of Ministry of Education , Shanghai University , Shanghai 200072 , China
| | - Yiping Wang
- State Key Laboratory of Mechanics and Control of Mechanical Structures , Nanjing University of Aeronautics and Astronautics , Nanjing 210016 , China
| | - Honglong Ning
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices , South China University of Technology , Guangzhou 510640 , China
| | - Dong Guo
- School of Materials Science and Engineering , Beihang University , Beijing 100191 , China
| | - Wei Cai
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices , South China University of Technology , Guangzhou 510640 , China
| | - Shangxiong Zhou
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices , South China University of Technology , Guangzhou 510640 , China
| | - Zhihao Liang
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices , South China University of Technology , Guangzhou 510640 , China
| | - Rihui Yao
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices , South China University of Technology , Guangzhou 510640 , China
| | - Junbiao Peng
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices , South China University of Technology , Guangzhou 510640 , China
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25
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Expeditious, scalable solution growth of metal oxide films by combustion blade coating for flexible electronics. Proc Natl Acad Sci U S A 2019; 116:9230-9238. [PMID: 31004056 DOI: 10.1073/pnas.1901492116] [Citation(s) in RCA: 27] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022] Open
Abstract
Metal oxide (MO) semiconductor thin films prepared from solution typically require multiple hours of thermal annealing to achieve optimal lattice densification, efficient charge transport, and stable device operation, presenting a major barrier to roll-to-roll manufacturing. Here, we report a highly efficient, cofuel-assisted scalable combustion blade-coating (CBC) process for MO film growth, which involves introducing both a fluorinated fuel and a preannealing step to remove deleterious organic contaminants and promote complete combustion. Ultrafast reaction and metal-oxygen-metal (M-O-M) lattice condensation then occur within 10-60 s at 200-350 °C for representative MO semiconductor [indium oxide (In2O3), indium-zinc oxide (IZO), indium-gallium-zinc oxide (IGZO)] and dielectric [aluminum oxide (Al2O3)] films. Thus, wafer-scale CBC fabrication of IGZO-Al2O3 thin-film transistors (TFTs) (60-s annealing) with field-effect mobilities as high as ∼25 cm2 V-1 s-1 and negligible threshold voltage deterioration in a demanding 4,000-s bias stress test are realized. Combined with polymer dielectrics, the CBC-derived IGZO TFTs on polyimide substrates exhibit high flexibility when bent to a 3-mm radius, with performance bending stability over 1,000 cycles.
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26
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Chung S, Cho K, Lee T. Recent Progress in Inkjet-Printed Thin-Film Transistors. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2019; 6:1801445. [PMID: 30937255 PMCID: PMC6425446 DOI: 10.1002/advs.201801445] [Citation(s) in RCA: 75] [Impact Index Per Article: 12.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/28/2018] [Revised: 11/25/2018] [Indexed: 05/19/2023]
Abstract
Drop-on-demand inkjet printing is one of the most attractive techniques from a manufacturing perspective due to the possibility of fabrication from a digital layout at ambient conditions, thus leading to great opportunities for the realization of low-cost and flexible thin-film devices. Over the past decades, a variety of inkjet-printed applications including thin-film transistors (TFTs), radio-frequency identification devices, sensors, and displays have been explored. In particular, many research groups have made great efforts to realize high-performance TFTs, for application as potential driving components of ubiquitous wearable electronics. Although there are still challenges to enable the commercialization of printed TFTs beyond laboratory-scale applications, the field of printed TFTs still attracts significant attention, with remarkable developments in soluble materials and printing methodology. Here, recent progress in printing-based TFTs is presented from materials to applications. Significant efforts to improve the electrical performance and device-yield of printed TFTs to match those of counterparts fabricated using conventional deposition or photolithography methods are highlighted. Moreover, emerging low-dimension printable semiconductors, including carbon nanotubes and transition metal dichalcogenides as well as mature semiconductors, and new-concept printed switching devices, are also discussed.
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Affiliation(s)
- Seungjun Chung
- Photo‐Electronic Hybrids Research CenterKorea Institute of Science and TechnologyHwarang‐ro 14‐gil 5Seongbuk‐guSeoul02792South Korea
| | - Kyungjune Cho
- Department of Physics and Astronomy, and Institute of Applied PhysicsSeoul National UniversitySeoul08826South Korea
| | - Takhee Lee
- Department of Physics and Astronomy, and Institute of Applied PhysicsSeoul National UniversitySeoul08826South Korea
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27
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Chen Y, Huang W, Sangwan VK, Wang B, Zeng L, Wang G, Huang Y, Lu Z, Bedzyk MJ, Hersam MC, Marks TJ, Facchetti A. Polymer Doping Enables a Two-Dimensional Electron Gas for High-Performance Homojunction Oxide Thin-Film Transistors. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2019; 31:e1805082. [PMID: 30499146 DOI: 10.1002/adma.201805082] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/04/2018] [Revised: 10/10/2018] [Indexed: 05/04/2023]
Abstract
High-performance solution-processed metal oxide (MO) thin-film transistors (TFTs) are realized by fabricating a homojunction of indium oxide (In2 O3 ) and polyethylenimine (PEI)-doped In2 O3 (In2 O3 :x% PEI, x = 0.5-4.0 wt%) as the channel layer. A two-dimensional electron gas (2DEG) is thereby achieved by creating a band offset between the In2 O3 and PEI-In2 O3 via work function tuning of the In2 O3 :x% PEI, from 4.00 to 3.62 eV as the PEI content is increased from 0.0 (pristine In2 O3 ) to 4.0 wt%, respectively. The resulting devices achieve electron mobilities greater than 10 cm2 V-1 s-1 on a 300 nm SiO2 gate dielectric. Importantly, these metrics exceed those of the devices composed of the pristine In2 O3 materials, which achieve a maximum mobility of ≈4 cm2 V-1 s-1 . Furthermore, a mobility as high as 30 cm2 V-1 s-1 is achieved on a high-k ZrO2 dielectric in the homojunction devices. This is the first demonstration of 2DEG-based homojunction oxide TFTs via band offset achieved by simple polymer doping of the same MO material.
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Affiliation(s)
- Yao Chen
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
- Key Laboratory of Green Chemistry and Technology (Ministry of Education), College of Chemistry, Sichuan University, Chengdu, 610064, P. R. China
| | - Wei Huang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
| | - Vinod K Sangwan
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA
| | - Binghao Wang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
| | - Li Zeng
- Applied Physics Program and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA
| | - Gang Wang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
| | - Yan Huang
- Key Laboratory of Green Chemistry and Technology (Ministry of Education), College of Chemistry, Sichuan University, Chengdu, 610064, P. R. China
| | - Zhiyun Lu
- Key Laboratory of Green Chemistry and Technology (Ministry of Education), College of Chemistry, Sichuan University, Chengdu, 610064, P. R. China
| | - Michael J Bedzyk
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA
- Applied Physics Program and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA
| | - Mark C Hersam
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA
| | - Tobin J Marks
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
- Department of Materials Science and Engineering and the Argonne Northwestern Solar Energy Research Center (ANSER), Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
| | - Antonio Facchetti
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
- Flexterra Inc., 8025 Lamon Avenue, Skokie, IL, 60077, USA
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28
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Sanctis S, Hoffmann RC, Koslowski N, Foro S, Bruns M, Schneider JJ. Aqueous Solution Processing of Combustible Precursor Compounds into Amorphous Indium Gallium Zinc Oxide (IGZO) Semiconductors for Thin Film Transistor Applications. Chem Asian J 2018; 13:3912-3919. [PMID: 30426698 DOI: 10.1002/asia.201801371] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/12/2018] [Revised: 10/07/2018] [Indexed: 11/08/2022]
Abstract
Combustion synthesis of semiconducting amorphous indium gallium zinc oxide IGZO (In:Ga:Zn, 7:1:1.5) thin films was carried out using urea nitrate precursor compounds of indium(III), gallium(III) and zinc(II). This approach provides further understanding towards the oxide formation process under a moderate temperature regime by employment of well-defined coordination compounds. All precursor compounds were fully characterized by spectroscopic techniques as well as by single crystal structure analysis. Their intrinsic thermal decomposition was studied by a combination of differential scanning calorimetry (DSC) and thermogravimetry coupled with mass spectrometry and infrared spectroscopy (TG-MS/IR). For all precursors a multistep decomposition involving a complex redox-reaction pathway under in situ formation of nitrogen containing molecular species was observed. Controlled thermal conversion of a mixture of the indium, gallium and zinc urea nitrate complexes into ternary amorphous IGZO films could thus be achieved. Thin film transistors (TFTs) were fabricated from a defined compositional mixture of the molecular precursors. The TFT devices exhibited decent charge carrier mobilities of 0.4 and 3.1 cm2 /(Vs) after annealing of the deposited films at temperatures as low as 250 and 350 °C, respectively. This approach represents a significant step further towards a low temperature solution processing of semiconducting thin films.
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Affiliation(s)
- Shawn Sanctis
- Department of Chemistry, Eduard-Zintl Institut für Anorganische und Physikalische Chemie, Technische Universität Darmstadt, Alarich-Weiss-Straße 12, 64287, Darmstadt, Germany
| | - Rudolf C Hoffmann
- Department of Chemistry, Eduard-Zintl Institut für Anorganische und Physikalische Chemie, Technische Universität Darmstadt, Alarich-Weiss-Straße 12, 64287, Darmstadt, Germany
| | - Nico Koslowski
- Department of Chemistry, Eduard-Zintl Institut für Anorganische und Physikalische Chemie, Technische Universität Darmstadt, Alarich-Weiss-Straße 12, 64287, Darmstadt, Germany
| | - Sabine Foro
- Department of Material Science, Technische Universität Darmstadt, Alarich-Weiss-Straße 8, 64287, Darmstadt, Germany
| | - Michael Bruns
- Institute for Applied Materials-Karlsruhe Nano Micro Facility, Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, D-76344, Eggenstein-Leopoldshafen, Germany
| | - Jörg J Schneider
- Department of Chemistry, Eduard-Zintl Institut für Anorganische und Physikalische Chemie, Technische Universität Darmstadt, Alarich-Weiss-Straße 12, 64287, Darmstadt, Germany
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29
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Effects of Interfacial Passivation on the Electrical Performance, Stability, and Contact Properties of Solution Process Based ZnO Thin Film Transistors. MATERIALS 2018; 11:ma11091761. [PMID: 30231500 PMCID: PMC6163572 DOI: 10.3390/ma11091761] [Citation(s) in RCA: 17] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/21/2018] [Revised: 09/12/2018] [Accepted: 09/14/2018] [Indexed: 01/01/2023]
Abstract
This paper reports low temperature solution processed ZnO thin film transistors (TFTs), and the effects of interfacial passivation of a 4-chlorobenzoic acid (PCBA) layer on device performance. It was found that the ZnO TFTs with PCBA interfacial modification layers exhibited a higher electron mobility of 4.50 cm² V-1 s-1 compared to the pristine ZnO TFTs with a charge carrier mobility of 2.70 cm² V-1 s-1. Moreover, the ZnO TFTs with interfacial modification layers could significantly improve device shelf-life stability and bias stress stability compared to the pristine ZnO TFTs. Most importantly, interfacial modification layers could also decrease the contact potential barrier between the source/drain electrodes and the ZnO films when using high work-function metals such as Ag and Au. These results indicate that high performance TFTs can be obtained with a low temperature solution process with interfacial modification layers, which strongly implies further potential for their applications.
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30
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Zhang X, Wang B, Huang W, Chen Y, Wang G, Zeng L, Zhu W, Bedzyk MJ, Zhang W, Medvedeva JE, Facchetti A, Marks TJ. Synergistic Boron Doping of Semiconductor and Dielectric Layers for High-Performance Metal Oxide Transistors: Interplay of Experiment and Theory. J Am Chem Soc 2018; 140:12501-12510. [DOI: 10.1021/jacs.8b06395] [Citation(s) in RCA: 34] [Impact Index Per Article: 4.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/30/2022]
Affiliation(s)
- Xinan Zhang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
- School of Physics and Electronics, Key Laboratory of Photovoltaic Materials, Henan University, Kaifeng, 475004, PR China
| | - Binghao Wang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Wei Huang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Yao Chen
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Gang Wang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Li Zeng
- Applied Physics Program, Department of Materials Science and Engineering, and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United States
| | - Weigang Zhu
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Michael J. Bedzyk
- Applied Physics Program, Department of Materials Science and Engineering, and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United States
| | - Weifeng Zhang
- School of Physics and Electronics, Key Laboratory of Photovoltaic Materials, Henan University, Kaifeng, 475004, PR China
| | - Julia E. Medvedeva
- Department of Physics, Missouri University of Science and Technology, Rolla, Missouri 65409, United States
| | - Antonio Facchetti
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Tobin J. Marks
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
- Applied Physics Program, Department of Materials Science and Engineering, and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United States
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31
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Rucavado E, Graužinytė M, Flores-Livas JA, Jeangros Q, Landucci F, Lee Y, Koida T, Goedecker S, Hessler-Wyser A, Ballif C, Morales-Masis M. New Route for "Cold-Passivation" of Defects in Tin-Based Oxides. THE JOURNAL OF PHYSICAL CHEMISTRY. C, NANOMATERIALS AND INTERFACES 2018; 122:17612-17620. [PMID: 30258525 PMCID: PMC6150684 DOI: 10.1021/acs.jpcc.8b02302] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/08/2018] [Revised: 07/17/2018] [Indexed: 06/08/2023]
Abstract
Transparent conductive oxides (TCOs) are essential in technologies coupling light and electricity. For Sn-based TCOs, oxygen deficiencies and undercoordinated Sn atoms result in an extended density of states below the conduction band edge. Although shallow states provide free carriers necessary for electrical conductivity, deeper states inside the band gap are detrimental to transparency. In zinc tin oxide (ZTO), the overall optoelectronic properties can be improved by defect passivation via annealing at high temperatures. Yet, the high thermal budget associated with such treatment is incompatible with many applications. Here, we demonstrate an alternative, low-temperature passivation method, which relies on cosputtering Sn-based TCOs with silicon dioxide (SiO2). Using amorphous ZTO and amorphous/polycrystalline tin dioxide (SnO2) as representative cases, we demonstrate through optoelectronic characterization and density functional theory simulations that the SiO2 contribution is twofold. First, oxygen from SiO2 passivates the oxygen deficiencies that form deep defects in SnO2 and ZTO. Second, the ionization energy of the remaining deep defect centers is lowered by the presence of silicon atoms. Remarkably, we find that these ionized states do not contribute to sub-gap absorptance. This simple passivation scheme significantly improves the optical properties without affecting the electrical conductivity, hence overcoming the known transparency-conductivity trade-off in Sn-based TCOs.
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Affiliation(s)
- Esteban Rucavado
- Institute
of Microengineering (IMT), Photovoltaics and Thin-Film Electronics
Laboratory, École Polytechnique Fédérale
de Lausanne (EPFL), Neuchâtel CH-2002, Switzerland
| | - Miglė Graužinytė
- Department
of Physics, Universität Basel, Klingelbergstr. 82, 4056 Basel, Switzerland
| | - José A. Flores-Livas
- Department
of Physics, Universität Basel, Klingelbergstr. 82, 4056 Basel, Switzerland
| | - Quentin Jeangros
- Institute
of Microengineering (IMT), Photovoltaics and Thin-Film Electronics
Laboratory, École Polytechnique Fédérale
de Lausanne (EPFL), Neuchâtel CH-2002, Switzerland
- Department
of Physics, Universität Basel, Klingelbergstr. 82, 4056 Basel, Switzerland
| | - Federica Landucci
- Institute
of Microengineering (IMT), Photovoltaics and Thin-Film Electronics
Laboratory, École Polytechnique Fédérale
de Lausanne (EPFL), Neuchâtel CH-2002, Switzerland
- Interdisciplinary
Centre for Electron Microscopy, École
Polytechnique Fédérale de Lausanne (EPFL), Lausanne CH-1015, Switzerland
| | - Yeonbae Lee
- Department
of Materials Science and Engineering, University
of California Berkeley, Berkeley, California 94720, United States
| | - Takashi Koida
- Research
Center for Photovoltaics, National Institute
of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
| | - Stefan Goedecker
- Department
of Physics, Universität Basel, Klingelbergstr. 82, 4056 Basel, Switzerland
| | - Aïcha Hessler-Wyser
- Institute
of Microengineering (IMT), Photovoltaics and Thin-Film Electronics
Laboratory, École Polytechnique Fédérale
de Lausanne (EPFL), Neuchâtel CH-2002, Switzerland
| | - Christophe Ballif
- Institute
of Microengineering (IMT), Photovoltaics and Thin-Film Electronics
Laboratory, École Polytechnique Fédérale
de Lausanne (EPFL), Neuchâtel CH-2002, Switzerland
| | - Monica Morales-Masis
- Institute
of Microengineering (IMT), Photovoltaics and Thin-Film Electronics
Laboratory, École Polytechnique Fédérale
de Lausanne (EPFL), Neuchâtel CH-2002, Switzerland
- MESA+ Institute
for Nanotechnology, University of Twente, 7500 AE Enschede, The Netherlands
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32
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Xu W, Li H, Xu JB, Wang L. Recent Advances of Solution-Processed Metal Oxide Thin-Film Transistors. ACS APPLIED MATERIALS & INTERFACES 2018; 10:25878-25901. [PMID: 29509395 DOI: 10.1021/acsami.7b16010] [Citation(s) in RCA: 50] [Impact Index Per Article: 7.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Solution-processed metal oxide thin-film transistors (TFTs) are considered as one of the most promising transistor technologies for future large-area flexible electronics. This work surveys the recent advances in solution-processed metal oxide TFTs, including n-type oxide semiconductors, oxide dielectrics, and p-type oxide semiconductors. We first deliver a review on the history and present status of metal oxide TFTs. Then, we present the recent progress in solution-processed n-type oxide semiconductors, with a special focus on low-temperature and large-area solution-based approaches as well as emerging nondisplay applications. Next, we give a detailed analysis of the state-of-the-art solution-processed oxide dielectrics for low-power electronics. We further discuss the recent advances in solution-based p-type oxide semiconductors, which will enable the highly desirable future low-cost large-area complementary circuits. Finally, we draw conclusions and outline the perspectives over the research field.
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Affiliation(s)
- Wangying Xu
- College of Materials Science and Engineering, Guangdong Research Center for Interfacial Engineering of Functional Materials, Shenzhen Key Laboratory of Special Functional Materials , Shenzhen University , Shenzhen 518060 , China
| | - Hao Li
- Department of Electronic Engineering, Materials Science and Technology Research Center , The Chinese University of Hong Kong , Shatin New Town , Hong Kong SAR 999077 , China
| | - Jian-Bin Xu
- Department of Electronic Engineering, Materials Science and Technology Research Center , The Chinese University of Hong Kong , Shatin New Town , Hong Kong SAR 999077 , China
| | - Lei Wang
- Department of Electronic Engineering, Materials Science and Technology Research Center , The Chinese University of Hong Kong , Shatin New Town , Hong Kong SAR 999077 , China
- Department of Applied Physics, School of Physical and Mathematical Sciences , Nanjing Tech University , Nanjing 211816 , China
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33
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Garlapati SK, Divya M, Breitung B, Kruk R, Hahn H, Dasgupta S. Printed Electronics Based on Inorganic Semiconductors: From Processes and Materials to Devices. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2018; 30:e1707600. [PMID: 29952112 DOI: 10.1002/adma.201707600] [Citation(s) in RCA: 28] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/29/2017] [Revised: 03/20/2018] [Indexed: 06/08/2023]
Abstract
Following the ever-expanding technological demands, printed electronics has shown palpable potential to create new and commercially viable technologies that will benefit from its unique characteristics, such as, large-area and wide range of substrate compatibility, conformability and low-cost. Through the last few decades, printed/solution-processed field-effect transistors (FETs) and circuits have witnessed immense research efforts, technological growth and increased commercial interests. Although printing of functional inks comprising organic semiconductors has already been initiated in early 1990s, gradually the attention, at least partially, has been shifted to various forms of inorganic semiconductors, starting from metal chalcogenides, oxides, carbon nanotubes and very recently to graphene and other 2D semiconductors. In this review, the entire domain of printable inorganic semiconductors is considered. In fact, thanks to the continuous development of materials/functional inks and novel design/printing strategies, the inorganic printed semiconductor-based circuits today have reached an operation frequency up to several hundreds of kilohertz with only a few nanosecond time delays at the individual FET/inverter levels; in this regard, often circuits based on hybrid material systems have been found to be advantageous. At the end, a comparison of relative successes of various printable inorganic semiconductor materials, the remaining challenges and the available future opportunities are summarized.
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Affiliation(s)
- Suresh Kumar Garlapati
- Institute of Nanotechnology, Karlsruhe Institute of Technology (KIT), D-76344, Eggenstein-Leopoldshafen, Germany
| | - Mitta Divya
- Department of Materials Engineering, Indian Institute of Science, Bangalore, 560012, India
| | - Ben Breitung
- Institute of Nanotechnology, Karlsruhe Institute of Technology (KIT), D-76344, Eggenstein-Leopoldshafen, Germany
| | - Robert Kruk
- Institute of Nanotechnology, Karlsruhe Institute of Technology (KIT), D-76344, Eggenstein-Leopoldshafen, Germany
| | - Horst Hahn
- Institute of Nanotechnology, Karlsruhe Institute of Technology (KIT), D-76344, Eggenstein-Leopoldshafen, Germany
- KIT-TUD Joint Research Laboratory Nanomaterials, Technische Universität Darmstadt (TUD), Institute of Materials Science, Jovanka-Bontschits-Str. 2, ,64287, Darmstadt, Germany
| | - Subho Dasgupta
- Institute of Nanotechnology, Karlsruhe Institute of Technology (KIT), D-76344, Eggenstein-Leopoldshafen, Germany
- Department of Materials Engineering, Indian Institute of Science, Bangalore, 560012, India
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34
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Wang B, Huang W, Chi L, Al-Hashimi M, Marks TJ, Facchetti A. High- k Gate Dielectrics for Emerging Flexible and Stretchable Electronics. Chem Rev 2018; 118:5690-5754. [PMID: 29785854 DOI: 10.1021/acs.chemrev.8b00045] [Citation(s) in RCA: 178] [Impact Index Per Article: 25.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/04/2023]
Abstract
Recent advances in flexible and stretchable electronics (FSE), a technology diverging from the conventional rigid silicon technology, have stimulated fundamental scientific and technological research efforts. FSE aims at enabling disruptive applications such as flexible displays, wearable sensors, printed RFID tags on packaging, electronics on skin/organs, and Internet-of-things as well as possibly reducing the cost of electronic device fabrication. Thus, the key materials components of electronics, the semiconductor, the dielectric, and the conductor as well as the passive (substrate, planarization, passivation, and encapsulation layers) must exhibit electrical performance and mechanical properties compatible with FSE components and products. In this review, we summarize and analyze recent advances in materials concepts as well as in thin-film fabrication techniques for high- k (or high-capacitance) gate dielectrics when integrated with FSE-compatible semiconductors such as organics, metal oxides, quantum dot arrays, carbon nanotubes, graphene, and other 2D semiconductors. Since thin-film transistors (TFTs) are the key enablers of FSE devices, we discuss TFT structures and operation mechanisms after a discussion on the needs and general requirements of gate dielectrics. Also, the advantages of high- k dielectrics over low- k ones in TFT applications were elaborated. Next, after presenting the design and properties of high- k polymers and inorganic, electrolyte, and hybrid dielectric families, we focus on the most important fabrication methodologies for their deposition as TFT gate dielectric thin films. Furthermore, we provide a detailed summary of recent progress in performance of FSE TFTs based on these high- k dielectrics, focusing primarily on emerging semiconductor types. Finally, we conclude with an outlook and challenges section.
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Affiliation(s)
- Binghao Wang
- Department of Chemistry and the Materials Research Center , Northwestern University , 2145 Sheridan Road , Evanston , Illinois 60208 , United States.,Institute of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices , Soochow University , 199 Ren'ai Road , Suzhou 215123 , China
| | - Wei Huang
- Department of Chemistry and the Materials Research Center , Northwestern University , 2145 Sheridan Road , Evanston , Illinois 60208 , United States
| | - Lifeng Chi
- Institute of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices , Soochow University , 199 Ren'ai Road , Suzhou 215123 , China
| | - Mohammed Al-Hashimi
- Department of Chemistry , Texas A&M University at Qatar , PO Box 23874, Doha , Qatar
| | - Tobin J Marks
- Department of Chemistry and the Materials Research Center , Northwestern University , 2145 Sheridan Road , Evanston , Illinois 60208 , United States
| | - Antonio Facchetti
- Department of Chemistry and the Materials Research Center , Northwestern University , 2145 Sheridan Road , Evanston , Illinois 60208 , United States.,Flexterra Corporation , 8025 Lamon Avenue , Skokie , Illinois 60077 , United States
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35
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Wang CH, Incorvia JAC, McClellan CJ, Yu AC, Mleczko MJ, Pop E, Wong HSP. Unipolar n-Type Black Phosphorus Transistors with Low Work Function Contacts. NANO LETTERS 2018; 18:2822-2827. [PMID: 29620900 DOI: 10.1021/acs.nanolett.7b05192] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Black phosphorus (BP) is a promising two-dimensional (2D) material for nanoscale transistors, due to its expected higher mobility than other 2D semiconductors. While most studies have reported ambipolar BP with a stronger p-type transport, it is important to fabricate both unipolar p- and n-type transistors for low-power digital circuits. Here, we report unipolar n-type BP transistors with low work function Sc and Er contacts, demonstrating a record high n-type current of 200 μA/μm in 6.5 nm thick BP. Intriguingly, the electrical transport of the as-fabricated, capped devices changes from ambipolar to n-type unipolar behavior after a month at room temperature. Transmission electron microscopy analysis of the contact cross-section reveals an intermixing layer consisting of partly oxidized metal at the interface. This intermixing layer results in a low n-type Schottky barrier between Sc and BP, leading to the unipolar behavior of the BP transistor. This unipolar transport with a suppressed p-type current is favorable for digital logic circuits to ensure a lower off-power consumption.
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Affiliation(s)
- Ching-Hua Wang
- Department of Electrical Engineering , Stanford University , Stanford , California 94305 , United States
| | - Jean Anne C Incorvia
- Department of Electrical Engineering , Stanford University , Stanford , California 94305 , United States
| | - Connor J McClellan
- Department of Electrical Engineering , Stanford University , Stanford , California 94305 , United States
| | - Andrew C Yu
- Department of Electrical Engineering , Stanford University , Stanford , California 94305 , United States
| | - Michal J Mleczko
- Department of Electrical Engineering , Stanford University , Stanford , California 94305 , United States
| | - Eric Pop
- Department of Electrical Engineering , Stanford University , Stanford , California 94305 , United States
- Materials Science and Engineering , Stanford University , Stanford , California 94305 , United States
- Precourt Institute for Energy , Stanford University , Stanford , California 94305 , United States
| | - H-S Philip Wong
- Department of Electrical Engineering , Stanford University , Stanford , California 94305 , United States
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36
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Papadas IT, Ioakeimidis A, Armatas GS, Choulis SA. Low-Temperature Combustion Synthesis of a Spinel NiCo 2O 4 Hole Transport Layer for Perovskite Photovoltaics. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2018; 5:1701029. [PMID: 29876223 PMCID: PMC5979620 DOI: 10.1002/advs.201701029] [Citation(s) in RCA: 25] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/14/2017] [Revised: 01/22/2018] [Indexed: 05/09/2023]
Abstract
The synthesis and characterization of low-temperature solution-processable monodispersed nickel cobaltite (NiCo2O4) nanoparticles (NPs) via a combustion synthesis is reported using tartaric acid as fuel and the performance as a hole transport layer (HTL) for perovskite solar cells (PVSCs) is demonstrated. NiCo2O4 is a p-type semiconductor consisting of environmentally friendly, abundant elements and higher conductivity compared to NiO. It is shown that the combustion synthesis of spinel NiCo2O4 using tartaric acid as fuel can be used to control the NPs size and provide smooth, compact, and homogeneous functional HTLs processed by blade coating. Study of PVSCs with different NiCo2O4 thickness as HTL reveals a difference on hole extraction efficiency, and for 15 nm, optimized thickness enhanced hole carrier collection is achieved. As a result, p-i-n structure of PVSCs with 15 nm NiCo2O4 HTLs shows reliable performance and power conversion efficiency values in the range of 15.5% with negligible hysteresis.
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Affiliation(s)
- Ioannis T. Papadas
- Molecular Electronics and Photonics Research UnitDepartment of Mechanical Engineering and Materials Science and EngineeringCyprus University of TechnologyLimassol3041Cyprus
| | - Apostolos Ioakeimidis
- Molecular Electronics and Photonics Research UnitDepartment of Mechanical Engineering and Materials Science and EngineeringCyprus University of TechnologyLimassol3041Cyprus
| | - Gerasimos S. Armatas
- Department of Materials Science and TechnologyUniversity of CreteHeraklion71003Greece
| | - Stelios A. Choulis
- Molecular Electronics and Photonics Research UnitDepartment of Mechanical Engineering and Materials Science and EngineeringCyprus University of TechnologyLimassol3041Cyprus
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37
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Huang W, Guo P, Zeng L, Li R, Wang B, Wang G, Zhang X, Chang RPH, Yu J, Bedzyk MJ, Marks TJ, Facchetti A. Metal Composition and Polyethylenimine Doping Capacity Effects on Semiconducting Metal Oxide–Polymer Blend Charge Transport. J Am Chem Soc 2018; 140:5457-5473. [DOI: 10.1021/jacs.8b01252] [Citation(s) in RCA: 31] [Impact Index Per Article: 4.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/31/2022]
Affiliation(s)
- Wei Huang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
- State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, China
| | - Peijun Guo
- Department of Materials Science and Engineering and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United States
| | - Li Zeng
- Applied Physics Program and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United States
| | - Ran Li
- Department of Materials Science and Engineering and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United States
| | - Binghao Wang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Gang Wang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Xinan Zhang
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Robert P. H. Chang
- Department of Materials Science and Engineering and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United States
| | - Junsheng Yu
- State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, China
| | - Michael J. Bedzyk
- Department of Materials Science and Engineering and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United States
- Applied Physics Program and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United States
| | - Tobin J. Marks
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Antonio Facchetti
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
- Flexterra Inc., 8025 Lamon Avenue, Skokie, Illinois 60077, United States
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38
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Sanctis S, Koslowski N, Hoffmann R, Guhl C, Erdem E, Weber S, Schneider JJ. Toward an Understanding of Thin-Film Transistor Performance in Solution-Processed Amorphous Zinc Tin Oxide (ZTO) Thin Films. ACS APPLIED MATERIALS & INTERFACES 2017; 9:21328-21337. [PMID: 28573850 DOI: 10.1021/acsami.7b06203] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Amorphous zinc tin oxide (ZTO) thin films are accessible by a molecular precursor approach using mononuclear zinc(II) and tin(II) compounds with methoxyiminopropionic acid ligands. Solution processing of two precursor solutions containing a mixture of zinc and tin(II)-methoxyiminopropinato complexes results in the formation of smooth homogeneous thin films, which upon calcination are converted into the desired semiconducting amorphous ZTO thin films. ZTO films integrated within a field-effect transistor (FET) device exhibit an active semiconducting behavior in the temperature range between 250 and 400 °C, giving an increased performance, with mobility values between μ = 0.03 and 5.5 cm2/V s, with on/off ratios increasing from 105 to 108 when going from 250 to 400 °C. Herein, our main emphasis, however, was on an improved understanding of the material transformation pathway from weak to high performance of the semiconductor in a solution-processed FET as a function of the processing temperature. We have correlated this with the chemical composition and defects states within the microstructure of the obtained ZTO thin film via photoelectron spectroscopy (X-ray photoelectron spectroscopy, ultraviolet photoelectron spectroscopy), Auger electron spectroscopy, electron paramagnetic resonance spectroscopy, atomic force microscopy, and photoluminescence investigations. The critical factor observed for the improved performance within this ZTO material could be attributed to a higher tin concentration, wherein the contributions of point defects arising from the tin oxide within the final amorphous ZTO material play the dominant role in governing the transistor performance.
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Affiliation(s)
- Shawn Sanctis
- Fachbereich Chemie, Eduard-Zintl-Institut, Fachgebiet Anorganische Chemie, Technische Universität Darmstadt , Alarich-Weiss-Straße 12, 64287 Darmstadt, Germany
| | - Nico Koslowski
- Fachbereich Chemie, Eduard-Zintl-Institut, Fachgebiet Anorganische Chemie, Technische Universität Darmstadt , Alarich-Weiss-Straße 12, 64287 Darmstadt, Germany
| | - Rudolf Hoffmann
- Fachbereich Chemie, Eduard-Zintl-Institut, Fachgebiet Anorganische Chemie, Technische Universität Darmstadt , Alarich-Weiss-Straße 12, 64287 Darmstadt, Germany
| | - Conrad Guhl
- Fachgebiet Surface Science, Technische Universität Darmstadt , Jovanka-Bontschits-Straße 2, 64287 Darmstadt, Germany
| | - Emre Erdem
- Institute of Physical Chemistry, Universität Freiburg , Albert Straße 21, 79104 Freiburg, Germany
| | - Stefan Weber
- Institute of Physical Chemistry, Universität Freiburg , Albert Straße 21, 79104 Freiburg, Germany
| | - Jörg J Schneider
- Fachbereich Chemie, Eduard-Zintl-Institut, Fachgebiet Anorganische Chemie, Technische Universität Darmstadt , Alarich-Weiss-Straße 12, 64287 Darmstadt, Germany
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39
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Pujar P, Gandla S, Singh M, Gupta B, Tarafder K, Gupta D, Noh YY, Mandal S. Development of low temperature stoichiometric solution combustion derived transparent conductive ternary zinc tin co-doped indium oxide electrodes. RSC Adv 2017. [DOI: 10.1039/c7ra09189c] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/15/2023] Open
Abstract
Here, the development of transparent conductive zinc tin co-doped indium oxide (IZTO: In1.4Sn0.3Zn0.3O3) ternary electrodes is addressed through low temperature solution combustion processing.
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Affiliation(s)
- Pavan Pujar
- Department of Metallurgical and Materials Engineering
- National Institute of Technology Karnataka (NITK)
- Surathkal-575025
- India
- Plastic Electronics and Energy Laboratory
| | - Srinivas Gandla
- Plastic Electronics and Energy Laboratory
- Department of Metallurgical Engineering and Materials Science
- Indian Institute of Technology Bombay
- India
| | - Mukesh Singh
- Plastic Electronics and Energy Laboratory
- Department of Metallurgical Engineering and Materials Science
- Indian Institute of Technology Bombay
- India
| | - Bikesh Gupta
- Department of Metallurgical and Materials Engineering
- National Institute of Technology Karnataka (NITK)
- Surathkal-575025
- India
| | - Kartick Tarafder
- Department of Physics
- National Institute of Technology Karnataka (NITK)
- Surathkal-575025
- India
| | - Dipti Gupta
- Plastic Electronics and Energy Laboratory
- Department of Metallurgical Engineering and Materials Science
- Indian Institute of Technology Bombay
- India
| | - Yong-Young Noh
- Department of Energy & Materials Engineering
- Dongguk University
- Seoul
- Republic of Korea
| | - Saumen Mandal
- Department of Metallurgical and Materials Engineering
- National Institute of Technology Karnataka (NITK)
- Surathkal-575025
- India
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40
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Gao P, Lan L, Lin Z, Sun S, Li Y, Song W, Song E, Zhang P, Peng J. Low-temperature, high-mobility, solution-processed metal oxide semiconductors fabricated with oxygen radical assisted perchlorate aqueous precursors. Chem Commun (Camb) 2017; 53:6436-6439. [DOI: 10.1039/c7cc01100h] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/22/2023]
Abstract
In this report, a simple and general chemical route for fabricating MO semiconducting films at a relatively low temperature without any fuel additives or special annealing steps was demonstrated.
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Affiliation(s)
- Peixiong Gao
- State Key Laboratory of Luminescent Materials and Devices
- South China University of Technology
- Guangzhou 510640
- China
| | - Linfeng Lan
- State Key Laboratory of Luminescent Materials and Devices
- South China University of Technology
- Guangzhou 510640
- China
| | - Zhenguo Lin
- State Key Laboratory of Luminescent Materials and Devices
- South China University of Technology
- Guangzhou 510640
- China
| | - Sheng Sun
- State Key Laboratory of Luminescent Materials and Devices
- South China University of Technology
- Guangzhou 510640
- China
| | - Yuzhi Li
- State Key Laboratory of Luminescent Materials and Devices
- South China University of Technology
- Guangzhou 510640
- China
| | - Wei Song
- State Key Laboratory of Luminescent Materials and Devices
- South China University of Technology
- Guangzhou 510640
- China
| | - Erlong Song
- State Key Laboratory of Luminescent Materials and Devices
- South China University of Technology
- Guangzhou 510640
- China
| | - Peng Zhang
- State Key Laboratory of Luminescent Materials and Devices
- South China University of Technology
- Guangzhou 510640
- China
| | - Junbiao Peng
- State Key Laboratory of Luminescent Materials and Devices
- South China University of Technology
- Guangzhou 510640
- China
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41
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Son Y, Li J, Peterson RL. In Situ Chemical Modification of Schottky Barrier in Solution-Processed Zinc Tin Oxide Diode. ACS APPLIED MATERIALS & INTERFACES 2016; 8:23801-23809. [PMID: 27559750 DOI: 10.1021/acsami.6b05953] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Here we present a novel in situ chemical modification process to form vertical Schottky diodes using palladium (Pd) rectifying bottom contacts, amorphous zinc tin oxide (Zn-Sn-O) semiconductor made via acetate-based solution process, and molybdenum top ohmic contacts. Using X-ray photoelectron spectroscopy depth profiling, we show that oxygen plasma treatment of Pd creates a PdOx interface layer, which is then reduced back to metallic Pd by in situ reactions during Zn-Sn-O film annealing. The plasma treatment ensures an oxygen-rich environment in the semiconductor near the Schottky barrier, reducing the level of oxygen-deficiency-related defects and improving the rectifying contact. Using this process, we achieve diodes with high forward current density exceeding 10(3)A cm(-2) at 1 V, rectification ratios of >10(2), and ideality factors of around 1.9. The measured diode current-voltage characteristics are compared to numerical simulations of thermionic field emission with sub-bandgap states in the semiconductor, which we attribute to spatial variations in metal stoichiometry of amorphous Zn-Sn-O. To the best of our knowledge, this is the first demonstration of vertical Schottky diodes using solution-processed amorphous metal oxide semiconductor. Furthermore, the in situ chemical modification method developed here can be adapted to tune interface properties in many other oxide devices.
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Affiliation(s)
- Youngbae Son
- Department of Electrical Engineering and Computer Science, University of Michigan , Ann Arbor, Michigan 48109-2122, United States
| | - Jiabo Li
- Department of Electrical Engineering and Computer Science, University of Michigan , Ann Arbor, Michigan 48109-2122, United States
| | - Rebecca L Peterson
- Department of Electrical Engineering and Computer Science, University of Michigan , Ann Arbor, Michigan 48109-2122, United States
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42
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Varma A, Mukasyan AS, Rogachev AS, Manukyan KV. Solution Combustion Synthesis of Nanoscale Materials. Chem Rev 2016; 116:14493-14586. [PMID: 27610827 DOI: 10.1021/acs.chemrev.6b00279] [Citation(s) in RCA: 289] [Impact Index Per Article: 32.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Abstract
Solution combustion is an exciting phenomenon, which involves propagation of self-sustained exothermic reactions along an aqueous or sol-gel media. This process allows for the synthesis of a variety of nanoscale materials, including oxides, metals, alloys, and sulfides. This Review focuses on the analysis of new approaches and results in the field of solution combustion synthesis (SCS) obtained during recent years. Thermodynamics and kinetics of reactive solutions used in different chemical routes are considered, and the role of process parameters is discussed, emphasizing the chemical mechanisms that are responsible for rapid self-sustained combustion reactions. The basic principles for controlling the composition, structure, and nanostructure of SCS products, and routes to regulate the size and morphology of the nanoscale materials are also reviewed. Recently developed systems that lead to the formation of novel materials and unique structures (e.g., thin films and two-dimensional crystals) with unusual properties are outlined. To demonstrate the versatility of the approach, several application categories of SCS produced materials, such as for energy conversion and storage, optical devices, catalysts, and various important nanoceramics (e.g., bio-, electro-, magnetic), are discussed.
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Affiliation(s)
- Arvind Varma
- School of Chemical Engineering, Purdue University , West Lafayette, Indiana 47907, United States
| | | | - Alexander S Rogachev
- Institute of Structural Macrokinetics and Materials Science, RAS , Chernogolovka 142432, Russia.,National University of Science and Technology, MISiS , Moscow 119049, Russia
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43
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Secor EB, Smith J, Marks TJ, Hersam MC. High-Performance Inkjet-Printed Indium-Gallium-Zinc-Oxide Transistors Enabled by Embedded, Chemically Stable Graphene Electrodes. ACS APPLIED MATERIALS & INTERFACES 2016; 8:17428-17434. [PMID: 27327555 DOI: 10.1021/acsami.6b02730] [Citation(s) in RCA: 19] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Recent developments in solution-processed amorphous oxide semiconductors have established indium-gallium-zinc-oxide (IGZO) as a promising candidate for printed electronics. A key challenge for this vision is the integration of IGZO thin-film transistor (TFT) channels with compatible source/drain electrodes using low-temperature, solution-phase patterning methods. Here we demonstrate the suitability of inkjet-printed graphene electrodes for this purpose. In contrast to common inkjet-printed silver-based conductive inks, graphene provides a chemically stable electrode-channel interface. Furthermore, by embedding the graphene electrode between two consecutive IGZO printing passes, high-performance IGZO TFTs are achieved with an electron mobility of ∼6 cm(2)/V·s and current on/off ratio of ∼10(5). The resulting printed devices exhibit robust stability to aging in ambient as well as excellent resilience to thermal stress, thereby offering a promising platform for future printed electronics applications.
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Affiliation(s)
- Ethan B Secor
- Department of Materials Science and Engineering and the Materials Research Center, Northwestern University , Evanston, Illinois 60208, United States
| | - Jeremy Smith
- Department of Chemistry and the Materials Research Center, Northwestern University , Evanston, Illinois 60208, United States
| | - Tobin J Marks
- Department of Materials Science and Engineering and the Materials Research Center, Northwestern University , Evanston, Illinois 60208, United States
- Department of Chemistry and the Materials Research Center, Northwestern University , Evanston, Illinois 60208, United States
| | - Mark C Hersam
- Department of Materials Science and Engineering and the Materials Research Center, Northwestern University , Evanston, Illinois 60208, United States
- Department of Chemistry and the Materials Research Center, Northwestern University , Evanston, Illinois 60208, United States
- Department of Electrical Engineering and Computer Science, Northwestern University , Evanston, Illinois 60208, United States
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44
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Banger K, Warwick C, Lang J, Broch K, Halpert JE, Socratous J, Brown A, Leedham T, Sirringhaus H. Identification of dipole disorder in low temperature solution processed oxides: its utility and suppression for transparent high performance solution-processed hybrid electronics. Chem Sci 2016; 7:6337-6346. [PMID: 28567246 PMCID: PMC5450438 DOI: 10.1039/c6sc01962e] [Citation(s) in RCA: 35] [Impact Index Per Article: 3.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/04/2016] [Accepted: 07/01/2016] [Indexed: 01/05/2023] Open
Abstract
Identification of long-lived dipole disorder in low-temp solution processed dielectrics, and it's suppression.
The ability to deposit high-quality inorganic semiconductors and dielectrics from solution at low process temperatures (∼200 °C) has become a very important research focus. During the course of our investigation, we identify the presence of an induced dipole present in solid state solution processed inorganic oxide insulator layers processed at reduced temperature (200–350 °C) from either molecular precursors, or well-dispersed metal oxide nanoparticles. Chemical composition analysis coupled with electrical measurements shows that the dielectric instability occurs due to proton migration via the Grotthuss mechanism inducing a long lived dipole disorder. Thus we established conditions for suppressing this effect to afford “ideal” high-k dielectric layer. Using this methodology, solution processed all inorganic thin film transistors (TFTs) with charge carrier mobilities exceeding 6 cm2 V–1 s–1 operating at low voltage (5 V) have been achieved. In addition, we show the broad utility of the perovskite high-k dielectric when processed with state of the art polymer and single crystal organic semiconductors yielding mobilities of approx. 7 cm2 V–1 s–1 at only 4 V. These transparent devices demonstrate excellent electrical device stability and a threshold voltage shift of only 0.41 V over 14 h, which is comparable, or better than sputtered oxide films.
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Affiliation(s)
- Kulbinder Banger
- Optoelectronics Group , Cavendish Laboratory , JJ Thomson Avenue , Cambridge CB3 0HE , UK . ;
| | - Christopher Warwick
- Optoelectronics Group , Cavendish Laboratory , JJ Thomson Avenue , Cambridge CB3 0HE , UK . ;
| | - Jiang Lang
- Optoelectronics Group , Cavendish Laboratory , JJ Thomson Avenue , Cambridge CB3 0HE , UK . ;
| | - Katharina Broch
- Optoelectronics Group , Cavendish Laboratory , JJ Thomson Avenue , Cambridge CB3 0HE , UK . ;
| | - Jonathan E Halpert
- Optoelectronics Group , Cavendish Laboratory , JJ Thomson Avenue , Cambridge CB3 0HE , UK . ;
| | - Josephine Socratous
- Optoelectronics Group , Cavendish Laboratory , JJ Thomson Avenue , Cambridge CB3 0HE , UK . ;
| | - Adam Brown
- Optoelectronics Group , Cavendish Laboratory , JJ Thomson Avenue , Cambridge CB3 0HE , UK . ;
| | | | - Henning Sirringhaus
- Optoelectronics Group , Cavendish Laboratory , JJ Thomson Avenue , Cambridge CB3 0HE , UK . ;
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45
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Wang B, Zeng L, Huang W, Melkonyan FS, Sheets WC, Chi L, Bedzyk MJ, Marks TJ, Facchetti A. Carbohydrate-Assisted Combustion Synthesis To Realize High-Performance Oxide Transistors. J Am Chem Soc 2016; 138:7067-74. [DOI: 10.1021/jacs.6b02309] [Citation(s) in RCA: 53] [Impact Index Per Article: 5.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Binghao Wang
- Department
of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
- Institute of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, Soochow University, 199 Ren’ai Road, Suzhou 215123, China
| | - Li Zeng
- Applied
Physics Program, Materials Science and Engineering Department and
the Materials Research Center, Northwestern University, 2220 Campus
Drive, Evanston, Illinois 60208, United States
| | - Wei Huang
- Department
of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - Ferdinand S. Melkonyan
- Department
of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
| | - William C. Sheets
- Polyera Corporation, 8045 Lamon
Avenue, Skokie, Illinois 60077, United States
| | - Lifeng Chi
- Institute of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, Soochow University, 199 Ren’ai Road, Suzhou 215123, China
| | - Michael J. Bedzyk
- Applied
Physics Program, Materials Science and Engineering Department and
the Materials Research Center, Northwestern University, 2220 Campus
Drive, Evanston, Illinois 60208, United States
| | - Tobin J. Marks
- Department
of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
- Applied
Physics Program, Materials Science and Engineering Department and
the Materials Research Center, Northwestern University, 2220 Campus
Drive, Evanston, Illinois 60208, United States
| | - Antonio Facchetti
- Department
of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United States
- Polyera Corporation, 8045 Lamon
Avenue, Skokie, Illinois 60077, United States
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46
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Yu X, Marks TJ, Facchetti A. Metal oxides for optoelectronic applications. NATURE MATERIALS 2016; 15:383-96. [PMID: 27005918 DOI: 10.1038/nmat4599] [Citation(s) in RCA: 395] [Impact Index Per Article: 43.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/25/2015] [Accepted: 02/15/2016] [Indexed: 05/27/2023]
Abstract
Metal oxides (MOs) are the most abundant materials in the Earth's crust and are ingredients in traditional ceramics. MO semiconductors are strikingly different from conventional inorganic semiconductors such as silicon and III-V compounds with respect to materials design concepts, electronic structure, charge transport mechanisms, defect states, thin-film processing and optoelectronic properties, thereby enabling both conventional and completely new functions. Recently, remarkable advances in MO semiconductors for electronics have been achieved, including the discovery and characterization of new transparent conducting oxides, realization of p-type along with traditional n-type MO semiconductors for transistors, p-n junctions and complementary circuits, formulations for printing MO electronics and, most importantly, commercialization of amorphous oxide semiconductors for flat panel displays. This Review surveys the uniqueness and universality of MOs versus other unconventional electronic materials in terms of materials chemistry and physics, electronic characteristics, thin-film fabrication strategies and selected applications in thin-film transistors, solar cells, diodes and memories.
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Affiliation(s)
- Xinge Yu
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA
- State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Opto-electronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, China
| | - Tobin J Marks
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA
| | - Antonio Facchetti
- Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA
- Polyera Corporation, 8045 Lamon Avenue, Skokie, Illinois 60077, USA
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Kim DE, Cho SW, Kim B, Shin JH, Kang WJ, Yun MG, Beak SK, Cho HK, Kim YH, Kim Y. Chemically robust solution-processed indium zinc oxide thin film transistors fabricated by back channel wet-etched Mo electrodes. RSC Adv 2016. [DOI: 10.1039/c6ra09684k] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/03/2023] Open
Abstract
We designed a systematic strategy for a chemically robust solution-processed IZO thin film transistor with back channel wet-etched Mo electrodes, which showed superior electrical performance and uniformity.
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Affiliation(s)
- Da Eun Kim
- School of Advanced Materials Science and Engineering
- Sungkyunkwan University
- Suwon
- Republic of Korea
| | - Sung Woon Cho
- School of Advanced Materials Science and Engineering
- Sungkyunkwan University
- Suwon
- Republic of Korea
| | - Bora Kim
- School of Advanced Materials Science and Engineering
- Sungkyunkwan University
- Suwon
- Republic of Korea
| | - Jae Hui Shin
- School of Advanced Materials Science and Engineering
- Sungkyunkwan University
- Suwon
- Republic of Korea
| | - Won Jun Kang
- School of Advanced Materials Science and Engineering
- Sungkyunkwan University
- Suwon
- Republic of Korea
| | - Myeong Gu Yun
- School of Advanced Materials Science and Engineering
- Sungkyunkwan University
- Suwon
- Republic of Korea
| | - Seung Ki Beak
- School of Advanced Materials Science and Engineering
- Sungkyunkwan University
- Suwon
- Republic of Korea
| | - Hyung Koun Cho
- School of Advanced Materials Science and Engineering
- Sungkyunkwan University
- Suwon
- Republic of Korea
| | - Yong-Hoon Kim
- School of Advanced Materials Science and Engineering
- Sungkyunkwan University
- Suwon
- Republic of Korea
| | - Yunseok Kim
- School of Advanced Materials Science and Engineering
- Sungkyunkwan University
- Suwon
- Republic of Korea
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Jung JW, Chueh CC, Jen AKY. A Low-Temperature, Solution-Processable, Cu-Doped Nickel Oxide Hole-Transporting Layer via the Combustion Method for High-Performance Thin-Film Perovskite Solar Cells. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2015; 27:7874-7880. [PMID: 26484846 DOI: 10.1002/adma.201503298] [Citation(s) in RCA: 110] [Impact Index Per Article: 11.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/08/2015] [Revised: 09/11/2015] [Indexed: 06/05/2023]
Abstract
Low-temperature, solution-processable Cu-doped NiOX (Cu:NiOx ), prepared via combustion chemistry, is demonstrated as an excellent hole-transporting layer (HTL) for thin-film perovskite solar cells (PVSCs). Its good crystallinity, conductivity, and hole-extraction properties enable the derived PVSC to have a high power conversion efficiency (PCE) of 17.74%. Its general applicability for various elecrode materials is also revealed.
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Affiliation(s)
- Jae Woong Jung
- Department of Materials Science and Engineering, University of Washington, Seattle, WA, 98195, USA
| | - Chu-Chen Chueh
- Department of Materials Science and Engineering, University of Washington, Seattle, WA, 98195, USA
| | - Alex K-Y Jen
- Department of Materials Science and Engineering, University of Washington, Seattle, WA, 98195, USA
- Department of Chemistry, University of Washington, Seattle, WA, 98195, USA
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Bassanetti I, Mattarozzi M, Delferro M, Marks TJ, Marchiò L. Silver(I) Bis(pyrazolyl)methane Complexes and Their Implementation as Precursors for Metallic Silver Deposition. Eur J Inorg Chem 2015. [DOI: 10.1002/ejic.201501236] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
Affiliation(s)
- Irene Bassanetti
- Dipartimento di ChimicaUniversità degli Studi di ParmaParco Area delle Scienze 17/a43124ParmaItaly
- Department of ChemistryNorthwestern University2145 Sheridan Road60208EvanstonIllinoisUSA
| | - Monica Mattarozzi
- Dipartimento di ChimicaUniversità degli Studi di ParmaParco Area delle Scienze 17/a43124ParmaItaly
| | - Massimiliano Delferro
- Department of ChemistryNorthwestern University2145 Sheridan Road60208EvanstonIllinoisUSA
| | - Tobin J. Marks
- Department of ChemistryNorthwestern University2145 Sheridan Road60208EvanstonIllinoisUSA
| | - Luciano Marchiò
- Dipartimento di ChimicaUniversità degli Studi di ParmaParco Area delle Scienze 17/a43124ParmaItaly
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Yu X, Zeng L, Zhou N, Guo P, Shi F, Buchholz DB, Ma Q, Yu J, Dravid VP, Chang RPH, Bedzyk M, Marks TJ, Facchetti A. Ultra-flexible, "invisible" thin-film transistors enabled by amorphous metal oxide/polymer channel layer blends. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2015; 27:2390-9. [PMID: 25712894 DOI: 10.1002/adma.201405400] [Citation(s) in RCA: 18] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/25/2014] [Revised: 01/24/2015] [Indexed: 05/26/2023]
Abstract
Ultra-flexible and transparent metal oxide transistors are developed by doping In2 O3 films with poly(vinylphenole) (PVP). By adjusting the In2 O3 :PVP weight ratio, crystallization is frustrated, and conducting pathways for efficient charge transport are maintained. In2 O3 :5%PVP-based transistors exhibit mobilities approaching 11 cm(2) V(-1) s(-1) before, and retain up to ca. 90% performance after 100 bending/relaxing cycles at a radius of 10 mm.
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Affiliation(s)
- Xinge Yu
- Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA; State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu, 610054, China
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