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Bharti A, Turchet A, Marmiroli B. X-Ray Lithography for Nanofabrication: Is There a Future? FRONTIERS IN NANOTECHNOLOGY 2022. [DOI: 10.3389/fnano.2022.835701] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/13/2022] Open
Abstract
X-ray lithography has been first proposed almost 50 years ago, and the related LIGA process around 25 years ago. It is therefore a good time to make an analysis of the technique, with its pros and cons. In this perspective article, we describe X-ray lithography’s latest advancements. First, we report the improvement in the fabrication of the high aspect ratio and high-resolution micro/nanostructures. Then, we present the radiation-assisted synthesis and processing of novel materials for the next generation of functional devices. We finally draw our conclusion on the future prospects of the technique.
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Poddighe M, Innocenzi P. Hydrophobic Thin Films from Sol-Gel Processing: A Critical Review. MATERIALS (BASEL, SWITZERLAND) 2021; 14:6799. [PMID: 34832200 PMCID: PMC8620172 DOI: 10.3390/ma14226799] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/24/2021] [Revised: 11/07/2021] [Accepted: 11/08/2021] [Indexed: 11/17/2022]
Abstract
Fabrication of hydrophobic thin films from a liquid phase is a hot topic with critical technological issues. Interest in the production of hydrophobic surfaces is growing steadily due to their wide applications in several industrial fields. Thin films from liquid phases can be deposited on different types of surfaces using a wide variety of techniques, while the design of the precursor solution offers the possibility of fine-tuning the properties of the hydrophobic coating layers. A general trend is the design of multifunctional films, which have different properties besides being hydrophobic. In the present review, we have described the synthesis through sol-gel processing of hydrophobic films enlightening the main achievements obtained in the field.
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Affiliation(s)
| | - Plinio Innocenzi
- Laboratory of Materials Science and Nanotechnology (LMNT), Department of Biomedical Sciences, University of Sassari, CR-INSTM, Viale San Pietro, 07100 Sassari, Italy;
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Jiang Y, Carboni D, Pinna A, Marmiroli B, Malfatti L, Innocenzi P. Hard X-rays for processing hybrid organic-inorganic thick films. JOURNAL OF SYNCHROTRON RADIATION 2016; 23:267-273. [PMID: 26698073 DOI: 10.1107/s1600577515018597] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/31/2015] [Accepted: 10/05/2015] [Indexed: 06/05/2023]
Abstract
Hard X-rays, deriving from a synchrotron light source, have been used as an effective tool for processing hybrid organic-inorganic films and thick coatings up to several micrometres. These coatings could be directly modified, in terms of composition and properties, by controlled exposure to X-rays. The physico-chemical properties of the coatings, such as hardness, refractive index and fluorescence, can be properly tuned using the interaction of hard X-rays with the sol-gel hybrid films. The changes in the microstructure have been correlated especially with the modification of the optical and the mechanical properties. A relationship between the degradation rate of the organic groups and the rise of fluorescence from the hybrid material has been observed; nanoindentation analysis of the coatings as a function of the X-ray doses has shown a not linear dependence between thickness and film hardness.
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Affiliation(s)
- Yu Jiang
- Laboratorio di Scienza dei Materiali e Nanotecnologie, DADU, Università di Sassari, CR-INSTM, Palazzo Pou Salit, Piazza Duomo 6, 07041 Alghero (Sassari), Italy
| | - Davide Carboni
- Laboratorio di Scienza dei Materiali e Nanotecnologie, DADU, Università di Sassari, CR-INSTM, Palazzo Pou Salit, Piazza Duomo 6, 07041 Alghero (Sassari), Italy
| | - Alessandra Pinna
- Laboratorio di Scienza dei Materiali e Nanotecnologie, DADU, Università di Sassari, CR-INSTM, Palazzo Pou Salit, Piazza Duomo 6, 07041 Alghero (Sassari), Italy
| | - Benedetta Marmiroli
- Institute of Inorganic Chemistry, Graz University of Technology, Stremayrgasse 9/IV, 8010 Graz, Austria
| | - Luca Malfatti
- Laboratorio di Scienza dei Materiali e Nanotecnologie, DADU, Università di Sassari, CR-INSTM, Palazzo Pou Salit, Piazza Duomo 6, 07041 Alghero (Sassari), Italy
| | - Plinio Innocenzi
- Laboratorio di Scienza dei Materiali e Nanotecnologie, DADU, Università di Sassari, CR-INSTM, Palazzo Pou Salit, Piazza Duomo 6, 07041 Alghero (Sassari), Italy
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Ghogare AA, Miller JM, Mondal B, Lyons AM, Cengel KA, Busch TM, Greer A. Fluorinated Photodynamic Therapy Device Tips and their Resistance to Fouling for In Vivo Sensitizer Release. Photochem Photobiol 2016; 92:166-72. [PMID: 26451683 PMCID: PMC4839978 DOI: 10.1111/php.12538] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/18/2015] [Accepted: 09/17/2015] [Indexed: 01/10/2023]
Abstract
We describe progress on a one-step photodynamic therapy (PDT) technique that is simple: device tip delivery of sensitizer, oxygen and light simultaneously. Control is essential for their delivery to target sites to generate singlet oxygen. One potential problem is the silica device tip may suffer from biomaterial fouling and the pace of sensitizer photorelease is slowed. Here, we have used biomaterial (e.g. proteins, cells, etc.) from SQ20B head and neck tumors and whole blood for an assessment of fouling of the silica tips by adsorption. It was shown that by exchanging the native silica tip for a fluorinated tip, a better nonstick property led to an increased sensitizer output by ~10%. The fluorinated tip gave a sigmoidal photorelease where singlet oxygen is stabilized to physical quenching, whereas the native silica tip with unprotected SiO-H groups gave a slower (pseudolinear) photorelease. A further benefit from fluorinated silica is that 15% less biomaterial adheres to its surface compared to native silica based on a bicinchoninic acid assay (BCA) and X-ray photoelectron spectroscopy (XPS) measurements. We discuss how the fluorination of the device tip increases biofouling resistance and can contribute to a new pointsource PDT tool.
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Affiliation(s)
- Ashwini A. Ghogare
- Department of Chemistry and Graduate Center, Brooklyn College, City University of New York, Brooklyn, New York, 11210, United States
| | - Joann M. Miller
- Department of Radiation Oncology, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Bikash Mondal
- Department of Chemistry and Graduate Center, College of Staten Island, City University of New York, Staten Island, New York 10314, United States
| | - Alan M. Lyons
- Department of Chemistry and Graduate Center, College of Staten Island, City University of New York, Staten Island, New York 10314, United States
| | - Keith A. Cengel
- Department of Radiation Oncology, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Theresa M. Busch
- Department of Radiation Oncology, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Alexander Greer
- Department of Chemistry and Graduate Center, Brooklyn College, City University of New York, Brooklyn, New York, 11210, United States
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Wang W, Burgess IB, Hatton BD, Alvarenga J, Aizenberg J. Secrets revealed — Spatially selective wetting of plasma-patterned periodic mesoporous organosilica. CAN J CHEM 2012. [DOI: 10.1139/v2012-092] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/22/2022]
Abstract
We report a simple method to pattern wetting properties on thin films of periodic mesoporous organosilica (PMO). A hydrophobic methane PMO thin film was covered by masks and exposed to oxygen plasma to make the unmasked area hydrophilic. The wettability patterns could be revealed only when the films were immersed in water or exposed to moisture. We expect that our method would extend the utility of PMO to such areas as sensing and information security.
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Affiliation(s)
- Wendong Wang
- Wyss Institute for Biologically Inspired Engineering, Harvard University, Cambridge, MA 02138, USA
- School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA
| | - Ian B. Burgess
- Wyss Institute for Biologically Inspired Engineering, Harvard University, Cambridge, MA 02138, USA
- School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA
| | - Benjamin D. Hatton
- Wyss Institute for Biologically Inspired Engineering, Harvard University, Cambridge, MA 02138, USA
- School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA
| | - Jack Alvarenga
- Wyss Institute for Biologically Inspired Engineering, Harvard University, Cambridge, MA 02138, USA
| | - Joanna Aizenberg
- Wyss Institute for Biologically Inspired Engineering, Harvard University, Cambridge, MA 02138, USA
- School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA
- Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138, USA
- Kavli Institute for Bionano Science & Technology, Harvard University, Cambridge, MA 02138, USA
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Marmiroli B, Amenitsch H. X-ray lithography and small-angle X-ray scattering: a combination of techniques merging biology and materials science. EUROPEAN BIOPHYSICS JOURNAL: EBJ 2012; 41:851-61. [PMID: 22854870 DOI: 10.1007/s00249-012-0843-3] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/09/2012] [Revised: 06/30/2012] [Accepted: 07/10/2012] [Indexed: 11/28/2022]
Abstract
The advent of micro/nanotechnology has blurred the border between biology and materials science. Miniaturization of chemical and biological assays, performed by use of micro/nanofluidics, requires both careful selection of the methods of fabrication and the development of materials designed for specific applications. This, in turn, increases the need for interdisciplinary combination of suitable microfabrication and characterisation techniques. In this review, the advantages of combining X-ray lithography, as fabrication technique, with small-angle X-ray scattering measurements will be discussed. X-ray lithography enables the limitations of small-angle X-ray scattering, specifically time resolution and sample environment, to be overcome. Small-angle X-ray scattering, on the other hand, enables investigation and, consequently, adjustment of the nanostructural morphology of microstructures and materials fabricated by X-ray lithography. Moreover, the effect of X-ray irradiation on novel materials can be determined by use of small-angle X-ray scattering. The combination of top-down and bottom-up methods to develop new functional materials and structures with potential in biology will be reported.
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Affiliation(s)
- B Marmiroli
- Institute of Biophysics and Nanosystems Research, Austrian Academy of Sciences, Schmiedlstr. 6, 8042, Graz, Austria
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Falcaro P, Buso D, Hill AJ, Doherty CM. Patterning techniques for metal organic frameworks. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2012; 24:3153-68. [PMID: 22641395 DOI: 10.1002/adma.201200485] [Citation(s) in RCA: 81] [Impact Index Per Article: 6.2] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/03/2012] [Indexed: 05/15/2023]
Abstract
The tuneable pore size and architecture, chemical properties and functionalization make metal organic frameworks (MOFs) attractive versatile stimuli-responsive materials. In this context, MOFs hold promise for industrial applications and a fervent research field is currently investigating MOF properties for device fabrication. Although the material properties have a crucial role, the ability to precisely locate the functional material is fundamental for device fabrication. In this progress report, advancements in the control of MOF positioning and precise localization of functional materials within MOF crystals are presented. Advantages and limitations of each reviewed technique are critically investigated, and several important gaps in the technological development for device fabrication are highlighted. Finally, promising patterning techniques are presented which are inspired by previous studies in organic and inorganic crystal patterning for the future of MOF lithography.
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Affiliation(s)
- Paolo Falcaro
- CSIRO, Division of Materials Science and Engineering, Clayton South MDC, Victoria, Australia.
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Malfatti L, Falcaro P, Marmiroli B, Amenitsch H, Piccinini M, Falqui A, Innocenzi P. Nanocomposite mesoporous ordered films for lab-on-chip intrinsic surface enhanced Raman scattering detection. NANOSCALE 2011; 3:3760-3766. [PMID: 21826319 DOI: 10.1039/c1nr10404g] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
Mesoporous nanocomposite materials have been fabricated through integration of evaporation-induced self-assembly and deep X-ray lithography. Micropatterned films made using a mesoporous ordered silica matrix which contains silver nanoparticles have been obtained. The exposure of the mesoporous films to high energy X-rays, which are generated by a synchrotron source, produces several effects: the removal of the surfactant, the densification of the silica backbone and the formation of silver nanoparticles. This integrated process produces a nanocomposite material which has a 2D-hexagonal organized porosity and silver nanoparticles with a sharp size distribution around 5 nm. The patterned nanostructured films have been tested as a lab-on-chip device for intrinsic surface enhanced Raman scattering detection using a solution containing rhodamine 6G in ethanol and measuring Raman response as a function of laser power.
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Affiliation(s)
- Luca Malfatti
- Laboratorio di Scienza dei Materiali e Nanotecnologie (LMNT), CR-INSTM, CNBS, Università di Sassari, Palazzo Pou Salid Piazza Duomo 6, 07041 Alghero SS, Italy
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