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Musgrave CSA, Shoji S, Nagai K. Easy-handling minimum mass laser target scaffold based on sub-millimeter air bubble -An example of laser plasma extreme ultraviolet generation. Sci Rep 2020; 10:5906. [PMID: 32246061 PMCID: PMC7125169 DOI: 10.1038/s41598-020-62858-3] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/14/2019] [Accepted: 03/19/2020] [Indexed: 11/09/2022] Open
Abstract
Low density materials can control plasma properties of laser absorption, which can enhance quantum beam generation. The recent practical extreme ultraviolet light (EUV) is the first industrial example of laser plasma source with low density targets. Here we propose an easy-handling target source based on a hollow sub-millimeter microcapsule fabricated from polyelectrolyte cationic and anionic surfactant on air bubbles. The lightweight microcapsules acted as a scaffold for surface coating by tin (IV) oxide nanoparticles (22-48%), and then dried. As a proof of concept study, the microcapsules were ablated with a Nd:YAG laser (7.1 × 1010 W/cm2, 1 ns) to generate 13.5 nm EUV relatively directed to laser incidence. The laser conversion efficiency (CE) at 13.5 nm 2% bandwidth from the tin-coated microcapsule (0.8%) was competitive compared with bulk tin (1%). We propose that microcapsule aggregates could be utilized as a potential small scale/compact EUV source, and future quantum beam sources by changing the coating to other elements.
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Affiliation(s)
- Christopher S A Musgrave
- Laboratory for Chemical and Life Sciences Institute of Innovative Research, Tokyo Institute of Technology R1-26 Suzukake-dai, Midori-ku, Yokohama, 226-8503, Japan
- Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin), University College Dublin, D14 YH57, Dublin, Ireland
| | - Shuntaro Shoji
- School of Chemical Science and Engineering, Tokyo Institute of Technology, R1-26, Suzukake-dai, Midori-ku, Yokohama, 226-8503, Japan
| | - Keiji Nagai
- Laboratory for Chemical and Life Sciences Institute of Innovative Research, Tokyo Institute of Technology R1-26 Suzukake-dai, Midori-ku, Yokohama, 226-8503, Japan.
- School of Chemical Science and Engineering, Tokyo Institute of Technology, R1-26, Suzukake-dai, Midori-ku, Yokohama, 226-8503, Japan.
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Andrew Musgrave CS, Lu N, Sato R, Nagai K. Gallium–tin alloys as a low melting point liquid metal for repetition-pulse-laser-induced high energy density state toward compact pulse EUV sources. RSC Adv 2019; 9:13927-13932. [PMID: 35519559 PMCID: PMC9064005 DOI: 10.1039/c9ra01905g] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/13/2019] [Accepted: 04/24/2019] [Indexed: 12/15/2022] Open
Abstract
We show the near-room-temperature-handling of a liquid gallium–tin alloy (Ga:Sn) as a laser target source for 13.5 nm pulse repetition.
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Affiliation(s)
| | - Nan Lu
- Laboratory for Chemical and Life Sciences
- Institute of Innovative Research
- Tokyo Institute of Technology
- Yokohama 226-8503
- Japan
| | - Rie Sato
- Laboratory for Chemical and Life Sciences
- Institute of Innovative Research
- Tokyo Institute of Technology
- Yokohama 226-8503
- Japan
| | - Keiji Nagai
- Laboratory for Chemical and Life Sciences
- Institute of Innovative Research
- Tokyo Institute of Technology
- Yokohama 226-8503
- Japan
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Nagai K, Musgrave CS, Kuwata N, Kawamura J. Electrochemically Synthesized Tin/Lithium Alloy To Convert Laser Light to Extreme Ultraviolet Light. ACS OMEGA 2018; 3:12422-12427. [PMID: 31457973 PMCID: PMC6644476 DOI: 10.1021/acsomega.8b01220] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/03/2018] [Accepted: 09/18/2018] [Indexed: 06/10/2023]
Abstract
This paper describes lithium-tin alloys as a novel target material to enhance the efficiency of 13.5 nm extreme ultraviolet (EUV) light from generated laser-produced plasmas. Both lithium and tin exhibit EUV emission with the same peak at 13.5 nm. We show that lithium-tin (LiSn) alloys exhibit emission also at 13.5 nm and a mixture of tin and lithium emission by illuminating Nd:YAG laser (1 ns, 2.5 × 1010, 7.1 × 1010 W/cm2). The emission spectra and emission angular distribution by using phosphor imaging plates were analyzed to obtain the conversion efficiency from laser light to 13.5 nm light. The Li-Sn alloys were slightly higher than planar tin and between tin and lithium. It would be due to the suppression of self-absorption of 13.5 nm light by the tin plasma.
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Affiliation(s)
- Keiji Nagai
- Laboratory
for Chemistry and Life Science, Institute of Innovative Research, Tokyo Institute of Technology, R1-26, Nagatsuta 4259, Midori-ku, Yokohama 226-8503, Kanagawa, Japan
| | - Christopher S.
A. Musgrave
- Laboratory
for Chemistry and Life Science, Institute of Innovative Research, Tokyo Institute of Technology, R1-26, Nagatsuta 4259, Midori-ku, Yokohama 226-8503, Kanagawa, Japan
| | - Naoaki Kuwata
- Institute
of Multidisciplinary Research for Advanced Materials, Tohoku University, Katahira 2-1-1, Sendai 980-8577, Miyagi, Japan
| | - Junichi Kawamura
- Institute
of Multidisciplinary Research for Advanced Materials, Tohoku University, Katahira 2-1-1, Sendai 980-8577, Miyagi, Japan
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Ge L, Ji J, Bai L, Fei T, Wang W, Nagai K, Nishimura H, Izawa Y, Mima K, Norimatsu T. Effect of Nd:YAG Laser Energy on Multilayer Hollow Nanofiber Target's Extreme Ultraviolet Conversion Efficiency. J MACROMOL SCI B 2011. [DOI: 10.1080/00222348.2010.549426] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
Affiliation(s)
- Liqin Ge
- a State Key Laboratory of Bioelectronics, School of Biological Science and Medical Engineering , Southeast University , Nanjing, China
- b Institute of Laser Engineering, Osaka University , Osaka, Japan
| | - Jianyu Ji
- a State Key Laboratory of Bioelectronics, School of Biological Science and Medical Engineering , Southeast University , Nanjing, China
| | - Lingling Bai
- a State Key Laboratory of Bioelectronics, School of Biological Science and Medical Engineering , Southeast University , Nanjing, China
| | - Teng Fei
- a State Key Laboratory of Bioelectronics, School of Biological Science and Medical Engineering , Southeast University , Nanjing, China
| | - Weichen Wang
- a State Key Laboratory of Bioelectronics, School of Biological Science and Medical Engineering , Southeast University , Nanjing, China
| | - Keiji Nagai
- b Institute of Laser Engineering, Osaka University , Osaka, Japan
- c Chemical Resources Laboratory , Tokyo Institute of Technology, Nagatsuta-cho, Midori-ku, Yokohama , Kanagawa, Japan
| | | | - Yasukazu Izawa
- b Institute of Laser Engineering, Osaka University , Osaka, Japan
| | - Kunioki Mima
- b Institute of Laser Engineering, Osaka University , Osaka, Japan
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Cao H, Dong Y, O'Rorke S, Wang W, Pandit A. PEG based hyperbranched polymeric hollow nanospheres. NANOTECHNOLOGY 2011; 22:065604. [PMID: 21212483 DOI: 10.1088/0957-4484/22/6/065604] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/30/2023]
Abstract
The synthesis of a new PEG based hyperbranched copolymer of poly(ethylene glycol) methyl ether methacrylate-co-ethylene glycol dimethacrylate (PEGMEMA-co-EGDMA) was achieved via a one-step in situ deactivation enhanced atom transfer radical polymerization (DE-ATRP). Then, hollow PEG based nanospheres were fabricated from this polymer using a solvent evaporation method and post-stabilisation strategy. Furthermore, the analysis using a cellular metabolic activity assay proved that the copolymer did not affect cellular metabolism, indicating that this PEG based polymeric nanosphere has potential for use in drug delivery applications.
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Affiliation(s)
- Hongliang Cao
- Network of Excellence for Functional Biomaterials, National University of Ireland, Galway, Ireland
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Nagai K, Miyamoto K, Iyoda T, Pan C, Gu Z. Monolithic and Low-Density (<50 mg/cm 3) Metal Oxides Fabricated Using Electrospinning: Vanadium Oxide and Copper Oxide Examples. FUSION SCIENCE AND TECHNOLOGY 2011. [DOI: 10.13182/fst11-a11527] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
Affiliation(s)
- Keiji Nagai
- Tokyo Institute of Technology, Chemical Resources Laboratory, Yokohama, Kanagawa, Japan
| | - Kohei Miyamoto
- Tokyo Institute of Technology, Chemical Resources Laboratory, Yokohama, Kanagawa, Japan
| | - Tomokazu Iyoda
- Tokyo Institute of Technology, Chemical Resources Laboratory, Yokohama, Kanagawa, Japan
| | - Cao Pan
- Southeast University, State Key Laboratory for Bioelectronics, Nanjing, Jiangsu, China
| | - Zhongze Gu
- Southeast University, State Key Laboratory for Bioelectronics, Nanjing, Jiangsu, China
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Ge L, Ji J, Tian T, Xiao Z, Gu Z, Norimatsu T, Shimada Y, Nishimura H, Fujioka S, Nagai K. Fabrication of the hollow SnO2 nanoparticles contained spheres as extreme ultraviolet (EUV) target. Colloids Surf A Physicochem Eng Asp 2010. [DOI: 10.1016/j.colsurfa.2010.01.035] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/19/2022]
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