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Hannon AF, Sunday DF, Bowen A, Khaira G, Ren J, Nealey PF, de Pablo JJ, Kline RJ. Optimizing self-consistent field theory block copolymer models with X-ray metrology. MOLECULAR SYSTEMS DESIGN & ENGINEERING 2018; 3:376-389. [PMID: 29892480 PMCID: PMC5992623 DOI: 10.1039/c7me00098g] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/30/2023]
Abstract
A block copolymer self-consistent field theory (SCFT) model is used for direct analysis of experimental X-ray scattering data obtained from thin films of polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA) made from directed self-assembly. In a departure from traditional approaches, which reconstruct the real space structure using simple geometric shapes, we build on recent work that has relied on physics-based models to determine shape profiles and extract thermodynamic processing information from the scattering data. More specifically, an SCFT model, coupled to a covariance matrix adaptation evolutionary strategy (CMAES), is used to find the set of simulation parameters for the model that best reproduces the scattering data. The SCFT model is detailed enough to capture the essential physics of the copolymer self-assembly, but sufficiently simple to rapidly produce structure profiles needed for interpreting the scattering data. The ability of the model to produce a matching scattering profile is assessed, and several improvements are proposed in order to more accurately recreate the experimental observations. The predicted parameters are compared to those extracted from model fits via additional experimental methods and with predicted parameters from direct particle-based simulations of the same model, which incorporate the effects of fluctuations. The Flory-Huggins interaction parameter for PS-b-PMMA is found to be in agreement with reported ranges for this material. These results serve to strengthen the case for relying on physics-based models for direct analysis of scattering and light signal based experiments.
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Affiliation(s)
- Adam F Hannon
- Materials Science and Engineering Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA
| | - Daniel F Sunday
- Materials Science and Engineering Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA
| | - Alec Bowen
- Institute for Molecular Engineering, University of Chicago, 5801 S Ellis Ave, Chicago, IL 60637, USA
| | - Gurdaman Khaira
- Mentor Graphics Corporation, 8005 Boeckman Rd, Wilsonville, OR 97070, USA
| | - Jiaxing Ren
- Institute for Molecular Engineering, University of Chicago, 5801 S Ellis Ave, Chicago, IL 60637, USA
| | - Paul F Nealey
- Institute for Molecular Engineering, University of Chicago, 5801 S Ellis Ave, Chicago, IL 60637, USA
- Argonne National Laboratory, 9700 Cass Ave, Lemont, IL 60439, USA
| | - Juan J de Pablo
- Institute for Molecular Engineering, University of Chicago, 5801 S Ellis Ave, Chicago, IL 60637, USA
- Argonne National Laboratory, 9700 Cass Ave, Lemont, IL 60439, USA
| | - R Joseph Kline
- Materials Science and Engineering Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA
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Ren J, Ocola LE, Divan R, Czaplewski DA, Segal-Peretz T, Xiong S, Kline RJ, Arges CG, Nealey PF. Post-directed-self-assembly membrane fabrication for in situ analysis of block copolymer structures. NANOTECHNOLOGY 2016; 27:435303. [PMID: 27659775 DOI: 10.1088/0957-4484/27/43/435303] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Full characterization of the three-dimensional structures resulting from the directed self-assembly (DSA) of block copolymers (BCP) remains a difficult challenge. Transmission electron microscope (TEM) tomography and resonant soft x-ray scattering have emerged as powerful and complementary methods for through-film characterization; both techniques require samples to be prepared on specialized membrane substrates. Here we report a generalizable process to implement BCP DSA with density multiplication on silicon nitride membranes. A key feature of the process developed here is that it does not introduce any artefacts or damage to the polymer assemblies as DSA is performed prior to back-etched membrane formation. Because most research and applications of BCP lithography are based on silicon substrates, process variations introduced by implementing DSA on a silicon nitride/silicon stack versus silicon were identified and mitigated. Using full-wafers, membranes were fabricated with different sizes and layouts to enable both TEM and x-ray characterization. Finally, both techniques were used to characterize structures resulting from the DSA of lamella-forming BCP with density multiplication.
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Affiliation(s)
- J Ren
- University of Chicago, Institute for Molecular Engineering, 5640 S Ellis Ave ERC 229, Chicago, IL 60637, USA
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Serral M, Pinna M, Zvelindovsky AV, Avalos JB. Cell Dynamics Simulations of Sphere-Forming Diblock Copolymers in Thin Films on Chemically Patterned Substrates. Macromolecules 2016. [DOI: 10.1021/acs.macromol.5b02314] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/27/2023]
Affiliation(s)
- Maria Serral
- Department
d’Enginyeria Química, Universitat Rovira i Virgili, Tarragona, Av. dels Països Catalans, 26, 43007 Tarragona, Spain
| | - Marco Pinna
- School
of Mathematics and Physics, College of Science, University of Lincoln, Brayford Pool, Lincoln, Lincolnshire LN6 7TS, U.K
| | - Andrei V. Zvelindovsky
- School
of Mathematics and Physics, College of Science, University of Lincoln, Brayford Pool, Lincoln, Lincolnshire LN6 7TS, U.K
| | - Josep Bonet Avalos
- Department
d’Enginyeria Química, Universitat Rovira i Virgili, Tarragona, Av. dels Països Catalans, 26, 43007 Tarragona, Spain
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Tavakkoli AKG, Nicaise SM, Hannon AF, Gotrik KW, Alexander-Katz A, Ross CA, Berggren KK. Sacrificial-post templating method for block copolymer self-assembly. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2014; 10:493-418. [PMID: 23839974 DOI: 10.1002/smll.201301066] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/06/2013] [Indexed: 06/02/2023]
Abstract
A sacrificial-post templating method is presented for directing block copolymer self-assembly to form nanostructures consisting of monolayers and bilayers of microdomains. In this approach, the topographical post template is removed after self-assembly and therefore is not incorporated into the final microdomain pattern. Arrays of nanoscale holes of different shapes and symmetries, including mesh structures and perforated lamellae with a bimodal pore size distribution, are produced. The ratio of the pore sizes in the bimodal distributions can be varied via the template pitch, and agrees with predictions of self consistent field theory.
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Affiliation(s)
- Amir K G Tavakkoli
- Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA; NUS Graduate School for Integrative Sciences & Engineering (NGS), 117456, Singapore
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7
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Shi LY, Zhou Y, Shen Z, Fan XH. Hierarchical Structures in Thin Films of Macrophase- and Microphase-Separated AB/AC Diblock Copolymer Blends. Macromolecules 2012. [DOI: 10.1021/ma202660f] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Ling-Ying Shi
- Beijing National Laboratory for Molecular
Sciences,
Key Laboratory of Polymer Chemistry and Physics of Ministry of Education,
College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China
| | - Yu Zhou
- Beijing National Laboratory for Molecular
Sciences,
Key Laboratory of Polymer Chemistry and Physics of Ministry of Education,
College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China
| | - Zhihao Shen
- Beijing National Laboratory for Molecular
Sciences,
Key Laboratory of Polymer Chemistry and Physics of Ministry of Education,
College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China
| | - Xing-He Fan
- Beijing National Laboratory for Molecular
Sciences,
Key Laboratory of Polymer Chemistry and Physics of Ministry of Education,
College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China
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Tavakkoli K. G. A, Gotrik KW, Hannon AF, Alexander-Katz A, Ross CA, Berggren KK. Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films. Science 2012; 336:1294-8. [DOI: 10.1126/science.1218437] [Citation(s) in RCA: 222] [Impact Index Per Article: 18.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/02/2022]
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Yoo S, Cho H, Lee JP, Kim KT, Park S. Gold Double-Ring Structures Synthesized from Block Copolymer Corpuscle Templates. Chem Asian J 2012; 7:692-5. [DOI: 10.1002/asia.201101032] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/20/2011] [Indexed: 11/09/2022]
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Ji S, Nagpal U, Liao W, Liu CC, de Pablo JJ, Nealey PF. Three-dimensional directed assembly of block copolymers together with two-dimensional square and rectangular nanolithography. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2011; 23:3692-3697. [PMID: 21735489 DOI: 10.1002/adma.201101813] [Citation(s) in RCA: 36] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/15/2011] [Indexed: 05/31/2023]
Affiliation(s)
- Shengxiang Ji
- Key Laboratory of Polymer Ecomaterials, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, China
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Ji S, Liu CC, Liao W, Fenske AL, Craig GSW, Nealey PF. Domain Orientation and Grain Coarsening in Cylinder-Forming Poly(styrene-b-methyl methacrylate) Films. Macromolecules 2011. [DOI: 10.1021/ma2005734] [Citation(s) in RCA: 88] [Impact Index Per Article: 6.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Shengxiang Ji
- Department of Chemical and Biological Engineering, University of Wisconsin, 1415 Engineering Drive, Madison, Wisconsin 53706, United States
- Key Laboratory of Polymer Ecomaterials, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China
| | - Chi-Chun Liu
- Department of Chemical and Biological Engineering, University of Wisconsin, 1415 Engineering Drive, Madison, Wisconsin 53706, United States
| | - Wen Liao
- Department of Chemical and Biological Engineering, University of Wisconsin, 1415 Engineering Drive, Madison, Wisconsin 53706, United States
| | - Alyssa L. Fenske
- Department of Chemical and Biological Engineering, University of Wisconsin, 1415 Engineering Drive, Madison, Wisconsin 53706, United States
| | - Gordon S. W. Craig
- Department of Chemical and Biological Engineering, University of Wisconsin, 1415 Engineering Drive, Madison, Wisconsin 53706, United States
| | - Paul F. Nealey
- Department of Chemical and Biological Engineering, University of Wisconsin, 1415 Engineering Drive, Madison, Wisconsin 53706, United States
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Ye X, Edwards BJ, Khomami B. Elucidating the Formation of Block Copolymer Nanostructures on Patterned Surfaces: A Self-Consistent Field Theory Study. Macromolecules 2010. [DOI: 10.1021/ma101227w] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Xianggui Ye
- Materials Research and Innovation Laboratory (MRAIL), Department of Chemical and Biomolecular Engineering, University of Tennessee, Knoxville, Tennessee 37996, United States
- Sustainable Energy Education and Research Center, University of Tennessee, Knoxville, Tennessee 37996, United States
| | - Brian J. Edwards
- Materials Research and Innovation Laboratory (MRAIL), Department of Chemical and Biomolecular Engineering, University of Tennessee, Knoxville, Tennessee 37996, United States
- Sustainable Energy Education and Research Center, University of Tennessee, Knoxville, Tennessee 37996, United States
| | - Bamin Khomami
- Materials Research and Innovation Laboratory (MRAIL), Department of Chemical and Biomolecular Engineering, University of Tennessee, Knoxville, Tennessee 37996, United States
- Sustainable Energy Education and Research Center, University of Tennessee, Knoxville, Tennessee 37996, United States
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Metwalli E, Perlich J, Wang W, Diethert A, Roth SV, Papadakis CM, Müller-Buschbaum P. Morphology of Semicrystalline Diblock Copolymer Thin Films upon Directional Solvent Vapor Flow. MACROMOL CHEM PHYS 2010. [DOI: 10.1002/macp.201000343] [Citation(s) in RCA: 22] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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Marencic AP, Register RA. Controlling Order in Block Copolymer Thin Films for Nanopatterning Applications. Annu Rev Chem Biomol Eng 2010; 1:277-97. [DOI: 10.1146/annurev-chembioeng-073009-101007] [Citation(s) in RCA: 106] [Impact Index Per Article: 7.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
Abstract
An attractive “unconventional” lithographic technique to pattern periodic, sub-100 nm features uses self-assembled block copolymer thin films as etch masks. Unfortunately, as-cast films lack the orientational and positional order of the microphase-separated domains that are necessary for many desired applications. Reviewed herein are techniques developed to guide the self-assembly process in thin films, which permit varying degrees of control over the patterns formed by the microdomains. Techniques that can control the out-of-plane order of the microdomains are first summarized. Then, techniques that control the lateral ordering are reviewed, beginning with those that generate large defect-free grains, then those that impart orientational order to the microdomains, and finally those that can control both the orientation and position of individual microdomains. Each technique is summarized with experimental examples and discussions regarding the mechanism of the guided self-assembly process.
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Affiliation(s)
- Andrew P. Marencic
- Department of Chemical and Biological Engineering, Princeton University, Princeton, New Jersey 08544
| | - Richard A. Register
- Department of Chemical and Biological Engineering, Princeton University, Princeton, New Jersey 08544
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15
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Cho H, Kim S, Park S. Fabrication of gold nanoparticles and silicon oxide corpuscles from block copolymers. ACTA ACUST UNITED AC 2010. [DOI: 10.1039/b922334g] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Farrell RA, Fitzgerald TG, Borah D, Holmes JD, Morris MA. Chemical interactions and their role in the microphase separation of block copolymer thin films. Int J Mol Sci 2009; 10:3671-3712. [PMID: 19865513 PMCID: PMC2769138 DOI: 10.3390/ijms10093671] [Citation(s) in RCA: 57] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/06/2009] [Accepted: 08/14/2009] [Indexed: 11/17/2022] Open
Abstract
The thermodynamics of self-assembling systems are discussed in terms of the chemical interactions and the intermolecular forces between species. It is clear that there are both theoretical and practical limitations on the dimensions and the structural regularity of these systems. These considerations are made with reference to the microphase separation that occurs in block copolymer (BCP) systems. BCP systems self-assemble via a thermodynamic driven process where chemical dis-affinity between the blocks driving them part is balanced by a restorative force deriving from the chemical bond between the blocks. These systems are attracting much interest because of their possible role in nanoelectronic fabrication. This form of self-assembly can obtain highly regular nanopatterns in certain circumstances where the orientation and alignment of chemically distinct blocks can be guided through molecular interactions between the polymer and the surrounding interfaces. However, for this to be possible, great care must be taken to properly engineer the interactions between the surfaces and the polymer blocks. The optimum methods of structure directing are chemical pre-patterning (defining regions on the substrate of different chemistry) and graphoepitaxy (topographical alignment) but both centre on generating alignment through favourable chemical interactions. As in all self-assembling systems, the problems of defect formation must be considered and the origin of defects in these systems is explored. It is argued that in these nanostructures equilibrium defects are relatively few and largely originate from kinetic effects arising during film growth. Many defects also arise from the confinement of the systems when they are 'directed' by topography. The potential applications of these materials in electronics are discussed.
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Affiliation(s)
- Richard A. Farrell
- Department of Chemistry, University College Cork, Cork, Ireland; E-Mails: (R.A.F.); (T.G.F.); (D.B.); (J.D.H.)
- Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin, Ireland
- Tyndall National Institute, The Maltings, Cork, Ireland
| | - Thomas G. Fitzgerald
- Department of Chemistry, University College Cork, Cork, Ireland; E-Mails: (R.A.F.); (T.G.F.); (D.B.); (J.D.H.)
- Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin, Ireland
- Intel Ireland, Leixlip, Co. Kildare, Ireland
| | - Dipu Borah
- Department of Chemistry, University College Cork, Cork, Ireland; E-Mails: (R.A.F.); (T.G.F.); (D.B.); (J.D.H.)
- Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin, Ireland
| | - Justin D. Holmes
- Department of Chemistry, University College Cork, Cork, Ireland; E-Mails: (R.A.F.); (T.G.F.); (D.B.); (J.D.H.)
- Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin, Ireland
- Tyndall National Institute, The Maltings, Cork, Ireland
| | - Michael A. Morris
- Department of Chemistry, University College Cork, Cork, Ireland; E-Mails: (R.A.F.); (T.G.F.); (D.B.); (J.D.H.)
- Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin, Ireland
- Tyndall National Institute, The Maltings, Cork, Ireland
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