Wafer-scale fabrication of plasmonic crystals from patterned silicon templates prepared by nanosphere lithography

Analysis of the Pattern Shapes Obtained By Micro/Nanospherical Lens Photolithography

Micro/nanospherical lens photolithography (SLPL) constitutes an efficient and precise micro/nanofabrication methodology. It offers advantages over traditional nanolithography approaches, such as cost-effectiveness and ease of implementation. By using micrometer-sized microspheres, SLPL enables the preparation of subwavelength scale features. This technique has gained attention due to its potential applications. However, the SLPL process has a notable limitation in that it mostly produces simple pattern shapes, mainly consisting of circular arrays. There has been a lack of theoretical analysis regarding the possible shapes that can be created. In our experiments, we successfully prepared annular and ring-with-hole pattern shapes. To address this limitation, we applied the Mie scattering theory to systematically analyze and summarize the various patterns that can be obtained through the SLPL process. We also proposed methods to predict and obtain different patterns. This theoretical analysis enhances the understanding of SLPL and expands its potential applications, making it a valuable area for further research.

Fast, Economical, and Reproducible Sensing from a 2D Si Wire Array: Accurate Characterization by Single Wire Spectroscopy

Silicon (Si) is promising as a field enhancement material because of its high abundance, low toxicity, and high refractive index. The field enhancement effect intensifies light-matter interactions, which improves photocatalysis, solar cell performance, and sensor sensitivity. To manufacture field enhancement materials on a production scale, the fabrication technique must be simple, cost-effective, fast, and highly reproducible and must produce a high enhancement factor (EF). Herein, we report on an economical and efficient fabrication method for a field enhancement substrate consisting of a two-dimensional Si wire array (2D-SiWA). This substrate was demonstrated as a fluorescence sensor with high sensitivity (EF > 200) and composed of a large area (6.0 mm²). In addition, single wire spectroscopy was used to identify very high reproducibility of the sensor sensitivity in regular regions (97%) and a mixture of regular and irregular regions (87%) of the 2D-SiWA. The large-area Si fluorescence sensor fabrication was cost-effective and rapid and was 50× less expensive, 20×faster, and 60,000×larger than the typical electron beam lithography method.

Interference surface patterning using colloidal particle lens arrays

Surface patterns of complex morphology can be made by combining the near-field colloidal lithography and the multiple-beam interference of the incident laser light. Our calculation shows that patterns made of bright and dim photonic jets can be formed beneath the dielectric spheres within the close-packed colloidal monolayer. An algorithm to find the propagation directions, amplitudes, and phases of the incident beams needed to make the desired photonic jet pattern is proposed. The field contrast in those patterns is studied.

Wafer-Scale Fabrication of Micro- to Nanoscale Bubble Swimmers and Their Fast Autonomous Propulsion by Ultrasound

Fuel-free, biocompatible swimmers with dimensions smaller than one micrometer have the potential to revolutionize the way we study and manipulate microscopic systems. Sub-micrometer, metallic Janus particles can be propelled rapidly and autonomously by acoustically induced fluid streaming, but their operation at acoustic pressure nodes limits their utility. In contrast, bubble-based microswimmers have an "on board" resonant cavity that enables them to operate far from the source of acoustic power. So far, they have been fabricated by direct writing techniques that limit both their minimum dimensions and the number that can be produced. Consequently, the size scaling of the properties of bubble swimmers has not been explored experimentally. Additionally, 3D autonomous motion has not yet been demonstrated for this type of swimmer. We describe here a method for fabricating bubble swimmers in large numbers (>10⁹) with sizes ranging from 5 μm to 500 nm without direct writing or photolithographic tools. These swimmers follow a previously proposed scaling theory and reveal useful phenomena that enable their propulsion in different modes in the same experiment: with magnetic steering, autonomously in 3D, and in frequency-specific autonomous modes. These interesting behaviors are relevant to possible applications of autonomously moving micro- and nanorobots.

Evaporation-Induced Hierarchical Assembly of Rigid Silicon Nanopillars Fabricated by a Scalable Two-Level Colloidal Lithography Approach

Periodic arrays of silicon nanowires/nanopillars are of great technological importance in developing novel electrical, optical, biosensing, and electromechanical devices. Here, we report a novel two-level colloidal lithography technology for making periodic arrays of single-crystalline silicon nanopillars (or nanocolumns) over large areas. Spin-coated monolayer silica colloidal crystals with unusual nonclose-packed structures are utilized as first-level etching masks in generating ordered polymer posts whose sizes can be much smaller than the templating silica microspheres. These polymer posts can then be used as second-level structural templates in fabricating highly ordered silicon nanopillars with broadly tunable geometries by employing metal-assisted chemical etching. As the silicon nanopillars are produced by direct wet etching on the surface of a single-crystalline silicon wafer, they are relatively free of volume defects and thus their bending strength approaches the predicted theoretical maximum. Most importantly, the unique nonclose-packed structure of the original colloidal template and the close-to-ideal mechanical property enables the formation of unusual open-structured hierarchical assemblies of rigid silicon nanopillars during water evaporation. Both experiments and numerical finite-difference time-domain modeling confirm the importance of high aspect ratios of the templated silicon nanopillars in achieving superior broadband antireflection properties. The large fraction of entrapped air in the hierarchically assembled silicon nanopillars further facilitates to accomplish superhydrophobic surface states, promising for developing self-cleaning antireflection coatings for many important optoelectronic applications.

Nanostructures for Light Trapping in Thin Film Solar Cells

Thin film solar cells are one of the important candidates utilized to reduce the cost of photovoltaic production by minimizing the usage of active materials. However, low light absorption due to low absorption coefficient and/or insufficient active layer thickness can limit the performance of thin film solar cells. Increasing the absorption of light that can be converted into electrical current in thin film solar cells is crucial for enhancing the overall efficiency and in reducing the cost. Therefore, light trapping strategies play a significant role in achieving this goal. The main objectives of light trapping techniques are to decrease incident light reflection, increase the light absorption, and modify the optical response of the device for use in different applications. Nanostructures utilize key sets of approaches to achieve these objectives, including gradual refractive index matching, and coupling incident light into guided modes and localized plasmon resonances, as well as surface plasmon polariton modes. In this review, we discuss some of the recent developments in the design and implementation of nanostructures for light trapping in solar cells. These include the development of solar cells containing photonic and plasmonic nanostructures. The distinct benefits and challenges of these schemes are also explained and discussed.

A gold coated polystyrene ring microarray formed by two-step patterning: construction of an advanced microelectrode for voltammetric sensing

A two-step patterning process was developed based on nanosphere lithography and plasma etching to fabricate an array of electrodes with two different gold ring structures: the arrays of Au micro-ring electrode (Au-MRE) and Au covered with polystyrene micro-ring electrode (Au-PS-MRE). The Au-MRE structure was fabricated by etching a monolayer of polystyrene (PS) spheres on indium tin oxide (ITO) surface to generate PS rings on ITO glass. PS rings served as a mask in secondary etching for blocking an interaction of oxygen plasma and ITO surface to create a ring-patterned ITO surface. Then, the PS residue was removed and gold was deposited. The site-selective electrodeposition of gold was carried out and an array of a gold ring structure was formed on the ITO glass. The Au-PS-MRE structure was fabricated by keeping the PS residue from second etching before deposition of gold. The Au-PS-MRE microelectrode was studied by using hexacyanoferrate as an electrochemical probe where it displayed steady state current in cyclic voltammetry. The respective calibration plots were acquired at a working potential of 0.31 V and 0.12 V (vs. Ag/AgCl) for oxidation and reduction reaction, respectively. The sensitivity is as high as 163.4-220.7 μA·mM^-1·mm^-2 which is larger by a factor of 95-132 compared to a conventional gold film macroelectrode. The detection limit (at a signal-to-noise ratio of 3) is 2.2 μM. This approach thus yields relatively effective and low-cost fabrication without resorting to high resolution instruments. Conceivably, the technique may be used to produce microelectrode arrays on a large scale. Graphical abstract Schematic presentation of a novel fabrication process of micro-ring electrode arrays. Two-step patterning based on nanosphere lithography leads to electrodes with great electrochemical performance. Direct deposition metal in the presence of polystyrene (PS) mask induces the formation of a new structure with arrays of gold covered with PS microring on the indium tin oxide (ITO) coated glass. The microelectrode-like behavior has been achieved using this fabrication process.

Microscale and Nanoscale Electrophotonic Diagnostic Devices

Detecting and identifying infectious agents and potential pathogens in complex environments and characterizing their mode of action is a critical need. Traditional diagnostics have targeted a single characteristic (e.g., spectral response, surface receptor, mass, intrinsic conductivity, etc.). However, advances in detection technologies have identified emerging approaches in which multiple modes of action are combined to obtain enhanced performance characteristics. Particularly appealing in this regard, electrophotonic devices capable of coupling light to electron translocation have experienced rapid recent growth and offer significant advantages for diagnostics. In this review, we explore three specific promising approaches that combine electronics and photonics: (1) assays based on closed bipolar electrochemistry coupling electron transfer to color or fluorescence, (2) sensors based on localized surface plasmon resonances, and (3) emerging nanophotonics approaches, such as those based on zero-mode waveguides and metamaterials.

Batch Fabrication of Broadband Metallic Planar Microlenses and Their Arrays Combining Nanosphere Self-Assembly with Conventional Photolithography

A novel low-cost, batch-fabrication method combining the spin-coating nanosphere lithography (NSL) with the conventional photolithographic technique is demonstrated to efficiently produce the metallic planar microlenses and their arrays. The developed microlenses are composed of subwavelength nanoholes and can focus light effectively in the entire visible spectrum, with the foci sizes close to the Rayleigh diffraction limit. By changing the spacing and diameter of nanoholes, the focusing efficiency can be tuned. Although the random defects commonly exist during the self-assembly of nanospheres, the main focusing performance, e.g., focal length, depth of focus (DOF), and full-width at half-maximum (FWHM), keeps almost invariable. This research provides a cheap way to realize the integrated nanophotonic devices on the wafer level.

Switchable reflection/transmission utilizing polarization on a plasmonic structure consisting of self-assembly polystyrene spheres with silver patches

We report a plasmonic structure for switchable reflection and transmission by polarization. The structure is composed of a hexagonal-packed polystyrene sphere array with silver patches on them. Simulations and experiments demonstrated that the conversions between reflected beams and transmitted ones can be performed when the polarization directions of incident beams vary from 0° to 90°. A switchable reflection and transmission at a given wavelength can be obtained, as long as sizes of PS spheres and azimuthal angles are properly chosen. Such a patchy plasmonic structure serving as a switch between reflection and transmission have potential applications in photoelectric control devices.

Confined Etching within 2D and 3D Colloidal Crystals for Tunable Nanostructured Templates: Local Environment Matters

We report the isotropic etching of 2D and 3D polystyrene (PS) nanosphere hcp arrays using a benchtop O₂ radio frequency plasma cleaner. Unexpectedly, this slow isotropic etching allows tuning of both particle diameter and shape. Due to a suppressed etching rate at the point of contact between the PS particles originating from their arrangement in 2D and 3D crystals, the spherical PS templates are converted into polyhedral structures with well-defined hexagonal cross sections in directions parallel and normal to the crystal c-axis. Additionally, we found that particles located at the edge (surface) of the hcp 2D (3D) crystals showed increased etch rates compared to those of the particles within the crystals. This indicates that 2D and 3D order affect how nanostructures chemically interact with their surroundings. This work also shows that the morphology of nanostructures periodically arranged in 2D and 3D supercrystals can be modified via gas-phase etching and programmed by the superlattice symmetry. To show the potential applications of this approach, we demonstrate the lithographic transfer of the PS template hexagonal cross section into Si substrates to generate Si nanowires with well-defined hexagonal cross sections using a combination of nanosphere lithography and metal-assisted chemical etching.

Investigations of high order plasmonic resonance features of the nano hyper ring

A novel silver hyper ring and its complex nanostructures are designed and its plasmonic properties are investigated numerically. It is found that these hyper ring structures have relative stable optical features. The absorption cross section of the structure changes slightly when the direction and polarization of incident light is adjusting. For the complex structure, the position of each resonance peak does not present obvious change when the relative position of the inner hyper ring and outside larger ring changes. The result of the investigation has great significance for the production of practical nanostructures and the improvement of possible applications.

Large-Area Sub-Wavelength Optical Patterning via Long-Range Ordered Polymer Lens Array

Fabrication of large-area, highly orderly, and high-resolution nanostructures in a cost-effective fashion prompts advances in nanotechnology. Herein, for the first time, we demonstrate a unique strategy to prepare a long-range highly regular polymer lens from photoresist nanotrenches based templates, which are obtained from underexposure. The relationship between exposure dose and the cross-sectional morphology of produced photoresist nanostructures is revealed for the first time. The polymer lens arrays are repeatedly used for rapid generation of sub-100 nm nanopatterns across centimeter-scale areas. The light focusing properties of the nanoscale polymer lens are investigated by both simulation and experiment. It is found that the geometry, size of the lens, and the exposure dose can be deployed to adjust the produced feature size, spacing, and shapes. Because the polymer lenses are derived from top-down photolithography, the nearly perfect long-range periodicity of produced nanopatterns is ensured, and the feature shapes can be flexibly designed. Because this nanolithographic strategy enables subwavelength periodical nanopatterns with controllable feature size, geometry, and composition in a cost-effective manner, it can be optimized as a viable and potent nanofabrication tool for various technological applications.

Observation of localized surface plasmons and hybridized surface plasmon polaritons on self-assembled two-dimensional nanocavities

Large-area patterning of periodic nanostructures using self-assembled nanospheres is of interest for fabricating low-cost plasmonic substrates, such as two-dimensional (2D) metallic gratings. Surface plasmon polaritons (SPPs) excited on metallic gratings have applications in biosensors, thin-film photovoltaics, photoelectrochemical cells, and photodetectors. Here we fabricated large-area metallic gratings using nanosphere lithography, and the geometry of gratings was controlled by the sphere size and distance between nanospheres. Both forward and backward propagating SPPs were observed using the grating coupling geometry. Furthermore, we reported the first observation of localized surface plasmons (LSPs) on this large-area metallic grating by both simulation and experimental studies. Such an LSP mode was confined in the 2D nanocavities and was not supported by dielectric gratings with the same 2D geometry.

Numerical Study of Complementary Nanostructures for Light Trapping in Colloidal Quantum Dot Solar Cells

We have investigated two complementary nanostructures, nanocavity and nanopillar arrays, for light absorption enhancement in depleted heterojunction colloidal quantum dot (CQD) solar cells. A facile complementary fabrication process is demonstrated for patterning these nanostructures over the large area required for light trapping in photovoltaic devices. The simulation results show that both proposed periodic nanostructures can effectively increase the light absorption in CQD layer of the solar cell throughout the near-infrared region where CQD solar cells typically exhibit weak light absorption. The complementary fabrication process for implementation of these nanostructures can pave the way for large-area, inexpensive light trapping implementation in nanostructured solar cells.

Recent advancement on micro-/nano-spherical lens photolithography based on monolayer colloidal crystals

Highly ordered nanostructures have gained substantial interest in the research community due to their fascinating properties and wide applications.Micro-/nano-spherical lens photolithography (SLPL) has been recognized as an inexpensive, inherently parallel, and high-throughput approach to the creation of highly ordered nanostructures. SLPL based on monolayer colloidal crystals (MCCs) of self-assembled colloidal micro-/nano-spheres have recently made remarkable progress in overcoming the constraints of conventional photolithography in terms of cost, feature size, tunability, and pattern complexity. In this review, we highlight the current state-of-the-art in this field with an emphasis on the fabrication of a variety of highly ordered nanostructures based on this technique and their demonstrated applications in light emitting diodes, nano-patterning semiconductors, and localized surface plasmon resonance devices. Finally, we present a perspective on the future development of MCC-based SLPL technique, including a discussion on the improvement of the quality of MCCs and the compatibility of this technique with other semiconductor micromachining process for nanofabrication.

In situ monitoring of colloid packing at an air/water interface using visible laser diffraction

A diffractive method using a visible laser to directly monitor colloids trapped at an air/water interface under isothermal compression is discussed.

Periodic anti-ring back reflectors for hydrogenated amorphous silicon thin-film solar cells

Large and periodic anti-ring arrays are fabricated by using a monolayer of polymer/nanosphere hybrid technique and applied as back reflectors in substrate-type hydrogenated amorphous silicon (a-Si:H) thin-film solar cells. The structure of each anti-ring comprises a nanodome centered inside a nanohole. The excitation of Bloch wave surface plasmon polaritons is observed in the Ag-coated anti-ring arrays. The nanodomes of the anti-ring arrays turn out to enhance large-angle light scattering and increase the effective optical path in the solar cell. The resulting efficiency of an ultrathin a-Si:H (thickness: 150 nm) solar cell is enhanced by 39% compared to that with a flat back reflector and by 13% compared to that with a nanohole back reflector.

Gas-flow-induced reorientation to centimeter-sized two-dimensional colloidal single crystal of polystyrene particle

Centimeter-sized two-dimensional (2D) colloidal single crystals of polystyrene (PS) particles were fabricated at the water/air interface by capillary-modulated self-assembly. Different from previous reports, in this work, emulsifier was used to facilitate the stress release during 2D colloidal crystal formation by adjusting the interparticle lateral interactions. With the assistance of compressed nitrogen flow, 2D hexagonal colloidal single crystals of centimeter size were obtained under appropriate emulsifier concentrations. A new method was also developed to transfer the 2D colloidal crystals from the air/water interface to the desired substrate without obvious disturbance. This new transferring method was proven not to be sensitive to surface wettability nor curvature, thus 2D colloidal single crystals with large areas could be obtained on different kinds of substrate.

3D hierarchical architectures prepared by single exposure through a highly durable colloidal phase mask

Three-dimensional hierarchical architectures are fabricated using a simple, cost-effective, durable colloidal phase mask containing a colloidal monolayer embedded in a flexible polydimethylsiloxane (PDMS) membrane. These structures give rise to a photonic bandgap that can be tuned over a wide spectral range from the visible to the near-infrared regions.

Integrated one diode-one resistor architecture in nanopillar SiOx resistive switching memory by nanosphere lithography

We report on a highly compact, one diode-one resistor (1D-1R) nanopillar device architecture for SiOx-based ReRAM fabricated using nanosphere lithography (NSL). The intrinsic SiOx-based resistive switching element and Si diode are self-aligned on an epitaxial silicon wafer using NSL and a deep-Si-etch process without conventional photolithography. AC-pulse response in 50 ns regime, multibit operation, and good reliability are demonstrated. The NSL process provides a fast and economical approach to large-scale patterning of high-density 1D-1R ReRAM with good potential for use in future applications.

Fabrication of metallic nanopatterns with ultrasmooth surface on various substrates through lift-off and transfer process

The smooth surface of the metallic nanostructure is essential for the propagation of surface plasmon polaritons. In this paper, we present a novel method to fabricate the metallic nanopatterns with ultra-smooth surface on various substrates. By using a silica film as the sacrificial layer, we show that the prefabricated metallic nanopatterns produced by electron beam lithography and film deposition can be hydrolyzed and transferred onto a designated substrate. The ultra-smooth surface morphology of nanopatterns has been characterized and verified by scanning electron microscopy and atomic force microscopy. More importantly, we demonstrate that this method can successfully produce a variety of nanostructures with high product yield, even onto the uneven substrate. The results indicate that our proposed method is a promising and versatile means to fabricate multiplicate smooth metallic nanostructure on various substrates for the application of nanophotonic devices.

Quasiperiodic moiré plasmonic crystals

This paper describes the properties of silver plasmonic crystals with quasiperiodic rotational symmetries. Compared to periodic plasmonic crystals, quasiperiodic moiré structures exhibited an increased number of surface plasmon polariton modes, especially at high angles of excitation. In addition, plasmonic band gaps were often formed at the intersections of these new modes. To identify the origin and predict the location of the band gaps, we developed a Bragg-based indexing system using the reciprocal lattice vectors of the moiré plasmonic crystals. We showed that even more complicated quasiperiodic geometries could also be described by this indexing model. We anticipate that these quasiperiodic lattices will be useful for applications that require the concentration and manipulation of light over a broadband spectrum.