Graphene metallization of high-stress silicon nitride resonators for electrical integration

Research on Fabrication of Phononic Crystal Soft-Supported Graphene Resonator

In aviation, aerospace, and other fields, nanomechanical resonators could offer excellent sensing performance. Among these, graphene resonators, as a new sensitive unit, are expected to offer very high mass and force sensitivity due to their extremely thin thickness. However, at present, the quality factor of graphene resonators at room temperature is generally low, which limits the performance improvement and further application of graphene resonators. Enhancing the quality factor of graphene resonators has emerged as a pressing research concern. In a previous study, we have proposed a new mechanism to reduce the energy dissipation of graphene resonators by utilizing phononic crystal soft-supported structures. We verified its feasibility through theoretical analysis and simulations. This article focuses on the fabrication of a phononic crystal soft-supported graphene resonator. In order to address the issues of easy fracture, deformation, and low success rate in the fabrication of phononic crystal soft-supported graphene resonators, we have studied key processes for graphene suspension release and focused ion beam etching. Through parameter optimization, finally, we have obtained phononic crystal soft-supported graphene resonators with varying cycles and pore sizes. Finally, we designed an optical excitation and detection platform based on Fabry-Pérot interference principle and explored the impact of laser power and spot size on phononic crystal soft-supported graphene resonators.

Dissipation from Interlayer Friction in Graphene Nanoelectromechanical Resonators

A unique feature of two-dimensional (2D) materials is the ultralow friction at their van der Waals interfaces. A key question in a new generation of 2D heterostructure-based nanoelectromechanical systems (NEMS) is how the low friction interfaces will affect the dynamic performance. Here, we apply the exquisite sensitivity of graphene nanoelectromechanical drumhead resonators to compare the dissipation from monolayer, Bernal-stacked bilayer, and twisted bilayer graphene membranes. We find a significant difference in the average quality factors of three resonator types: 53 for monolayer, 40 for twisted and 31 for Bernal-stacked membranes. We model this difference as a combination of change in stiffness and additional dissipation from interlayer friction during motion. We find even the lowest frictions measured on sliding 2D interfaces are sufficient to alter dissipation in 2D NEMS. This model provides a generalized approach to quantify dissipation in NEMS based on 2D heterostructures which incorporate interlayer slip and friction.

High-Q Silicon Nitride Drum Resonators Strongly Coupled to Gates

Silicon nitride (SiN) mechanical resonators with high quality mechanical properties are attractive for fundamental research and applications. However, it is challenging to maintain these mechanical properties while achieving strong coupling to an electrical circuit for efficient on-chip integration. Here, we present a SiN drum resonator covered with an aluminum thin film, enabling large capacitive coupling to a suspended top-gate. Implementing the full electrical measurement scheme, we demonstrate a high quality factor ∼10⁴ (comparable to that of bare drums at room temperature) and present our ability to detect ∼10 mechanical modes at low temperature. The drum resonator is also coupled to a microwave cavity, so that we can perform optomechanical sideband pumping with a fairly good coupling strength G and demonstrate mechanical parametric amplification. This SiN drum resonator design provides efficient electrical integration and exhibits promising features for exploring mode coupling and signal processing.

Graphene-assisted electro-optomechanical integration on a silicon-on-insulator platform

Micro- and nano-optomechanics has attracted broad interest for applications of mechanical sensing and coherent signal processing. For nonpiezoelectric materials such as silicon or silicon nitride, electrocapacitive effects with metals patterned on mechanical structures are usually adopted to actuate the mechanical motion of the micro- or nanomechanical devices. However, the metals have deleterious effects on the mechanical structures because they add an additional weight and also introduce considerable mechanical losses. To solve these problems, we have proposed and experimentally demonstrated a new scheme of electro-optomechanical integration on a silicon-on-insulator platform by using single-layer graphene as a highly conductive coating for electromechanical actuation. Mechanical modes of different groups were electrically actuated and optically detected in a micromechanical resonator, with the mechanical Q > 1000 measured in air. Compatible with CMOS technology, our scheme is suitable for large-scale electro-optomechanical integration and will have wide applications in high-speed sensing, communication, and signal processing.

Electrical tuning of elastic wave propagation in nanomechanical lattices at MHz frequencies

Nanoelectromechanical systems (NEMS) that operate in the megahertz (MHz) regime allow energy transducibility between different physical domains. For example, they convert optical or electrical signals into mechanical motions and vice versa¹. This coupling of different physical quantities leads to frequency-tunable NEMS resonators via electromechanical non-linearities^2-4. NEMS platforms with single- or low-degrees of freedom have been employed to demonstrate quantum-like effects, such as mode cooling⁵, mechanically induced transparency⁵, Rabi oscillation^6,7, two-mode squeezing⁸ and phonon lasing⁹. Periodic arrays of NEMS resonators with architected unit cells enable fundamental studies of lattice-based solid-state phenomena, such as bandgaps^10,11, energy transport^10-12, non-linear dynamics and localization^13,14, and topological properties¹⁵, directly transferrable to on-chip devices. Here we describe one-dimensional, non-linear, nanoelectromechanical lattices (NEML) with active control of the frequency band dispersion in the radio-frequency domain (10-30 MHz). The design of our systems is inspired by NEMS-based phonon waveguides^10,11 and includes the voltage-induced frequency tuning of the individual resonators^2-4. Our NEMLs consist of a periodic arrangement of mechanically coupled, free-standing nanomembranes with circular clamped boundaries. This design forms a flexural phononic crystal with a well-defined bandgap, 1.8 MHz wide. The application of a d.c. gate voltage creates voltage-dependent on-site potentials, which can significantly shift the frequency bands of the device. Additionally, a dynamic modulation of the voltage triggers non-linear effects, which induce the formation of a phononic bandgap in the acoustic branch, analogous to Peierls transition in condensed matter¹⁶. The gating approach employed here makes the devices more compact than recently proposed systems, whose tunability mostly relies on materials' compliance^17,18 and mechanical non-linearities^19-22.

Wettability Investigations and Wet Transfer Enhancement of Large-Area CVD-Graphene on Aluminum Nitride

The two-dimensional and virtually massless character of graphene attracts great interest for radio frequency devices, such as surface and bulk acoustic wave resonators. Due to its good electric conductivity, graphene might be an alternative as a virtually massless electrode by improving resonator performance regarding mass-loading effects. We report on an optimization of the commonly used wet transfer technique for large-area graphene, grown via chemical vapor deposition, onto aluminum nitride (AlN), which is mainly used as an active, piezoelectric material for acoustic devices. Today, graphene wet transfer is well-engineered for silicon dioxide (SiO₂). Investigations on AlN substrates reveal highly different surface properties compared to SiO₂ regarding wettability, which strongly influences the quality of transferred graphene monolayers. Both physical and chemical effects of a plasma treatment of AlN surfaces change wettability and avoid large-scale cracks in the transferred graphene sheet during desiccation. Spatially-resolved Raman spectroscopy reveals a strong strain and doping dependence on AlN plasma pretreatments correlating with the electrical conductivity of graphene. In our work, we achieved transferred crack-free large-area (40 × 40 mm²) graphene monolayers with sheet resistances down to 350 Ω/sq. These achievements make graphene more powerful as an eco-friendly and cheaper replacement for conventional electrode materials used in radio frequency resonator devices.

Recent advances in the fabrication and structure-specific applications of graphene-based inorganic hybrid membranes

The preparation and applications of graphene (G)-based materials are attracting increasing interests due to their unique electronic, optical, magnetic, thermal, and mechanical properties. Compared to G-based hybrid and composite materials, G-based inorganic hybrid membrane (GIHM) offers enormous advantages ascribed to their facile synthesis, planar two-dimensional multilayer structure, high specific surface area, and mechanical stability, as well as their unique optical and mechanical properties. In this review, we report the recent advances in the technical fabrication and structure-specific applications of GIHMs with desirable thickness and compositions. In addition, the advantages and disadvantages of the methods utilized for creating GIHMs are discussed in detail. Finally, the potential applications and key challenges of GIHMs for future technical applications are mentioned.

Femtogram-scale photothermal spectroscopy of explosive molecules on nanostrings

We demonstrate detection of femtogram-scale quantities of the explosive molecule 1,3,5-trinitroperhydro-1,3,5-triazine (RDX) via combined nanomechanical photothermal spectroscopy and mass desorption. Photothermal spectroscopy provides a spectroscopic fingerprint of the molecule, which is unavailable using mass adsorption/desorption alone. Our measurement, based on thermomechanical measurement of silicon nitride nanostrings, represents the highest mass resolution ever demonstrated via nanomechanical photothermal spectroscopy. This detection scheme is quick, label-free, and is compatible with parallelized molecular analysis of multicomponent targets.

Graphitized silicon carbide microbeams: wafer-level, self-aligned graphene on silicon wafers

Currently proven methods that are used to obtain devices with high-quality graphene on silicon wafers involve the transfer of graphene flakes from a growth substrate, resulting in fundamental limitations for large-scale device fabrication. Moreover, the complex three-dimensional structures of interest for microelectromechanical and nanoelectromechanical systems are hardly compatible with such transfer processes. Here, we introduce a methodology for obtaining thousands of microbeams, made of graphitized silicon carbide on silicon, through a site-selective and wafer-scale approach. A Ni-Cu alloy catalyst mediates a self-aligned graphitization on prepatterned SiC microstructures at a temperature that is compatible with silicon technologies. The graphene nanocoating leads to a dramatically enhanced electrical conductivity, which elevates this approach to an ideal method for the replacement of conductive metal films in silicon carbide-based MEMS and NEMS devices.

Remote sensing in hybridized arrays of nanostrings

We study high-Q nanostrings that are joined end-to-end to form coupled linear arrays. Whereas isolated individual resonators exhibit sinusoidal vibrational modes with an almost perfectly harmonic spectrum, the modes of the interacting strings are substantially hybridized. Even far-separated strings can show significantly correlated displacement. This remote coupling property is exploited to quantify the deposition of femtogram-scale masses with string-by-string positional discrimination based on measurements of one string only.

Reconfigurable long-range phonon dynamics in optomechanical arrays

We investigate periodic optomechanical arrays as reconfigurable platforms for engineering the coupling between multiple mechanical and electromagnetic modes and for exploring many-body phonon dynamics. Exploiting structural resonances in the coupling between light fields and collective motional modes of the array, we show that tunable effective long-range interactions between mechanical modes can be achieved. This paves the way towards the implementation of controlled phononic walks and heat transfer on densely connected graphs as well as the coherent transfer of excitations between distant elements of optomechanical arrays.