MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA

Micromechanical resonators have aroused growing interest as biological and chemical sensors, and microcantilever beams are the main research focus. Recently, a resonant microcantilever with an integrated heater has been applied in on-chip thermogravimetric analysis (TGA). However, there is a strong relationship between the mass sensitivity of a resonant microcantilever and the location of adsorbed masses. Different sampling positions will cause sensitivity differences, which will result in an inaccurate calculation of mass change. Herein, an integrated H-shaped resonant beam with uniform mass sensitivity and temperature distribution is proposed and developed to improve the accuracy of bio/chemical sensing and TGA applications. Experiments verified that the presented resonant beam possesses much better uniformity of sensitivity and temperature distribution compared with resonant microcantilevers. Gas-sensing and TGA experiments utilizing the integrated resonant beam were also carried out and exhibited good measurement accuracy.

Boosting Second Harmonic Generation Efficiency and Nonlinear Susceptibility via Metasurfaces Featuring Split-Ring Resonators and Bowtie Nanoantennas

This work investigates a metasurface design to achieve remarkable second harmonic generation (SHG) conversion efficiency and enhance effective nonlinear susceptibility using the finite element method. The elements of the designed structure are composed of a rectangular split-ring resonator Ag film, a bowtie-shaped Ag nanoantenna, and a pair of Bi bars that induce nonlinear optical phenomena due to the nonuniform distribution of the electric and magnetic fields within the device surface. The simulation results agree perfectly with the theory and demonstrate outstanding achievements in terms of SHG conversion efficiency (η) and effective nonlinear susceptibility (χeff(2)). Specifically, the metasurface reaches a peak η value of 4.544×10-8 and an effective nonlinear susceptibility of 3.4×104 pm/V. This work presents a novel and versatile design to achieve high η and χeff(2) in an SHG metasurface.

Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO3 Thin Film

This article presents lithium niobate (LiNbO3) based on shear horizontal (SH0) resonators, utilizing a suspended structure, for radio frequency (RF) applications. It demonstrates the design, analysis, and fabrication of SH0 resonators based on a 36Y-cut LiNbO3 thin film. The spurious-free SH0 resonator achieves an electromechanical coupling coefficient (kt2) of 42.67% and a quality factor (Qr) of 254 at the wave-propagating orientation of 0° in the 36Y-cut plane.

Optimal Excitation and Readout of Resonators Used as Wireless Passive Sensors

Resonators are passive time-invariant components that do not produce a frequency shift. However, they respond to an excitation signal close to resonance with an oscillation at their natural frequencies with exponentially decreasing amplitudes. If resonators are connected to antennas, they form purely passive sensors that can be read remotely. In this work, we model the external excitation of a resonator with different excitation signals and its subsequent decay characteristics analytically as well as numerically. The analytical modeling explains the properties of the resonator during transient response and decay behavior. The analytical modeling clarifies how natural oscillations are generated in a linear time-invariant system, even if their spectrum was not included in the stimulation spectrum. In addition, it enables the readout signals to be optimized in terms of duration and bandwidth.

Real-Time Tracking of Carbon Dioxide Concentration Using an Optical Microsphere Resonator Sensor

Whispering gallery mode resonator sensors are nondisruptive optical sensors that can detect and monitor perturbations in a gaseous environment. Through its resonant properties of peak wavelength, amplitude, and quality factor (Q factor), changes in concentration can be quantified within seconds and monitored over days with great stability. In addition, the small footprint, low cost, and high sensitivity are ideal properties for a disposable sensor that can be utilized in extreme environments. The large Q factor of the resonant cavity enables long interaction lengths and amplifies the effect of small changes in the background refractive index, which is detectable in picometer shifts of the resonance wavelength. However, this measurement is susceptible to changes in other environmental factors such as temperature, pressure, and humidity, which manifest on the picometer wavelength scale, reinforcing the need to decouple the variables. In this work, we compare the spectral response of different diameter resonators to carbon dioxide, nitrogen, and its mixtures, observing the spectral shifting and broadening of the cavity resonance near 1550 nm. In addition, the effect of environmental temperature on spectral shifting due to the thermo-optic effect is characterized and quantified. Lastly, the gas concentrations are changed in real time to showcase the tracking and recovery capabilities of the resonator sensor.

Quality Factor Improvement of a Thin-Film Piezoelectric-on-Silicon Resonator Using a Radial Alternating Material Phononic Crystal

This paper studies the radial alternating material phononic crystal (RAM-PnC). By simulating the band gap structure of the phononic crystal, a complete acoustic band gap was verified at the resonant frequency of 175.14 MHz, which can prevent the propagation of elastic waves in a specific direction. The proposed alternately arranged radial phononic crystal structure is applied to the thin-film piezoelectric-on-silicon (TPOS) MEMS resonator. The finite element simulation method increases the anchor quality factor (Qanchor) from 60,596 to 659,536,011 at the operating frequency of 175.14 MHz, which is about 10,000 times higher. The motion resistance of the RAM-PnC resonator is reduced from 156.25 Ω to 48.31 Ω compared with the traditional resonator. At the same time, the insertion loss of the RAM-PnC resonator is reduced by 1.1 dB compared with the traditional resonator.

Compact and modular system architecture for a nano-resonator-mass spectrometer

Mass measurements in the mega-to giga-Dalton range are essential for the characterization of natural and synthetic nanoparticles, but very challenging to perform using conventional mass spectrometers. Nano-electro-mechanical system (NEMS) based MS has demonstrated unique capabilities for the analysis of ultra-high mass analytes. Yet, system designs to date included constraints transferred from conventional MS instruments, such as ion guides and high vacuum requirements. Encouraged by other reports, we investigated the influence of pressure on the performances of the NEMS sensor and the aerodynamic focusing lens that equipped our first-generation instrument. We thus realized that the NEMS spectrometer could operate at significantly higher pressures than anticipated without compromising particle focusing nor mass measurement quality. Based on these observations, we designed and constructed a new NEMS-MS prototype considerably more compact than our original system, and which features an improved aerodynamic lens alignment concept, yielding superior particle focusing. We evaluated this new prototype by performing nanoparticle deposition to characterize aerodynamic focusing, and mass measurements of calibrated gold nanoparticles samples. The particle capture efficiency showed nearly two orders of magnitude improvement compared to our previous prototype, while operating at two orders of magnitude greater pressure, and without compromising mass resolution.

Design and Development of a Hair-like Sensor with Bridge-Type Flexible Amplification Mechanisms

Compared with lever-type amplification mechanisms, bridge-type flexible amplification mechanisms have advantages in terms of amplification ratio and structural compactness. Therefore, they can effectively replace the lever-type amplification mechanism in the existing hair-like sensors and realize the development of miniature hair-like sensors with high sensitivity. With that in mind, a highly sensitive hair-like sensor based on a bridge-type amplification mechanism with distributed flexibility is presented to measure the airflow rate. First, the structural composition and operating principle of the hair-like sensor are described. Then, detailed design and analysis of the hair-like sensor are carried out, focusing on the design of the hair post structure, amplification mechanism, and resonator. Furthermore, the designed hair-like sensor is processed and prepared, and some experimental studies are conducted. The experimental results demonstrate that the developed hair-like sensor can measure the airflow rate with high sensitivity up to 8.56 Hz/(m/s)2. This provides a new concept for the structural design of hair-like sensors and expands the application of bridge-type flexible amplification mechanisms in the field of micro/nano sensors.

Mutual Coupling Reduction in Antenna Arrays Using Artificial Intelligence Approach and Inverse Neural Network Surrogates

This paper presents a novel approach to reducing undesirable coupling in antenna arrays using custom-designed resonators and inverse surrogate modeling. To illustrate the concept, two standard patch antenna cells with 0.07λ edge-to-edge distance were designed and fabricated to operate at 2.45 GHz. A stepped-impedance resonator was applied between the antennas to suppress their mutual coupling. For the first time, the optimum values of the resonator geometry parameters were obtained using the proposed inverse artificial neural network (ANN) model, constructed from the sampled EM-simulation data of the system, and trained using the particle swarm optimization (PSO) algorithm. The inverse ANN surrogate directly yields the optimum resonator dimensions based on the target values of its S-parameters being the input parameters of the model. The involvement of surrogate modeling also contributes to the acceleration of the design process, as the array does not need to undergo direct EM-driven optimization. The obtained results indicate a remarkable cancellation of the surface currents between two antennas at their operating frequency, which translates into isolation as high as -46.2 dB at 2.45 GHz, corresponding to over 37 dB improvement as compared to the conventional setup.

A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation

This paper proposes a highly sensitive and high-resolution resonant MEMS electrostatic field sensor based on electrostatic stiffness perturbation, which uses resonant frequency as an output signal to eliminate the feedthrough interference from the driving voltage. The sensor is composed of a resonator, driving electrode, detection electrode, transition electrode, and electrostatic field sensing plate. The working principle is that when there is an electrostatic field, an induction charge will appear at the surface of the electrostatic field sensing plate and induce electrostatic stiffness on the resonator, which will cause a resonant frequency shift. The resonant frequency is used as the output signal of the microsensor. The characteristics of the electrostatic field sensor are analyzed with a theoretical model and verified by finite element simulation. A device prototype is fabricated based on the Silicon on Insulator (SOI) process and tested under vacuum conditions. The results indicate that the sensitivity of the sensor is 0.1384Hz/(kV/m) and the resolution is better than 10 V/m.

Spatial Multiplexing of Whispering Gallery Mode Sensors

Whispering gallery mode resonators have proven to be robust and sensitive platforms for the trace detection of chemical and/or biological analytes. Conventional approaches using serially addressed resonators face challenges in simultaneous multi-channel (i.e., multi-species) detection. We present an alternative monitoring scheme that allows for the spatial multiplexing of whispering gallery mode resonators with the simultaneous observation of the resonance spectra from each of them. By imaging arrays of microspheres and monitoring the glare spot intensities through image processing routines, resonance spectra from multiple resonators may be simultaneously recorded without interference or confounding effects of serial excitation/detection. We demonstrate our multiplexed imaging approach with bulk refractive index variations and virus-antibody binding.

A Compact Rat-Race Coupler with Harmonic Suppression for GSM Applications: Design and Implementation Using Artificial Neural Network

In this paper, a compact microstrip rat-race coupler at a 950 MHz operating frequency is designed, simulated, and fabricated. New branches are proposed in this design using high-/low- impedance open-ended resonators. In the conventional rat-race coupler, there are three long λ/4 branches and a 3λ/4 branch, and they occupy a very large area. In the presented designed, three compact branches are proposed for use instead of three λ/4 branches and an ultra-compact branch is suggested for use instead of the 3λ/4 branch. Additionally, an artificial neural network (ANN) approach is incorporated to improve the performance of the resonators using a radial basis function (RBF) network. The proposed compact structure has achieved a reduction of more than 82% compared with the size of the conventional coupler structures. Additionally, the proposed coupler can suppress the 2nd up to the 5th harmonic to improve the performance of the device.

Study on Microwave-Assisted Ignition Using a Novel Aero-Engine Combustor

Microwave plasma can improve the performance of ignition and combustion, as well as reduce pollutant emissions. By designing a novel microwave feeding device, the combustor can be used as a cavity resonator to generate microwave plasma and improve the performance of ignition and combustion. In order to feed the energy of microwave into the combustor as much as possible, and effectively adapt to the change in resonance frequency of combustor during ignition and combustion, the combustor was designed and manufactured by optimizing the size of slot antenna and setting the tuning screws, according to the simulation results of HFSS software (version: 2019 R 3). The relationship between the size, position of metal tip in the combustor and the discharge voltage was studied using HFSS software, as well as the interaction between ignition kernel, flame and microwave. The resonant characteristics of combustor and the discharge of microwave-assisted igniter were subsequently studied via experiments. The results show that the combustor as microwave cavity resonator has a wider resonance curve and can adapt to the change in resonance frequency during ignition and combustion. It is also indicated that microwave can enhance the discharge development of igniter and increase the discharge size. Based on this, the electric and magnetic field effects of microwave are decoupled.

A Miniaturized Dual-Band Diplexer Design with High Port Isolation for UHF/SHF Applications Using a Neural Network Model

In this paper, a compact dual-band diplexer is proposed using two interdigital filters. The proposed microstrip diplexer correctly works at 2.1 GHz and 5.1 GHz. In the proposed diplexer, two fifth-order bandpass interdigital filters are designed to pass the desired frequency bands. Applied interdigital filters with simple structures pass the 2.1 GHz and 5.1 GHz frequencies and suppress other frequency bands with high attenuation levels. The dimensions of the interdigital filter are obtained using the artificial neural network (ANN) model, constructed from the EM-simulation data. The desired filter and diplexer parameters, such as operating frequency, bandwidth, and insertion loss, can be obtained using the proposed ANN model. The insertion loss parameter of the proposed diplexer is 0.4 dB, and more than 40 dB output port isolation is obtained (for both operating frequencies). The main circuit has the small size of 28.5 mm × 23 mm (0.32 λg × 0.26 λg). The proposed diplexer, with the achieved desired parameters, is a good candidate for UHF/SHF applications.

A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application

A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 μm. The resonator has been actuated in an atmosphere and at room temperature by mechanical, electrostatic and electro-thermal methods. The (1,1) mode has been observed to dominate the resonance, which suggests that the graphene/PMMA membrane has been perfectly clamped and seals the closed cavity. The degree of linearity of the membrane's displacement versus the actuation signal has been determined. The resonant frequency has been observed to be tuned to around 4% by applying an AC voltage through the membrane. The strain has been estimated to be around 0.08%. This research puts forward a graphene-based sensor design for acoustic sensing.

The Application of Nanofibrous Resonant Membranes for Room Acoustics

Solitary sound absorbing elements exist; however, their construction is massive and heavy, which largely limits their use. These elements are generally made of porous materials that serve to reduce the amplitude of the reflected sound waves. Materials based on the resonance principle (oscillating membranes, plates, and Helmholtz's resonators) can also be used for sound absorption. A limitation of these elements is the absorption of a very narrow sound band to which these elements are "tuned". For other frequencies, the absorption is very low. The aim of the solution is to achieve a high sound absorption efficiency at a very low weight. A nanofibrous membrane was used to create high sound absorption in synergy with special grids working as a cavity resonator. Prototypes of the nanofibrous resonant membrane on a grid with a thickness of 2 mm and an air gap of 50 mm already showed a high level of sound absorption (0.6-0.8) at a frequency of 300 Hz, which is a very unique result. Since acoustic elements, i.e., lighting, tiles, and ceilings, are designed for interiors, an essential part of the research is also the achievement of the lighting function and the emphasis on aesthetic design.

Design of a Compact Quad-Channel Microstrip Diplexer for L and S Band Applications

In this paper, two novel dual-band bandpass filters (BPFs) and a compact quad-channel diplexer working at 1.7/3.3 GHz and 1.9/3.6 GHz are proposed. In the proposed diplexer design, triangular loop resonators and rectangular loop resonators are used together to reduce the circuit size and improve diplexer performances. Insertion loss (IL) and return loss (RL) of the proposed diplexer are better than 0.8 dB and 21 dB, respectively, at these four operating frequencies. Output ports isolation parameter is better than 30 dB. With the achieved specifications, the proposed diplexer can be used in L and S band applications.

Performance Analysis of Resonantly Driven Piezoelectric Sensors Operating in Amplitude Mode and Phase Mode

Piezoelectric layers coupled to micromechanical resonators serve as the basis for sensors to detect a variety of different physical quantities. In contrast to passive sensors, actively operated sensors exploit a detuning of the resonance frequency caused by the signal to be measured. To detect the time-varying resonance frequency, the piezoelectric resonator is resonantly excited by a voltage, with this signal being modulated in both amplitude and phase by the signal to be measured. At the same time, the sensor signal is impaired by amplitude noise and phase noise caused by sensor-intrinsic noise sources that limit the reachable detectivities. This leads to the question of the optimum excitation frequency and the optimum readout type for such sensors. In this article, based on the fundamental properties of micromechanical resonators, a detailed analysis of the performance of piezoelectric resonators in amplitude mode and phase mode is presented. In particular, the sensitivities, the noise behavior, and the resulting limits of detection (LOD) are considered and analytical expressions are derived. For the first time, not only the influence of a static measurand is analyzed, but also the dynamic operation, i.e., physical quantities to be detected that quickly change over time. Accordingly, frequency-dependent limits of detection can be derived in the form of amplitude spectral densities. It is shown that the low-frequency LOD in phase mode is always about 6 dB better than the LOD in amplitude mode. In addition, the bandwidth, in terms of detectivity, is generally significantly larger in phase mode and never worse compared with the amplitude mode.

Application of Compact Folded-Arms Square Open-Loop Resonator to Bandpass Filter Design

Folded-arms square open-loop resonator (FASOLR) is a variant of the conventional microstrip square open-loop resonator (SOLR) that facilitates further device size miniaturization by having the two arms of the conventional SOLR folded inwards. This paper highlights the benefits of this brand of compact SOLR by implementing a five-pole Chebyshev bandpass filter (BPF) using compact FASOLR. The test BPF is presented, with centre frequency of 2.2 GHz, fractional bandwidth of 10%, passband ripple of 0.04321 dB, and return loss of 20 dB. The design is implemented on a Rogers RT/Duroid 6010LM substrate with a dielectric constant of 10.7 and thickness of 1.27 mm. The filter device is manufactured and characterised, with the experimentation results being used to justify the simulation results. The presented measurement and electromagnetic (EM) simulation results demonstrate a good match. The EM simulation responses achieve a minimum insertion loss of 0.8 dB and a very good channel return loss of 22.6 dB. The measurement results, on the other hand, show a minimum insertion loss of 0.9 dB and a return loss of better than 19.2 dB. The filter component has a footprint of 36.08 mm by 6.74 mm (that is, 0.26 λg × 0.05 λg), with λg indicating the guided wavelength for the 50 Ohm microstrip line impedance at the centre frequency of the proposed fifth-order bandpass filter.

Electrically Tunable MXene Nanomechanical Resonators Vibrating at Very High Frequencies

As an emerging class of two-dimensional (2D) layered nanomaterial, MXene exhibits a number of intriguing properties, such as good electrical conductivity and high elastic modulus, and has witnessed continued growth in related device research. However, nanoscale MXene devices which leverage both the intrinsic electrical and mechanical properties of these 2D crystals have not been experimentally studied. Here we demonstrate nanoelectromechanical resonators based on 2D MXene crystals, where Ti₃C₂T_x drumheads with a wide range of thickness, from more than 50 layers all the way down to a monolayer, exhibit robust nanomechanical vibrations with fundamental-mode frequency f₀ up to >70 MHz in the very high frequency (VHF) band, a displacement noise density down to 52 fm/Hz^1/2, and a fundamental-mode frequency-quality factor product up to f₀ × Q ≈ 6.85 × 10⁹ Hz. By combining experimental results with theoretical calculations, we independently derive the Young's modulus of 2D Ti₃C₂T_x crystals to be 270-360 GPa, in excellent agreement with nanoindentation measurements, based on which we elucidate frequency scaling pathways toward microwave frequencies. We further demonstrate electrical tuning of resonance frequency in MXene resonators and frequency-shift-based MXene vacuum gauges with responsivity of 736%/Torr and detection range down to 10^-4 Torr. Our study can lead to the design and creation of nanoscale vibratory devices that exploit the intrinsic electrical and mechanical properties in 2D MXene crystals.

Concepts and Key Technologies of Microelectromechanical Systems Resonators

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.

High Quality Factors in Superlattice Ferroelectric Hf0.5Zr0.5O2 Nanoelectromechanical Resonators

The discovery of ferroelectricity and advances in creating polar structures in atomic-layered hafnia-zirconia (Hf_xZr_1-xO₂) films spur the exploration of using the material for novel integrated nanoelectromechanical systems (NEMS). Despite its popularity, the approach to achieving high quality factors (Qs) in resonant NEMS made of Hf_xZr_1-xO₂ thin films remains unexplored. In this work, we investigate the realization of high Qs in Hf_0.5Zr_0.5O₂ nanoelectromechanical resonators by stress engineering via the incorporation of alumina (Al₂O₃) interlayers. We fabricate nanoelectromechanical resonators out of the Hf_0.5Zr_0.5O₂-Al₂O₃ superlattices, from which we measure Qs up to 171,000 and frequency-quality factor products (f × Q) of >10¹¹ Hz through electrical excitation and optical detection schemes at room temperature in vacuum. The analysis suggests that clamping loss and surface loss are the limiting dissipation sources and f × Q > 10¹² Hz is achievable through further engineering of anchor structure and built-in stress.

Monolayer MXene Nanoelectromechanical Piezo-Resonators with 0.2 Zeptogram Mass Resolution

2D materials-based nanoelectromechanical resonant systems with high sensitivity can precisely trace quantities of ultra-small mass molecules and therefore are broadly applied in biological analysis, chemical sensing, and physical detection. However, conventional optical and capacitive transconductance schemes struggle to measure high-order mode resonant effectively, which is the scientific key to further achieving higher accuracy and lower noise. In the present study, the different vibrations of monolayer Ti₃ C₂ Tx MXene piezo-resonators are investigated, and achieve a high-order f_2,3 resonant mode with a ≈234.59 ± 0.05 MHz characteristic peak due to the special piezoelectrical structure of the Ti₃ C₂ Tx MXene layer. The effective measurements of signals have a low thermomechanical motion spectral density (9.66 ± 0.01  fmHz$\frac{{fm}}{{\sqrt {Hz} }}$ ) and an extensive dynamic range (118.49 ± 0.42 dB) with sub-zeptograms resolution (0.22 ± 0.01 zg) at 300 K temperature and 1 atm. Furthermore, the functional groups of the Ti₃ C₂ Tx MXene with unique adsorption properties enable a high working range ratio of ≈3100 and excellent repeatability. This Ti₃ C₂ Tx MXene device demonstrates encouraging performance advancements over other nano-resonators and will lead the related engineering applications including high-sensitivity mass detectors.

Raman Spectroscopic Probe for Nonlinear MoS2 Nanoelectromechanical Resonators

Resonant nanoelectromechanical systems (NEMS) enabled by two-dimensional (2D) semiconductors have been actively explored and engineered for making ultrascaled transducers toward applications in ultralow-power signal processing, communication, and sensing. Although the transduction of miniscule resonant motions has been achieved by low-noise optical or electronic techniques, direct probing of strain in vibrating 2D semiconductor membranes and the interplay between the spectroscopic and mechanical properties are still largely unexplored. Here, we experimentally demonstrate dynamical phonon softening in atomically thin molybdenum disulfide (MoS₂) NEMS resonators by directly coupling Raman spectroscopy with optical interferometry resonance motion detection. In single-layer, bilayer, and trilayer (1L to 3L) MoS₂ circular membrane NEMS resonators, we show that high-amplitude nonlinear resonances can enhance the Raman signal amplitude, as well as introduce Raman modes softening up to 0.8 cm^-1. These results shall pave the way for engineering the coupling and control between collective mechanical vibrations and Raman modes of the constituent crystals in 2D transducers.

Low-Cost Electromagnetic Split-Ring Resonator Sensor System for the Petroleum Industry

The use of a low-cost split-ring resonator (SRR) passive sensor for the real-time permittivity characterization of hydrocarbon fluids is proposed in this paper. The characterization of the sensor is performed through both full-wave simulation and measurements. Thanks to the analysis of several crude samples, the possibility of discrimination between different types of crude and the estimation of several of their properties are demonstrated. Between them, the estimation of sulfur, aromatic hydrocarbons, and salt-water concentrations either in normal ambient conditions or in a high-pressure and high-temperature environment can be mentioned. Experiments were run both at normal ambient conditions and pressures up to 970 bar and temperatures up to 200 °C.

Towards Repeatable, Scalable Graphene Integrated Micro-Nano Electromechanical Systems (MEMS/NEMS)

The demand for graphene-based devices is rapidly growing but there are significant challenges for developing scalable and repeatable processes for the manufacturing of graphene devices. Basic research on understanding and controlling growth mechanisms have recently enabled various mass production approaches over the past decade. However, the integration of graphene with Micro-Nano Electromechanical Systems (MEMS/NEMS) has been especially challenging due to performance sensitivities of these systems to the production process. Therefore, ability to produce graphene-based devices on a large scale with high repeatability is still a major barrier to the commercialization of graphene. In this review article, we discuss the merits of integrating graphene into Micro-Nano Electromechanical Systems, current approaches for the mass production of graphene integrated devices, and propose solutions to overcome current manufacturing limits for the scalable and repeatable production of integrated graphene-based devices.

Development of a Microwave Sensor for Solid and Liquid Substances Based on Closed Loop Resonator

In this work, a compact dielectric sensor for the detection of adulteration in solid and liquid samples using planar resonators is presented. Six types of filter prototypes operating at 2.4 GHz are presented, optimized, numerically assessed, fabricated and experimentally validated. The obtained experimental results provided an error less than 6% with respect to the simulated results. Moreover, a size reduction of about 69% was achieved for the band stop filter and a 75% reduction for band pass filter compared to standard sensors realized using open/short circuited stub microstrip lines. From the designed filters, the miniaturised filter with Q of 95 at 2.4 GHz and size of 35 mm × 35 mm is formulated as a sensor and is validated theoretically and experimentally. The designed sensor shows better sensitivity, and it depends upon the dielectric property of the sample to be tested. Simulation and experimental validation of the designed sensor is carried out by loading different samples onto the sensor. The adulteration detection of various food samples using the designed sensor is experimentally validated and shows excellent sensing on adding adulterants to the original sample. The sensitivity of the sensor is analyzed by studying the variations in resonant frequency, scattering parameters, phase and Q factor with variation in the dielectric property of the sample loaded onto the sensor.

A Resonant Coupler for Subcutaneous Implant

A resonator coupler for subcutaneous implants has been developed with a new impedance matching pattern added to the conventional loop antenna. The tuning element of a concentric metal pad contributes distributed capacitance and inductance to the planar inductive loop and improves resonance significantly. It provides a better qualify factor for resonant coupling and a much lower reflection coefficient for the implant electronics. Practical constraints are taken into account for designs including the requirement of operation within a regulated frequency band and the limited thickness for a monolithic implant. In this work, two designs targeting to operate in the two industrial, scientific, and medical (ISM) bands at 903 MHz and 2.45 GHz are considered. The tuning metal pad improves their resonances significantly, compared to the conventional loop designs. Since it is difficult to tune the implant antenna after implantation, the effects of tissue depth variations due to the individual's surgery and the appropriate implant depths are investigated. Simulations conducted with the dielectric properties of human skin documented in the literature are compared to measurements done with hydrated ground pork as phantoms. Experiments and simulations are conducted to explain the discrepancies in frequency shifts due to the uses of pork phantoms. The design method is thus validated for uses on human skin. A noninvasive localization method to identify the implant under the skin has been examined and demonstrated by both simulations and measurements. It can efficiently locate the subcutaneous implant based on the high quality-factor resonance owing to the tuning elements in both implant and transmitter couplers. The planar resonant coupler for wireless power transfer shows good performance and promise in subcutaneous applications for implants.

Near-Field Mapping of Photonic Eigenmodes in Patterned Silicon Nanocavities by Electron Energy-Loss Spectroscopy

Recently, there has been significant interest in using dielectric nanocavities for the controlled scattering of light, owing to the diverse electromagnetic modes that they support. For plasmonic systems, electron energy-loss spectroscopy (EELS) is now an established method enabling structure-optical property analysis at the scale of the nanostructure. Here, we instead test its potential for the near-field mapping of photonic eigenmodes supported in planar dielectric nanocavities, which are lithographically patterned from amorphous silicon according to standard photonic principles. By correlating results with finite element simulations, we demonstrate how many of the EELS excitations can be directly corresponded to various optical eigenmodes of interest for photonic engineering. The EELS maps present a high spatial definition, displaying intensity features that correlate precisely to the impact parameters giving the highest probability of modal excitation. Further, eigenmode characteristics translate into their EELS signatures, such as the spatially and energetically extended signal of the low Q-factor electric dipole and nodal intensity patterns emerging from excitation of toroidal and second-order magnetic modes within the nanocavity volumes. Overall, the spatial-spectral nature of the data, combined with our experimental-simulation toolbox, enables interpretation of subtle changes in the EELS response across a range of nanocavity dimensions and forms, with certain simulated resonances matching the excitation energies within ±0.01 eV. By connecting results to far-field simulations, perspectives are offered for tailoring the nanophotonic resonances via manipulating nanocavity size and shape.

Dissipation from Interlayer Friction in Graphene Nanoelectromechanical Resonators

A unique feature of two-dimensional (2D) materials is the ultralow friction at their van der Waals interfaces. A key question in a new generation of 2D heterostructure-based nanoelectromechanical systems (NEMS) is how the low friction interfaces will affect the dynamic performance. Here, we apply the exquisite sensitivity of graphene nanoelectromechanical drumhead resonators to compare the dissipation from monolayer, Bernal-stacked bilayer, and twisted bilayer graphene membranes. We find a significant difference in the average quality factors of three resonator types: 53 for monolayer, 40 for twisted and 31 for Bernal-stacked membranes. We model this difference as a combination of change in stiffness and additional dissipation from interlayer friction during motion. We find even the lowest frictions measured on sliding 2D interfaces are sufficient to alter dissipation in 2D NEMS. This model provides a generalized approach to quantify dissipation in NEMS based on 2D heterostructures which incorporate interlayer slip and friction.

A Resonantly Driven, Electroluminescent Metal Oxide Semiconductor Capacitor with High Power Efficiency

Electroluminescence can be generated from a wide variety of emissive materials using a simple, generic device structure. In such a device, emissive materials are deposited by various means on a metal oxide semiconductor capacitor structure across which alternating current voltage is applied. However, these devices suffer from low external efficiencies and require the application of high voltages, thus hindering their practical usage and raising questions about the possible efficiencies that can be achieved using alternating current driving schemes in which injection of bipolar charges does not occur simultaneously. We show that appropriately chosen reactive electrical components can be leveraged to generate passive voltage gain across the device, allowing operation at input voltages below 1 V for devices across a range of gate oxide thicknesses. Furthermore, high power efficiencies are observed when using thermally activated delayed fluorescence emitters deposited by a single thermal evaporation step, suggesting that the efficiency of a light-emitting device with simplified structure can be high.

Curvature and Stress Effects on the Performance of Contour-Mode Resonant ΔE Effect Magnetometers

Miniaturized piezoelectric/magnetostrictive contour-mode resonators have been shown to be effective magnetometers by exploiting the ΔE effect. With dimensions of ~100-200 μm across and <1 μm thick, they offer high spatial resolution, portability, low power consumption, and low cost. However, a thorough understanding of the magnetic material behavior in these devices has been lacking, hindering performance optimization. This manuscript reports on the strong, nonlinear correlation observed between the frequency response of these sensors and the stress-induced curvature of the resonator plate. The resonance frequency shift caused by DC magnetic fields drops off rapidly with increasing curvature: about two orders of magnitude separate the highest and lowest frequency shift in otherwise identical devices. Similarly, an inverse correlation with the quality factor was found, suggesting a magnetic loss mechanism. The mechanical and magnetic properties are theoretically analyzed using magnetoelastic finite-element and magnetic domain-phase models. The resulting model fits the measurements well and is generally consistent with additional results from magneto-optical domain imaging. Thus, the origin of the observed behavior is identified and broader implications for the design of nano-magnetoelastic devices are derived. By fabricating a magnetoelectric nano-plate resonator with low curvature, a record-high DC magnetic field sensitivity of 5 Hz/nT is achieved.

Experimental Study on Variation of Surface Roughness and Q Factors of Fused Silica Cylindrical Resonators with Different Grinding Speeds

For the axisymmetric shell resonator gyroscopes, the quality factor (Q factor) of the resonator is one of the core parameters limiting their performances. Surface loss is one of the dominating losses, which is related to the subsurface damage (SSD) that is influenced by the grinding parameters. This paper experimentally studies the surface roughness and Q factor variation of six resonators ground by three different grinding speeds. The results suggest that the removal of the SSD cannot improve the Q factor continuously, and the variation of surface roughness is not the dominant reason to affect the Q factor. The measurement results indicate that an appropriate increase in the grinding speed can significantly improve the surface quality and Q factor. This study also demonstrates that a 20 million Q factor for fused silica cylindrical resonators is achievable using appropriate manufacturing processes combined with post-processing etching, which offers possibilities for developing high-precision and low-cost cylindrical resonator gyroscopes.

Ultrawide Frequency Tuning of Atomic Layer van der Waals Heterostructure Electromechanical Resonators

We report on the experimental demonstration of atomically thin molybdenum disulfide (MoS₂)-graphene van der Waals (vdW) heterostructure nanoelectromechanical resonators with ultrawide frequency tuning. With direct electrostatic gate tuning, these vdW resonators exhibit exceptional tunability, in general, Δf/f₀ > 200%, for continuously tuning the same device and the same mode (e.g., from ∼23 to ∼107 MHz), up to Δf/f₀ ≈ 370%, the largest fractional tuning range in such resonators to date. This remarkable electromechanical resonance tuning is investigated by two different analytical models and finite element simulations. Furthermore, we carefully perform clear control experiments and simulations to elucidate the difference in frequency tuning between the heterostructure and single-material resonators. At a given initial strain level, the tuning range depends on the two-dimensional (2D) Young's moduli of the constitutive crystals; devices built on materials with lower 2D moduli show wider tuning ranges. This study exemplifies that vdW heterostructure resonators can retain unconventionally broad, continuous tuning, which is promising for voltage-controlled, tunable nanosystems.

Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis

This study aims to develop methods to design and optimize the resonator in a resonant accelerometer based on mode and frequency analysis. First, according to the working principle of a resonant accelerometer, the resonator is divided into three parts: beam I, beam II, and beam III. Using Hamilton's principle, the undamped dynamic control equation and the ordinary differential dynamic equation of the resonant beam are obtained. Moreover, the structural parameters of the accelerometer are designed and optimized by using resonator mode and frequency analysis, then using finite element simulation to verify it. Finally, 1 g acceleration tumbling experiments are built to verify the feasibility of the proposed design and optimization method. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 98 Hz/g, a resolution of 0.917 mg, and a bias stability of 1.323 mg/h. The research findings suggest that according to the resonator mode and frequency analysis, the values of the resonator structural parameters are determined so that the working mode of the resonator is far away from the interference mode and avoids resonance points effectively. The research results are expected to be beneficial for a practical resonant sensor design.

Low Power Contactless Bioimpedance Sensor for Monitoring Breathing Activity

An electronic circuit for contactless detection of impedance changes in a tissue is presented. It operates on the principle of resonant frequency change of the resonator having the observed tissue as a dielectric. The operating frequency reflects the tissue dielectric properties (i.e., the tissue composition and on the tissue physiological changes). The sensor operation was tested within a medical application by measuring the breathing of a patient, which was an easy detectable physiological process. The advantage over conventional contact bioimpedance measurement methods is that no direct contact between the resonator and the body is required. Furthermore, the sensor's wide operating range, ability to adapt to a broad range of measured materials, fast response, low power consumption, and small outline dimensions enables applications not only in the medical sector, but also in other domains. This can be extended, for example, to food industry or production maintenance, where the observed phenomena are reflected in dynamic dielectric properties of the observed object or material.

Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Magnetoelectric resonators have been studied for the detection of small amplitude and low frequency magnetic fields via the delta-E effect, mainly in fundamental bending or bulk resonance modes. Here, we present an experimental and theoretical investigation of magnetoelectric thin-film cantilevers that can be operated in bending modes (BMs) and torsion modes (TMs) as a magnetic field sensor. A magnetoelastic macrospin model is combined with an electromechanical finite element model and a general description of the delta-E effect of all stiffness tensor components C_ij is derived. Simulations confirm quantitatively that the delta-E effect of the C₆₆ component has the promising potential of significantly increasing the magnetic sensitivity and the maximum normalized frequency change Δfr. However, the electrical excitation of TMs remains challenging and is found to significantly diminish the gain in sensitivity. Experiments reveal the dependency of the sensitivity and Δfr of TMs on the mode number, which differs fundamentally from BMs and is well explained by our model. Because the contribution of C₁₁ to the TMs increases with the mode number, the first-order TM yields the highest magnetic sensitivity. Overall, general insights are gained for the design of high-sensitivity delta-E effect sensors, as well as for frequency tunable devices based on the delta-E effect.

Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching

This work presents the design and characterization of a resonant CMOS-MEMS pressure sensor manufactured in a standard 180 nm CMOS industry-compatible technology. The device consists of aluminum square plates attached together by means of tungsten vias integrated into the back end of line (BEOL) of the CMOS process. Three prototypes were designed and the structural characteristics were varied, particularly mass and thickness, which are directly related to the resonance frequency, quality factor, and pressure; while the same geometry at the frontal level, as well as the air gap, were maintained to allow structural comparative analysis of the structures. The devices were released through an isotropic wet etching step performed in-house after the CMOS die manufacturing, and characterized in terms of Q-factor vs. pressure, resonant frequency, and drift vs. temperature and biasing voltage.

Single-Layer MoS2 Mechanical Resonant Piezo-Sensors with High Mass Sensitivity

Thin-film resonators and scanning probe microscopies (SPM) are usually used on low-frequency mechanical systems at the nanoscale or larger. Generally, off-chip approaches are applied to detect mechanical vibrations in these systems, but these methods are not much appropriate for atomic-thin-layer devices with ultrahigh characteristic frequencies and ultrathin thickness. Primarily, those mechanical devices based on atomic-layers provide highly improved properties, which are inapproachable with conventional nanoelectromechanical systems (NEMS). In this report, the assembly and manipulation of single-atomic-layer piezo-resonators as mass sensors with eigen mechanical resonances up to gigahertz are described. The resonators utilize electronic vibration transducers based on piezo-electric polarization charges, allowing direct and optimal atomic-layer sensor exports. This direct detection affords practical applications with the previously inapproachable Q-factor and sensitivity rather than photoelectric conversion. Exploration of a 2406.26 MHz membrane vibration is indicated with a thermo-noise-limited mass resolution of ∼3.0 zg (10^-21 g) in room temperature. The fabricated mass sensors are contactless and fast and can afford a method for precision measurements of the ultrasmall mass with two-dimentional materials.

Surface Acoustic Wave Resonators for Wireless Sensor Network Applications in the 433.92 MHz ISM Band

Surface acoustic wave (SAW) resonators are low cost devices that can operate wirelessly on a received radio frequency (RF) signal with no requirement for an additional power source. Multiple SAW resonators operating as transponders that form a wireless sensor network (WSN), often need to operate at tightly spaced, different frequencies inside the industrial, scientific and medical (ISM) bands. This requires nanometer precision in the design and fabrication processes. Here, we present results demonstrating a reliable and repeatable fabrication process that yields at least four arrays on a single 4-inch wafer. Each array consists of four single-port resonators with center frequencies allocated inside four different sub-bands that have less than 50 kHz bandwidth and quality factors exceeding 8000. We see promise of standard, low-cost photolithography techniques being used to fabricate multiple SAW resonators with different center resonances all inside the 433.05 MHz-434.79 MHz ISM band and a mere 100 kHz spacing. We achieved that by leveraging the intrinsic process variation of photolithography and the impact of the metallization ratio and metal thickness in rendering distinct resonant frequencies.

Social Laser Model for the Bandwagon Effect: Generation of Coherent Information Waves

During recent years our society has often been exposed to coherent information waves of high amplitudes. These are waves of huge social energy. Often they are of destructive character, a kind of information tsunami. However, they can also carry positive improvements in human society, as waves of decision-making matching rational recommendations of societal institutes. The main distinguishing features of these waves are their high amplitude, coherence (homogeneous character of social actions generated by them), and short time needed for their generation and relaxation. Such waves can be treated as large-scale exhibitions of the bandwagon effect. We show that this socio-psychic phenomenon can be modeled based on the recently developed social laser theory. This theory can be used to model stimulated amplification of coherent social actions. “Actions” are treated very generally, from mass protests to votes and other collective decisions, such as, e.g., acceptance (often unconscious) of some societal recommendations. In this paper, we concentrate on the theory of laser resonators, physical vs. social. For the latter, we analyze in detail the functioning of Internet-based echo chambers. Their main purpose is increasing of the power of the quantum information field as well as its coherence. Of course, the bandwagon effect is well known and well studied in social psychology. However, social laser theory gives the possibility to model it by using general formalism of quantum field theory. The paper contains the minimum of mathematics and it can be read by researchers working in psychological, cognitive, social, and political sciences; it might also be interesting for experts in information theory and artificial intelligence.

Pushing Absorption of Perovskite Nanocrystals into the Infrared

To date, defect-tolerance electronic structure of lead halide perovskite nanocrystals is limited to an optical feature in the visible range. Here, we demonstrate that IR sensitization of formamidinium lead iodine (FAPI) nanocrystal array can be obtained by its doping with PbS nanocrystals. In this hybrid array, absorption comes from the PbS nanocrystals while transport is driven by the perovskite which reduces the dark current compared to pristine PbS. In addition, we fabricate a field-effect transistor using a high capacitance ionic glass made of hybrid FAPI/PbS nanocrystal arrays. We show that the hybrid material has an n-type nature with an electron mobility of 2 × 10^-3 cm² V^-1 s^-1. However, the dark current reduction is mostly balanced by a loss of absorption. To overcome this limitation, we couple the FAPI/PbS hybrid to a guided mode resonator that can enhance the infrared light absorption.

Remote characterization of resonance frequency with a wirelessly powered parametric oscillator

It is of both fundamental importance and practical value to measure the frequency of an LC resonator beyond the near-field region, especially when the resonator is used as a standalone capacitive sensor embedded inside a closed environment. To improve the coupling efficiency between the resonator and the external sniffer loop, we propose a novel method to integrate the LC resonator with a wirelessly-powered parametric resonator whose oscillation signal can be remotely identified in a noisy background. By measuring the minimum power level that is required for oscillation at different pumping frequencies, the resonator can be indirectly characterized by the frequency response curve. Starting from the basic principle of parametric oscillation, we will predict the measurable extremities in the frequency-dependent power curve under various circumstances that are classified based on the relative ratio between the lower and higher resonance frequencies. Our analytical models are validated by on-bench measurements performed on several parametric resonators with different circuit topologies. Their ability for remote characterization will make parametric resonators useful in structural health sensors or biomedical implants.

Highly Sensitive and Contactless Ammonia Detection Based on Nanocomposites of Phosphate-Functionalized Reduced Graphene Oxide/Polyaniline Immobilized on Microstrip Resonators

Ammonia is a key compound in a variety of industrial sectors, including automotive, chemical, and food. Its hazardous effects on the environment and human health require the implementation of proper safety guidelines and monitoring techniques. An attractive approach is to add sensing functionality to low-cost wireless communication devices to allow for the monitoring/mapping of the chemical environment across a large area. This study outlines a highly sensitive contactless ammonia gas sensor with the potential for continuous and wireless mapping of ammonia emissions by integrating an antenna on the device. The devices were fabricated by casting a novel advanced sensing nanocomposite, polyaniline (PANI), and phosphate-functionalized reduced graphene oxide (P-rGO) on split-ring resonators (SRRs). P-rGO incorporation in PANI produced a positive-sensing synergistic effect to multiply the sensing response severalfold to ammonia and dimethylamine gases. Furthermore, we identified that the modification of the semiconductive behavior of the nanosheets, achieved via phosphate functionalization, is the key factor to the positive-sensing synergy observed in the nanocomposites because of the formation of localized heterojunctions. The prepared SRRs exhibited remarkably a low detection limit, ∼1 ppm, to ammonia gas, as well as good stability and selectivity, which paves the path for a novel generation of wireless, chipless, potentially fully printable, and passive sensor platforms.

Temperature-Modulated Micromechanical Thermal Analysis with Microstring Resonators Detects Multiple Coherent Features of Small Molecule Glass Transition

Micromechanical Thermal Analysis utilizes microstring resonators to analyze a minimum amount of sample to obtain both the thermal and mechanical responses of the sample during a heating ramp. We introduce a modulated setup by superimposing a sinusoidal heating on the linear heating and implementing a post-measurement data deconvolution process. This setup is utilized to take a closer look at the glass transition as an important fundamental feature of amorphous matter with relations to the processing and physical stability of small molecule drugs. With an additionally developed image and qualitative mode shape analysis, we are able to separate distinct features of the glass transition process and explain a previously observed two-fold change in resonance frequency. The results from this setup indicate the detection of initial relaxation to viscous flow onset as well as differences in mode responsivity and possible changes in the primary resonance mode of the string resonators. The modulated setup is helpful to distinguish these processes during the glass transition with varying responses in the frequency and quality factor domain and offers a more robust way to detect the glass transition compared to previously developed methods. Furthermore, practical and theoretical considerations are discussed when performing measurements on string resonators (and comparable emerging analytical techniques) for physicochemical characterization.

μ-Coriolis Mass Flow Sensor with Resistive Readout

This paper presents a μ-Coriolis mass flow sensor with resistive readout. Instead of measuring a net displacement such as in a capacitive readout, a resistive readout detects the deformation of the suspended micro-fluidic channel. It allows for actuation at much higher amplitudes than for a capacitive readout, resulting in correspondingly larger Coriolis forces in response to fluid flow. A resistive readout can be operated in two actuation vibrational modes. A capacitive readout can only be operated in one of these two modes, which is more sensitive to external disturbances. Three types of devices have been realized. We present measurement results for all three devices. One device clearly outperforms the other two, with a flow sensitivity of 2.22 °/(g·h⁻¹) and a zero-flow stability of 0.02 g·h⁻¹ over 30 min. Optimization of the metal strain gauges and/or implementation of poly-Silicon strain gauges could further improve performance.

In-Plane Vibration of Hammerhead Resonators for Chemical Sensing Applications

Thermally excited and piezoresistively detected in-plane cantilever resonators have been previously demonstrated for gas- and liquid-phase chemical and biosensing applications. In this work, the hammerhead resonator geometry, consisting of a cantilever beam supporting a wider semicircular "head", vibrating in an in-plane vibration mode, is shown to be particularly effective for gas-phase sensing with estimated limits of detection in the sub-ppm range for volatile organic compounds. This paper discusses the hammerhead resonator design and the particular advantages of the hammerhead geometry, while also presenting mechanical characterization, optical characterization, and chemical sensing results. These data highlight the distinct advantages of the hammerhead geometry over other cantilever designs.

Fully-Differential TPoS Resonators Based on Dual Interdigital Electrodes for Feedthrough Suppression

As one of the core components of MEMS (i.e., micro-electro-mechanical systems), thin-film piezoelectric-on-silicon (TPoS) resonators experienced a blooming development in the past decades due to unique features such as a remarkable capability of integration for attractive applications of system-on-chip integrated timing references. However, the parasitic capacitive feedthrough poses a great challenge to electrical detection of resonance in a microscale silicon-based mechanical resonator. Herein, a fully-differential configuration of a TPoS MEMS resonator based on a novel structural design of dual interdigital electrodes is proposed to eliminate the negative effect of feedthrough. The fundamental principle of feedthrough suppression was comprehensively investigated by using FEA (i.e., finite-element analysis) modeling and electrical measurements of fabricated devices. It was shown that with the help of fully-differential configuration, the key parameter of SBR (i.e., signal-to-background ratio) was significantly enhanced by greatly suppressing the in-phase signal. The S-parameter measurement results further verified the effectiveness of this novel feedthrough suppression strategy, and the insertion loss and SBR of proposed TPoS resonators were improved to 4.27 dB and 42.47 dB, respectively.

A Study on the Effects of Bottom Electrode Designs on Aluminum Nitride Contour-Mode Resonators

This study presents the effects of bottom electrode designs on the operation of laterally vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). A total of 160 CMRs were analyzed with varying bottom electrode areas at two resonant frequencies (f₀) of about 230 MHz and 1.1 GHz. Specifically, we analyzed the impact of bottom electrode coverage rates on the resonator quality factor (Q) and electromechanical coupling (k²), which are important parameters for Radio Frequency (RF) and sensing applications. From our experiments, Q exhibited different trends to electrode coverage rates depending on the device resonant frequencies, while k² increased with the coverage rate regardless of f₀. Along with experimental measurements, our finite element analysis (FEA) revealed that the bottom electrode coverage rate determines the active (or vibrating) region of the resonator and, thus, directly impacts Q. Additionally, to alleviate thermoelastic damping (TED) and focus on mechanical damping effects, we analyzed the device performance at 10 K. Our findings indicated that a careful design of bottom electrodes could further improve both Q and k² of AlN CMRs, which ultimately determines the power budget and noise level of the resonator in integrated oscillators and sensor systems.

Hybrid Shape Memory Alloy-Based Nanomechanical Resonators for Ultrathin Film Elastic Properties Determination and Heavy Mass Spectrometry

Micro-/nanomechanical resonators are often used in material science to measure the elastic properties of ultrathin films or mass spectrometry to estimate the mass of various chemical and biological molecules. Measurements with these sensors utilize changes in the resonant frequency of the resonator exposed to an investigated quantity. Their sensitivities are, therefore, determined by the resonant frequency. The higher resonant frequency and, correspondingly, higher quality factor (Q-factor) yield higher sensitivity. In solution, the resonant frequency (Q-factor) decreases causing a significant lowering of the achievable sensitivity. Hence, the nanomechanical resonator-based sensors mainly operate in a vacuum. Identification by nanomechanical resonator also requires an additional reference measurement on the identical unloaded resonator making experiments, due to limiting achievable accuracies in current nanofabrication processes, yet challenging. In addition, the mass spectrometry by nanomechanical resonator can be routinely performed for light analytes (i.e., analyte is modelled as a point particle). For heavy analytes such as bacteria clumps neglecting their stiffness result in a significant underestimation of determined mass values. In this work, we demonstrate the extraordinary capability of hybrid shape memory alloy (SMA)-based nanomechanical resonators to i) notably tune the resonant frequencies and improve Q-factor of the resonator immersed in fluid, ii) determine the Young’s (shear) modulus of prepared ultrathin film only from frequency response of the resonator with sputtered film, and iii) perform heavy analyte mass spectrometry by monitoring shift in frequency of just a single vibrational mode. The procedures required to estimate the Young’s (shear) modulus of ultrathin film and the heavy analyte mass from observed changes in the resonant frequency caused by a phase transformation in SMA are developed and, afterward, validated using numerical simulations. The present results demonstrate the outstanding potential and capability of high frequency operating hybrid SMA-based nanomechanical resonators in sensing applications that can be rarely achieved by current nanomechanical resonator-based sensors.