1
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Marcelot O, Marcelot C, Rolando S. Limitations and Drawbacks of DQE Estimation Methods Applied to Electron Detectors. Microscopy (Oxf) 2024:dfae016. [PMID: 38498372 DOI: 10.1093/jmicro/dfae016] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/14/2023] [Revised: 02/27/2024] [Accepted: 03/15/2024] [Indexed: 03/20/2024] Open
Abstract
The DQE is generally accepted as the main figure of merit for the comparison between electron detectors, and most of the time given as a unique number at the Nyquist frequency while it is known to vary with electron dose. It is usually estimated thanks to a method improved by McMullan in 2009. The purpose of this work is to analyse and to criticize this DQE extraction method on the basis of measurement and model results, and to give recommendations for fair comparison between detectors, wondering if the DQE is the right figure of merit for electron detectors.
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2
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Zhang Q, Zhang Y, Luo Y, Yin H. New structure transistors for advanced technology node CMOS ICs. Natl Sci Rev 2024; 11:nwae008. [PMID: 38390365 PMCID: PMC10883695 DOI: 10.1093/nsr/nwae008] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/17/2023] [Revised: 11/02/2023] [Accepted: 11/22/2023] [Indexed: 02/24/2024] Open
Abstract
Over recent decades, advancements in complementary metal-oxide-semiconductor integrated circuits (ICs) have mainly relied on structural innovations in transistors. From planar transistors to the fin field-effect transistor (FinFET) and gate-all-around FET (GAAFET), more gate electrodes have been added to three-dimensional (3D) channels with enhanced control and carrier conductance to provide higher electrostatic integrity and higher operating currents within the same device footprint. Beyond the 1-nm node, Moore's law scaling is no longer expected to be applicable to geometrical shrinkage. Vertical transistor stacking, e.g. in complementary FETs (CFET), 3D stack (3DS) FETs and vertical-channel transistors (VFET), for enhanced density and variable circuit or system design represents a revolutionary scaling approach for sustained IC development. Herein, innovative works on specific structures, key process breakthroughs, shrinking cell sizes and design methodologies for transistor structure research and development are reviewed. Perspectives on future innovations in advanced transistors with new channel materials and operating theories are also discussed.
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Affiliation(s)
- Qingzhu Zhang
- Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of Chinese Academy of Sciences (IMECAS), Beijing 100029, China
- State key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
| | - Yongkui Zhang
- Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of Chinese Academy of Sciences (IMECAS), Beijing 100029, China
- State key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
| | - Yanna Luo
- Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of Chinese Academy of Sciences (IMECAS), Beijing 100029, China
- School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Huaxiang Yin
- Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of Chinese Academy of Sciences (IMECAS), Beijing 100029, China
- State key Lab of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
- School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China
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3
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Ko GH, Moon SJ, Kim SH, Kim JG, Baek D. Fully Integrated 24-GHz 1TX-2RX Transceiver for Compact FMCW Radar Applications. Sensors (Basel) 2024; 24:1460. [PMID: 38474998 DOI: 10.3390/s24051460] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/19/2023] [Revised: 02/07/2024] [Accepted: 02/15/2024] [Indexed: 03/14/2024]
Abstract
A fully integrated 24-GHz radar transceiver with one transmitter (TX) and two receivers (RXs) for compact frequency modulated continuous wave (FMCW) radar applications is here presented. The FMCW synthesizer was realized using a fractional-N phase-locked loop (PLL) and programmable chirp generator, which are completely integrated in the proposed transceiver. The measured output phase noise of the synthesizer is -80 dBc/Hz at 100 kHz offset. The TX consists of a three-bit bridged t-type attenuator for gain control, a two-stage drive amplifier (DA) and a one-stage power amplifier (PA). The TX chain provides an output power of 13 dBm while achieving <0.5 dB output power variation within the range of 24 to 24.25 GHz. The RX with a direct conversion I-Q structure is composed of a two-stage low noise amplifier (LNA), I-Q generator, mixer, transimpedance amplifier (TIA), a two-stage biquad band pass filter (BPF), and a differential-to-single (DTS) amplifier. The TIA and the BPF employ a DC offset cancellation (DCOC) circuit to suppress the strong reflection signal and TX-RX leakage. The RX chain exhibits an overall gain of 100 dB. The proposed radar transceiver is fabricated using a 65 nm CMOS technology. The transceiver consumes 220 mW from a 1 V supply voltage and has 4.84 mm2 die size including all pads. The prototype FMCW radar is realized with the proposed transceiver and Yagi antenna to verify the radar functionality, such as the distance and angle of targets.
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Affiliation(s)
- Goo-Han Ko
- School of Electrical Engineering, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Seung-Jin Moon
- School of Electrical Engineering, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Seong-Hoon Kim
- School of Electrical Engineering, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Jeong-Geun Kim
- Department of Electronic Engineering, Kwangwoon University, Seoul 01897, Republic of Korea
| | - Donghyun Baek
- School of Electrical Engineering, Chung-Ang University, Seoul 06974, Republic of Korea
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4
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Yuvaraja S, Khandelwal V, Krishna S, Lu Y, Liu Z, Kumar M, Tang X, Maciel García GI, Chettri D, Liao CH, Li X. Enhancement-Mode Ambipolar Thin-Film Transistors and CMOS Logic Circuits using Bilayer Ga 2O 3/NiO Semiconductors. ACS Appl Mater Interfaces 2024; 16:6088-6097. [PMID: 38278516 PMCID: PMC10859899 DOI: 10.1021/acsami.3c15778] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/21/2023] [Revised: 11/20/2023] [Accepted: 12/04/2023] [Indexed: 01/28/2024]
Abstract
Recent advancements in power electronics have been driven by Ga2O3-based ultrawide bandgap (UWBG) semiconductor devices, enabling efficient high-current switching. However, integrating Ga2O3 power devices with essential silicon CMOS logic circuits for advanced control poses fabrication challenges. Researchers have introduced Ga2O3-based NMOS and pseudo-CMOS circuits for integration, but these circuits may either consume more power or increase the design complexity. Hence, this article proposes Ga2O3-based CMOS realized using heterogeneous 3D-stacked bilayer ambipolar transistors. These ambipolar transistors consist of HfO2/NiO/Ga2O3/NiO/HfO2 heterostructures that are wrapped around by the Ti/Au gate electrode, resulting in record high electron and hole current on/off ratios of 109 and 107. The threshold voltage, subthreshold swing, and current density measured from 100 ambipolar devices (across 5 batches) are around -7.99 ± 0.92 V (p-channel) and 7.81 ± 0.81 V (n-channel), 0.59 ± 0.07 V/dec (p-channel) and 0.61 ± 0.06 V/dec (n-channel), and 0.99 ± 0.26 mA/mm (p-channel) and 58.23 ± 12.99 mA/mm (n-channel), respectively. All the 100 ambipolar devices showed decent long-term stability over a period of 200 days, exhibiting reliable electrical performance. The threshold voltage shift (ΔVTH) after negative bias stressing for a period of 3500 s is around 11.52 V (p-channel) and 10.21 V (n-channel), respectively. Notably, the n-channels exhibit ∼2 orders higher on/off ratio than the best Ga2O3 unipolar transistors at 300 °C. Moreover, the polarities of ambipolar transistors are reconfigurable into p- or n-MOS, which are integrated to demonstrate CMOS inverter, NOR, and NAND logic gates. The switching periods from "0" to "1" and from "1" to "0" of NOR are 0.12 and 0.17 μs, and those of NAND are 0.16 and 0.13 μs. This work lays the foundation of oxide-semiconductor-based CMOS for future integrated electronics.
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Affiliation(s)
- Saravanan Yuvaraja
- Advanced Semiconductor Laboratory,
Electrical and Computer Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Vishal Khandelwal
- Advanced Semiconductor Laboratory,
Electrical and Computer Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Shibin Krishna
- Advanced Semiconductor Laboratory,
Electrical and Computer Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Yi Lu
- Advanced Semiconductor Laboratory,
Electrical and Computer Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Zhiyuan Liu
- Advanced Semiconductor Laboratory,
Electrical and Computer Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Mritunjay Kumar
- Advanced Semiconductor Laboratory,
Electrical and Computer Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Xiao Tang
- Advanced Semiconductor Laboratory,
Electrical and Computer Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Glen Isaac Maciel García
- Advanced Semiconductor Laboratory,
Electrical and Computer Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Dhanu Chettri
- Advanced Semiconductor Laboratory,
Electrical and Computer Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Che-Hao Liao
- Advanced Semiconductor Laboratory,
Electrical and Computer Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Xiaohang Li
- Advanced Semiconductor Laboratory,
Electrical and Computer Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
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5
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Li R, Zhou S, Yang C, Wang J. Investigation and Modeling of the Behavior of Temperature Characteristics of 0.3-1.1 GHz Complementary Metal Oxide Semiconductor Class-A Broadband Power Amplifiers. Micromachines (Basel) 2024; 15:246. [PMID: 38398973 PMCID: PMC10891772 DOI: 10.3390/mi15020246] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/18/2023] [Revised: 01/25/2024] [Accepted: 02/05/2024] [Indexed: 02/25/2024]
Abstract
A power amplifier (PA) stands as a central module within the electronic information system (EIS), and any variation in a PA's specifications has a direct impact on the EIS's performance, especially in the face of temperature fluctuations. In examining the influence of PA specification changes on the EIS, we employed support vector machine (SVM) to model the behavior of the temperature characteristics of 0.3-1.1 GHz complementary metal oxide semiconductor (CMOS) class-A broadband PAs. The results show that the parameters of S11, S12, S21, and S22 can be effectively modeled. SVM outperforms Elman and GRNN in terms of combined modeling time and modeling accuracy. This research can be extended to modeling the behavior of other types of power amplifiers or devices and circuits.
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Affiliation(s)
- Ruiliang Li
- Qingdao Institute for Marine Technology of Tianjin University, Qingdao 266200, China; (R.L.); (S.Z.)
| | - Shaohua Zhou
- Qingdao Institute for Marine Technology of Tianjin University, Qingdao 266200, China; (R.L.); (S.Z.)
- ZJU-Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, Hangzhou 310058, China
- School of Microelectronics, Tianjin University, Tianjin 300072, China
| | - Cheng Yang
- Qingdao Institute for Marine Technology of Tianjin University, Qingdao 266200, China; (R.L.); (S.Z.)
| | - Jian Wang
- School of Microelectronics, Tianjin University, Tianjin 300072, China
- Shandong Engineering Technology Research Center of Marine Information Perception and Transmission, Qingdao 266200, China
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6
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Osouli Tabrizi H, Forouhi S, Azadmousavi T, Ghafar-Zadeh E. A Multidisciplinary Approach toward CMOS Capacitive Sensor Array for Droplet Analysis. Micromachines (Basel) 2024; 15:232. [PMID: 38398961 PMCID: PMC10892496 DOI: 10.3390/mi15020232] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/01/2024] [Revised: 01/27/2024] [Accepted: 01/30/2024] [Indexed: 02/25/2024]
Abstract
This paper introduces an innovative method for the analysis of alcohol-water droplets on a CMOS capacitive sensor, leveraging the controlled thermal behavior of the droplets. Using this sensing method, the capacitive sensor measures the total time of evaporation (ToE), which can be influenced by the droplet volume, temperature, and chemical composition. We explored this sensing method by introducing binary mixtures of water and ethanol or methanol across a range of concentrations (0-100%, with 10% increments). The experimental results indicate that while the capacitive sensor is effective in measuring both the total ToE and dielectric properties, a higher dynamic range and resolution are observed in the former. Additionally, an array of sensing electrodes successfully monitors the droplet-sensor surface interaction. However practical considerations such as the creation of parasitic capacitance due to mismatch, arise from the large sensing area in the proposed capacitive sensors and other similar devices. In this paper, we discuss this non-ideality and propose a solution. Also, this paper showcases the benefits of utilizing a CMOS capacitive sensing method for accurately measuring ToE.
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Affiliation(s)
- Hamed Osouli Tabrizi
- Biologically Inspired Sensors and Actuators, Department of Electrical Engineering and Computer Science, Lassonde School of Engineering, York University, Toronto, ON M3J 1P3, Canada; (H.O.T.); (S.F.)
| | - Saghi Forouhi
- Biologically Inspired Sensors and Actuators, Department of Electrical Engineering and Computer Science, Lassonde School of Engineering, York University, Toronto, ON M3J 1P3, Canada; (H.O.T.); (S.F.)
| | - Tayebeh Azadmousavi
- Department of Electrical Engineering, University of Bonab, Bonab 5551395133, Iran;
| | - Ebrahim Ghafar-Zadeh
- Biologically Inspired Sensors and Actuators, Department of Electrical Engineering and Computer Science, Lassonde School of Engineering, York University, Toronto, ON M3J 1P3, Canada; (H.O.T.); (S.F.)
- Department of Biology, Faculty of Science, York University, Toronto, ON M3J 1P3, Canada
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7
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Ahn H, Oh K, Choi SE, Son DH, Nam I, Lim K, Lee O. A Dual-Mode CMOS Power Amplifier with an External Power Amplifier Driver Using 40 nm CMOS for Narrowband Internet-of-Things Applications. Nanomaterials (Basel) 2024; 14:262. [PMID: 38334533 PMCID: PMC10857100 DOI: 10.3390/nano14030262] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/15/2023] [Revised: 01/22/2024] [Accepted: 01/22/2024] [Indexed: 02/10/2024]
Abstract
The narrowband Internet-of-Things (NB-IoT) has been developed to provide low-power, wide-area IoT applications. The efficiency of a power amplifier (PA) in a transmitter is crucial for a longer battery lifetime, satisfying the requirements for output power and linearity. In addition, the design of an internal complementary metal-oxide semiconductor (CMOS) PA is typically required when considering commercial applications to include the operation of an optional external PA. This paper presents a dual-mode CMOS PA with an external PA driver for NB-IoT applications. The proposed PA supports an external PA mode without degrading the performances of output power, linearity, and stability. In the operation of an external PA mode, the PA provides a sufficient gain to drive an external PA. A parallel-combined transistor method is adopted for a dual-mode operation and a third-order intermodulation distortion (IMD3) cancellation. The proposed CMOS PA with an external PA driver was implemented using 40 nm-CMOS technology. The PA achieves a gain of 20.4 dB, a saturated output power of 28.8 dBm, and a power-added efficiency (PAE) of 57.8% in high-power (HP) mode at 920 MHz. With an NB-IoT signal (200 kHz π/4-differential quadrature phase shift keying (DQPSK)), the proposed PA achieves 24.2 dBm output power (Pout) with a 31.0% PAE, while satisfying -45 dBc adjacent channel leakage ratio (ACLR). More than 80% of the current consumption at 12 dBm Pout could be saved compared to that in HP mode when the proposed PA operates in low-power (LP) mode. The implemented dual-mode CMOS PA provides high linear output power with high efficiency, while supporting an external PA mode. The proposed PA is a good candidate for NB-IoT applications.
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Affiliation(s)
| | - Kyutaek Oh
- Department of Electrical Engineering, Pusan National University, Busan 46241, Republic of Korea; (K.O.); (I.N.)
| | - Se-Eun Choi
- Samsung Electronics, Hwaseong 18448, Gyeonggi-do, Republic of Korea
| | - Dong-Hee Son
- Hanwha Aerospace, Daejeon 34101, Republic of Korea;
| | - Ilku Nam
- Department of Electrical Engineering, Pusan National University, Busan 46241, Republic of Korea; (K.O.); (I.N.)
| | - Kyoohyun Lim
- Point2 Technology, Seoul 06034, Republic of Korea;
| | - Ockgoo Lee
- Department of Electrical Engineering, Pusan National University, Busan 46241, Republic of Korea; (K.O.); (I.N.)
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8
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Bui TNH, Large M, Poder J, Bucci J, Bianco E, Giampaolo RA, Rivetti A, Da Rocha Rolo M, Pastuovic Z, Corradino T, Pancheri L, Petasecca M. Preliminary Characterization of an Active CMOS Pad Detector for Tracking and Dosimetry in HDR Brachytherapy. Sensors (Basel) 2024; 24:692. [PMID: 38276383 PMCID: PMC10818778 DOI: 10.3390/s24020692] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/13/2023] [Revised: 01/15/2024] [Accepted: 01/18/2024] [Indexed: 01/27/2024]
Abstract
We assessed the accuracy of a prototype radiation detector with a built in CMOS amplifier for use in dosimetry for high dose rate brachytherapy. The detectors were fabricated on two substrates of epitaxial high resistivity silicon. The radiation detection performance of prototypes has been tested by ion beam induced charge (IBIC) microscopy using a 5.5 MeV alpha particle microbeam. We also carried out the HDR Ir-192 radiation source tracking at different depths and angular dose dependence in a water equivalent phantom. The detectors show sensitivities spanning from (5.8 ± 0.021) × 10-8 to (3.6 ± 0.14) × 10-8 nC Gy-1 mCi-1 mm-2. The depth variation of the dose is within 5% with that calculated by TG-43. Higher discrepancies are recorded for 2 mm and 7 mm depths due to the scattering of secondary particles and the perturbation of the radiation field induced in the ceramic/golden package. Dwell positions and dwell time are reconstructed within ±1 mm and 20 ms, respectively. The prototype detectors provide an unprecedented sensitivity thanks to its monolithic amplification stage. Future investigation of this technology will include the optimisation of the packaging technique.
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Affiliation(s)
- Thi Ngoc Hang Bui
- Centre for Medical Radiation Physics, University of Wollongong, Wollongong, NSW 2522, Australia; (T.N.H.B.); (M.L.); (J.P.); (J.B.)
| | - Matthew Large
- Centre for Medical Radiation Physics, University of Wollongong, Wollongong, NSW 2522, Australia; (T.N.H.B.); (M.L.); (J.P.); (J.B.)
| | - Joel Poder
- Centre for Medical Radiation Physics, University of Wollongong, Wollongong, NSW 2522, Australia; (T.N.H.B.); (M.L.); (J.P.); (J.B.)
- St George Cancer Care Centre, Kogarah, NSW 2217, Australia
- School of Physics, University of Sydney, Camperdown, NSW 2050, Australia
| | - Joseph Bucci
- Centre for Medical Radiation Physics, University of Wollongong, Wollongong, NSW 2522, Australia; (T.N.H.B.); (M.L.); (J.P.); (J.B.)
- St George Cancer Care Centre, Kogarah, NSW 2217, Australia
| | - Edoardo Bianco
- Department of Electronics and Telecommunications, Polytechnic University of Turin, 10129 Turin, Italy; (E.B.); (R.A.G.)
- Istituto Nazionale di Fisica Nucleare—Section of Turin, 10125 Turin, Italy; (A.R.); (M.D.R.R.)
| | - Raffaele Aaron Giampaolo
- Department of Electronics and Telecommunications, Polytechnic University of Turin, 10129 Turin, Italy; (E.B.); (R.A.G.)
- Istituto Nazionale di Fisica Nucleare—Section of Turin, 10125 Turin, Italy; (A.R.); (M.D.R.R.)
| | - Angelo Rivetti
- Istituto Nazionale di Fisica Nucleare—Section of Turin, 10125 Turin, Italy; (A.R.); (M.D.R.R.)
| | - Manuel Da Rocha Rolo
- Istituto Nazionale di Fisica Nucleare—Section of Turin, 10125 Turin, Italy; (A.R.); (M.D.R.R.)
| | - Zeljko Pastuovic
- Australian Nuclear Science and Technology Organisation, Lucas Heights, NSW 2234, Australia;
| | - Thomas Corradino
- Department of Industrial Engineering, University of Trento, 38123 Trento, Italy (L.P.)
- Trento Institute for Fundamental Physics and Applications, Istituto Nazionale di Fisica Nucleare, 38123 Trento, Italy
| | - Lucio Pancheri
- Department of Industrial Engineering, University of Trento, 38123 Trento, Italy (L.P.)
- Trento Institute for Fundamental Physics and Applications, Istituto Nazionale di Fisica Nucleare, 38123 Trento, Italy
| | - Marco Petasecca
- Centre for Medical Radiation Physics, University of Wollongong, Wollongong, NSW 2522, Australia; (T.N.H.B.); (M.L.); (J.P.); (J.B.)
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9
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Pérez M, Lado GM, Mato G, Franco DG, Vinciguerra IA, Berisso MG, Pomiro FJ, Lipovetzky J, Marpegan L. High-resolution X-Ray imaging of small animal samples based on Commercial-Off-The-Shelf CMOS image sensors. J Xray Sci Technol 2024; 32:355-367. [PMID: 38427532 DOI: 10.3233/xst-230232] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 03/03/2024]
Abstract
An automated system for acquiring microscopic-resolution radiographic images of biological samples was developed. Mass-produced, low-cost, and easily automated components were used, such as Commercial-Off-The-Self CMOS image sensors (CIS), stepper motors, and control boards based on Arduino and RaspberryPi. System configuration, imaging protocols, and Image processing (filtering and stitching) were defined to obtain high-resolution images and for successful computational image reconstruction. Radiographic images were obtained for animal samples including the widely used animal models zebrafish (Danio rerio) and the fruit-fly (Drosophila melanogaster), as well as other small animal samples. The use of phosphotungstic acid (PTA) as a contrast agent was also studied. Radiographic images with resolutions of up to (7±0.6)μm were obtained, making this system comparable to commercial ones. This work constitutes a starting point for the development of more complex systems such as X-ray attenuation micro-tomography systems based on low-cost off-the-shelf technology. It will also bring the possibility to expand the studies that can be carried out with small animal models at many institutions (mostly those working on tight budgets), particularly those on the effects of ionizing radiation and absorption of heavy metal contaminants in animal tissues.
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Affiliation(s)
- MartÍn Pérez
- Centro Atómico Bariloche, Av. Bustillo 9500, S. C. de Bariloche, Rio Negro, Argentina
- Comisión Nacional de Energía Atómica, Argentina
- Instituto Balseiro, Universidad Nacional de Cuyo, Argentina
| | - Gerardo M Lado
- Centro Atómico Bariloche, Av. Bustillo 9500, S. C. de Bariloche, Rio Negro, Argentina
- Instituto Balseiro, Universidad Nacional de Cuyo, Argentina
| | - Germán Mato
- Centro Atómico Bariloche, Av. Bustillo 9500, S. C. de Bariloche, Rio Negro, Argentina
- Instituto Balseiro, Universidad Nacional de Cuyo, Argentina
- Consejo Nacional de Investigaciones Científicas y Técnicas, Argentina
| | - Diego G Franco
- Centro Atómico Bariloche, Av. Bustillo 9500, S. C. de Bariloche, Rio Negro, Argentina
- Instituto Balseiro, Universidad Nacional de Cuyo, Argentina
- Consejo Nacional de Investigaciones Científicas y Técnicas, Argentina
| | - Ignacio Artola Vinciguerra
- Centro Atómico Bariloche, Av. Bustillo 9500, S. C. de Bariloche, Rio Negro, Argentina
- Comisión Nacional de Energía Atómica, Argentina
| | - Mariano Gómez Berisso
- Centro Atómico Bariloche, Av. Bustillo 9500, S. C. de Bariloche, Rio Negro, Argentina
- Comisión Nacional de Energía Atómica, Argentina
- Instituto Balseiro, Universidad Nacional de Cuyo, Argentina
- Consejo Nacional de Investigaciones Científicas y Técnicas, Argentina
| | - Federico J Pomiro
- Centro Atómico Bariloche, Av. Bustillo 9500, S. C. de Bariloche, Rio Negro, Argentina
- Comisión Nacional de Energía Atómica, Argentina
| | - José Lipovetzky
- Centro Atómico Bariloche, Av. Bustillo 9500, S. C. de Bariloche, Rio Negro, Argentina
- Comisión Nacional de Energía Atómica, Argentina
- Instituto Balseiro, Universidad Nacional de Cuyo, Argentina
- Consejo Nacional de Investigaciones Científicas y Técnicas, Argentina
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10
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Ribisch C, Hofbauer M, Kohneh Poushi SS, Zimmer A, Schneider-Hornstein K, Goll B, Zimmermann H. Multi-Channel Gating Chip in 0.18 µm High-Voltage CMOS for Quantum Applications. Sensors (Basel) 2023; 23:9644. [PMID: 38139490 PMCID: PMC10747136 DOI: 10.3390/s23249644] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/15/2023] [Revised: 11/23/2023] [Accepted: 12/04/2023] [Indexed: 12/24/2023]
Abstract
A gating circuit for a photonic quantum simulator is introduced. The gating circuit uses a large excess bias voltage of up to 9.9 V and an integrated single-photon avalanche diode (SPAD). Nine channels are monolithically implemented in an application-specific integrated circuit (ASIC) including nine SPADs using 0.18 µm high-voltage CMOS technology. The gating circuit achieves rise and fall times of 480 ps and 280 ps, respectively, and a minimum full-width-at-half-maximum pulse width of 1.26 ns. Thanks to a fast and sensitive comparator, a detection threshold for avalanche events of less than 100 mV is possible. The power consumption of all nine channels is about 250 mW in total. This gating chip is used to characterize the integrated SPADs. A photon detection probability of around 50% at 9.9 V excess bias and for a wavelength of 635 nm is found.
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Affiliation(s)
- Christoph Ribisch
- Institute of Electrodynamics, Microwave and Circuit Engineering, Faculty of Electrical Engineering and Information Technology, Technische Universität Wien, 1040 Vienna, Austria; (M.H.); (S.S.K.P.); (K.S.-H.); (B.G.); (H.Z.)
| | - Michael Hofbauer
- Institute of Electrodynamics, Microwave and Circuit Engineering, Faculty of Electrical Engineering and Information Technology, Technische Universität Wien, 1040 Vienna, Austria; (M.H.); (S.S.K.P.); (K.S.-H.); (B.G.); (H.Z.)
| | - Seyed Saman Kohneh Poushi
- Institute of Electrodynamics, Microwave and Circuit Engineering, Faculty of Electrical Engineering and Information Technology, Technische Universität Wien, 1040 Vienna, Austria; (M.H.); (S.S.K.P.); (K.S.-H.); (B.G.); (H.Z.)
| | | | - Kerstin Schneider-Hornstein
- Institute of Electrodynamics, Microwave and Circuit Engineering, Faculty of Electrical Engineering and Information Technology, Technische Universität Wien, 1040 Vienna, Austria; (M.H.); (S.S.K.P.); (K.S.-H.); (B.G.); (H.Z.)
| | - Bernhard Goll
- Institute of Electrodynamics, Microwave and Circuit Engineering, Faculty of Electrical Engineering and Information Technology, Technische Universität Wien, 1040 Vienna, Austria; (M.H.); (S.S.K.P.); (K.S.-H.); (B.G.); (H.Z.)
| | - Horst Zimmermann
- Institute of Electrodynamics, Microwave and Circuit Engineering, Faculty of Electrical Engineering and Information Technology, Technische Universität Wien, 1040 Vienna, Austria; (M.H.); (S.S.K.P.); (K.S.-H.); (B.G.); (H.Z.)
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11
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Kelly EM, Egan MJ, Colόn A, Angel SM, Sharma SK. Single-Grating Monolithic Spatial Heterodyne Raman Spectrometer: An Investigation on the Effects of Detector Selection. Appl Spectrosc 2023; 77:1411-1423. [PMID: 37801484 DOI: 10.1177/00037028231204894] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/08/2023]
Abstract
Spatial heterodyne Raman spectrometers (SHRSs) are modified forms of Michelson interferometers, except the mirrors in a Michelson interferometer are replaced with stationary diffraction gratings. This design removes the need for an entrance slit, as is the case in a dispersive spectrometer, and removes the need to scan the spectrum by using a moving mirror in a modern Michelson interferometer. In previous studies, various SHRS variants, such as free-standing two-grating SHRS, single-grating SHRS (1g-SHRS), monolithic SHRS (mSHRS), and single-grating mSHRS (1g-mSHRS), have been evaluated. However, the present study exclusively focuses on the 1g-mSHRS configuration. The 1g-mSHRS and 1g-SHRS increase the spectral range at fixed grating line density while trading off spectral resolution and resolving power. The mSHRS benefits from increased rigidity, lack of moving parts, and reduced footprint. In this study, we investigate how the choice of detector impacts the performance of the 1g-mSHRS system, with a specific focus on evaluating the performance of three types of cameras: charged-coupled device (CCD), intensified CCD (ICCD), and complementary metal-oxide-semiconductor (CMOS) cameras. These systems were evaluated using geological, organic, and inorganic samples using a 532 nm continuous wave laser for the CMOS and CCD cameras, and a 532 nm neodymium-doped yttrium aluminum garnet pulsed laser for the ICCD camera. The footprint of the 1g-mSHRS was 3.5 × 3.5 × 2.5 cm3 with a mass of 272 g or 80 g, depending on whether the monolith housing is included or not. We found that increasing the number of pixels utilized along the x-axis of the camera increases fringe visibility (FV) and optimizes the resolution (by capturing the entirety of the grating and magnifying the fringes). The number of pixels utilized in the y-axis, chip size, and dimensions, affect the signal-to-noise ratio of the systems. Additionally, we discuss the effect of pixel pitch on the recovery of Fizeau fringes, including the relationship between the Nyquist frequency, aliasing, and FV.
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Affiliation(s)
- Evan M Kelly
- Hawaii Institute of Geophysics and Planetology, University of Hawaii at Manoa, Honolulu, Hawaii, USA
| | - Miles J Egan
- Hawaii Institute of Geophysics and Planetology, University of Hawaii at Manoa, Honolulu, Hawaii, USA
| | - Arelis Colόn
- Chemistry and Biochemistry, University of South Carolina, Columbia, South Carolina, USA
| | - S Michael Angel
- Chemistry and Biochemistry, University of South Carolina, Columbia, South Carolina, USA
| | - Shiv K Sharma
- Hawaii Institute of Geophysics and Planetology, University of Hawaii at Manoa, Honolulu, Hawaii, USA
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12
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Cai J, Sun Z, Wu P, Tripathi R, Lan HY, Kong J, Chen Z, Appenzeller J. High-Performance Complementary Circuits from Two-Dimensional MoTe 2. Nano Lett 2023. [PMID: 37976291 DOI: 10.1021/acs.nanolett.3c03184] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/19/2023]
Abstract
Two-dimensional (2D) materials hold great promise for future complementary metal-oxide semiconductor (CMOS) technology. However, the lack of effective methods to tune the Schottky barrier poses a challenge in constructing high-performance complementary circuits from the same material. Here, we reveal that the polarity of pristine MoTe2 field-effect transistors (FETs) with minimized air exposure is n-type, irrespective of the metal contact type. The fabricated n-FETs with palladium contact can reach electron currents up to 275 μA/μm at VDS = 2 V. For p-FETs, we introduce a novel nitric oxide doping strategy, allowing a controlled transition of MoTe2 FETs from n-type to unipolar p-type. By doping only in the contact region, we demonstrate hole currents up to 170 μA/μm at VDS= -2 V with preserved Ion/Ioff ratios of 105. Finally, we present a complementary inverter circuit comprising the high-performance n- and p-type FETs based on MoTe2, promoting the application of 2D materials in future electronic systems.
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Affiliation(s)
- Jun Cai
- Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, United States
- Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, United States
| | - Zheng Sun
- Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, United States
- Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, United States
| | - Peng Wu
- Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
- Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Rahul Tripathi
- Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, United States
- Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, United States
| | - Hao-Yu Lan
- Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, United States
- Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, United States
| | - Jing Kong
- Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
- Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Zhihong Chen
- Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, United States
- Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, United States
| | - Joerg Appenzeller
- Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, United States
- Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, United States
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13
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Torres F, Uranga A, Barniol N. Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection. Sensors (Basel) 2023; 23:8945. [PMID: 37960643 PMCID: PMC10648888 DOI: 10.3390/s23218945] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/28/2023] [Revised: 10/24/2023] [Accepted: 10/26/2023] [Indexed: 11/15/2023]
Abstract
This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a commercial CMOS technology (0.35 μm CMOS-AMS) and monolithically integrated with conditioning and readout circuitry. Sensing is performed through the resonance frequency change due to the addition of water onto the clamped-clamped beam coming from the moisture created by the evaporation of water in the human body. The sensitivity and high-speed response to the addition of water onto the metal bridge, as well as the quick dewetting of the surface, make it suitable for low-power human activity sensing.
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Affiliation(s)
- Francesc Torres
- Electronic Engineering Department, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB, 08193 Cerdanyola del Valles, Spain; (A.U.); (N.B.)
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14
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Mirbeik A, Najafizadeh L, Ebadi N. A Synthetic Ultra-Wideband Transceiver for Millimeter-Wave Imaging Applications. Micromachines (Basel) 2023; 14:2031. [PMID: 38004888 PMCID: PMC10673051 DOI: 10.3390/mi14112031] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/09/2023] [Revised: 10/06/2023] [Accepted: 10/27/2023] [Indexed: 11/26/2023]
Abstract
In this work, we present a transceiver front-end in SiGe BiCMOS technology that can provide an ultra-wide bandwidth of 100 GHz at millimeter-wave frequencies. The front-end utilizes an innovative arrangement to efficiently distribute broadband-generated pulses and coherently combine received pulses with minimal loss. This leads to the realization of a fully integrated ultra-high-resolution imaging chip for biomedical applications. We realized an ultra-wide imaging band-width of 100 GHz via the integration of two adjacent disjointed frequency sub-bands of 10-50 GHz and 50-110 GHz. The transceiver front-end is capable of both transmit (TX) and receive (RX) operations. This is a crucial component for a system that can be expanded by repeating a single unit cell in both the horizontal and vertical directions. The imaging elements were designed and fabricated in Global Foundry 130-nm SiGe 8XP process technology.
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Affiliation(s)
| | - Laleh Najafizadeh
- Department of Electrical and Computer Engineering, Rutgers University, Piscataway, NJ 08854, USA
| | - Negar Ebadi
- Department of Electrical and Computer Engineering, Stevens Institute of Technology, Hoboken, NJ 07030, USA
- Stanford University School of Medicine, Stanford, CA 94305, USA
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15
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Chen CY, Dai ZX. Fabrication and Characterization of Photovoltaic Microgenerators Using the Complementary Metal Oxide Semiconductor Process. Micromachines (Basel) 2023; 14:2038. [PMID: 38004895 PMCID: PMC10673397 DOI: 10.3390/mi14112038] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/02/2023] [Revised: 10/26/2023] [Accepted: 10/30/2023] [Indexed: 11/26/2023]
Abstract
This study develops a photovoltaic microgenerator based on the complementary metal oxide semiconductor (CMOS) process. The photovoltaic microgenerator converts the absorbed light energy into electrical energy using the photovoltaic effect. The material for the photovoltaic microgenerator is silicon, and its structure consists of patterned p-n junctions. The design of the photovoltaic microgenerator utilizes a grid-like shape, forming a large-area p-n junction with a patterned p-doping and N-well structure to enhance the photocurrent and improve the device's performance. The photovoltaic microgenerator is fabricated employing the CMOS process with post-processing step. Post-processing is applied to enhance the microgenerator's light absorption and energy-conversion efficiency. This involves using wet etching with buffered-oxide etch (BOE) to remove the silicon dioxide layer above the p-n junctions, allowing direct illumination of the p-n junctions. The area of the photovoltaic microgenerator is 0.79 mm2. The experimental results show that under an illumination intensity of 1000 W/m2, the photovoltaic microgenerator exhibits an open-circuit voltage of 0.53 V, a short-circuit current of 233 µA, a maximum output power of 99 µW, a fill factor of 0.8, and an energy-conversion efficiency of 12.5%.
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Affiliation(s)
- Chun-Yu Chen
- Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
| | - Zhi-Xuan Dai
- Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung 402, Taiwan
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16
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Abdelatty M, Incandela J, Hu K, Larkin JW, Reda S, Rosenstein JK. Microscale 3-D Capacitance Tomography with a CMOS Sensor Array. IEEE Biomed Circuits Syst Conf 2023; 2023:10.1109/biocas58349.2023.10388576. [PMID: 38384749 PMCID: PMC10880799 DOI: 10.1109/biocas58349.2023.10388576] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/23/2024]
Abstract
Electrical capacitance tomography (ECT) is a non-optical imaging technique in which a map of the interior permittivity of a volume is estimated by making capacitance measurements at its boundary and solving an inverse problem. While previous ECT demonstrations have often been at centimeter scales, ECT is not limited to macroscopic systems. In this paper, we demonstrate ECT imaging of polymer microspheres and bacterial biofilms using a CMOS microelectrode array, achieving spatial resolution of 10 microns. Additionally, we propose a deep learning architecture and an improved multi-objective training scheme for reconstructing out-of-plane permittivity maps from the sensor measurements. Experimental results show that the proposed approach is able to resolve microscopic 3-D structures, achieving 91.5% prediction accuracy on the microsphere dataset and 82.7% on the biofilm dataset, including an average of 4.6% improvement over baseline computational methods.
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17
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Tamilarasan E, Duraisamy GNR, Elangovan MK, Sarasam AST. A 0.8 V, 14.76 nVrms, Multiplexer-Based AFE for Wearable Devices Using 45 nm CMOS Techniques. Micromachines (Basel) 2023; 14:1816. [PMID: 37893253 PMCID: PMC10609258 DOI: 10.3390/mi14101816] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/28/2023] [Revised: 09/13/2023] [Accepted: 09/18/2023] [Indexed: 10/29/2023]
Abstract
Wearable medical devices (WMDs) that continuously monitor health conditions enable people to stay healthy in everyday situations. A wristband is a monitoring format that can measure bioelectric signals. The main part of a wearable device is its analog front end (AFE). Wearables have issues such as low reliability, high power consumption, and large size. A conventional AFE device uses more analog-to-digital converters, amplifiers, and filters for individual electrodes. Our proposed MUX-based AFE design requires fewer components than a conventional AFE device, reducing power consumption and area. It includes a single-ended differential feedback operational transconductance amplifier (OTA) and n-pass MUX-based AFE circuits which are related to the emergence of low power, low area, and low cost AFE-integrated chips that are required for wearable biomedical applications. The proposed 6T n-pass multiplexer measures a gain of -68 dB across a frequency range of 100 kHz with a 136.5 nW power consumption and a delay of 0.07 ns. The design layout area is approximately 9.8 µm2 and uses 45 nm complementary metal oxide semiconductor (CMOS) technology. Additionally, the proposed single-ended differential OTA has an obtained input referred noise of 0.014 µVrms, and a gain of -5.5 dB, while the design layout area is about 2 µm2 and was designed with the help of the Cadence Virtuoso layout design tool.
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Affiliation(s)
- Esther Tamilarasan
- Department of Electronics and Communication, Thigarajar College of Engineering, Madurai 625005, Tamil Nadu, India
| | | | - Muthu Kumaran Elangovan
- Engineering, D.R.B.R. Ambedkar Institute of Technology, Port Blair 744101, Union Territory of Andaman & Nicobar Islands, India;
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18
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Poongan B, Rajendran J, Mariappan S, Rawat AS, Kumar N, Nathan A, Yarman BS. A 54 µW CMOS Auto-Trimming Bandgap References (ATBGR) Achieving 90 dB PSRR for Artificial Intelligence of Things (AIoT) Chips. Micromachines (Basel) 2023; 14:1724. [PMID: 37763888 PMCID: PMC10535921 DOI: 10.3390/mi14091724] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/28/2023] [Revised: 08/12/2023] [Accepted: 08/29/2023] [Indexed: 09/29/2023]
Abstract
An Auto-Trimming CMOS Bandgap References Circuit (ATBGR) with PSRR enhancement circuit for Artificial Intelligence of Things (AIoT) chips is presented in this paper. The ATBGR is designed with a first-order temperature compensation technique providing a stable reference voltage of 1.25 V in the ranges of input voltages from 1.65 V to 4.5 V. An auto-trimming circuit is integrated into a PTAT resistor of BGR to minimize the influences of the process variations. The four parallel resistor pairs with PMOS switches are connected in series with the PTAT resistor. The reference voltage, VREF, is compared to an external constant value, 1.25 V, through an operational amplifier, and the output of the de-multiplexer is used to configure the PMOS switches. High power supply rejection is achieved through a PSRR enhancement circuit constituting a cascaded PMOS common gate pair. The ATBGR circuit is fabricated in 180 nm CMOS technology, consuming an area of 0.03277 mm2. The auto-trimming method yields an average temperature coefficient of 9.99 ppm/°C with temperature ranges from -40 °C to 125 °C, and a power supply rejection ratio of -90 dB at 100 MHz is obtained. The line regulation of the proposed circuit is 0.434%/V with power consumption of 54.12 µW at room temperature.
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Affiliation(s)
- Balamahesn Poongan
- Collaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia
| | - Jagadheswaran Rajendran
- Collaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia
| | - Selvakumar Mariappan
- Collaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia
| | - Arvind Singh Rawat
- School of Computing, DIT University, Dehradun 248009, Uttarakhand, India
| | - Narendra Kumar
- Department of Electrical Engineering, Faculty of Engineering, University of Malaya, Kuala Lumpur 50603, Malaysia
| | - Arokia Nathan
- Darwin College, Cambridge University, Cambridge CB3 9EU, UK
| | - Binboga S Yarman
- Department of Electrical and Electronics Engineering, Istanbul University, 34320 Istanbul, Turkey
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19
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Chang GE, Yu SQ, Sun G. "GeSn Rule-23"-The Performance Limit of GeSn Infrared Photodiodes. Sensors (Basel) 2023; 23:7386. [PMID: 37687845 PMCID: PMC10490364 DOI: 10.3390/s23177386] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/20/2023] [Revised: 08/10/2023] [Accepted: 08/22/2023] [Indexed: 09/10/2023]
Abstract
Group-IV GeSn photodetectors (PDs) compatible with standard complementary metal-oxide-semiconductor (CMOS) processing have emerged as a new and non-toxic infrared detection technology to enable a wide range of infrared applications. The performance of GeSn PDs is highly dependent on the Sn composition and operation temperature. Here, we develop theoretical models to establish a simple rule of thumb, namely "GeSn-rule 23", to describe GeSn PDs' dark current density in terms of operation temperature, cutoff wavelength, and Sn composition. In addition, analysis of GeSn PDs' performance shows that the responsivity, detectivity, and bandwidth are highly dependent on operation temperature. This rule provides a simple and convenient indicator for device developers to estimate the device performance at various conditions for practical applications.
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Affiliation(s)
- Guo-En Chang
- Department of Mechanical Engineering, Advanced Institute of Manufacturing with High-Tech Innovations, National Chung Cheng University, Chia-Yi 62102, Taiwan
| | - Shui-Qing Yu
- Department of Electrical Engineering, University of Arkansas, Fayetteville, AR 72701, USA;
| | - Greg Sun
- Department of Engineering, University of Massachusetts-Boston, Boston, MA 02125, USA;
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20
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Hamid SS, Mariappan S, Rajendran J, Rawat AS, Rhaffor NA, Kumar N, Nathan A, Yarman BS. A State-of-the-Art Review on CMOS Radio Frequency Power Amplifiers for Wireless Communication Systems. Micromachines (Basel) 2023; 14:1551. [PMID: 37630087 PMCID: PMC10456352 DOI: 10.3390/mi14081551] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/19/2023] [Revised: 07/28/2023] [Accepted: 07/29/2023] [Indexed: 08/27/2023]
Abstract
Wireless communication systems have undergone significant development in recent years, particularly with the transition from fourth generation (4G) to fifth generation (5G). As the number of wireless devices and mobile data usage increase, there is a growing need for enhancements and upgrades to the current wireless communication systems. CMOS transceivers are increasingly being explored to meet the requirements of the latest wireless communication protocols and applications while achieving the goal of system-on-chip (SoC). The radio frequency power amplifier (RFPA) in a CMOS transmitter plays a crucial role in amplifying RF signals and transmitting them from the antenna. This state-of-the-art review paper presents a concise discussion of the performance metrics that are important for designing a CMOS PA, followed by an overview of the trending research on CMOS PA techniques that focuses on efficiency, linearity, and bandwidth enhancement.
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Affiliation(s)
- Sofiyah Sal Hamid
- Collaborative Microelectronics Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia; (S.S.H.); (J.R.); (N.A.R.)
| | - Selvakumar Mariappan
- Collaborative Microelectronics Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia; (S.S.H.); (J.R.); (N.A.R.)
| | - Jagadheswaran Rajendran
- Collaborative Microelectronics Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia; (S.S.H.); (J.R.); (N.A.R.)
| | - Arvind Singh Rawat
- School of Computing, DIT University, Dehradun 248009, Uttarakhand, India;
| | - Nuha A. Rhaffor
- Collaborative Microelectronics Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia; (S.S.H.); (J.R.); (N.A.R.)
| | - Narendra Kumar
- Department of Electrical Engineering, Faculty of Engineering, University of Malaya, Kuala Lumpur 50603, Malaysia;
| | - Arokia Nathan
- Darwin College, Cambridge University, Cambridge CB3 9EU, UK;
| | - Binboga S. Yarman
- Department of Electrical and Electronics Engineering, Istanbul University, 34320 Istanbul, Turkey;
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21
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Yang Y, Lv S, Li X, Wang X, Wang Q, Yuan Y, Liang S, Zhang F. An Ultra-Low-Power Analog Multiplier-Divider Compatible with Digital Code for RRAM-Based Computing-in-Memory Macros. Micromachines (Basel) 2023; 14:1482. [PMID: 37512793 PMCID: PMC10383279 DOI: 10.3390/mi14071482] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/07/2023] [Revised: 07/17/2023] [Accepted: 07/18/2023] [Indexed: 07/30/2023]
Abstract
This manuscript presents an ultra-low-power analog multiplier-divider compatible with digital code words, which is applicable to the integrated structure of resistive random-access memory (RRAM)-based computing-in-memory (CIM) macros. Current multiplication and division are accomplished by a current-mirror-based structure. Compared with digital dividers to achieve higher precision and operation speed, analog dividers present the advantages of a reduced power consumption and a simple circuit structure in lower precision operations, thus improving the energy efficiency. Designed and fabricated in a 55 nm CMOS process, the proposed work is capable of achieving 8-bit precision for analog current multiplication and division operations. Measurement results show that the signal delay is 1 μs when performing 8-bit operation, with a bandwidth of 1.4 MHz. The power consumption is less than 6.15 μW with a 1.2 V supply voltage. The proposed multiplier-divider can increase the operation capacity by dividing the input current and digital code while reducing the power consumption and complexity required by division, which can be further utilized in real-time operation of edge computing devices.
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Affiliation(s)
- Yiming Yang
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
| | - Shidong Lv
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
| | - Xiaoran Li
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
- BIT Chongqing Institute of Microelectronics and Microsystems, Chongqing 401332, China
| | - Xinghua Wang
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
- BIT Chongqing Institute of Microelectronics and Microsystems, Chongqing 401332, China
- Yangtze Delta Region Academy of Beijing Institute of Technology, Jiaxing 314000, China
| | - Qian Wang
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
| | - Yiyang Yuan
- Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
| | - Sen Liang
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
| | - Feng Zhang
- Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
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22
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Asghar MS, Arslan S, Al-Hamid AA, Kim H. A Compact and Low-Power SoC Design for Spiking Neural Network Based on Current Multiplier Charge Injector Synapse. Sensors (Basel) 2023; 23:6275. [PMID: 37514571 PMCID: PMC10383375 DOI: 10.3390/s23146275] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/11/2023] [Revised: 07/04/2023] [Accepted: 07/06/2023] [Indexed: 07/30/2023]
Abstract
This paper presents a compact analog system-on-chip (SoC) implementation of a spiking neural network (SNN) for low-power Internet of Things (IoT) applications. The low-power implementation of an SNN SoC requires the optimization of not only the SNN model but also the architecture and circuit designs. In this work, the SNN has been constituted from the analog neuron and synaptic circuits, which are designed to optimize both the chip area and power consumption. The proposed synapse circuit is based on a current multiplier charge injector (CMCI) circuit, which can significantly reduce power consumption and chip area compared with the previous work while allowing for design scalability for higher resolutions. The proposed neuron circuit employs an asynchronous structure, which makes it highly sensitive to input synaptic currents and enables it to achieve higher energy efficiency. To compare the performance of the proposed SoC in its area and power consumption, we implemented a digital SoC for the same SNN model in FPGA. The proposed SNN chip, when trained using the MNIST dataset, achieves a classification accuracy of 96.56%. The presented SNN chip has been implemented using a 65 nm CMOS process for fabrication. The entire chip occupies 0.96 mm2 and consumes an average power of 530 μW, which is 200 times lower than its digital counterpart.
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Affiliation(s)
- Malik Summair Asghar
- Department of Electronics, College of Electrical and Computer Engineering, Chungbuk National University, Cheongju 28644, Republic of Korea; (M.S.A.); (A.A.A.-H.)
- Department of Electrical and Computer Engineering, COMSATS University Islamabad, Abbottabad Campus, Univeristy Road, Tobe Camp., Abbottabad 22044, Pakistan
| | - Saad Arslan
- TSY Design (Pvt.) Ltd., Islamabad 44000, Pakistan;
| | - Ali A. Al-Hamid
- Department of Electronics, College of Electrical and Computer Engineering, Chungbuk National University, Cheongju 28644, Republic of Korea; (M.S.A.); (A.A.A.-H.)
| | - HyungWon Kim
- Department of Electronics, College of Electrical and Computer Engineering, Chungbuk National University, Cheongju 28644, Republic of Korea; (M.S.A.); (A.A.A.-H.)
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23
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Bhatta A, Park J, Baek D, Kim JG. A Multimode 28 GHz CMOS Fully Differential Beamforming IC for Phased Array Transceivers. Sensors (Basel) 2023; 23:6124. [PMID: 37447973 DOI: 10.3390/s23136124] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/19/2023] [Revised: 06/28/2023] [Accepted: 07/01/2023] [Indexed: 07/15/2023]
Abstract
A 28 GHz fully differential eight-channel beamforming IC (BFIC) with multimode operations is implemented in 65 nm CMOS technology for use in phased array transceivers. The BFIC has an adjustable gain and phase control on each channel to achieve fine beam steering and beam pattern. The BFIC has eight differential beamforming channels each consisting of the two-stage bi-directional amplifier with a precise gain control circuit, a six-bit phase shifter, a three-bit digital step attenuator, and a tuning bit for amplitude and phase variation compensation. The Tx and Rx mode overall gains of the differential eight-channel BFIC are around 11 dB and 9 dB, respectively, at 27.0-29.5 GHz. The return losses of the Tx mode and Rx mode are >10 dB at 27.0-29.5 GHz. The maximum phase of 354° with a phase resolution of 5.6° and the maximum attenuation of 31 dB, including the gain control bits with an attenuation resolution of 1 dB, is achieved at 27.0-29.5 GHz. The root mean square (RMS) phase and amplitude errors are <3.2° and <0.6 dB at 27.0-29.5 GHz, respectively. The chip size is 3.0 × 3.5 mm2, including pads, and Tx mode current consumption is 580 mA at 2.5 V supply voltage.
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Affiliation(s)
- Ayush Bhatta
- Department of Electronic Engineering, Kwangwoon University, Seoul 01897, Republic of Korea
| | - Jeongsoo Park
- Department of Information Technology and Electrical Engineering, ETH, 8092 Zurich, Switzerland
| | - Donghyun Baek
- School of Electrical Engineering, Chung-Ang University, Seoul 06974, Republic of Korea
| | - Jeong-Geun Kim
- Department of Electronic Engineering, Kwangwoon University, Seoul 01897, Republic of Korea
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24
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Lysak DH, Grisi M, Marable K, Conley GM, Michal CA, Moxley-Paquette V, Wolff WW, Downey K, Kock FVC, Costa PM, Ronda K, Moraes TB, Steiner K, Colnago LA, Simpson AJ. Exploring the Potential of Broadband Complementary Metal Oxide Semiconductor Micro-Coil Nuclear Magnetic Resonance for Environmental Research. Molecules 2023; 28:5080. [PMID: 37446742 PMCID: PMC10343494 DOI: 10.3390/molecules28135080] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/01/2023] [Revised: 06/23/2023] [Accepted: 06/27/2023] [Indexed: 07/15/2023] Open
Abstract
With sensitivity being the Achilles' heel of nuclear magnetic resonance (NMR), the superior mass sensitivity offered by micro-coils can be an excellent choice for tiny, mass limited samples such as eggs and small organisms. Recently, complementary metal oxide semiconductor (CMOS)-based micro-coil transceivers have been reported and demonstrate excellent mass sensitivity. However, the ability of broadband CMOS micro-coils to study heteronuclei has yet to be investigated, and here their potential is explored within the lens of environmental research. Eleven nuclei including 7Li, 19F, 31P and, 205Tl were studied and detection limits in the low to mid picomole range were found for an extended experiment. Further, two environmentally relevant samples (a sprouting broccoli seed and a D. magna egg) were successfully studied using the CMOS micro-coil system. 13C NMR was used to help resolve broad signals in the 1H spectrum of the 13C enriched broccoli seed, and steady state free precession was used to improve the signal-to-noise ratio by a factor of six. 19F NMR was used to track fluorinated contaminants in a single D. magna egg, showing potential for studying egg-pollutant interactions. Overall, CMOS micro-coil NMR demonstrates significant promise in environmental research, especially when the future potential to scale to multiple coil arrays (greatly improving throughput) is considered.
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Affiliation(s)
- Daniel H. Lysak
- Environmental NMR Centre, University of Toronto, Toronto, ON M1C 1A4, Canada
| | - Marco Grisi
- Annaida Technologies, Innovation Park, 1015 Lausanne, Switzerland
| | - Kathryn Marable
- Annaida Technologies, Innovation Park, 1015 Lausanne, Switzerland
| | | | - Carl A. Michal
- Department of Physics and Astronomy, University of British Columbia, Vancouver, BC V6T 1Z1, Canada
| | | | - William W. Wolff
- Environmental NMR Centre, University of Toronto, Toronto, ON M1C 1A4, Canada
| | - Katelyn Downey
- Environmental NMR Centre, University of Toronto, Toronto, ON M1C 1A4, Canada
| | - Flavio V. C. Kock
- Environmental NMR Centre, University of Toronto, Toronto, ON M1C 1A4, Canada
| | - Peter M. Costa
- Environmental NMR Centre, University of Toronto, Toronto, ON M1C 1A4, Canada
| | - Kiera Ronda
- Environmental NMR Centre, University of Toronto, Toronto, ON M1C 1A4, Canada
| | - Tiago B. Moraes
- Departamento Engenharia de Biossistemas, Universidade de São Paulo/ESALQ, Av. Páduas Dias, 11, Piracicaba 13418-900, SP, Brazil
| | - Katrina Steiner
- Environmental NMR Centre, University of Toronto, Toronto, ON M1C 1A4, Canada
| | - Luiz A. Colnago
- Embrapa Instrumentação, Rua XV de Novembro 1452, São Carlos 13560-970, SP, Brazil
| | - Andre J. Simpson
- Environmental NMR Centre, University of Toronto, Toronto, ON M1C 1A4, Canada
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25
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Joo JE, Choi S, Chon Y, Park SM. A Low-Cost Measurement Methodology for LiDAR Receiver Integrated Circuits. Sensors (Basel) 2023; 23:6002. [PMID: 37447851 DOI: 10.3390/s23136002] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/21/2023] [Revised: 06/14/2023] [Accepted: 06/27/2023] [Indexed: 07/15/2023]
Abstract
This paper presents a test methodology to facilitate the measuring processes of LiDAR receiver ICs by avoiding the inherent walk error issue. In a typical LiDAR system, a costly laser diode driver emits narrow light pulses with fast rising edges, and the reflected pulses from targets enter an optical detector followed by an analog front-end (AFE) circuit. Then, the received signals pass through the cascaded amplifiers down to the time-to-digital converter (TDC) that can estimate the detection range. However, this relatively long signal journey leads to the significant decline of rising-edge slopes and the output pulse spreading, thus producing inherent walk errors in LiDAR receiver ICs. Compensation methods requiring complex algorithms and extra chip area have frequently been exploited to lessen the walk errors. In this paper, however, a simpler and lower-cost methodology is proposed to test LiDAR receiver ICs by employing a high-speed buffer and variable delay cells right before the TDC. With these circuits, both START and STOP pulses show very similar pulse shapes, thus effectively avoiding the walk error issue. Additionally, the time interval between two pulses is easily determined by varying the number of the delay cells. Test chips of the proposed receiver IC implemented in a 180-nm CMOS process successfully demonstrate easier and more accurate measurement results.
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Affiliation(s)
- Ji-Eun Joo
- Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Republic of Korea
- Graduate Program in Smart Factory, Ewha Womans University, Seoul 03760, Republic of Korea
| | - Shinhae Choi
- Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Republic of Korea
- Graduate Program in Smart Factory, Ewha Womans University, Seoul 03760, Republic of Korea
| | - Yeojin Chon
- Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Republic of Korea
- Graduate Program in Smart Factory, Ewha Womans University, Seoul 03760, Republic of Korea
| | - Sung-Min Park
- Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Republic of Korea
- Graduate Program in Smart Factory, Ewha Womans University, Seoul 03760, Republic of Korea
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26
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Chen Q, Zhou H, Xu S, Huang YC, Wu S, Lee KH, Gong X, Tan CS. A Route toward High-Detectivity and Low-Cost Short-Wave Infrared Photodetection: GeSn/Ge Multiple-Quantum-Well Photodetectors with a Dielectric Nanohole Array Metasurface. ACS Nano 2023. [PMID: 37350358 DOI: 10.1021/acsnano.2c12625] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Subscribe] [Scholar Register] [Indexed: 06/24/2023]
Abstract
High-detectivity and low-cost short-wave infrared photodetectors with complementary metal-oxide-semiconductor (CMOS) compatibility are attractive for various applications such as next-generation optical communication, LiDAR, and molecular sensing. Here, GeSn/Ge multiple-quantum-well (MQW) photodetectors with a dielectric nanohole array metasurface were proposed to realize high-detectivity and low-cost SWIR photodetection. The Ge nanohole array metasurface was utilized to enhance the light absorption in the GeSn/Ge MQW active layer. Compared with metallic nanostructures, the dielectric nanohole structure has the advantages of low intrinsic loss and CMOS compatibility. The introduction of metasurface architecture facilitates a 10.5 times enhanced responsivity of 0.232 A/W at 2 μm wavelength while slightly sacrificing the dark current density. Besides, the metasurface GeSn/Ge MQW photodetectors benefit 35% improvement in the 3 dB bandwidth compared to control GeSn/Ge MQW photodetectors, which can be attributed to the reduced RC delay. Due to the high responsivity and low dark current density, the room temperature specific detectivity at 2 μm is as high as 5.34 × 109 cm·Hz1/2/W, which is the highest among GeSn photodetectors and is better than commercial InSb and PbSe photodetectors operating at the similar wavelength. This work offers a promising approach for achieving low-cost and effective photodetection at 2 μm, contributing to the development of the 2 μm communication band.
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Affiliation(s)
- Qimiao Chen
- School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
| | - Hao Zhou
- School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
- Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
| | - Shengqiang Xu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576
| | - Yi-Chiau Huang
- Applied Materials Inc., Sunnyvale, California 95054-3299, United States
| | - Shaoteng Wu
- School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
| | - Kwang Hong Lee
- Low Energy Electronic Systems (LEES), Singapore-MIT Alliance for Research and Technology (SMART), Singapore 138602
| | - Xiao Gong
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576
| | - Chuan Seng Tan
- School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
- Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
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27
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Lin WH, Huang HL, Wu PJ, Lin CJ, King YC. CMOS compatible 2T pixel for on-wafer in-situ EUV detection. Discov Nano 2023; 18:88. [PMID: 37382771 DOI: 10.1186/s11671-023-03836-2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/03/2022] [Accepted: 03/21/2023] [Indexed: 06/30/2023]
Abstract
A novel 2-transistor (2T) pixel EUV detector is proposed and demonstrated by advanced CMOS technology. The proposed 2T detector also exhibits high spectral range (< 267 nm) and spatial resolution (67 μm) with high stability and CMOS Compatibility. The compact 2T EUV detector pixels arranged in a test array are capable of on-wafer recording the 2D EUV flux distribution without any external power. The compact 2T EUV detector pixels arranged in a test array are capable of on-wafer recording the 2D EUV flux distribution without any external power. Through proper initialization process, EUV induced discharging mechanism is fully investigated and an EUV induced electron emission efficiency model is established. Finally, a 2D array for in-situ EUV detection is demonstrated to precisely reflect the pattern projected on the chip/wafer surface.
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Affiliation(s)
- Wei-Hwa Lin
- Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, Taiwan.
| | - Han-Lin Huang
- College of Semiconductor Research, National Tsing Hua University, Hsinchu, Taiwan
| | - Pin-Jiun Wu
- National Synchrotron Radiation Research Center, Hsinchu, Taiwan
| | - Chrong-Jung Lin
- Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, Taiwan
| | - Ya-Chin King
- Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, Taiwan
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28
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Zeng N, Jung T, Sharma M, Eichler G, Fabbri J, Cotton RJ, Spinazzi E, Youngerman B, Carloni L, Shepard KL. A Wireless, Mechanically Flexible, 25μm-Thick, 65,536-Channel Subdural Surface Recording and Stimulating Microelectrode Array with Integrated Antennas. 2023 IEEE Symp VLSI Technol Circuits (2023) 2023; 2023:10.23919/vlsitechnologyandcir57934.2023.10185321. [PMID: 37671168 PMCID: PMC10478373 DOI: 10.23919/vlsitechnologyandcir57934.2023.10185321] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/07/2023]
Abstract
This paper presents a fully wireless microelectrode array (MEA) system-on-chip (SoC) with 65,536 electrodes for non-penetrative cortical recording and stimulation, featuring a total sensing area of 6.8mm×7.4mm with a 26.5μm×29μm electrode pitch. Sensing, data telemetry, and powering are monolithically integrated on a single chip, which is made mechanically flexible to conform to the surface of the brain by substrate removal to a total thickness of 25μm allowing it to be contained entirely in the subdural space under the skull.
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29
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Fan C, Cheng X, Xie Y, Liu F, Deng X, Zhu M, Gao Y, Xiao M, Zhang Z. Monolithic Three-Dimensional Integration of Carbon Nanotube Circuits and Sensors for Smart Sensing Chips. ACS Nano 2023. [PMID: 37256833 DOI: 10.1021/acsnano.3c03190] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/02/2023]
Abstract
Semiconducting carbon nanotube (CNT) film is a promising material for constructing high-performance complementary metal-oxide-semiconductor (CMOS) integrated circuits (ICs) and highly sensitive field-effect transistor (FET) bio/chemical sensors. Moreover, CNT logic transistors and sensors can be integrated through a compatible low-temperature fabrication process, providing enough thermal budget to construct monolithic three-dimensional (M3D) systems for smart sensors. However, an M3D sensing chip based on CNT film has not yet been demonstrated. In this work, we develop M3D technology to fabricate CNT CMOS ICs and CNT sensor arrays in two different layers; then, we demonstrate a preliminary M3D sensing system comprising CNT CMOS interfacing ICs in the bottom layer and CNT sensors in the upper layer through interlayer vias as links. As a typical example, a highly sensitive hydrogen sensing IC has been demonstrated to perform in situ sensing and processing functions through upper-layer FET-based hydrogen sensors exposed to the environment and bottom-layer CNT CMOS voltage-controlled oscillator (VCO) interfacing circuits. The M3D CNT sensing ICs convert hydrogen concentration information (8-128 ppm) to digital frequency information (0.78-1.11 GHz) with a sensitivity of 2.75 MHz/ppm. M3D sensing technology is expected to provide a universal sensing system for future smart sensing chips, including multitarget detection and ultralow power sensors.
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Affiliation(s)
- Chenwei Fan
- Key Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-Based Electronics, Department of Electronics, Peking University, Beijing 100871, China
| | - Xiaohan Cheng
- Key Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-Based Electronics, Department of Electronics, Peking University, Beijing 100871, China
- Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
| | - Yunong Xie
- Key Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-Based Electronics, Department of Electronics, Peking University, Beijing 100871, China
- Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
| | - Fangfang Liu
- Hunan Institute of Advanced Sensing and Information Technology, Xiangtan University, Xiangtan, Hunan 411105, China
| | - Xiaosong Deng
- Key Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-Based Electronics, Department of Electronics, Peking University, Beijing 100871, China
| | - Maguang Zhu
- Key Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-Based Electronics, Department of Electronics, Peking University, Beijing 100871, China
| | - Yunfei Gao
- Key Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-Based Electronics, Department of Electronics, Peking University, Beijing 100871, China
| | - Mengmeng Xiao
- Key Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-Based Electronics, Department of Electronics, Peking University, Beijing 100871, China
- Hunan Institute of Advanced Sensing and Information Technology, Xiangtan University, Xiangtan, Hunan 411105, China
| | - Zhiyong Zhang
- Key Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-Based Electronics, Department of Electronics, Peking University, Beijing 100871, China
- Hunan Institute of Advanced Sensing and Information Technology, Xiangtan University, Xiangtan, Hunan 411105, China
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30
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Li S, Wu Z. Design Technology Co-Optimization Strategy for Ge Fraction in SiGe Channel of SGOI FinFET. Nanomaterials (Basel) 2023; 13:nano13111709. [PMID: 37299612 DOI: 10.3390/nano13111709] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/29/2023] [Revised: 05/16/2023] [Accepted: 05/20/2023] [Indexed: 06/12/2023]
Abstract
FinFET devices and Silicon-On-Insulator (SOI) devices are two mainstream technical routes after the planar MOSFET reached the limit for scaling. The SOI FinFET devices combine the benefits of FinFET and SOI devices, which can be further boosted by SiGe channels. In this work, we develop an optimizing strategy of the Ge fraction in SiGe Channels of SGOI FinFET devices. The simulation results of ring oscillator (RO) circuits and SRAM cells reveal that altering the Ge fraction can improve the performance and power of different circuits for different applications.
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Affiliation(s)
- Shixin Li
- Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
- University of Chinese Academy of Sciences, Beijing 100049, China
| | - Zhenhua Wu
- Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
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31
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Wu CH, Hsu CC, Tsai YC, Lee CY, Dai CL. Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique. Micromachines (Basel) 2023; 14:mi14051038. [PMID: 37241663 DOI: 10.3390/mi14051038] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/14/2023] [Revised: 05/03/2023] [Accepted: 05/10/2023] [Indexed: 05/28/2023]
Abstract
The design, fabrication, and measurement of a microelectromechanical system (MEMS) three-axis magnetic field sensor (MFS) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The MFS is a magnetic transistor type. The performance of the MFS was analyzed employing the semiconductor simulation software, Sentaurus TCAD. In order to decrease the cross-sensitivity of the three-axis MFS, the structure of the MFS is planed to accommodate two independent sensing components, a z-MFS utilized to sense magnetic field (M-F) in the z-direction and a y/x-MFS composed of a y-MFS and a x-MFS to be utilized to sense M-F in the y- and x-directions. The z-MFS incorporates four additional collectors to increase its sensitivity. The commercial 1P6M 0.18 μm CMOS process of the Taiwan Semiconductor Manufacturing Company (TSMC) is utilized to manufacture the MFS. Experiments depict that the MFS has a low cross-sensitivity of less than 3%. The sensitivities of z-, y-, and x-MFS are 237 mV/T, 485 mV/T, and 484 mV/T, respectively.
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Affiliation(s)
- Chi-Han Wu
- Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
| | - Cheng-Chih Hsu
- Department of Electro-Optical Engineering, National United University, Miaoli 360, Taiwan
| | - Yao-Chuan Tsai
- Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung 402, Taiwan
| | - Chi-Yuan Lee
- Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan 320, Taiwan
| | - Ching-Liang Dai
- Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
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32
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Smith K, Lin CY, Gilpin Y, Wayne E, Dandin M. Measuring and modeling macrophage proliferation in a lab-on- CMOS capacitance sensing microsystem. Front Bioeng Biotechnol 2023; 11:1159004. [PMID: 37251577 PMCID: PMC10213696 DOI: 10.3389/fbioe.2023.1159004] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/04/2023] [Accepted: 05/04/2023] [Indexed: 05/31/2023] Open
Abstract
We report on the use of a lab-on-CMOS biosensor platform for quantitatively tracking the proliferation of RAW 264.7 murine Balb/c macrophages. We show that macrophage proliferation correlates linearly with an average capacitance growth factor resulting from capacitance measurements at a plurality of electrodes dispersed in a sensing area of interest. We further show a temporal model that captures the cell number evolution in the area over long periods (e.g., 30 h). The model links the cell numbers and the average capacitance growth factor to describe the observed cell proliferation.
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Affiliation(s)
- Kyle Smith
- Department of Chemical Engineering, Pittsburgh, PA, United States
| | - Ching-Yi Lin
- Department of Electrical and Computer Engineering, Pittsburgh, PA, United States
| | - Yann Gilpin
- Department of Electrical and Computer Engineering, Pittsburgh, PA, United States
| | - Elizabeth Wayne
- Department of Chemical Engineering, Pittsburgh, PA, United States
- Department of Biomedical Engineering, Carnegie Mellon University, Pittsburgh, PA, United States
| | - Marc Dandin
- Department of Electrical and Computer Engineering, Pittsburgh, PA, United States
- Department of Biomedical Engineering, Carnegie Mellon University, Pittsburgh, PA, United States
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33
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Tripathi P, Gulli C, Broomfield J, Alexandrou G, Kalofonou M, Bevan C, Moser N, Georgiou P. Classification of nucleic acid amplification on ISFET arrays using spectrogram-based neural networks. Comput Biol Med 2023; 161:107027. [PMID: 37211003 DOI: 10.1016/j.compbiomed.2023.107027] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/20/2022] [Revised: 04/20/2023] [Accepted: 05/09/2023] [Indexed: 05/23/2023]
Abstract
The COVID-19 pandemic has highlighted a significant research gap in the field of molecular diagnostics. This has brought forth the need for AI-based edge solutions that can provide quick diagnostic results whilst maintaining data privacy, security and high standards of sensitivity and specificity. This paper presents a novel proof-of-concept method to detect nucleic acid amplification using ISFET sensors and deep learning. This enables the detection of DNA and RNA on a low-cost and portable lab-on-chip platform for identifying infectious diseases and cancer biomarkers. We show that by using spectrograms to transform the signal to the time-frequency domain, image processing techniques can be applied to achieve the reliable classification of the detected chemical signals. Transformation to spectrograms is beneficial as it makes the data compatible with 2D convolutional neural networks and helps gain significant performance improvement over neural networks trained on the time domain data. The trained network achieves an accuracy of 84% with a size of 30kB making it suitable for deployment on edge devices. This facilitates a new wave of intelligent lab-on-chip platforms that combine microfluidics, CMOS-based chemical sensing arrays and AI-based edge solutions for more intelligent and rapid molecular diagnostics.
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Affiliation(s)
- Prateek Tripathi
- Centre for Bio-Inspired Technology, Department of Electrical and Electronic Engineering, Faculty of Engineering, Imperial College London, SW7 2AZ, London, UK.
| | - Costanza Gulli
- Centre for Bio-Inspired Technology, Department of Electrical and Electronic Engineering, Faculty of Engineering, Imperial College London, SW7 2AZ, London, UK
| | - Joseph Broomfield
- Centre for Bio-Inspired Technology, Department of Electrical and Electronic Engineering, Faculty of Engineering, Imperial College London, SW7 2AZ, London, UK; Department of Surgery and Cancer, Faculty of Medicine, Imperial College London, SW7 2AZ, London, UK
| | - George Alexandrou
- Centre for Bio-Inspired Technology, Department of Electrical and Electronic Engineering, Faculty of Engineering, Imperial College London, SW7 2AZ, London, UK
| | - Melpomeni Kalofonou
- Centre for Bio-Inspired Technology, Department of Electrical and Electronic Engineering, Faculty of Engineering, Imperial College London, SW7 2AZ, London, UK
| | - Charlotte Bevan
- Department of Surgery and Cancer, Faculty of Medicine, Imperial College London, SW7 2AZ, London, UK
| | - Nicolas Moser
- Centre for Bio-Inspired Technology, Department of Electrical and Electronic Engineering, Faculty of Engineering, Imperial College London, SW7 2AZ, London, UK
| | - Pantelis Georgiou
- Centre for Bio-Inspired Technology, Department of Electrical and Electronic Engineering, Faculty of Engineering, Imperial College London, SW7 2AZ, London, UK
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34
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Wang L, Zhou S, Fang W, Huang W, Yang Z, Fu C, Liu C. Automatic Piecewise Extreme Learning Machine-Based Model for S-Parameters of RF Power Amplifier. Micromachines (Basel) 2023; 14:840. [PMID: 37421073 DOI: 10.3390/mi14040840] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/02/2023] [Revised: 04/11/2023] [Accepted: 04/11/2023] [Indexed: 07/09/2023]
Abstract
This paper presents an automatic piecewise (Auto-PW) extreme learning machine (ELM) method for S-parameters modeling radio-frequency (RF) power amplifiers (PAs). A strategy based on splitting regions at the changing points of concave-convex characteristics is proposed, where each region adopts a piecewise ELM model. The verification is carried out with S-parameters measured on a 2.2-6.5 GHz complementary metal oxide semiconductor (CMOS) PA. Compared to the long-short term memory (LSTM), support vector regression (SVR), and conventional ELM modeling methods, the proposed method performs excellently. For example, the modeling speed is two orders of magnitude faster than SVR and LSTM, and the modeling accuracy is more than one order of magnitude higher than ELM.
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Affiliation(s)
- Lulu Wang
- School of Micro-Nano Electronics, Zhejiang University, Hangzhou 310058, China
- Key Laboratory of Advanced Science and Technology on High Power Microwave, Northwest Institute of Nuclear Technology, Xi'an 710024, China
| | - Shaohua Zhou
- Qingdao Institute for Marine Technology of Tianjin University, Qingdao 266200, China
- Research Center for Intelligent Chips and Devices, Zhejiang Lab, Hangzhou 311121, China
- School of Microelectronics, Tianjin University, Tianjin 300072, China
| | - Wenrao Fang
- Key Laboratory of Advanced Science and Technology on High Power Microwave, Northwest Institute of Nuclear Technology, Xi'an 710024, China
| | - Wenhua Huang
- Key Laboratory of Advanced Science and Technology on High Power Microwave, Northwest Institute of Nuclear Technology, Xi'an 710024, China
| | - Zhiqiang Yang
- Key Laboratory of Advanced Science and Technology on High Power Microwave, Northwest Institute of Nuclear Technology, Xi'an 710024, China
| | - Chao Fu
- Key Laboratory of Advanced Science and Technology on High Power Microwave, Northwest Institute of Nuclear Technology, Xi'an 710024, China
| | - Changkun Liu
- Key Laboratory of Advanced Science and Technology on High Power Microwave, Northwest Institute of Nuclear Technology, Xi'an 710024, China
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35
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Wang X, Li TP, Yan SX, Wang J. Room-Temperature CMOS Monolithic Resonant Triple-Band Terahertz Thermal Detector. Micromachines (Basel) 2023; 14:mi14030627. [PMID: 36985034 PMCID: PMC10051246 DOI: 10.3390/mi14030627] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/20/2023] [Revised: 03/07/2023] [Accepted: 03/07/2023] [Indexed: 06/01/2023]
Abstract
Multiband terahertz (THz) detectors show great application potential in imaging, spectroscopy, and sensing fields. Thermal detectors have become a promising choice because they could sense THz radiations on the whole spectrum. This paper demonstrates the operation principle, module designs with in-depth theoretical analysis, and experimental validation of a room-temperature CMOS monolithic resonant triple-band THz thermal detector. The detector, which consists of a compact triple-band octagonal ring antenna and a sensitive proportional to absolute temperature (PTAT) sensor, has virtues of room-temperature operation, low cost, easy integration, and mass production. Good experimental results are obtained at 0.91 THz, 2.58 THz, and 4.2 THz with maximum responsivities of 32.6 V/W, 43.2 V/W, and 40 V/W, respectively, as well as NEPs of 1.28 μW/Hz0.5, 2.19 μW/Hz0.5, and 2.37 μW/Hz0.5, respectively, providing great potential for multiband THz sensing and imaging systems.
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Affiliation(s)
- Xu Wang
- State Key Laboratory of Complex Electromagnetic Environmental Effects on Electronics and Information System, Luoyang 471003, China
- School of Electronics and Information Engineering, Tiangong University, Tianjin 300387, China
- School of Microelectronics, Tianjin University, Tianjin 300072, China
| | - Ting-Peng Li
- State Key Laboratory of Complex Electromagnetic Environmental Effects on Electronics and Information System, Luoyang 471003, China
| | - Shu-Xia Yan
- School of Electronics and Information Engineering, Tiangong University, Tianjin 300387, China
- School of Microelectronics, Tianjin University, Tianjin 300072, China
| | - Jian Wang
- State Key Laboratory of Complex Electromagnetic Environmental Effects on Electronics and Information System, Luoyang 471003, China
- School of Microelectronics, Tianjin University, Tianjin 300072, China
- Qingdao Institute for Ocean Technology, Tianjin University, Qingdao 266200, China
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36
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Mariappan S, Rajendran J, Kumar N, Othman M, Nathan A, Grebennikov A, Yarman BS. A Wide-Bandwidth PVT-Reconfigurable CMOS Power Amplifier with an Integrated Tunable-Output Impedance Matching Network. Micromachines (Basel) 2023; 14:530. [PMID: 36984937 PMCID: PMC10051762 DOI: 10.3390/mi14030530] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/13/2023] [Revised: 02/21/2023] [Accepted: 02/21/2023] [Indexed: 06/18/2023]
Abstract
This paper proposes a wideband CMOS power amplifier (PA) with integrated digitally assisted wideband pre-distorter (DAWPD) and a transformer-integrated tunable-output impedance matching network. As a continuation of our previous research, which focused only on linearization tuning for wideband and PVT, this work emphasized improving the maximum output power, gain and PAE across the PVT variations while maintaining the linearity for a wide frequency bandwidth of 1 GHz. The DAWPD is employed at the driver stage to realize a pre-distorting characteristic for wideband linearization. The addition of the tunable-output impedance matching technique in this work provides stable output power, PAE and gain across the PVT variations, through which it improves the design's robustness, reliability and production yield. Fabricated in CMOS 130 nm with an 8-metal-layer process, the DAWPD-PA with tunable-output impedance matching can achieve an operating frequency bandwidth of 1 GHz from 1.7 to 2.7 GHz. The DAWPD-PA attained a maximum output power of 27 to 28 dBm with a peak PAE of 38.8 to 41.3%. The power gain achieved was 26.9 to 29.7 dB across the targeted frequencies. In addition, when measured with a 20 MHz LTE modulated signal, the DAWPD-PA achieved a linear output power and PAE of 24.0 to 25.1 dBm and 34.5 to 38.8% across the frequency, respectively. On top of that, in this study, the DAWPD-PA is proven to be resilient to process-voltage-temperature (PVT) variations, where it achieves stable performances via the utilization of the proposed tuning mechanisms, mainly contributed by the proposed transformer-integrated tunable-output impedance matching network.
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Affiliation(s)
- Selvakumar Mariappan
- Collaborative Microelectronics Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia
| | - Jagadheswaran Rajendran
- Collaborative Microelectronics Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia
| | - Narendra Kumar
- Department of Electrical Engineering, Faculty of Engineering, University of Malaya, Kuala Lumpur 50603, Malaysia
| | - Masuri Othman
- Institute of Microengineering and Nanoelectronics, National University of Malaysia, Bangi 43600, Malaysia
| | - Arokia Nathan
- Darwin College, Cambridge University, Cambridge CB3 9EU, UK
| | | | - Binboga S. Yarman
- Department of Electrical and Electronics Engineering, Istanbul University, 34320 Istanbul, Turkey
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37
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Yampolsky M, Pikhay E, Shima Edelstein R, Roizin Y. High-Sensitivity CMOS-Integrated Floating Gate-Based UVC Sensors. Sensors (Basel) 2023; 23:2509. [PMID: 36904716 PMCID: PMC10006957 DOI: 10.3390/s23052509] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/02/2023] [Revised: 02/22/2023] [Accepted: 02/22/2023] [Indexed: 06/18/2023]
Abstract
We report on novel UVC sensors based on the floating gate (FG) discharge principle. The device operation is similar to that of EPROM non-volatile memories UV erasure, but the sensitivity to ultraviolet light is strongly increased by using single polysilicon devices of special design with low FG capacitance and long gate periphery (grilled cells). The devices were integrated without additional masks into a standard CMOS process flow featuring a UV-transparent back end. Low-cost integrated UVC solar blind sensors were optimized for implementation in UVC sterilization systems, where they provided feedback on the radiation dose sufficient for disinfection. Doses of ~10 µJ/cm2 at 220 nm could be measured in less than a second. The device can be reprogrammed up to 10,000 times and used to control ~10-50 mJ/cm2 UVC radiation doses typically employed for surface or air disinfection. Demonstrators of integrated solutions comprising UV sources, sensors, logics, and communication means were fabricated. Compared with the existing silicon-based UVC sensing devices, no degradation effects that limit the targeted applications were observed. Other applications of the developed sensors, such as UVC imaging, are also discussed.
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38
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Jin IK, Kumar K, Rendell MJ, Huang JY, Escott CC, Hudson FE, Lim WH, Dzurak AS, Hamilton AR, Liles SD. Combining n-MOS Charge Sensing with p-MOS Silicon Hole Double Quantum Dots in a CMOS platform. Nano Lett 2023; 23:1261-1266. [PMID: 36748989 DOI: 10.1021/acs.nanolett.2c04417] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Holes in silicon quantum dots are receiving attention due to their potential as fast, tunable, and scalable qubits in semiconductor quantum circuits. Despite this, challenges remain in this material system including difficulties using charge sensing to determine the number of holes in a quantum dot, and in controlling the coupling between adjacent quantum dots. We address these problems by fabricating an ambipolar complementary metal-oxide-semiconductor (CMOS) device using multilayer palladium gates. The device consists of an electron charge sensor adjacent to a hole double quantum dot. We demonstrate control of the spin state via electric dipole spin resonance. We achieve smooth control of the interdot coupling rate over 1 order of magnitude and use the charge sensor to perform spin-to-charge conversion to measure the hole singlet-triplet relaxation time of 11 μs for a known hole occupation. These results provide a path toward improving the quality and controllability of hole spin-qubits.
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Affiliation(s)
- Ik Kyeong Jin
- School of Physics, The University of New South Wales, Sydney, New South Wales 2052, Australia
| | - Krittika Kumar
- School of Physics, The University of New South Wales, Sydney, New South Wales 2052, Australia
| | - Matthew J Rendell
- School of Physics, The University of New South Wales, Sydney, New South Wales 2052, Australia
| | - Jonathan Yue Huang
- School of Electrical Engineering and Telecommunications, The University of New South Wales, Sydney, New South Wales 2052, Australia
- Diraq, Sydney, New South Wales 2052, Australia
| | - Chris C Escott
- School of Electrical Engineering and Telecommunications, The University of New South Wales, Sydney, New South Wales 2052, Australia
- Diraq, Sydney, New South Wales 2052, Australia
| | - Fay E Hudson
- School of Electrical Engineering and Telecommunications, The University of New South Wales, Sydney, New South Wales 2052, Australia
- Diraq, Sydney, New South Wales 2052, Australia
| | - Wee Han Lim
- School of Electrical Engineering and Telecommunications, The University of New South Wales, Sydney, New South Wales 2052, Australia
- Diraq, Sydney, New South Wales 2052, Australia
| | - Andrew S Dzurak
- School of Electrical Engineering and Telecommunications, The University of New South Wales, Sydney, New South Wales 2052, Australia
- Diraq, Sydney, New South Wales 2052, Australia
| | - Alexander R Hamilton
- School of Physics, The University of New South Wales, Sydney, New South Wales 2052, Australia
| | - Scott D Liles
- School of Physics, The University of New South Wales, Sydney, New South Wales 2052, Australia
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39
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Li Y, Rajendran J, Mariappan S, Rawat AS, Sal Hamid S, Kumar N, Othman M, Nathan A. CMOS Radio Frequency Energy Harvester (RFEH) with Fully On-Chip Tunable Voltage-Booster for Wideband Sensitivity Enhancement. Micromachines (Basel) 2023; 14:392. [PMID: 36838092 PMCID: PMC9958904 DOI: 10.3390/mi14020392] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/28/2022] [Revised: 01/17/2023] [Accepted: 01/18/2023] [Indexed: 06/18/2023]
Abstract
Radio frequency energy harvesting (RFEH) is one form of renewable energy harvesting currently seeing widespread popularity because many wireless electronic devices can coordinate their communications via RFEH, especially in CMOS technology. For RFEH, the sensitivity of detecting low-power ambient RF signals is the utmost priority. The voltage boosting mechanisms at the input of the RFEH are typically applied to enhance its sensitivity. However, the bandwidth in which its sensitivity is maintained is very poor. This work implements a tunable voltage boosting (TVB) mechanism fully on-chip in a 3-stage cross-coupled differential drive rectifier (CCDD). The TVB is designed with an interleaved transformer architecture where the primary winding is implemented to the rectifier, while the secondary winding is connected to a MOSFET switch that tunes the inductance of the network. The TVB enables the sensitivity of the rectifier to be maintained at 1V DC output voltage with a minimum deviation of -2 dBm across a wide bandwidth of 3 to 6 GHz of 5G New Radio frequency (5GNR) bands. A DC output voltage of 1 V and a peak PCE of 83% at 3 GHz for -23 dBm input power are achieved. A PCE of more than 50% can be maintained at the sensitivity point of 1 V with the aid of TVB. The proposed CCDD-TVB mechanism enables the CMOS RFEH to be operated for wideband applications with optimum sensitivity, DC output voltage, and efficiency.
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Affiliation(s)
- Yizhi Li
- Collaborative Microelectronics Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia
| | - Jagadheswaran Rajendran
- Collaborative Microelectronics Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia
| | - Selvakumar Mariappan
- Collaborative Microelectronics Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia
| | - Arvind Singh Rawat
- Collaborative Microelectronics Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia
| | - Sofiyah Sal Hamid
- Collaborative Microelectronics Design Excellence Centre (CEDEC), Universiti Sains Malaysia, Bayan Lepas 11900, Malaysia
| | - Narendra Kumar
- Department of Electrical Engineering, Faculty of Engineering, University of Malaya, Kuala Lumpur 50603, Malaysia
| | - Masuri Othman
- Institute of Microengineering and Nanoelectronics, National University of Malaysia, Bangi 43600, Malaysia
| | - Arokia Nathan
- Darwin College, Cambridge University, Cambridge CB3 9EU, UK
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40
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Gao J, Wang X, Han F, Wan J, Gu W. Analysis and Design of a Non-Magnetic Bulk CMOS Passive Circulator Using 25% Duty-Cycle Clock. Micromachines (Basel) 2022; 14:33. [PMID: 36677094 PMCID: PMC9866938 DOI: 10.3390/mi14010033] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/12/2022] [Revised: 12/18/2022] [Accepted: 12/20/2022] [Indexed: 06/17/2023]
Abstract
A circulator, which is a non-reciprocal device, is widely used in full-duplex systems, future communication and sensing networks, and quantum computing, and it is difficult to implement a passive topology on a chip. Based on switch-based spatio-temporal conductivity modulation, in this study, we design and implement a non-magnetic on-chip passive circulator operating at the Ku band in a 90-nm bulk CMOS technology using a 25% duty-cycle I/Q clock signal. With the virtue of the four-phase non-overlapping clock signal, the proposed circulator achieves a 3.9 dB transmitter (TX)-to-antenna (ANT) and a 4.0 dB ANT-to-receiver (RX) insertion loss with a 1-dB bandwidth of 2.7 GHz (21.4%). The TX-to-RX isolation is better than 17.2 dB, and the TX-to-ANT IIP3 and ANT-to-RX IIP3 are 19.7 dBm and 20.0 dBm, respectively, while occupying a die area of 1.55 mm × 1.15 mm. Although low-cost bulk CMOS technology is used, competitive isolation, linearity performance, and isolation bandwidth are achieved in the proposed design.
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Affiliation(s)
- Jian Gao
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
| | - Xinghua Wang
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
| | - Fang Han
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
| | - Jiayue Wan
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
| | - Wei Gu
- School of Information and Electronics, Beijing Institute of Technology, Beijing 100081, China
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41
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Thai HH, Pham CK, Le DH. Design of a Low-Power and Low-Area 8-Bit Flash ADC Using a Double-Tail Comparator on 180 nm CMOS Process. Sensors (Basel) 2022; 23:76. [PMID: 36616674 PMCID: PMC9824010 DOI: 10.3390/s23010076] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/14/2022] [Revised: 12/16/2022] [Accepted: 12/17/2022] [Indexed: 06/17/2023]
Abstract
This paper presents a low-area 8-bit flash ADC that consumes low power. The flash ADC includes four main blocks-an analog multiplexer (MUX), a comparator, an encoder, and an SPI (Serial Peripheral Interface) block. The MUX allows the selection between eight analog inputs. The comparator block contains a TIQ (Threshold Inverter Quantization) comparator, a control circuit, and a proposed architecture of a Double-Tail (DT) comparator. The advantage of using the DT comparator is to reduce the number of comparators by half, which helps reduce the design area. The SPI block can provide a simple way for the ADC to interface with microcontrollers. This mixed-signal circuitry is designed and simulated using 180 nm CMOS technology. The 8-bit flash ADC only employs 128 comparators. The applied input clock is 80 MHz, with the input voltage ranging from 0.6 V to 1.8 V. The comparator block outputs 127 bits of thermometer code and sends them to the encoder, which exports the seven least significant bits (LSB) of the binary code. The most significant bit (MSB) is decided by only one DT comparator. The design consumes 2.81 mW of power on average. The total area of the layout is 0.088 mm2. The figure of merit (FOM) is about 877 fJ/step. The research ends up with a fabricated chip with the design inserted into it.
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Affiliation(s)
- Hong-Hai Thai
- Faculty of Electronics and Telecommunications, The University of Science, Vietnam National University, Ho Chi Minh City 700000, Vietnam
| | - Cong-Kha Pham
- Department of Computer and Network Engineering, The University of Electro-Communications, Tokyo 182-8585, Japan
| | - Duc-Hung Le
- Faculty of Electronics and Telecommunications, The University of Science, Vietnam National University, Ho Chi Minh City 700000, Vietnam
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42
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Becker GS, Lovas R. Uniformity Correction of CMOS Image Sensor Modules for Machine Vision Cameras. Sensors (Basel) 2022; 22:9733. [PMID: 36560102 PMCID: PMC9783237 DOI: 10.3390/s22249733] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/04/2022] [Revised: 11/28/2022] [Accepted: 12/08/2022] [Indexed: 06/17/2023]
Abstract
Flat-field correction (FFC) is commonly used in image signal processing (ISP) to improve the uniformity of image sensor pixels. Image sensor nonuniformity and lens system characteristics have been known to be temperature-dependent. Some machine vision applications, such as visual odometry and single-pixel airborne object tracking, are extremely sensitive to pixel-to-pixel sensitivity variations. Numerous cameras, especially in the fields of infrared imaging and staring cameras, use multiple calibration images to correct for nonuniformities. This paper characterizes the temperature and analog gain dependence of the dark signal nonuniformity (DSNU) and photoresponse nonuniformity (PRNU) of two contemporary global shutter CMOS image sensors for machine vision applications. An optimized hardware architecture is proposed to compensate for nonuniformities, with optional parametric lens shading correction (LSC). Three different performance configurations are outlined for different application areas, costs, and power requirements. For most commercial applications, the correction of LSC suffices. For both DSNU and PRNU, compensation with one or multiple calibration images, captured at different gain and temperature settings are considered. For more demanding applications, the effectiveness, external memory bandwidth, power consumption, implementation, and calibration complexity, as well as the camera manufacturability of different nonuniformity correction approaches were compared.
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Affiliation(s)
- Gabor Szedo Becker
- Doctoral School of Applied Informatics and Applied Mathematics, Óbuda University, Bécsi út 96/B, 1034 Budapest, Hungary
| | - Róbert Lovas
- Institute for Computer Science and Control (SZTAKI), Eötvös Loránd Research Network (ELKH), Kende u. 13-17, 1111 Budapest, Hungary
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43
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Lee JH, Lee MK, Park JD. A Direct Feedback FVF LDO for High Precision FMCW Radar Sensors in 65-nm CMOS Technology. Sensors (Basel) 2022; 22:9672. [PMID: 36560043 PMCID: PMC9786220 DOI: 10.3390/s22249672] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/19/2022] [Revised: 12/05/2022] [Accepted: 12/06/2022] [Indexed: 06/17/2023]
Abstract
A direct feedback flipped voltage follower (FVF) LDO for a high-precision frequency-modulated continuous-wave (FMCW) radar is presented. To minimize the effect of the power supply ripple on the FMCW radar sensor's resolution, a folded cascode error amplifier (EA) was connected to the outer loop of the FVF to increase the open-loop gain. The direct feedback structure enhances the PSRR while minimizing the power supply ripple path and not compromising a transient response. The flipped voltage follower with a super source follower forms a fast feedback loop. The stability and parameter variation sensitivity of the multi-loop FVF LDO were analyzed through the state matrix decomposition. We implemented the FVF LDO in TSMC 65 nm CMOS technology. The fabricated FVF LDO supplied a maximum load current of 20 mA with a 1.2 V power supply. The proposed FVF LDO achieved a full-spectrum PSR with a low-frequency PSRR of 66 dB, unity-gain bandwidth of 469 MHz, and 20 ns transient settling time with a load current step from 1 mA to 20 mA.
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Affiliation(s)
- Jun-Hee Lee
- Division of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, Republic of Korea
| | - Mun-Kyo Lee
- Yongin Research Institute, Hanwha Systems, Yongin-si 17121, Republic of Korea
| | - Jung-Dong Park
- Division of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, Republic of Korea
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44
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Kim J. A Wideband and Low-Power Distributed Cascode Mixer Using Inductive Feedback. Sensors (Basel) 2022; 22:s22229022. [PMID: 36433615 PMCID: PMC9696788 DOI: 10.3390/s22229022] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/16/2022] [Revised: 11/15/2022] [Accepted: 11/18/2022] [Indexed: 05/27/2023]
Abstract
A wideband and low-power distributed cascode mixer is implemented for future mobile communications. The distributed design inspired by the distributed amplifier (DA) enables a mixer to operate in a wide band. In addition, the cascode structure and inductive positive feedback design allow high conversion gain with low-power consumption. The proposed mixer is fabricated using a 130 nm commercial complementary metal-oxide-semiconductor (CMOS) process. It consists of three cascode gain cells and operates with a drain voltage of 1.5 V and a gate voltage of 0.5 to 0.7 V. The fabricated mixer exhibits conversion gain of -2.9 to 3.1 dB at the radio frequencies (RFs) of 4 to 30 GHz and -1.9 to 0.4 dB at RFs of 54 to 66 GHz under the conditions of 8 to 10 dBm of local oscillator (LO) power and 650 MHz of intermediate frequency (IF). The LO-RF isolation is more than 15 dB over the entire measurement band (0.2 to 67 GHz) as the RF and LO signals are applied to different transistors owing to the cascode structure. The total power consumption is only within 12 mW, and the chip size is 0.056 mm2, making it possible to implement a compact mixer. The proposed mixer shows broadband characteristics covering from ultra-wideband (UWB) and the 28 GHz fifth-generation (5G) communication band to the 60 GHz wireless gigabit alliance (WiGig) band.
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Affiliation(s)
- Jihoon Kim
- Department of Electronics Engineering, Pai Chai University, Daejeon 35345, Republic of Korea
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45
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Annese VF, Hu C. Integrating Microfluidics and Electronics in Point-of-Care Diagnostics: Current and Future Challenges. Micromachines (Basel) 2022; 13:1923. [PMID: 36363944 PMCID: PMC9699090 DOI: 10.3390/mi13111923] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/19/2022] [Revised: 11/01/2022] [Accepted: 11/03/2022] [Indexed: 06/16/2023]
Abstract
Point-of-Care (POC) diagnostics have gained increasing attention in recent years due to its numerous advantages over conventional diagnostic approaches. As proven during the recent COVID-19 pandemic, the rapidity and portability of POC testing improves the efficiency of healthcare services and reduces the burden on healthcare providers. There are hundreds of thousands of different applications for POC diagnostics, however, the ultimate requirement for the test is the same: sample-in and result-out. Many technologies have been implemented, such as microfluidics, semiconductors, and nanostructure, to achieve this end. The development of even more powerful POC systems was also enabled by merging multiple technologies into the same system. One successful example is the integration of microfluidics and electronics in POC diagnostics, which has simplified the sample handling process, reduced sample usage, and reduced the cost of the test. This review will analyze the current development of the POC diagnostic systems with the integration of microfluidics and electronics and discuss the future challenges and perspectives that researchers might have.
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Affiliation(s)
- Valerio Francesco Annese
- Center for Nano Science and Technology@PoliMi, Istituto Italiano di Tecnologia, 20133 Milan, Italy
- James Watt School of Engineering, University of Glasgow, Glasgow G12 8QQ, UK
| | - Chunxiao Hu
- James Watt School of Engineering, University of Glasgow, Glasgow G12 8QQ, UK
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46
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Lee Y, Kim S, Shin H. A 24 GHz CMOS Direct-Conversion RF Receiver with I/Q Mismatch Calibration for Radar Sensor Applications. Sensors (Basel) 2022; 22:8246. [PMID: 36365944 PMCID: PMC9658703 DOI: 10.3390/s22218246] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/20/2022] [Revised: 10/24/2022] [Accepted: 10/26/2022] [Indexed: 06/16/2023]
Abstract
A 24 GHz millimeter-wave direct-conversion radio-frequency (RF) receiver with wide-range and precise I/Q mismatch calibration is designed in 65 nm CMOS technology for radar sensor applications. The CMOS RF receiver is based on a quadrature direct-conversion architecture. Analytic relations are derived to clearly exhibit the individual contributions of the I/Q amplitude and phase mismatches to the image-rejection ratio (IRR) degradation, which provides a useful design guide for determining the range and resolution of the I/Q mismatch calibration circuit. The designed CMOS RF receiver comprises a low-noise amplifier, quadrature down-conversion mixer, baseband amplifier, and quadrature LO generator. Controlling the individual gate bias voltages of the switching FETs in the down-conversion mixer having a resistive load is found to induce significant changes at the amplitude and phase of the output signal. In the calibration process, the mixer gate bias tuning is first performed for the amplitude mismatch calibration, and the remaining phase mismatch is then calibrated out by the varactor capacitance tuning at the LO buffer's LC load. Implemented in 65 nm CMOS process, the RF receiver achieves 31.5 dB power gain, -35.2 dBm input-referred 1 dB compression power, and 4.8-7.1 dB noise figure across 22.5-26.1 GHz band, while dissipating 106.2 mA from a 1.2 V supply. The effectiveness of the proposed I/Q mismatch calibration is successfully verified by observing that the amplitude and phase mismatches are improved from 1.0-1.5 dB to 0.02-0.19 dB, and from 10.8-23.8 to 1.1-3.2 degrees, respectively.
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Affiliation(s)
- Yongho Lee
- Department of Electronic Convergence Engineering, Kwangwoon University, Seoul 01897, Korea
| | - Soyeon Kim
- Samsung Electronics Co., Ltd., Suwon 16677, Korea
| | - Hyunchol Shin
- Department of Electronic Convergence Engineering, Kwangwoon University, Seoul 01897, Korea
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47
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Joo JE, Hu Y, Kim S, Kim H, Park S, Kim JH, Kim Y, Park SM. An Indoor-Monitoring LiDAR Sensor for Patients with Alzheimer Disease Residing in Long-Term Care Facilities. Sensors (Basel) 2022; 22:7934. [PMID: 36298279 PMCID: PMC9610032 DOI: 10.3390/s22207934] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/26/2022] [Revised: 10/15/2022] [Accepted: 10/17/2022] [Indexed: 06/16/2023]
Abstract
This paper introduces an indoor-monitoring LiDAR sensor for patients with Alzheimer disease residing in long-term care facilities (LTCFs), and this sensor exploits an optoelectronic analog front-end (AFE) to detect light signals from targets by utilizing on-chip avalanche photodiodes (APDs) realized in a 180 nm CMOS process and a neural processing unit (NPU) used for motion detection and decisions, especially for incidents of falls occurring in LTCFs. The AFE consists of an on-chip CMOS P+/N-well APD, a linear-mode transimpedance amplifier, a post-amplifier, and a time-to-digital converter, whereas the NPU exploits network sparsity and approximate processing elements for low-power operation. This work provides a potential solution of low-cost, low-power, indoor-monitoring LiDAR sensors for patients with Alzheimer disease in LTCFs.
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Affiliation(s)
- Ji-Eun Joo
- Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Korea
- Graduate Program in Smart Factory, Ewha Womans University, Seoul 03760, Korea
| | - Yu Hu
- Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Korea
- Graduate Program in Smart Factory, Ewha Womans University, Seoul 03760, Korea
| | - Sujin Kim
- Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Korea
- Graduate Program in Smart Factory, Ewha Womans University, Seoul 03760, Korea
| | - Hyunji Kim
- Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Korea
- Graduate Program in Smart Factory, Ewha Womans University, Seoul 03760, Korea
| | - Sunyoung Park
- Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Korea
- Graduate Program in Smart Factory, Ewha Womans University, Seoul 03760, Korea
| | - Ji-Hoon Kim
- Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Korea
- Graduate Program in Smart Factory, Ewha Womans University, Seoul 03760, Korea
| | - Younghyun Kim
- Department of Electronic and Computer Engineering, University of Wisconsin–Madison, Madison, WI 53706, USA
| | - Sung-Min Park
- Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Korea
- Graduate Program in Smart Factory, Ewha Womans University, Seoul 03760, Korea
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48
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Bah TM, Didenko S, Zhou D, Zhu T, Ikzibane H, Monfray S, Skotnicki T, Dubois E, Robillard JF. A CMOS compatible thermoelectric device made of crystalline silicon membranes with nanopores. Nanotechnology 2022; 33:505403. [PMID: 36027727 DOI: 10.1088/1361-6528/ac8d12] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/29/2022] [Accepted: 08/25/2022] [Indexed: 06/15/2023]
Abstract
Herein, we report the use of nanostructured crystalline silicon as a thermoelectric material and its integration into thermoelectric devices. The proof-of-concept relies on the partial suppression of lattice thermal conduction by introducing pores with dimensions scaling between the electron mean free path and the phonon mean free path. In other words, we artificially aimed at the well-known 'electron crystal and phonon glass' trade-off targeted in thermoelectricity. The devices were fabricated using CMOS-compatible processes and exhibited power generation up to 5.5 mW cm-2under a temperature difference of 280 K. These numbers demonstrate the capability to power autonomous devices with environmental heat sources using silicon chips of centimeter square dimensions. We also report the possibility of using the developed devices for integrated thermoelectric cooling.
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Affiliation(s)
- Thierno-Moussa Bah
- STMicroelectronics-850 rue jean Monnet F-38920 Crolles, France
- Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Microélectronique et de Nanotechnologie, F-59000 Lille, France
| | - Stanislav Didenko
- Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Microélectronique et de Nanotechnologie, F-59000 Lille, France
| | - Di Zhou
- Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Microélectronique et de Nanotechnologie, F-59000 Lille, France
| | - Tianqi Zhu
- Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Microélectronique et de Nanotechnologie, F-59000 Lille, France
| | - Hafsa Ikzibane
- Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Microélectronique et de Nanotechnologie, F-59000 Lille, France
| | | | - Thomas Skotnicki
- Warsaw University of Technology, Centre for Advanced Materials and Technologies CEZAMAT, ul. Poleczki 19, 02-822 Warsaw, Poland
- Warsaw University of Technology, Faculty of Electronics and Information Technology, Institute of Microelectronics and Optoelectronics, ul. Koszykowa 75, 00-662 Warsaw, Poland
| | - Emmanuel Dubois
- Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Microélectronique et de Nanotechnologie, F-59000 Lille, France
| | - Jean-François Robillard
- Univ. Lille, CNRS, Centrale Lille, Junia, Univ. Polytechnique Hauts-de-France, UMR 8520-IEMN-Institut d'Electronique de Microélectronique et de Nanotechnologie, F-59000 Lille, France
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49
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Liu Y, Zhang X, Sun J, Tong L, Kong L, Deng T. A Novel Terahertz Detector Based on Asymmetrical FET Array in 55-nm Standard CMOS Process. Materials (Basel) 2022; 15:6578. [PMID: 36233918 PMCID: PMC9573511 DOI: 10.3390/ma15196578] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/18/2022] [Revised: 09/08/2022] [Accepted: 09/16/2022] [Indexed: 06/16/2023]
Abstract
This paper reports a novel, one-dimensional dense array of asymmetrical metal-oxide-semiconductor field-effect-transistor (MOSFET) THz detector, which has been fabricated in GlobalFoundries 55-nm CMOS technology. Compared with other technologies, the Si-based complementary metal-oxide-semiconductor (CMOS) dominates in industrial applications, owing to its easier integration and lower cost. However, as the frequency increases, the return loss between the antenna and detector will increase. The proposed THz detector has a short-period grating structure formed by MOSFET fingers in the array, which can serve as an effective antenna to couple incident THz radiation into the FET channels. It not only solved the problem of return loss effectively, but also greatly reduced the detector area. Meanwhile, since the THz signal is rectified at both the source and drain electrodes to generate two current signals with equal amplitude but opposite directions, the source drain voltage is not provided to reduce the power consumption. This leads to a poor performance of the THz detector. Therefore, by using an asymmetric structure for the gate fingers position to replace the source drain voltage, the performance of the detector in the case of zero power consumption can be effectively improved. Compared with the symmetrical MOSFET THz detector, Rv is increased by 183.3% and NEP is decreased by 67.7%.
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Affiliation(s)
- Yaxuan Liu
- School of Microelectronics, Tianjin University, Tianjin 300072, China
- School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing 100044, China
| | - Xin Zhang
- School of Microelectronics, Tianjin University, Tianjin 300072, China
| | - Jingye Sun
- School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing 100044, China
| | - Ling Tong
- Beijing Microelectronics Technology Institute, Beijing 100076, China
| | - Lingbing Kong
- School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing 100044, China
| | - Tao Deng
- School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing 100044, China
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50
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Allport PP, Benhammadi S, Bosley RR, Dopke J, Fasselt L, Flynn S, Gonella L, Guerrini N, Issever C, Nikolopoulos K, Kopsalis I, Philips P, Price T, Sedgwick I, Villani G, Warren M, Watson N, Weber H, Winter A, Wilson F, Worm S, Zhang Z. DECAL: A Reconfigurable Monolithic Active Pixel Sensor for Tracking and Calorimetry in a 180 nm Image Sensor Process. Sensors (Basel) 2022; 22:6848. [PMID: 36146197 PMCID: PMC9506098 DOI: 10.3390/s22186848] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/29/2022] [Revised: 09/02/2022] [Accepted: 09/03/2022] [Indexed: 06/16/2023]
Abstract
In this paper, we describe DECAL, a prototype Monolithic Active Pixel Sensor (MAPS) device designed to demonstrate the feasibility of both digital calorimetry and reconfigurability in ASICs for particle physics. The goal of this architecture is to help reduce the development and manufacturing costs of detectors for future colliders by developing a chip that can operate both as a digital silicon calorimeter and a tracking chip. The prototype sensor consists of a matrix of 64 × 64 55 μm pixels, and provides a readout at 40 MHz of the number of particles which have struck the matrix in the preceding 25 ns. It can be configured to report this as a total sum across the sensor (equivalent to the pad of an analogue calorimeter) or the sum per column (equivalent to a traditional strip detector). The design and operation of the sensor are described, and the results of chip characterisation are reported and compared to simulations.
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Affiliation(s)
- Philip Patrick Allport
- School of Physics and Astronomy, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
| | - Seddik Benhammadi
- STFC Rutherford Appleton Laboratory, Harwell Campus, Didcot OX11 0QX, UK
| | - Robert Ross Bosley
- School of Physics and Astronomy, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
| | - Jens Dopke
- STFC Rutherford Appleton Laboratory, Harwell Campus, Didcot OX11 0QX, UK
| | - Lucian Fasselt
- Institute for Physics, Humboldt University of Berlin, Newtonstrasse 15, D-12489 Berlin, Germany
| | - Samuel Flynn
- School of Physics and Astronomy, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
| | - Laura Gonella
- School of Physics and Astronomy, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
| | - Nicola Guerrini
- STFC Rutherford Appleton Laboratory, Harwell Campus, Didcot OX11 0QX, UK
| | - Cigdem Issever
- Institute for Physics, Humboldt University of Berlin, Newtonstrasse 15, D-12489 Berlin, Germany
- Deutsches Elektronen-Synchrotron DESY, Platanenallee 6, D-15738 Zeuthen, Germany
| | - Kostas Nikolopoulos
- School of Physics and Astronomy, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
| | - Ioannis Kopsalis
- School of Physics and Astronomy, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
| | - Peter Philips
- STFC Rutherford Appleton Laboratory, Harwell Campus, Didcot OX11 0QX, UK
| | - Tony Price
- School of Physics and Astronomy, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
| | - Iain Sedgwick
- STFC Rutherford Appleton Laboratory, Harwell Campus, Didcot OX11 0QX, UK
| | - Giulio Villani
- STFC Rutherford Appleton Laboratory, Harwell Campus, Didcot OX11 0QX, UK
| | - Matt Warren
- Department of Physics and Astronomy, University College London, Gower Street, London WC1E 6BT, UK
| | - Nigel Watson
- School of Physics and Astronomy, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
| | - Hannsjorg Weber
- Institute for Physics, Humboldt University of Berlin, Newtonstrasse 15, D-12489 Berlin, Germany
| | - Alasdair Winter
- School of Physics and Astronomy, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
| | - Fergus Wilson
- STFC Rutherford Appleton Laboratory, Harwell Campus, Didcot OX11 0QX, UK
| | - Steven Worm
- Deutsches Elektronen-Synchrotron DESY, Platanenallee 6, D-15738 Zeuthen, Germany
| | - Zhige Zhang
- STFC Rutherford Appleton Laboratory, Harwell Campus, Didcot OX11 0QX, UK
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