Coupled Micromachined Magnetic Resonators for Microwave Signal Processing

In this paper, the theory, micromachining technology, and experimental results of the coupling of integrated magnetic film-based resonators for microwave signal filtering are presented. This is an extended contribution to the field of magnetostatic wave coupled resonators, including details about the technological results, circuit theory, and perspective applications for tunable integrated coupled magnetic resonators. An analytical approach using the magnetostatic wave approximation is used to derive the coupling coefficient between adjacent resonators coupled by the electromagnetic field decaying outside the resonators. Then, micromachining employing hot phosphoric acid etching is presented to manufacture integrated coupled resonators. Finally, circuit modeling and experimental results obtained using the ferromagnetic resonance technique are discussed.

Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.

Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection

This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a commercial CMOS technology (0.35 μm CMOS-AMS) and monolithically integrated with conditioning and readout circuitry. Sensing is performed through the resonance frequency change due to the addition of water onto the clamped-clamped beam coming from the moisture created by the evaporation of water in the human body. The sensitivity and high-speed response to the addition of water onto the metal bridge, as well as the quick dewetting of the surface, make it suitable for low-power human activity sensing.

Single-Line Multi-Channel Flexible Stress Sensor Arrays

Flexible stress sensor arrays, comprising multiple flexible stress sensor units, enable accurate quantification and analysis of spatial stress distribution. Nevertheless, the current implementation of flexible stress sensor arrays faces the challenge of excessive signal wires, resulting in reduced deformability, stability, reliability, and increased costs. The primary obstacle lies in the electric amplitude modulation nature of the sensor unit's signal (e.g., resistance and capacitance), allowing only one signal per wire. To overcome this challenge, the single-line multi-channel signal (SLMC) measurement has been developed, enabling simultaneous detection of multiple sensor signals through one or two signal wires, which effectively reduces the number of signal wires, thereby enhancing stability, deformability, and reliability. This review offers a general knowledge of SLMC measurement beginning with flexible stress sensors and their piezoresistive, capacitive, piezoelectric, and triboelectric sensing mechanisms. A further discussion is given on different arraying methods and their corresponding advantages and disadvantages. Finally, this review categorizes existing SLMC measurement methods into RLC series resonant sensing, transmission line sensing, ionic conductor sensing, triboelectric sensing, piezoresistive sensing, and distributed fiber optic sensing based on their mechanisms, describes the mechanisms and characteristics of each method and summarizes the research status of SLMC measurement.

High-Sensitivity Graphene MOEMS Resonant Pressure Sensor

Nanomechanical resonators made from suspended graphene exhibit high sensitivity toward pressure variations. Nevertheless, these devices exhibit significant energy loss in nonvacuum environments due to air damping, as well as inevitably weak gas leakage within the reference cavity because of the slight permeation of graphene. We present a new type of graphene resonant pressure sensor utilizing micro-opto-electro-mechanical systems technology, which features a multilayer graphene membrane that is sealed in vacuum and adhered to pressure-sensitive silicon film with grooves. This approach innovatively employs an indirectly sensitive method, exhibiting 60 times smaller energy loss in atmosphere, and solving the long-standing issue of gas permeation between the substrate and graphene. Notably, the proposed sensor exhibits a high pressure sensitivity of 1.7 Hz/Pa, which is 5 times higher than the sensitivity of the silicon counterparts. Also, the all-optical encapsulating cavity structure contributes a high signal-to-noise ratio of 6.9 × 10^-5 Pa^-1 and a low temperature drift (0.014%/^◦C). The proposed method offers a promising solution for long-term stability and energy loss suppression of pressure sensors using two-dimensional materials as the sensitive membrane.

A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators

This paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators wherein we designed the resonator and the micro-hotplate using MEMS technology, then bounding them in a package shell at the chip level. The resonator is transduced by AlN film, and its temperature is monitored by temperature-sensing resistors on both sides. The designed micro-hotplate is placed at the bottom of the resonator chip as a heater and insulated by airgel. The PID pulse width modulation (PWM) circuit controls the heater according to the temperature detection result to provide a constant temperature for the resonator. The proposed oven-controlled MEMS resonator (OCMR) exhibits a frequency drift of 3.5 ppm. Compared with the previously reported similar methods, first, the OCMR structure using airgel combined with a micro-hotplate is proposed for the first time, and the working temperature is extended from 85 °C to 125 °C. Second, our work does not require redesign or additional constraints on the MEMS resonator, so the proposed structure is more general and can be practically applied to other MEMS devices that require temperature control.

Optical Biosensors and Their Applications for the Detection of Water Pollutants

The correct detection and quantification of pollutants in water is key to regulating their presence in the environment. Biosensors offer several advantages, such as minimal sample preparation, short measurement times, high specificity and sensibility and low detection limits. The purpose of this review is to explore the different types of optical biosensors, focusing on their biological elements and their principle of operation, as well as recent applications in the detection of pollutants in water. According to our literature review, 33% of the publications used fluorescence-based biosensors, followed by surface plasmon resonance (SPR) with 28%. So far, SPR biosensors have achieved the best results in terms of detection limits. Although less common (22%), interferometers and resonators (4%) are also highly promising due to the low detection limits that can be reached using these techniques. In terms of biological recognition elements, 43% of the published works focused on antibodies due to their high affinity and stability, although they could be replaced with molecularly imprinted polymers. This review offers a unique compilation of the most recent work in the specific area of optical biosensing for water monitoring, focusing on both the biological element and the transducer used, as well as the type of target contaminant. Recent technological advances are discussed.

Investigating the Potential of Transparent Parallel-Arranged Micro-Perforated Panels (MPPs) as Sound Absorbers in Classrooms

Acoustic deficiencies due to lack of absorption in indoor spaces may sometime render significant buildings unfit for their purpose, especially the ones used as speech auditoria. This study investigates the potential of designing wideband acoustic absorbers composed of parallel-arranged micro-perforated panels (MPPs), known as efficient absorbers that do not need any other fibrous/porous material to have a high absorptive performance. It aims to integrate architectural trends such as transparency and the use of raw materials with acoustical constraints to ensure optimal indoor acoustic conditions. It proposes a structure composed of four parallel-arranged MPPs, which have been theoretically modelled using the electrical Equivalent Circuit Model (ECM) and implemented on an acrylic prototype using recent techniques such as CNC machining tools. The resulting samples are experimentally analysed for their absorption efficiency through the ISO-10534-2 method in an impedance tube. The results show that the prediction model and the experimental data are in good agreement. Afterward, the investigation focuses on applying the most absorptive MPP structure in a classroom without acoustic treatment through numerical simulations in ODEON 16 Acoustics Software. When the proposed material is installed as a wall panel, the results show an improvement toward optimum values in Reverberation Time (RT30) and Speech Transmission Index (STI).

Ultrathin Piezoelectric Resonators Based on Graphene and Free-Standing Single-Crystal BaTiO3

Suspended piezoelectric thin films are key elements enabling high-frequency filtering in telecommunication devices. To meet the requirements of next-generation electronics, it is essential to reduce device thickness for reaching higher resonance frequencies. Here, the high-quality mechanical and electrical properties of graphene electrodes are combined with the strong piezoelectric performance of the free-standing complex oxide, BaTiO₃ (BTO), to create ultrathin piezoelectric resonators. It is demonstrated that the device can be brought into mechanical resonance by piezoelectric actuation. By sweeping the DC bias voltage on the top graphene electrode, the BTO membrane is switched between the two poled ferroelectric states. Remarkably, ferroelectric hysteresis is also observed in the resonance frequency, magnitude and Q-factor of the first membrane mode. In the bulk acoustic mode, the device vibrates at 233 GHz. This work demonstrates the potential of combining van der Waals materials with complex oxides for next-generation electronics, which not only opens up opportunities for increasing filter frequencies, but also enables reconfiguration by poling, via ferroelectric memory effect.

Nanomechanical Resonators: Toward Atomic Scale

The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained effort have been devoted to creating mechanical devices toward the ultimate limit of miniaturization─genuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-to-atomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.

Freestanding Laser-Induced Graphene Ultrasensitive Resonative Viral Sensors

Early and reliable detection of an infectious viral disease is critical to accurately monitor outbreaks and to provide individuals and health care professionals the opportunity to treat patients at the early stages of a disease. The accuracy of such information is essential to define appropriate actions to protect the population and to reduce the likelihood of a possible pandemic. Here, we show the fabrication of freestanding laser-induced graphene (FLIG) flakes that are highly sensitive sensors for high-fidelity viral detection. As a case study, we show the detection of SARS-CoV-2 spike proteins. FLIG flakes are nonembedded porous graphene foams ca. 30 μm thick that are generated using laser irradiation of polyimide and can be fabricated in seconds at a low cost. Larger pieces of FLIG were cut forming a cantilever, used as suspended resonators, and characterized for their electromechanics behavior. Thermomechanical analysis showed FLIG stiffness comparable to other porous materials such as boron nitride foam, and electrostatic excitation showed amplification of the vibrations at frequencies in the range of several kilo-hertz. We developed a protocol for aqueous biological sensing by characterizing the wetting dynamic response of the sensor in buffer solution and in water, and devices functionalized with COVID-19 antibodies specifically detected SARS-CoV-2 spike protein binding, while not detecting other viruses such as MS2. The FLIG sensors showed a clear mass-dependent frequency response shift of ∼1 Hz/pg, and low nanomolar concentrations could be detected. Ultimately, the sensors demonstrated an outstanding limit of detection of 2.63 pg, which is equivalent to as few as ∼5000 SARS-CoV-2 viruses. Thus, the FLIG platform technology can be utilized to develop portable and highly accurate sensors, including biological applications where the fast and reliable protein or infectious particle detection is critical.

DC Signature of Snap-through Bistability in Carbon Nanotube Mechanical Resonators

Bistable arched beams exhibiting Euler-Bernoulli snap-through buckling are widely investigated as promising candidates for various potential applications, such as memory devices, energy harvesters, sensors, and actuators. Recently, we reported the realization of a buckled suspended carbon nanotube (CNT) based bistable resonator, which exhibits a unique three-dimensional snap-through transition and an extremely large change in frequency as a result. In this article, we address a unique characteristic of these devices in which a significant change in the DC conductance is also observed at the mechanical snap-through transition. Through the analysis of this phenomenon, we arrive at several important conclusions: we find that the common approach to determining CNT vibrational resonance amplitude is inaccurate; we find evidence that latching phenomena should be easily realizable, relevant for RF switches and nonvolatile memory devices. Finally, we present evidence for possible inner shell sliding, which is relevant for understanding interlayer coupling and moiré pattern research.

Techniques to Improve the Performance of Planar Microwave Sensors: A Review and Recent Developments

Planar microwave sensors have become increasing developed in recent decades, especially in material characterization (solid/liquid) as they provide regions highly sensitive to the surrounding medium. However, when it comes to deciphering the content of practical biological analytes or chemical components inside a host medium, even higher sensitivities are required due to their minute concentrations. This review article presents a comprehensive outlook on various methodologies to enhance sensitivity (e.g., coupling resonators, channel embedding, analyte immobilization, resonator pattern recognition, use of phase variation, using coupled line section, and intermodulation products), resolution (active sensors, differential measurements), and robustness (using machine learning) of arbitrary sensors of interest. Some of the most practical approaches are presented with prototype examples, and the main applications of incorporating such procedures are reported. Sensors with which the proposed techniques are implemented exhibit higher performance for high-end and real-life use.

Towards Portable MEMS Oscillators for Sensing Nanoparticles

This paper reports on the design, and implementation of piezoelectric-on-silicon MEMS resonators installed within a portable experimental setup for sensing nanoparticles in a laboratory environment. MEMS oscillators with a center frequency of approximately 5.999 MHz are employed for sensing 50 nm size-selected silver nanoparticles generated in the laboratory. The same experimental setup is then assembled to sense indoor particles that are present in the laboratory environment. The challenges associated with particle deposition as a result of assembling the portable experimental setup is highlighted. Furthermore, the MEMS oscillators demonstrate that the total mass of silver nanoparticles deposited onto the MEMS resonator surface using the inertial impaction technique-based experimental setup is approximately 7.993 nanograms. The total indoor particle mass accumulated on the MEMS resonator surface is estimated to be approximately 1.732 nanograms and 26.9 picograms for two different runs. The frequency resolution of the MEMS oscillator is estimated to be approximately 32 ppb and, consequently, the minimum detectable particle mass is approximately 60 femtograms for a 9.2 s integration time.

Imaging of THz Photonic Modes by Scattering Scanning Near-Field Optical Microscopy

We investigated the near-field distribution associated to the photonic mode of terahertz photonic micro-resonators by scattering scanning near-field optical microscopy. Probing individual THz micro-resonators concentrating electric fields is important for high-sensitivity chemical and biochemical sensing and fundamental light-matter interactions studies at the nanoscale. We imaged both electric field concentration predicted by numerical simulations and unexpected patterns that deviate from intuitive assumptions. We propose a scenario based on the combination of the near-field with the far-field pattern of the probe/resonator ensemble that is in excellent agreement with the experimental data and propose an image analysis procedure to recover the near-field of such structures.

Selective Microwave Zeroth-Order Resonator Sensor Aided by Machine Learning

Microwave sensors are principally sensitive to effective permittivity, and hence not selective to a specific material under test (MUT). In this work, a highly compact microwave planar sensor based on zeroth-order resonance is designed to operate at three distant frequencies of 3.5, 4.3, and 5 GHz, with the size of only λg-min/8 per resonator. This resonator is deployed to characterize liquid mixtures with one desired MUT (here water) combined with an interfering material (e.g., methanol, ethanol, or acetone) with various concentrations (0%:10%:100%). To achieve a sensor with selectivity to water, a convolutional neural network (CNN) is used to recognize different concentrations of water regardless of the host medium. To obtain a high accuracy of this classification, Style-GAN is utilized to generate a reliable sensor response for concentrations between water and the host medium (methanol, ethanol, and acetone). A high accuracy of 90.7% is achieved using CNN for selectively discriminating water concentrations.

A Resonant Graphene NEMS Vibrometer

Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.

Fabricating Silicon Resonators for Analysing Biological Samples

The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay sensitivities that rival or exceed conventional standards, silicon-based microelectromechanical systems remain underutilised for biological and biomedical applications. Although microelectromechanical resonators and actuators do not always exhibit optimal performance in liquid due to electrical double layer formation and high damping, these issues have been solved with some innovative fabrication processes or alternative experimental approaches. This paper focuses on several examples of silicon-based resonating devices with a brief look at their fundamental sensing elements and key fabrication steps, as well as current and potential biological/biomedical applications.

Integrated Whispering-Gallery-Mode Resonator for Solid-State Coherent Quantum Photonics

Tailored photonics cavities enhance light-matter interactions, ultimately enabling a fully coherent quantum interface. Here, we report an integrated microdisk cavity containing self-assembled quantum dots to coherently route photons between different access waveguides. We measure a Purcell factor of F_exp = 6.9 ± 0.9 for a cavity quality factor of about 10,000, allowing us to observe clear signatures of coherent scattering of photons by the quantum dots. We show how this integrated system can coherently reroute photons between the drop and bus ports and how this routing is controlled by detuning the quantum dot and resonator or through the strength of the excitation beam, where a critical photon number less than one photon per lifetime is required. We discuss the strengths and limitations of this approach, focusing on how the coherent scattering and single-photon nonlinearity can be used to increase the efficiency of quantum devices such as routers or Bell-state analyzers.

Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations

In this research, we investigate the structural behavior, including the snap-through and pull-in instabilities, of in-plane microelectromechanical COSINE-shaped and electrically actuated clamped-clamped micro-beams resonators. The work examines various electrostatic actuation patterns including uniform and non-uniform parallel-plates airgap arrangements, which offer options to actuate the arches in the opposite and same direction of their curvature. The nonlinear equation of motion of a shallow arch is discretized into a reduced-order model based on the Galerkin's expansion method, which is then numerically solved. Static responses are examined for various DC electrostatic loads starting from small values to large values near pull-in and snap-through instability ranges, if any. The eigenvalue problem of the micro-beam is solved revealing the variations of the first four natural frequencies as varying the DC load. Various simulations are carried out for several case studies of shallow arches of various geometrical parameters and airgap arrangements, which demonstrate rich and diverse static and dynamic behaviors. Results show few cases with multi-states and hysteresis behaviors where some with only the pull-in instability and others with both snap-through buckling and pull-in instabilities. It is found that the micro-arches behaviors are very sensitive to the electrode's configuration. The studied configurations reveal different possibilities to control the pull-in and snap-through instabilities, which can be used for improving arches static stroke range as actuators and for realizing wide-range tunable micro-resonators.

A Virtual Instrument for Measuring the Piezoelectric Coefficients of a Thin Disc in Radial Resonant Mode

In this paper, we describe and present a Virtual Instrument, a tool that allows the determination of the electromechanical, dielectric, and elastic coefficients in polarised ferroelectric ceramic discs (piezoceramics) in the linear range, including all of the losses when the piezoceramics are vibrating in radial mode. There is no evidence in the recent scientific literature of any automatic system conceived and implemented as a Virtual Instrument based on an iterative algorithm issued as an alternative to solve the limitations of the ANSI IEEE 176 standard for the characterisation of piezoelectric coefficients of thin discs in resonant mode. The characterisation of these coefficients is needed for the design of ultrasonic sensors and generators. In 1995, two of the authors of this work, together with other authors, published an iterative procedure that allowed for the automatic determination of the complex constants for lossy piezoelectric materials in radial mode. As described in this work, the procedures involved in using a Virtual Instrument have been improved: the response time for the characterisation of a piezoelectric sample is shorter (approximately 5 s); the accuracy in measurement and, therefore, in the estimates of the coefficients has been increased; the calculation speed has been increased; an intuitive, simple, and friendly user interface has been designed, and tools have been provided for exporting and inspecting the measured and processed data. No Virtual Instrument has been found in the recent scientific literature that has improved on the iterative procedure designed in 1995. This Virtual Instrument is based on the measurement of a unique magnitude, the electrical admittance (Y = G + iB) in the frequency range of interest. After measuring the electrical admittance, estimates of the set of piezoelectric coefficients of the device are obtained. The programming language used in the construction of the Virtual Instrument is LabVIEW 2019^®.

Review of Recent Microwave Planar Resonator-Based Sensors: Techniques of Complex Permittivity Extraction, Applications, Open Challenges and Future Research Directions

Recent developments in the field of microwave planar sensors have led to a renewed interest in industrial, chemical, biological and medical applications that are capable of performing real-time and non-invasive measurement of material properties. Among the plausible advantages of microwave planar sensors is that they have a compact size, a low cost and the ease of fabrication and integration compared to prevailing sensors. However, some of their main drawbacks can be considered that restrict their usage and limit the range of applications such as their sensitivity and selectivity. The development of high-sensitivity microwave planar sensors is required for highly accurate complex permittivity measurements to monitor the small variations among different material samples. Therefore, the purpose of this paper is to review recent research on the development of microwave planar sensors and further challenges of their sensitivity and selectivity. Furthermore, the techniques of the complex permittivity extraction (real and imaginary parts) are discussed based on the different approaches of mathematical models. The outcomes of this review may facilitate improvements of and an alternative solution for the enhancement of microwave planar sensors’ normalized sensitivity for material characterization, especially in biochemical and beverage industry applications.

In-Fiber BaTiO3 Microsphere Resonator for High-Sensitivity Temperature Measurement

A fiber optic whispering gallery mode (WGM) resonator was proposed and realized by integrating an inline polymer waveguide with a microsphere mounted on it. The polymer waveguide with a diameter of 1 μm was printed with femtosecond laser-assisted multiphoton polymerization in a section of a grooved hollow-core fiber, which was sandwiched between two single-mode fibers. Two WGW resonators assembled with microspheres of different sizes were prepared. The transmission spectra of those stimulated WGMs were investigated both in simulation and experimentally. The temperature response of the resonators was particularly studied, and a linear sensitivity of −593 pm/°C was achieved from 20 °C to 100 °C.

On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction

Nowadays, surface acoustic wave (SAW) resonators are attracting growing attention, owing to their widespread applications in various engineering fields, such as electronic, telecommunication, automotive, chemical, and biomedical engineering. A thorough assessment of SAW performance is a key task for bridging the gap between commercial SAW devices and practical applications. To contribute to the accomplishment of this crucial task, the present paper reports the findings of a new comparative study that is based on the performance evaluation of different commercial SAW resonators by using scattering (S-) parameter measurements coupled with a Lorentzian fitting and an accurate modelling technique for the straightforward extraction of a lumped-element equivalent-circuit representation. The developed investigation thus provides ease and reliability when choosing the appropriate commercial device, depending on the requirements and constraints of the given sensing application. This paper deals with the performance evaluation of commercial surface acoustic wave (SAW) resonators by means of scattering (S-) parameter measurements and an equivalent-circuit model extracted using a reliable modeling procedure. The studied devices are four TO-39 packaged two-port resonators with different nominal operating frequencies: 418.05, 423.22, 433.92, and 915 MHz. The S-parameter characterization was performed locally around the resonant frequencies of the tested SAW resonators by using an 8753ES Agilent vector network analyzer (VNA) and a home-made calibration kit. The reported measurement-based study has allowed for the development of a comprehensive and detailed comparative analysis of the performance of the investigated SAW devices. The characterization and modelling procedures are fully automated with a user-friendly graphical user interface (GUI) developed in the Python environment, thereby making the experimental analysis faster and more efficient.

Tunable Graphene Phononic Crystal

In the field of phononics, periodic patterning controls vibrations and thereby the flow of heat and sound in matter. Bandgaps arising in such phononic crystals (PnCs) realize low-dissipation vibrational modes and enable applications toward mechanical qubits, efficient waveguides, and state-of-the-art sensing. Here, we combine phononics and two-dimensional materials and explore tuning of PnCs via applied mechanical pressure. To this end, we fabricate the thinnest possible PnC from monolayer graphene and simulate its vibrational properties. We find a bandgap in the megahertz regime within which we localize a defect mode with a small effective mass of 0.72 ag = 0.002 m_physical. We exploit graphene's flexibility and simulate mechanical tuning of a finite size PnC. Under electrostatic pressure up to 30 kPa, we observe an upshift in frequency of the entire phononic system by ∼350%. At the same time, the defect mode stays within the bandgap and remains localized, suggesting a high-quality, dynamically tunable mechanical system.

A Multi-Node Magnetic Positioning System with a Distributed Data Acquisition Architecture

We present a short-range magnetic positioning system that can track in real-time both the position and attitude (i.e., the orientation of the principal axes of an object in space) of up to six moving nodes. Moving nodes are small solenoids coupled with a capacitor (resonant circuit) and supplied with an oscillating voltage. Active moving nodes are detected by measuring the voltage that they induce on a three-dimensional matrix of passive coils. Data on each receiving coil are acquired simultaneously by a distributed data-acquisition architecture. Then, they are sent to a computer that calculates the position and attitude of each moving node. The entire process is run in real-time: the system can perform 62 position and attitude measurements per second when tracking six nodes simultaneously and up to 124 measurements per second when tracking one node only. Different active nodes are identified using a frequency-division multiple access technique. The position and angular resolution of the system have been experimentally estimated by tracking active nodes along a reference trajectory traced by a robotic arm. The factors limiting the viability of upscaling the system with more than six active nodes are discussed.

A Novel High Q Lamé-Mode Bulk Resonator with Low Bias Voltage

This work reports a novel silicon on insulator (SOI)-based high quality factor (Q factor) Lamé-mode bulk resonator which can be driven into vibration by a bias voltage as low as 3 V. A SOI-based fabrication process was developed to produce the resonators with 70 nm air gaps, which have a high resonance frequency of 51.3 MHz and high Q factors over 8000 in air and over 30,000 in vacuum. The high Q values, nano-scale air gaps, and large electrode area greatly improve the capacitive transduction efficiency, which decreases the bias voltage for the high-stiffness bulk mode resonators with high Q. The resonator showed the nonlinear behavior. The proposed resonator can be applied to construct a wireless communication system with low power consumption and integrated circuit (IC) integration.

Frequency Dependency of the Delta-E Effect and the Sensitivity of Delta-E Effect Magnetic Field Sensors

In recent years the delta-E effect has been used for detecting low frequency and low amplitude magnetic fields. Delta-E effect sensors utilize a forced mechanical resonator that is detuned by the delta-E effect upon application of a magnetic field. Typical frequencies of operation are from several kHz to the upper MHz regime. Different models have been used to describe the delta-E effect in those devices, but the frequency dependency has mainly been neglected. With this work we present a simple description of the delta-E effect as a function of the differential magnetic susceptibility χ of the magnetic material. We derive an analytical expression for χ that permits describing the frequency dependency of the delta-E effect of the Young’s modulus and the magnetic sensitivity. Calculations are compared with measurements on soft-magnetic (Fe90Co10)78Si12B10 thin films. We show that the frequency of operation can have a strong influence on the delta-E effect and the magnetic sensitivity of delta-E effect sensors. Overall, the delta-E effect reduces with increasing frequency and results in a stiffening of the Young’s modulus above the ferromagnetic resonance frequency. The details depend on the Gilbert damping. Whereas for large Gilbert damping the sensitivity continuously decreases with frequency, typical damping values result in an amplification close to the ferromagnetic resonance frequency.

Design of Polarization-Independent and Wide-Angle Broadband Absorbers for Highly Efficient Reflective Structural Color Filters

We propose a design of angle-insensitive and polarization-independent reflective color filters with high efficiency (>80%) based on broad resonance in a Fabry–Pérot cavity where asymmetric metal-dielectric-metal planar structures are employed. Broadband absorption properties allow the resonance in the visible range to remain nearly constant over a broad range of incident angles of up to 40° for both s- and p-polarizations. Effects of the angles of incidence and polarization state of incident light on the purity of the resulting colors are examined on the CIE 1931 chromaticity diagram. In addition, higher-order resonances of the proposed color filters and their electric field distributions are investigated for improved color purity. Lastly, the spectral properties of the proposed structures with different metallic layers are studied. The simple strategy described in this work could be adopted in a variety of research areas, such as color decoration devices, microscopy, and colorimetric sensors.

A Compact UWB Antenna with Independently Controllable Notch Bands

A minimally-sized, triple-notched band ultra-wideband (UWB) antenna, useful for many applications, is designed, analyzed, and experimentally validated in this paper. A modified maple leaf-shaped main radiating element with partial ground is used in the proposed design. An E-shaped resonator, meandered slot, and U-shaped slot are implemented in the proposed design to block the co-existing bands. The E-shaped resonator stops frequencies ranging from 1.8–2.3 GHz (Advanced Wireless System (AWS1–AWS2) band), while the meandered slot blocks frequencies from 3.2–3.8 GHz (WiMAX band). The co-existing band ranging from 5.6–6.1 GHz (IEEE 802.11/HIPERLANband) is blocked by utilizing the U-shaped section in the feeding network. The notched bands can be independently controlled over a wide range of frequencies using specific parameters. The proposed antenna is suitable for many applications because of its flat gain, good radiation characteristics at both principal planes, uniform group delay, and non-varying transfer function (S21) for the entire UWB frequency range.

A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide

We report on thermal and evanescent field sensing from a tellurium oxide optical microcavity resonator on a silicon photonics platform. The on-chip resonator structure is fabricated using silicon-photonics-compatible processing steps and consists of a silicon-on-insulator waveguide next to a circular trench that is coated in a tellurium oxide film. We characterize the device’s sensitivity by both changing the temperature and coating water over the chip and measuring the corresponding shift in the cavity resonance wavelength for different tellurium oxide film thicknesses. We obtain a thermal sensitivity of up to 47 pm/°C and a limit of detection of 2.2 × 10⁻³ RIU for a device with an evanescent field sensitivity of 10.6 nm/RIU. These results demonstrate a promising approach to integrating tellurium oxide and other novel microcavity materials into silicon microphotonic circuits for new sensing applications.

Electrospun one-dimensional nanostructures: a new horizon for gas sensing materials

Electrospun one-dimensional (1D) nanostructures are rapidly emerging as key enabling components in gas sensing due to their unique electrical, optical, magnetic, thermal, mechanical and chemical properties. 1D nanostructures have found applications in numerous areas, including healthcare, energy storage, biotechnology, environmental monitoring, and defence/security. Their enhanced specific surface area, superior mechanical properties, nanoporosity and improved surface characteristics (in particular, uniformity and stability) have made them important active materials for gas sensing applications. Such highly sensitive and selective elements can be embedded in sensor nodes for internet-of-things applications or in mobile systems for continuous monitoring of air pollutants and greenhouse gases as well as for monitoring the well-being and health in everyday life. Herein, we review recent developments of gas sensors based on electrospun 1D nanostructures in different sensing platforms, including optical, conductometric and acoustic resonators. After explaining the principle of electrospinning, we classify sensors based on the type of materials used as an active sensing layer, including polymers, metal oxide semiconductors, graphene, and their composites or their functionalized forms. The material properties of these electrospun fibers and their sensing performance toward different analytes are explained in detail and correlated to the benefits and limitations for every approach.

Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators

MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their smaller size and better integrability as opposed to their quartz counterparts. However, thermal drift of the natural frequency of silicon structures is one of the main issues that has hindered the development of MEMS resonators. Extensive investigations have addressed both the fabrication process (e.g., introducing heavy doping of the silicon) and the mechanical design (e.g., exploiting proper orientation of the device, slots, nonlinearities). In this work, starting from experimental data published in the literature, we show that a careful design can help reduce the thermal drift even when slots are inserted in the devices in order to decrease thermoelastic losses. A custom numerical code able to predict the dynamic behavior of MEMS resonators for different materials, orientations and doping levels is coupled with an evolutionary optimization algorithm and the possibility to find an optimal mechanical design is demonstrated on a tuning-fork resonator.

Anomalous Wavelength Scaling of Tightly Coupled Terahertz Metasurfaces

We theoretically and experimentally demonstrate the drastic changes in the wavelength scaling of tightly coupled metasurfaces caused by deep subwavelength variations in the distance between the unit resonators but no change in the length scale of the units themselves. This coupling-dependent wavelength scaling is elucidated by our model metasurfaces of ring resonators arranged with deep subwavelength lattice spacing g, and we show that narrower g results in rapider changes in wavelength scaling. Also, by using terahertz time-domain spectroscopy, we experimentally observed a significant shift of the spectral response arising from very small variations in lattice spacing, confirming our theoretical predictions.

Periodical 2D Photonic-Plasmonic Au/TiOx Nanocavity Resonators for Photoelectrochemical Applications

Effective light trapping at the nanoscale is vital for efficient photoelectrochemical (PEC) applications. Photonic and plasmonic resonators are the two most promising approaches for this purpose, and the synergetic combination of these two resonators will tail the propagation lengths of incident light along with field enhancements, and thus presents further enhanced light-trapping activity. Herein, a new hybrid photonic-plasmonic resonator is proposed through sputtering plasmonic Au nanoparticles (NPs) into the 2D photonic TiO_x nanocavity. Through facile control of the size of Au NPs, the matching of resonant wavelength of plasmonic Au NPs and photonic nanocavities maximize the light-trapping intensity and thus further improve the PEC performance. Furthermore, for expanding the PEC applications, after functionalization of Au NPs with aptamer as a biomolecular recognition unit, a PEC aptasensor is also proposed and presents the highest sensitivity for antibiotic detection.

Ultrawide Band Gap β-Ga2O3 Nanomechanical Resonators with Spatially Visualized Multimode Motion

Beta gallium oxide (β-Ga₂O₃) is an emerging ultrawide band gap (4.5 eV-4.9 eV) semiconductor with attractive properties for future power electronics, optoelectronics, and sensors for detecting gases and ultraviolet radiation. β-Ga₂O₃ thin films made by various methods are being actively studied toward such devices. Here, we report on the experimental demonstration of single-crystal β-Ga₂O₃ nanomechanical resonators using β-Ga₂O₃ nanoflakes grown via low-pressure chemical vapor deposition (LPCVD). By investigating β-Ga₂O₃ circular drumhead structures, we demonstrate multimode nanoresonators up to the sixth mode in high and very high frequency (HF/VHF) bands, and also realize spatial mapping and visualization of the multimode motion. These measurements reveal a Young's modulus of E_Y = 261 GPa and anisotropic biaxial built-in tension of 37.5 MPa and 107.5 MPa. We find that thermal annealing can considerably improve the resonance characteristics, including ∼40% upshift in frequency and ∼90% enhancement in quality (Q) factor. This study lays a foundation for future exploration and development of mechanically coupled and tunable β-Ga₂O₃ electronic, optoelectronic, and physical sensing devices.

Hexagonal boron nitride nanomechanical resonators with spatially visualized motion

Atomic layers of hexagonal boron nitride (h-BN) crystal are excellent candidates for structural materials as enabling ultrathin, two-dimensional (2D) nanoelectromechanical systems (NEMS) due to the outstanding mechanical properties and very wide bandgap (5.9 eV) of h-BN. In this work, we report the experimental demonstration of h-BN 2D nanomechanical resonators vibrating at high and very high frequencies (from ~5 to ~70 MHz), and investigations of the elastic properties of h-BN by measuring the multimode resonant behavior of these devices. First, we demonstrate a dry-transferred doubly clamped h-BN membrane with ~6.7 nm thickness, the thinnest h-BN resonator known to date. In addition, we fabricate circular drumhead h-BN resonators with thicknesses ranging from ~9 to 292 nm, from which we measure up to eight resonance modes in the range of ~18 to 35 MHz. Combining measurements and modeling of the rich multimode resonances, we resolve h-BN's elastic behavior, including the transition from membrane to disk regime, with built-in tension ranging from 0.02 to 2 N m^-1. The Young's modulus of h-BN is determined to be E _Y≈392 GPa from the measured resonances. The ultrasensitive measurements further reveal subtle structural characteristics and mechanical properties of the suspended h-BN diaphragms, including anisotropic built-in tension and bulging, thus suggesting guidelines on how these effects can be exploited for engineering multimode resonant functions in 2D NEMS transducers.

Resonant laser printing of structural colors on high-index dielectric metasurfaces

Man-made structural colors, which originate from resonant interactions between visible light and manufactured nanostructures, are emerging as a solution for ink-free color printing. We show that non-iridescent structural colors can be conveniently produced by nanostructures made from high-index dielectric materials. Compared to plasmonic analogs, color surfaces with high-index dielectrics, such as germanium (Ge), have a lower reflectance, yielding a superior color contrast. Taking advantage of band-to-band absorption in Ge, we laser-postprocess Ge color metasurfaces with morphology-dependent resonances. Strong on-resonance energy absorption under pulsed laser irradiation locally elevates the lattice temperature (exceeding 1200 K) in an ultrashort time scale (1 ns). This forms the basis for resonant laser printing, where rapid melting allows for surface energy-driven morphology changes with associated modification of color appearance. Laser-printable high-index dielectric color metasurfaces are scalable to a large area and open a new paradigm for printing and decoration with nonfading and vibrant colors.

Recent Developments in Fiber Optics Humidity Sensors

A wide range of applications such as health, human comfort, agriculture, food processing and storage, and electronic manufacturing, among others, require fast and accurate measurement of humidity. Sensors based on optical fibers present several advantages over electronic sensors and great research efforts have been made in recent years in this field. The present paper reports the current trends of optical fiber humidity sensors. The evolution of optical structures developed towards humidity sensing, as well as the novel materials used for this purpose, will be analyzed. Well-known optical structures, such as long-period fiber gratings or fiber Bragg gratings, are still being studied towards an enhancement of their sensitivity. Sensors based on lossy mode resonances constitute a platform that combines high sensitivity with low complexity, both in terms of their fabrication process and the equipment required. Novel structures, such as resonators, are being studied in order to improve the resolution of humidity sensors. Moreover, recent research on polymer optical fibers suggests that the sensitivity of this kind of sensor has not yet reached its limit. Therefore, there is still room for improvement in terms of sensitivity and resolution.

Accurate and Precise Determination of Mechanical Properties of Silicon Nitride Beam Nanoelectromechanical Devices

Accurate and precise determination of mechanical properties of nanoscale materials is mandatory since device performances of nanoelectromechanical systems (NEMS) are closely related to the flexural properties of the materials. In this study, the intrinsic mechanical properties of highly stressed silicon nitride (SiN) beams of varying lengths are investigated using two different techniques: Dynamic flexural measurement using optical interferometry and quasi-static flexural measurement using atomic force microscopy. The resonance frequencies of the doubly clamped, highly stressed beams are found to be inversely proportional to their length, which is not usually observed from a beam but is expected from a string-like structure. The mass density of the SiN beams can be precisely determined from the dynamic flexural measurements by using the values for internal stress and Young's modulus determined from the quasi-static measurements. As a result, the mass resolution of the SiN beam resonators was predicted to be a few attograms, which was found to be in excellent agreement with the experimental results. This work suggests that accurate and precise determination of mechanical properties can be achieved through combined flexural measurement techniques, which is a crucial key for designing practical NEMS applications such as biomolecular sensors and gas detectors.

Vocal training in an anthropometrical aspect

OBJECTIVES

As shown in our previous paper, the dimensions of the cerebral parts of the cranium and face of the vocal students were higher than those of the non-singing students. The aim of the present study was to analyse the type of voice and its development depending on selected dimensions.

METHODS

A total of 56 vocal students - 36 women and 20 men - who underwent anthropometric measurements were divided into groups according to their voice type. Two professors of singing made a subjective, independent evaluation of individual students' vocal development progress during the four years of training. The findings were analysed statistically with the current licensed versions of Statistica software.

RESULTS

We found statistically significant positive correlation between: the head length, head and face width, depth of upper and middle face, nose length and student's voice development.

CONCLUSIONS

The dimensions of the head and the face have no impact on type of voice; however, some anatomical characteristics may have impact on voice development.

Under-Coupling Whispering Gallery Mode Resonator Applied to Resonant Micro-Optic Gyroscope

As an important sensing element, the whispering gallery mode resonator (WGMR) parameters seriously affect the resonant micro-optic gyroscope (RMOG) performance. This work proposes an under-coupling resonator to improve the resonator’s Q value and to optimize the coupling coefficient to maximize the RMOG’s sensitivity. GeO₂-doped silica waveguide-type resonators with different coupling coefficients were simulated, designed, fabricated and tested. An under-coupling ring resonator with a quality factor of 10 million is reported. The RMOG system was built based on this resonator and the scale factor was tested on a uniaxial high-precision rotating platform. Experimental results show that this resonator could improve the RMOG sensitivity by five times.

3C-Silicon Carbide Microresonators for Timing and Frequency Reference

In the drive to miniaturise and integrate reference oscillator components, microelectromechanical systems (MEMS) resonators are excellent candidates to replace quartz crystals. Silicon is the most utilised resonator structural material due to its associated well-established fabrication processes. However, when operation in harsh environments is required, cubic silicon carbide (3C-SiC) is an excellent candidate for use as a structural material, due to its robustness, chemical inertness and high temperature stability. In order to actuate 3C-SiC resonators, electrostatic, electrothermal and piezoelectric methods have been explored. Both electrothermal and piezoelectric actuation can be accomplished with simpler fabrication and lower driving voltages, down to 0.5 V, compared to electrostatic actuation. The vibration amplitude at resonance can be maximised by optimising the design and location of the electrodes. Electrical read out of the resonator can be performed with electrostatic or piezoelectric transduction. Finally, a great deal of research has focused on tuning the resonant frequency of a 3C-SiC resonator by adjusting the DC bias applied to the electrodes, with a higher (up to 160-times) tuning range for electrothermal tuning compared to piezoelectric tuning. Electrothermal tuning lowers the frequency, while piezoelectric tuning can be used to raise the frequency.

Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors

Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow frequency stability improvement, thereby preserving mass responsivity. The authors present an array of five cantilevers (CMOS-MEMS system) that are forced to vibrate synchronously to enhance their frequency stability. The frequency stability has been determined in closed-loop configuration for long periods of time by calculating the Allan deviation. An Allan deviation of 0.013 ppm (@ 1 s averaging time) for a 1 MHz cantilever array MEMS system was obtained at the synchronized mode, which represents a 23-fold improvement in comparison with the non-synchronized operation mode (0.3 ppm).

Cloaking through cancellation of diffusive wave scattering

A new cloaking mechanism, which makes enclosed objects invisible to diffusive photon density waves, is proposed. First, diffusive scattering from a basic core-shell geometry, which represents the cloaked structure, is studied. The conditions of scattering cancellation in a quasi-static scattering regime are derived. These allow for tailoring the diffusivity constant of the shell enclosing the object so that the fields scattered from the shell and the object cancel each other. This means that the photon flow outside the cloak behaves as if the cloaked object were not present. Diffusive light invisibility may have potential applications in hiding hot spots in infrared thermography or tissue imaging.

Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges

Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sensors with potential applications such as biomedicine, automotive industry, navigation systems, space satellites, telecommunications and non-destructive testing. We present a review of recent magnetic field sensors based on MEMS resonators, which operate with Lorentz force. These sensors have a compact structure, wide measurement range, low energy consumption, high sensitivity and suitable performance. The design methodology, simulation tools, damping sources, sensing techniques and future applications of magnetic field sensors are discussed. The design process is fundamental in achieving correct selection of the operation principle, sensing technique, materials, fabrication process and readout systems of the sensors. In addition, the description of the main sensing systems and challenges of the MEMS sensors are discussed. To develop the best devices, researches of their mechanical reliability, vacuum packaging, design optimization and temperature compensation circuits are needed. Future applications will require multifunctional sensors for monitoring several physical parameters (e.g., magnetic field, acceleration, angular ratio, humidity, temperature and gases).

Chemiresistive and Gravimetric Dual-Mode Gas Sensor toward Target Recognition and Differentiation

We demonstrate a dual-mode gas sensor for simultaneous and independent acquisition of electrical and mechanical signals from the same gas adsorption event. The device integrates a graphene field-effect transistor (FET) with a piezoelectric resonator in a seamless manner by leveraging multiple structural and functional synergies. Dual signals resulting from independent physical processes, i.e., mass attachment and charge transfer can reflect intrinsic properties of gas molecules and potentially enable target recognition and quantification at the same time. Fabrication of the device is based on standard Integrated Circuit (IC) foundry processes and fully compatible with system-on-a-chip (SoC) integration to achieve extremely small form factors. In addition, the ability of simultaneous measurements of mass adsorption and charge transfer guides us to a more precise understanding of the interactions between graphene and various gas molecules. Besides its practical functions, the device serves as an effective tool to quantitatively investigate the physical processes and sensing mechanisms for a large library of sensing materials and target analytes.

Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Micro- and nanomechanical string resonators, which essentially are highly stressed bridges, are of particular interest for micro- and nanomechanical sensing because they exhibit resonant behavior with exceptionally high quality factors. Here, we fabricated and characterized nanomechanical pyrolytic carbon resonators (strings and cantilevers) obtained through pyrolysis of photoresist precursors. The developed fabrication process consists of only three processing steps: photolithography, dry etching and pyrolysis. Two different fabrication strategies with two different photoresists, namely SU-8 2005 (negative) and AZ 5214e (positive), were compared. The resonant behavior of the pyrolytic resonators was characterized at room temperature and in high vacuum using a laser Doppler vibrometer. The experimental data was used to estimate the Young’s modulus of pyrolytic carbon and the tensile stress in the string resonators. The Young’s moduli were calculated to be 74 ± 8 GPa with SU-8 and 115 ± 8 GPa with AZ 5214e as the precursor. The tensile stress in the string resonators was 33 ± 7 MPa with AZ 5214e as the precursor. The string resonators displayed maximal quality factor values of up to 3000 for 525-µm-long structures.

Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings

Helium ion microscopy has recently emerged as a potent tool for the in-situ modification and imaging of nanoscale devices. For example; finely focused helium ion beams have been used for the milling of pores in suspended structures. We here report the use of helium ion milling for the post-fabrication modification of nanostrings machined from an amorphous SiCN material. The modification consisted of milling linear arrays of holes along the length of nanostrings. This milling results in a slight decrease of resonant frequency while increasing the surface to volume ratio of the device. The frequency decrease is attributed to a reduction of the effective Young’s modulus of the string, which in turn reduces the tension the string is under. Such experimental observations are supported by the finite element analysis of milled and non-milled strings.

Multiplexed Simultaneous High Sensitivity Sensors with High-Order Mode Based on the Integration of Photonic Crystal 1 × 3 Beam Splitter and Three Different Single-Slot PCNCs

We simulated an efficient method for the sensor array of high-sensitivity single-slot photonic crystal nanobeam cavities (PCNCs) on a silicon platform. With the combination of a well-designed photonic crystal waveguide (PhCW) filter and an elaborate single-slot PCNC, a specific high-order resonant mode was filtered for sensing. A 1 × 3 beam splitter carefully established was implemented to split channels and integrate three sensors to realize microarrays. By applying the three-dimensional finite-difference-time-domain (3D-FDTD) method, the sensitivities calculated were S₁ = 492 nm/RIU, S₂ = 244 nm/RIU, and S₃ = 552 nm/RIU, respectively. To the best of our knowledge, this is the first multiplexing design in which each sensor cite features such a high sensitivity simultaneously.