Biosensing with Silicon Nitride Microring Resonators Integrated with an On-Chip Filter Bank Spectrometer

Wearable, mobile, and point-of-care (POC) sensors comprise a rapidly expanding field of devices aimed at improving human health by relaying real-time biometric data such as heart rate and glucose levels. The current scope of what these devices can offer healthcare is limited by their inability to measure biomarkers associated with inflammation, well-being, and disease. Photonic biosensors that integrate sensing elements directly with spectrometers, lasers, and detectors are an attractive approach to enabling POC sensors, with distinct advantages in terms of size, weight, power consumption, and cost. Here, we have demonstrated for the first time the integration of photonic microring resonator biosensors with an on-chip microring filter bank spectrometer for the controlled detection of inflammatory biomarker C-reactive protein (CRP) in serum. We demonstrate that sensor and spectrometer performance is tolerant of temperature variation, as temperature dependence moves in parallel. Finally, we assess the impact of manufacturing variability on the 300 mm wafer scale on the performance of the spectrometer. Taken together, these results suggest that integration of on-chip ring filter bank spectrometers with ring resonator-based biosensors constitutes an attractive approach toward cost-effective integrated sensor development.

UV-Nanoimprint and Deep Reactive Ion Etching of High Efficiency Silicon Metalenses: High Throughput at Low Cost with Excellent Resolution and Repeatability

As metasurfaces begin to find industrial applications there is a need to develop scalable and cost-effective fabrication techniques which offer sub-100 nm resolution while providing high throughput and large area patterning. Here we demonstrate the use of UV-Nanoimprint Lithography and Deep Reactive Ion Etching (Bosch and Cryogenic) towards this goal. Robust processes are described for the fabrication of silicon rectangular pillars of high pattern fidelity. To demonstrate the quality of the structures, metasurface lenses, which demonstrate diffraction limited focusing and close to theoretical efficiency for NIR wavelengths λ ∈ (1.3 μm, 1.6 μm), are fabricated. We demonstrate a process which removes the characteristic sidewall surface roughness of the Bosch process, allowing for smooth 90-degree vertical sidewalls. We also demonstrate that the optical performance of the metasurface lenses is not affected adversely in the case of Bosch sidewall surface roughness with 45 nm indentations (or scallops). Next steps of development are defined for achieving full wafer coverage.

Remote Non-Invasive Fabry-Pérot Cavity Spectroscopy for Label-Free Sensing

One way of optically monitoring molecule concentrations is to utilise the high sensitivity of the transmission and reflection rates of Fabry-Pérot cavities to changes of their optical properties. Up to now, intrinsic and extrinsic Fabry-Pérot cavity sensors have been considered with analytes either being placed inside the resonator or coupled to evanescent fields on the outside. Here we demonstrate that Fabry-Pérot cavities can also be used to monitor molecule concentrations non-invasively and remotely, since the reflection of light from the target molecules back into the Fabry-Pérot cavity adds upwards peaks to the minima of its overall reflection rate. Detecting the amplitude of these peaks reveals information about molecule concentrations. By using an array of optical cavities, a wide range of frequencies can be probed at once and a unique optical fingerprint can be obtained.

Environmental Monitoring: A Comprehensive Review on Optical Waveguide and Fiber-Based Sensors

Globally, there is active development of photonic sensors incorporating multidisciplinary research. The ultimate objective is to develop small, low-cost, sensitive, selective, quick, durable, remote-controllable sensors that are resistant to electromagnetic interference. Different photonic sensor designs and advances in photonic frameworks have shown the possibility to realize these capabilities. In this review paper, the latest developments in the field of optical waveguide and fiber-based sensors which can serve for environmental monitoring are discussed. Several important topics such as toxic gas, water quality, indoor environment, and natural disaster monitoring are reviewed.

Beyond Q: The Importance of the Resonance Amplitude for Photonic Sensors

Resonant photonic sensors are enjoying much attention based on the worldwide drive toward personalized healthcare diagnostics and the need to better monitor the environment. Recent developments exploiting novel concepts such as metasurfaces, bound states in the continuum, and topological sensing have added to the interest in this topic. The drive toward increasingly higher quality (Q)-factors, combined with the requirement for low costs, makes it critical to understand the impact of realistic limitations such as losses on photonic sensors. Traditionally, it is assumed that the reduction in the Q-factor sufficiently accounts for the presence of loss. Here, we highlight that this assumption is overly simplistic, and we show that losses have a stronger impact on the resonance amplitude than on the Q-factor. We note that the effect of the resonance amplitude has been largely ignored in the literature, and there is no physical model clearly describing the relationship between the limit of detection (LOD), Q-factor, and resonance amplitude. We have, therefore, developed a novel, ab initio analytical model, where we derive the complete figure of merit for resonant photonic sensors and determine their LOD. In addition to highlighting the importance of the optical losses and the resonance amplitude, we show that, counter-intuitively, optimization of the LOD is not achieved by maximization of the Q-factor but by counterbalancing the Q-factor and amplitude. We validate the model experimentally, put it into context, and show that it is essential for applying novel sensing concepts in realistic scenarios.

Passive Photonic Integrated Circuits Elements Fabricated on a Silicon Nitride Platform

The fabrication processes for silicon nitride photonic integrated circuits evolved from microelectronics components technology—basic processes have common roots and can be executed using the same type of equipment. In comparison to that of electronics components, passive photonic structures require fewer manufacturing steps and fabricated elements have larger critical dimensions. In this work, we present and discuss our first results on design and development of fundamental building blocks for silicon nitride integrated photonic platform. The scope of the work covers the full design and manufacturing chain, from numerical simulations of optical elements, design, and fabrication of the test structures to optical characterization and analysis the results. In particular, technological processes were developed and evaluated for fabrication of the waveguides (WGs), multimode interferometers (MMIs), and arrayed waveguide gratings (AWGs), which confirmed the potential of the technology and correctness of the proposed approach.

Waveguide Enhanced Raman Spectroscopy for Biosensing: A Review

Waveguide enhanced Raman spectroscopy (WERS) utilizes simple, robust, high-index contrast dielectric waveguides to generate a strong evanescent field, through which laser light interacts with analytes residing on the surface of the waveguide. It offers a powerful tool for the direct identification and reproducible quantification of biochemical species and an alternative to surface enhanced Raman spectroscopy (SERS) without reliance on fragile noble metal nanostructures. The advent of low-cost laser diodes, compact spectrometers, and recent progress in material engineering, nanofabrication techniques, and software modeling tools have made realizing portable and cheap WERS Raman systems with high sensitivity a realistic possibility. This review highlights the latest progress in WERS technology and summarizes recent demonstrations and applications. Following an introduction to the fundamentals of WERS, the theoretical framework that underpins the WERS principles is presented. The main WERS design considerations are then discussed, and a review of the available approaches for the modification of waveguide surfaces for the attachment of different biorecognition elements is provided. The review concludes by discussing and contrasting the performance of recent WERS implementations, thereby providing a future roadmap of WERS technology where the key opportunities and challenges are highlighted.

Identification and Speed Estimation of a Moving Object in an Indoor Application Based on Visible Light Sensing of Retroreflective Foils

Identification and sensing are two of the main tasks a wireless sensor node has to perform in an Internet of Things (IoT) environment. Placing active powered nodes on objects is the most usual approach for the fulfillment of these functions. With the expected massive increase of connected things, there are several issues on the horizon that hamper the further deployment of this approach in an energy efficient, sustainable way, like the usage of environmentally hazardous batteries or accumulators, as well as the required electrical energy for their operation. In this work, we propose a novel approach for performing the tasks of identification and sensing, applying visible light sensing (VLS) based on light emitting diode (LED) illumination and utilizing retroreflective foils mounted on a moving object. This low cost hardware is combined with a self-developed, low complex software algorithm with minimal training effort. Our results show that successful identification and sensing of the speed of a moving object can be achieved with a correct estimation rate of 99.92%. The used foils are commercially available and pose no threat to the environment and there is no need for active sensors on the moving object and no requirement of wireless radio frequency communication. All of this is achievable whilst undisturbed illumination is still provided.

Stimuli-Responsive Dynamic Metaholographic Displays with Designer Liquid Crystal Modulators

Flat optics, realized by the artificially created 2D material platform called optical metasurfaces, is currently undergoing a science-to-technology transition. However, "real-time" active operations of such flat optical devices remain yet unresolved. Here, liquid crystals (LCs)-integrated metaholograms for ultracompact dynamic holographic displays are proposed. The anisotropic nature of the LCs allows facile and repeatable manipulation of the polarization of light. Specifically designed ("designer") LCs and efficient helicity-encoded metaholograms are combined to realize stimuli-responsive dynamic displays. The designer LC modulators are used as switches that enable a variety of external stimuli (e.g., electric field, heat, surface pressure) to operate holographic images in real-time. Such a dynamic metaholographic platform will provide a path to external stimuli-driven "smart" sensing and display applications such as hologram labels for temperature/pressure/touch monitoring and interactive holographic displays with haptic motion recognition.

Dye-Encapsulated Zeolitic Imidazolate Framework (ZIF-71) for Fluorochromic Sensing of Pressure, Temperature, and Volatile Solvents

Luminescent metal-organic frameworks (MOFs) offer a multifunctional platform for creating noninvasive sensors and tunable optoelectronics. However, fluorochromic materials that are photophysically resilient and show high sensitivity toward different physical and chemical stimuli are scarce. We report a facile host-guest nanoconfinement strategy to construct a fluorescent hybrid material with multiple sensing capabilities. We design and fabricate a new Guest@MOF material: comprising a zeolitic MOF (ZIF-71) as a nanoporous host for encapsulating rhodamine B (RhB dye) guest molecules, resulting in an RhB@ZIF-71 system with mechanochromic, thermochromic, and solvatochromic sensing response. The fluorochromic sensing properties stem from the nanoconfinement effect that ZIF-71 imposes on RhB monomers, yielding the H- or J-type aggregates with tunable photophysical and photochemical properties. For mechanochromism, the external pressure causes an emission red shift in a linear fashion, switching RhB guests from H-type to J-type aggregates through a shear deformation. For thermochromism, we demonstrate a linear scaling as a function of temperature due to the spatial restriction imposed on J-type aggregates incarcerated in ZIF-71 pores. Harnessing the solvatochromism of RhB@ZIF-71, we interrogated its photochemical response by employing three diverse groups of volatile organic compounds. The multimodal sensing response paved the way to smart applications like photonic pressure sensors, noninvasive thermometers, and ultrasensitive chemosensors.

Methane Gas Photonic Sensor Based on Resonant Coupled Cavities

In this paper we report methane gas photonic sensors exploiting the principle of absorption-induced redirection of light propagation in coupled resonant cavities. In particular, an example of implemented architecture consists of a Fabry-Pérot (FP) resonator coupled to a fibre ring resonator, operating in the near IR. By changing the concentration of the methane gas in the FP region, the absorption coefficient of the FP changes. In turn, the variation of the methane gas concentration allows the redirection of the light propagation in the fibre ring resonator. Then, the methane gas concentration can be evaluated by analysing the ratio between the powers of two resonant modes, counter-propagating in the fibre ring resonator. In this way, a self-referenced read-out scheme, immune to the power fluctuations of the source, has been conceived. Moreover, a sensitivity of 0.37 ± 0.04 [dB/%], defined as the ratio between resonant modes at different outputs, in a range of methane concentration included between the 0% and 5%, has been achieved. These results allow a detection limit below the lower explosive limit (LEL) to be reached with a cost-effective sensor system.

A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide

We report on thermal and evanescent field sensing from a tellurium oxide optical microcavity resonator on a silicon photonics platform. The on-chip resonator structure is fabricated using silicon-photonics-compatible processing steps and consists of a silicon-on-insulator waveguide next to a circular trench that is coated in a tellurium oxide film. We characterize the device’s sensitivity by both changing the temperature and coating water over the chip and measuring the corresponding shift in the cavity resonance wavelength for different tellurium oxide film thicknesses. We obtain a thermal sensitivity of up to 47 pm/°C and a limit of detection of 2.2 × 10⁻³ RIU for a device with an evanescent field sensitivity of 10.6 nm/RIU. These results demonstrate a promising approach to integrating tellurium oxide and other novel microcavity materials into silicon microphotonic circuits for new sensing applications.

Characterization of Industrial Coolant Fluids and Continuous Ageing Monitoring by Wireless Node-Enabled Fiber Optic Sensors

Environmentally robust chemical sensors for monitoring industrial processes or infrastructures are lately becoming important devices in industry. Low complexity and wireless enabled characteristics can offer the required flexibility for sensor deployment in adaptable sensing networks for continuous monitoring and management of industrial assets. Here are presented the design, development and operation of a class of low cost photonic sensors for monitoring the ageing process and the operational characteristics of coolant fluids used in an industrial heavy machinery infrastructure. The chemical, physical and spectroscopic characteristics of specific industrial-grade coolant fluids were analyzed along their entire life cycle range, and proper parameters for their efficient monitoring were identified. Based on multimode polymer or silica optical fibers, wide range (3–11) pH sensors were developed by employing sol-gel derived pH sensitive coatings. The performances of the developed sensors were characterized and compared, towards their coolants’ ageing monitoring capability, proving their efficiency in such a demanding application scenario and harsh industrial environment. The operating characteristics of this type of sensors allowed their integration in an autonomous wireless sensing node, thus enabling the future use of the demonstrated platform in wireless sensor networks for a variety of industrial and environmental monitoring applications.

A polarization control system for intensity-resolved guided mode resonance sensors

In this study, a polarization-control setup for intensity-resolved guided mode resonance sensors is proposed and demonstrated experimentally. The experimental results are in good agreement with the simulation data based on rigorous coupled wave approach calculations. The proposed intensity-resolved measurement setup transfers polarization ellipses, which are produced from guided mode resonance to a linear polarization state under a buffer solution condition, and then suppresses the signals to dark using a polarization-control set. Hence, any changes in the refractive index results in an increase in the intensity signals. Furthermore, no wavelength-resolved or angular-resolved measurement is needed in this scheme. According to the experimental results, a wide linear detection range of 0.014 refractive index units is achieved and the limit of detection is 1.62E-4 RIU.

Optoelectronic capillary sensors in microfluidic and point-of-care instrumentation

This paper presents a review, based on the published literature and on the authors' own research, of the current state of the art of fiber-optic capillary sensors and related instrumentation as well as their applications, with special emphasis on point-of-care chemical and biochemical sensors, systematizing the various types of sensors from the point of view of the principles of their construction and operation. Unlike classical fiber-optic sensors which rely on changes in light propagation inside the fiber as affected by outside conditions, optical capillary sensors rely on changes of light transmission in capillaries filled with the analyzed liquid, which opens the possibility of interesting new applications, while raising specific issues relating to the construction, materials and instrumentation of those sensors.