Nanoelectromechanical Control of Spin-Photon Interfaces in a Hybrid Quantum System on Chip

Color centers (CCs) in nanostructured diamond are promising for optically linked quantum technologies. Scaling to useful applications motivates architectures meeting the following criteria: C1 individual optical addressing of spin qubits; C2 frequency tuning of spin-dependent optical transitions; C3 coherent spin control; C4 active photon routing; C5 scalable manufacturability; and C6 low on-chip power dissipation for cryogenic operations. Here, we introduce an architecture that simultaneously achieves C1-C6. We realize piezoelectric strain control of diamond waveguide-coupled tin vacancy centers with ultralow power dissipation necessary. The DC response of our device allows emitter transition tuning by over 20 GHz, combined with low-power AC control. We show acoustic spin resonance of integrated tin vacancy spins and estimate single-phonon coupling rates over 1 kHz in the resolved sideband regime. Combined with high-speed optical routing, our work opens a path to scalable single-qubit control with optically mediated entangling gates.

Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles.

Atmospheric-Pressure Mass Spectrometry by Single-Mode Nanoelectromechanical Systems

Weighing particles above the megadalton mass range has been a persistent challenge in commercial mass spectrometry. Recently, nanoelectromechanical systems-based mass spectrometry (NEMS-MS) has shown remarkable performance in this mass range, especially with the advance of performing mass spectrometry under entirely atmospheric conditions. This advance reduces the overall complexity and cost while increasing the limit of detection. However, this technique required the tracking of two mechanical modes and the accurate knowledge of mode shapes that may deviate from their ideal values, especially due to air damping. Here, we used a NEMS architecture with a central platform, which enables the calculation of mass by single-mode measurements. Experiments were conducted using polystyrene and gold nanoparticles to demonstrate the successful acquisition of mass spectra using a single mode with an improved areal capture efficiency. This advance represents a step forward in NEMS-MS, bringing it closer to becoming a practical application for the mass sensing of nanoparticles.

Phase Transition of MoTe2 Controlled in van der Waals Heterostructure Nanoelectromechanical Systems

This work reports experimental demonstrations of reversible crystalline phase transition in ultrathin molybdenum ditelluride (MoTe₂ ) controlled by thermal and mechanical mechanisms on the van der Waals (vdW) nanoelectromechanical systems (NEMS) platform, with hexagonal boron nitride encapsulated MoTe₂ structure residing on top of graphene layer. Benefiting from very efficient electrothermal heating and straining effects in the suspended vdW heterostructures, MoTe₂ phase transition is triggered by rising temperature and strain level. Raman spectroscopy monitors the MoTe₂ crystalline phase signatures in situ and clearly records reversible phase transitions between hexagonal 2H (semiconducting) and monoclinic 1T' (metallic) phases. Combined with Raman thermometry, precisely measured nanomechanical resonances of the vdW devices enable the determination and monitoring of the strain variations as temperature is being regulated by electrothermal control. These results not only deepen the understanding of MoTe₂ phase transition, but also demonstrate a novel platform for engineering MoTe₂ phase transition and multiphysical devices.

Nanomechanical Resonators: Toward Atomic Scale

The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained effort have been devoted to creating mechanical devices toward the ultimate limit of miniaturization─genuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-to-atomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.

Atmospheric Pressure Mass Spectrometry of Single Viruses and Nanoparticles by Nanoelectromechanical Systems

Mass spectrometry of intact nanoparticles and viruses can serve as a potent characterization tool for material science and biophysics. Inaccessible by widespread commercial techniques, the mass of single nanoparticles and viruses (>10MDa) can be readily measured by nanoelectromechanical systems (NEMS)-based mass spectrometry, where charged and isolated analyte particles are generated by electrospray ionization (ESI) in air and transported onto the NEMS resonator for capture and detection. However, the applicability of NEMS as a practical solution is hindered by their miniscule surface area, which results in poor limit-of-detection and low capture efficiency values. Another hindrance is the necessity to house the NEMS inside complex vacuum systems, which is required in part to focus analytes toward the miniscule detection surface of the NEMS. Here, we overcome both limitations by integrating an ion lens onto the NEMS chip. The ion lens is composed of a polymer layer, which charges up by receiving part of the ions incoming from the ESI tip and consequently starts to focus the analytes toward an open window aligned with the active area of the NEMS electrostatically. With this integrated system, we have detected the mass of gold and polystyrene nanoparticles under ambient conditions and with two orders-of-magnitude improvement in capture efficiency compared to the state-of-the-art. We then applied this technology to obtain the mass spectrum of SARS-CoV-2 and BoHV-1 virions. With the increase in analytical throughput, the simplicity of the overall setup, and the operation capability under ambient conditions, the technique demonstrates that NEMS mass spectrometry can be deployed for mass detection of engineered nanoparticles and biological samples efficiently.

Analysis of the Piezoelectric Properties of Aligned Multi-Walled Carbon Nanotubes

Recent studies reveal that carbon nanostructures show anomalous piezoelectric properties when the central symmetry of their structure is violated. Particular focus is given to carbon nanotubes (CNTs) with initial significant curvature of the graphene sheet surface, which leads to an asymmetric redistribution of the electron density. This paper presents the results of studies on the piezoelectric properties of aligned multi-walled CNTs. An original technique for evaluating the effective piezoelectric coefficient of CNTs is presented. For the first time, in this study, we investigate the influence of the growth temperature and thickness of the catalytic Ni layer on the value of the piezoelectric coefficient of CNTs. We establish the relationship between the effective piezoelectric coefficient of CNTs and their defectiveness and diameter, which determines the curvature of the graphene sheet surface. The calculated values of the effective piezoelectric coefficient of CNTs are shown to be between 0.019 and 0.413 C/m², depending on the degree of their defectiveness and diameter.

Detecting Single Molecule Deoxyribonucleic Acid in a Cell Using a Three-Dimensionally Integrated Nanopore

Amplification-free genome analysis can revolutionize biology and medicine by uncovering genetic variations among individuals. Here, the authors report on a 3D-integrated nanopore for electrolysis to in situ detection of single-molecule DNA in a cell by ionic current measurements. It consists of a SiO₂ multipore sheet and a SiN_x nanopore membrane stacked vertically on a Si wafer. Single cell lysis is demonstrated by 10⁶  V m^-1 -level electrostatic field focused at the multinanopore. The intracellular molecules are then directly detected as they move through a sensing zone, wherein the authors find telegraphic current signatures reflecting folding degrees of freedom of the millimeter-long polynucleotides threaded through the SiN_x nanopore. The present device concept may enable on-chip single-molecule sequencing to multi-omics analyses at a single-cell level.

Temperature-Dependent Nonlinear Damping in Palladium Nanomechanical Resonators

Advances in nanofabrication techniques have made it feasible to observe damping phenomena beyond the linear regime in nanomechanical systems. In this work, we report cubic nonlinear damping in palladium nanomechanical resonators. Nanoscale palladium beams exposed to a H₂ atmosphere become softer and display enhanced Duffing nonlinearity as well as nonlinear damping at ultralow temperatures. The damping is highest at the lowest temperatures of ∼110 mK and decreases when warmed up to ∼1 K. We experimentally demonstrate for the first time temperature-dependent nonlinear damping in a nanomechanical system below 1 K. This is consistent with a predicted two-phonon-mediated nonlinear Akhiezer scenario with a ballistic phonon mean free path comparable to the beam thickness. This opens up new possibilities to engineer nonlinear phenomena at low temperatures.

Electrodynamic Force, Casimir Effect, and Stiction Mitigation in Silicon Carbide Nanoelectromechanical Switches

Logic switches enabled by nanoelectromechanical systems (NEMS) offer abrupt on/off-state transition with zero off-state leakage and minimal subthreshold swing, making them uniquely suited for enhancing mainstream electronics in a range of applications, such as power gating, high-temperature and high-voltage logic, and ultralow-power circuits requiring zero standby leakage. As NEMS switches are scaled with genuinely nanoscale gaps and contacts, quantum mechanical electrodynamic force (EDF) takes an important role and may be the ultimate cause of the plaguing problem of stiction. Here, combined with experiments on three-terminal silicon carbide (SiC) NEMS switches, a theoretical investigation is performed to elucidate the origin of EDF and Casimir effect leading to stiction, and to develop a stiction-mitigation design. The EDF calculation with full Lifshitz formula using the actual material and device parameters is provided. Finite element modeling and analytical calculations demonstrate that EDF becomes dominant over elastic restoring force in such SiC NEMS when the switching gap shrinks to a few nanometers, leading to irreversible stiction at contact. Artificially corrugated contact surfaces are designed to reduce the contact area and the EDF, thus evading stiction. This rational surface engineering reduces the EDF down to 4% compared with the case of unengineered, flat contact surfaces.

Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS

A search of the recent literature reveals that there is a continuous growth of scientific publications on the development of chemical vapor deposition (CVD) processes for silicon carbide (SiC) films and their promising applications in micro- and nanoelectromechanical systems (MEMS/NEMS) devices. In recent years, considerable effort has been devoted to deposit high-quality SiC films on large areas enabling the low-cost fabrication methods of MEMS/NEMS sensors. The relatively high temperatures involved in CVD SiC growth are a drawback and studies have been made to develop low-temperature CVD processes. In this respect, atomic layer deposition (ALD), a modified CVD process promising for nanotechnology fabrication techniques, has attracted attention due to the deposition of thin films at low temperatures and additional benefits, such as excellent uniformity, conformability, good reproducibility, large area, and batch capability. This review article focuses on the recent advances in the strategies for the CVD of SiC films, with a special emphasis on low-temperature processes, as well as ALD. In addition, we summarize the applications of CVD SiC films in MEMS/NEMS devices and prospects for advancement of the CVD SiC technology.

Single-molecule optical absorption imaging by nanomechanical photothermal sensing

Absorption microscopy is a promising alternative to fluorescence microscopy for single-molecule imaging. So far, molecular absorption has been probed optically via the attenuation of a probing laser or via photothermal effects. The sensitivity of optical probing is not only restricted by background scattering but it is fundamentally limited by laser shot noise, which minimizes the achievable single-molecule signal-to-noise ratio. Here, we present nanomechanical photothermal microscopy, which overcomes the scattering and shot-noise limit by detecting the photothermal heating of the sample directly with a temperature-sensitive substrate. We use nanomechanical silicon nitride drums, whose resonant frequency detunes with local heating. Individual Au nanoparticles with diameters from 10 to 200 nm and single molecules (Atto 633) are scanned with a heating laser with a peak irradiance of 354 ± 45 µW/µm² using 50× long-working-distance objective. With a stress-optimized drum we reach a sensitivity of 16 fW/Hz^1/2 at room temperature, resulting in a single-molecule signal-to-noise ratio of >70. The high sensitivity combined with the inherent wavelength independence of the nanomechanical sensor presents a competitive alternative to established tools for the analysis and localization of nonfluorescent single molecules and nanoparticles.

Sub-diffraction spatial mapping of nanomechanical modes using a plasmomechanical system

Plasmomechanical systems - formed by introducing a mechanically compliant gap between metallic nanostructures - produce large optomechanical interactions that can be localized to deep subwavelength volumes. This unique ability opens a new path to study optomechanics in nanometer-scale regimes inaccessible by other methods. We show that the localized optomechanical interactions produced by plasmomechanics can be used to spatially map the displacement modes of a vibrating nanomechanical system with a resolution exceeding the diffraction limit. Furthermore, we use white light illumination for motion transduction instead of a monochromatic laser, and develop a semi-analytical model matching the changes in optomechanical coupling constant and motion signal strength observed in a broadband transduction experiment. Our results clearly demonstrate the key benefit of localized and broadband performance provided by plasmomechanical systems, which may enable future nano-scale sensing and wafer-scale metrology applications.

Single-Nanowire Strain Sensors Fabricated by Nanoskiving

This article describes the fabrication of single-nanowire strain sensors by thin sectioning of gold films with an ultramicrotome-i.e., "nanoskiving." The nanowire sensors are transferred to various substrates from the water bath on which they float after sectioning. The electrical response of these single nanowires to mechanical strain is investigated, with the lowest detectable strain determined to be 1.6 × 10-5 with a repeatable response to strains as high as 7 × 10-4. The sensors are shown to have an enhanced sensitivity with a gauge factor of 3.1 on average, but as high as 9.5 in the low strain regime (ε ~ 1 × 10-5). Conventional thin films of gold of the same height as the nanowires are used as controls, and are unable to detect those same strains. The practicality of this sensor is investigated by transferring a single nanowire to polyimide tape, and placing the sensor on the wrist to monitor the pulse pressure waveform from the radial artery. The nanowires are fabricated with simple tools and require no lithography. Moreover, the sensors can be "manufactured" efficiently, as each consecutive section of the film is a quasi copy of the previous nanowire. The simple fabrication of these nanowires, along with the compatibility with flexible substrates, offers possibilities in developing new kinds of devices for biomedical applications and structural health monitoring.

Noninvasive Scanning Raman Spectroscopy and Tomography for Graphene Membrane Characterization

Graphene has extraordinary mechanical and electronic properties, making it a promising material for membrane-based nanoelectromechanical systems (NEMS). Here, chemical-vapor-deposited graphene is transferred onto target substrates to suspend it over cavities and trenches for pressure-sensor applications. The development of such devices requires suitable metrology methods, i.e., large-scale characterization techniques, to confirm and analyze successful graphene transfer with intact suspended graphene membranes. We propose fast and noninvasive Raman spectroscopy mapping to distinguish between free-standing and substrate-supported graphene, utilizing the different strain and doping levels. The technique is expanded to combine two-dimensional area scans with cross-sectional Raman spectroscopy, resulting in three-dimensional Raman tomography of membrane-based graphene NEMS. The potential of Raman tomography for in-line monitoring is further demonstrated with a methodology for automated data analysis to spatially resolve the material composition in micrometer-scale integrated devices, including free-standing and substrate-supported graphene. Raman tomography may be applied to devices composed of other two-dimensional materials as well as silicon micro- and nanoelectromechanical systems.

Accurate and Precise Determination of Mechanical Properties of Silicon Nitride Beam Nanoelectromechanical Devices

Accurate and precise determination of mechanical properties of nanoscale materials is mandatory since device performances of nanoelectromechanical systems (NEMS) are closely related to the flexural properties of the materials. In this study, the intrinsic mechanical properties of highly stressed silicon nitride (SiN) beams of varying lengths are investigated using two different techniques: Dynamic flexural measurement using optical interferometry and quasi-static flexural measurement using atomic force microscopy. The resonance frequencies of the doubly clamped, highly stressed beams are found to be inversely proportional to their length, which is not usually observed from a beam but is expected from a string-like structure. The mass density of the SiN beams can be precisely determined from the dynamic flexural measurements by using the values for internal stress and Young's modulus determined from the quasi-static measurements. As a result, the mass resolution of the SiN beam resonators was predicted to be a few attograms, which was found to be in excellent agreement with the experimental results. This work suggests that accurate and precise determination of mechanical properties can be achieved through combined flexural measurement techniques, which is a crucial key for designing practical NEMS applications such as biomolecular sensors and gas detectors.

Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings

Helium ion microscopy has recently emerged as a potent tool for the in-situ modification and imaging of nanoscale devices. For example; finely focused helium ion beams have been used for the milling of pores in suspended structures. We here report the use of helium ion milling for the post-fabrication modification of nanostrings machined from an amorphous SiCN material. The modification consisted of milling linear arrays of holes along the length of nanostrings. This milling results in a slight decrease of resonant frequency while increasing the surface to volume ratio of the device. The frequency decrease is attributed to a reduction of the effective Young’s modulus of the string, which in turn reduces the tension the string is under. Such experimental observations are supported by the finite element analysis of milled and non-milled strings.

Charge and heat transport in soft nanosystems in the presence of time-dependent perturbations

BACKGROUND

Soft nanosystems are electronic nanodevices, such as suspended carbon nanotubes or molecular junctions, whose transport properties are modulated by soft internal degrees of freedom, for example slow vibrational modes. Effects of the electron-vibration coupling on the charge and heat transport of soft nanoscopic systems are theoretically investigated in the presence of time-dependent perturbations, such as a forcing antenna or pumping terms between the leads and the nanosystem. A well-established approach valid for non-equilibrium adiabatic regimes is generalized to the case where external time-dependent perturbations are present. Then, a number of relevant applications of the method are reviewed for systems composed by a quantum dot (or molecule) described by a single electronic level coupled to a vibrational mode.

RESULTS

Before introducing time-dependent perturbations, the range of validity of the adiabatic approach is discussed showing that a very good agreement with the results of an exact quantum calculation is obtained in the limit of low level occupation. Then, we show that the interplay between the low frequency vibrational modes and the electronic degrees of freedom affects the thermoelectric properties within the linear response regime finding out that the phonon thermal conductance provides an important contribution to the figure of merit at room temperature. Our work has been stimulated by recent experimental results on carbon nanotube electromechanical devices working in the semiclassical regime (resonator frequencies in the megahertz range compared to an electronic hopping frequency of the order of tens of gigahertz) with extremely high quality factors. The nonlinear vibrational regime induced by the external antenna in such systems has been discussed within the non-perturbative adiabatic approach reproducing quantitatively the characteristic asymmetric shape of the current-frequency curves. Within the same set-up, we have proved that the antenna is able to pump sufficient charge close to the mechanical resonance making single-parameter adiabatic charge pumping feasible in carbon nanotube resonators. The pumping mechanism that we observe is different from that acting in the two parameter pumping and, instead, it is based on an important dynamic adjustment of the mechanical motion of the nanotube to the external drive in the weakly nonlinear regime. Finally, stochastic forces induced by quantum and thermal fluctuations due to the electron charging of the quantum dot are shown to affect in a significant way a Thouless charge pump realized with an elastically deformable quantum dot. In this case, the pumping mechanism is also shown to be magnified when the frequency of the external drive is resonant with the proper frequency of the deformable quantum dot. In this regime, the pumping current is not strongly reduced by the temperature, giving a measurable effect.

CONCLUSION

Aim of this review has been to discuss common features of different soft nanosystems under external drive. The most interesting effects induced by time-dependent perturbations are obtained when the external forcing is nearly resonant with the slow vibrational modes. Indeed, not only the external forcing can enhance the electronic response, but it also induces nonlinear regimes where the interplay between electronic and vibrational degrees of freedom plays a major role.

Remote Magnetomechanical Nanoactuation

A novel approach to nanoactuation that relies on magnetomechanics instead of the conventional electromechanics utilized in micro and nanoactuated mechanical systems is devised and demonstrated. Namely, nanoactuated magnetomechanical devices that can change shape on command using a remote magnetic external stimulus, with a control at the subnanometer scale are designed and fabricated. In contrast to micro and nanoactuated electromechanical systems, nanoactuated magnetomechanical remote activation does not require physical contacts. Remote activation and control have a tremendous potential in bringing vast technological capabilities to more diverse environments, such as liquids or even inside living organisms, opening a clear path to applications in biotechnology and the emerging field of nanorobotics.

Large arrays and properties of 3-terminal graphene nanoelectromechanical switches

Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.

Current-induced forces in mesoscopic systems: A scattering-matrix approach

Nanoelectromechanical systems are characterized by an intimate connection between electronic and mechanical degrees of freedom. Due to the nanoscopic scale, current flowing through the system noticeably impacts upons the vibrational dynamics of the device, complementing the effect of the vibrational modes on the electronic dynamics. We employ the scattering-matrix approach to quantum transport in order to develop a unified theory of nanoelectromechanical systems out of equilibrium. For a slow mechanical mode the current can be obtained from the Landauer-Büttiker formula in the strictly adiabatic limit. The leading correction to the adiabatic limit reduces to Brouwer's formula for the current of a quantum pump in the absence of a bias voltage. The principal results of the present paper are the scattering-matrix expressions for the current-induced forces acting on the mechanical degrees of freedom. These forces control the Langevin dynamics of the mechanical modes. Specifically, we derive expressions for the (typically nonconservative) mean force, for the (possibly negative) damping force, an effective "Lorentz" force that exists even for time-reversal-invariant systems, and the fluctuating Langevin force originating from Nyquist and shot noise of the current flow. We apply our general formalism to several simple models that illustrate the peculiar nature of the current-induced forces. Specifically, we find that in out-of-equilibrium situations the current-induced forces can destabilize the mechanical vibrations and cause limit-cycle dynamics.