Hierarchical patterns of three-dimensional block-copolymer films formed by electrohydrodynamic jet printing and self-assembly

pH Tunable Patterning of Quantum Dots

Patterning of quantum dots (QDs) is essential for many, especially high-tech, applications. Here, pH tunable assembly of QDs over functional patterns prepared by electrohydrodynamic jet printing of poly(2-vinylpyridine) is presented. The selective adsorption of QDs from water dispersions is mediated by the electrostatic interaction between the ligand composed of 3-mercaptopropionic acid and patterned poly(2-vinylpyridine). The pH of the dispersion provides tunability at two levels. First, the adsorption density of QDs and fluorescence from the patterns can be modulated for pH > ≈4. Second, patterned features show unique type of disintegration resulting in randomly positioned features within areas defined by the printing for pH ≤ ≈4. The first capability is useful for deterministic patterning of QDs, whereas the second one enables hierarchically structured encoding of information by generating stochastic features of QDs within areas defined by the printing. This second capability is exploited for generating addressable security labels based on unclonable features. Through image analysis and feature matching algorithms, it is demonstrated that such patterns are unclonable in nature and provide a suitable platform for anti-counterfeiting applications. Collectively, the presented approach not only enables effective patterning of QDs, but also establishes key guidelines for addressable assembly of colloidal nanomaterials.

Direct Printing of Ultrathin Block Copolymer Film with Nano-in-Micro Pattern Structures

Nanotransfer printing (nTP) is one of the most promising nanopatterning methods given that it can be used to produce nano-to-micro patterns effectively with functionalities for electronic device applications. However, the nTP process is hindered by several critical obstacles, such as sub-20 nm mold technology, reliable large-area replication, and uniform transfer-printing of functional materials. Here, for the first time, a dual nanopatterning process is demonstrated that creates periodic sub-20 nm structures on the eight-inch wafer by the transfer-printing of patterned ultra-thin (<50 nm) block copolymer (BCP) film onto desired substrates. This study shows how to transfer self-assembled BCP patterns from the Si mold onto rigid and/or flexible substrates through a nanopatterning method of thermally assisted nTP (T-nTP) and directed self-assembly (DSA) of Si-containing BCPs. In particular, the successful microscale patternization of well-ordered sub-20 nm SiOx patterns is systematically presented by controlling the self-assembly conditions of BCP and printing temperature. In addition, various complex pattern geometries of nano-in-micro structures are displayed over a large patterning area by T-nTP, such as angular line, wave line, ring, dot-in-hole, and dot-in-honeycomb structures. This advanced BCP-replicated nanopatterning technology is expected to be widely applicable to nanofabrication of nano-to-micro electronic devices with complex circuits.

Biomimetic Mineral Synthesis by Nanopatterned Supramolecular-Block Copolymer Templates

Supramolecular structures of matrix proteins in mineralizing tissues are known to direct the crystallization of inorganic materials. Here we demonstrate how such structures can be synthetically directed into predetermined patterns for which functionality is maintained. The study employs block copolymer lamellar patterns with alternating hydrophilic and hydrophobic regions to direct the assembly of amelogenin-derived peptide nanoribbons that template calcium phosphate nucleation by creating a low-energy interface. Results show that the patterned nanoribbons retain their β-sheet structure and function and direct the formation of filamentous and plate-shaped calcium phosphate with high fidelity, where the phase, amorphous or crystalline, depends on the choice of mineral precursor and the fidelity depends on peptide sequence. The common ability of supramolecular systems to assemble on surfaces with appropriate chemistry combined with the tendency of many templates to mineralize multiple inorganic materials implies this approach defines a general platform for bottom-up-patterning of hybrid organic-inorganic materials.

Bubble wall confinement-driven molecular assembly toward sub-12 nm and beyond precision patterning

Patterning is attractive for nanofabrication, electron devices, and bioengineering. However, achieving the molecular-scale patterns to meet the demands of these fields is challenging. Here, we propose a bubble-template molecular printing concept by introducing the ultrathin liquid film of bubble walls to confine the self-assembly of molecules and achieve ultrahigh-precision assembly up to 12 nanometers corresponding to the critical point toward the Newton black film limit. The disjoining pressure describing the intermolecular interaction could predict the highest precision effectively. The symmetric molecules exhibit better reconfiguration capacity and smaller preaggregates than the asymmetric ones, which are helpful in stabilizing the drainage of foam films and construct high-precision patterns. Our results confirm the robustness of the bubble template to prepare molecular-scale patterns, verify the criticality of molecular symmetry to obtain the ultimate precision, and predict the application potential of high-precision organic patterns in hierarchical self-assembly and high-sensitivity sensors.

Nanofiber-based sorbents: Current status and applications in extraction methods

Advanced sorbents gradually become a research hotspot on account of the increasing attention paid to environmental problems. Due to the prominent physicochemical features of nanofibers (NFs), such as high porosity, large surface area, favorable interconnectivity, high adsorption capacity, wettability, and the possibility of surface modification using functional groups, these nanostructures are regarded as excellent candidates for extraction applications. Therefore, the research in the field of NFs and their nanocomposites has been increasing in recent years. In the present review, we summarize the most recent studies on NFs-based sorbents focusing on strategies for preparation, characterization, and their unique capabilities as porous sorbents in various sorbent-based extraction methods. Moreover, we further described the performance and selectivity of sorbents to achieve improved extraction efficiency. Finally, some perspectives on the challenges and outlook are provided to aid future investigations related to this topic.

Hierarchical, Self-Assembled Metasurfaces via Exposure-Controlled Reflow of Block Copolymer-Derived Nanopatterns

Nanopatterning for the fabrication of optical metasurfaces entails a need for high-resolution approaches like electron beam lithography that cannot be readily scaled beyond prototyping demonstrations. Block copolymer thin film self-assembly offers an attractive alternative for producing periodic nanopatterns across large areas, yet the pattern feature sizes are fixed by the polymer molecular weight and composition. Here, a general strategy is reported which overcomes the limitation of the fixed feature size by treating the copolymer thin film as a hierarchical resist, in which the nanoscale pattern motif is defined by self-assembly. Feature sizes can then be tuned by thermal reflow controlled locally by irradiative cross-linking or chemical alteration using lithographic ultraviolet light or electron beam exposure. Using blends of polystyrene-block-poly(methylmethacrylate) (PS-b-PMMA) with PS and PMMA homopolymers, we demonstrate both self-assembled PS grating and hexagonal hole patterns; exposure-controlled reflow is then used to reduce the hole diameter by as much as 50% or increase the PS grating linewidth by more than 180%. Transferring these nanopatterns, or their inverse obtained by a lift-off approach, into silicon yields structural colors that may be prescriptively controlled based on the nanoscale feature size. Furthermore, patterned exposure enables area-selective feature size control, yielding uniform structural color patterns across centimeter square areas. Electron beam lithography is also used to show that the lithographic resolution of this selective-area control can be extended to the nanoscale dimensions of the self-assembled features. The exposure-controlled reflow approach demonstrated here takes a pivotal step toward fabricating complex, hierarchical optical metasurfaces using scalable self-assembly methods.

Solvent-assisted self-assembly of block copolymer thin films

Solvent-assisted block copolymer self-assembly is a compelling method for processing and advancing practical applications of these materials due to the exceptional level of the control of BCP morphology and significant acceleration of ordering kinetics. Despite substantial experimental and theoretical efforts devoted to understanding of solvent-assisted BCP film ordering, the development of a universal BCP patterning protocol remains elusive; possibly due to a multitude of factors which dictate the self-assembly scenario. The aim of this review is to aggregate both seminal reports and the latest progress in solvent-assisted directed self-assembly and to provide the reader with theoretical background, including the outline of BCP ordering thermodynamics and kinetics phenomena. We also indicate significant BCP research areas and emerging high-tech applications where solvent-assisted processing might play a dominant role.

Predictive Biophysical Cue Mapping for Direct Cell Reprogramming Using Combinatorial Nanoarrays

Biophysical cues, such as nanotopographies of extracellular matrix (ECM), are key cell regulators for direct cell reprogramming. Therefore, high-throughput methods capable of systematically screening a wide range of biophysical cue-regulated cell reprogramming are increasingly needed for tissue engineering and regenerative medicine. Here, we report the development of a dynamic laser interference lithography (DIL) to generate large-scale combinatorial biophysical cue (CBC) arrays with diverse micro/nanostructures at higher complexities than most current arrays. Using CBC arrays, a high-throughput cell mapping method is further demonstrated for the systematic investigation of biophysical cue-mediated direct cell reprogramming. This CBC array-based high-throughput cell screening approach facilitates the rapid identification of unconventional hierarchical nanopatterns that induce the direct reprogramming of human fibroblasts into neurons through epigenetic modulation mechanisms. In this way, we successfully demonstrate DIL for generating highly complex CBC arrays and establish CBC array-based cell screening as a valuable strategy for systematically investigating the role of biophysical cues in cell reprogramming.

A laser-driven optical atomizer: photothermal generation and transport of zeptoliter-droplets along a carbon nanotube deposited hollow optical fiber

From mechanical syringes to electric field-assisted injection devices, precise control of liquid droplet generation has been sought after, and the present state-of-the-art technologies have provided droplets ranging from nanoliter to subpicoliter volume sizes. In this study, we present a new laser-driven method to generate liquid droplets with a zeptoliter volume, breaking the fundamental limits of previous studies. We guided an infrared laser beam through a hollow optical fiber (HOF) with a ring core whose end facet was coated with single-walled carbon nanotubes. The laser light was absorbed by this nanotube film and efficiently generated a highly localized microring heat source. This evaporated the liquid inside the HOF, which rapidly recondensed into zeptoliter droplets in the surrounding air at room temperature. We spectroscopically confirmed the chemical structures of the liquid precursor maintained in the droplets by atomizing dye-dissolved glycerol. Moreover, we explain the fundamental physical principles as well as functionalities of the optical atomizer and perform a detailed characterization of the droplets. Our approach has strong prospects for nanoscale delivery of biochemical substances in minuscule zeptoliter volumes.

Tunable and scalable fabrication of block copolymer-based 3D polymorphic artificial cell membrane array

Owing to their excellent durability, tunable physical properties, and biofunctionality, block copolymer-based membranes provide a platform for various biotechnological applications. However, conventional approaches for fabricating block copolymer membranes produce only planar or suspended polymersome structures, which limits their utilization. This study is the first to demonstrate that an electric-field-assisted self-assembly technique can allow controllable and scalable fabrication of 3-dimensional block copolymer artificial cell membranes (3DBCPMs) immobilized on predefined locations. Topographically and chemically structured microwell array templates facilitate uniform patterning of block copolymers and serve as reactors for the effective growth of 3DBCPMs. Modulating the concentration of the block copolymer and the amplitude/frequency of the electric field generates 3DBCPMs with diverse shapes, controlled sizes, and high stability (100% survival over 50 days). In vitro protein–membrane assays and mimicking of human intestinal organs highlight the potential of 3DBCPMs for a variety of biological applications such as artificial cells, cell-mimetic biosensors, and bioreactors.

In this manuscript, an electric-field-assisted self-assembly technique that can allow controllable and scalable fabrication of 3-dimensional block copolymer (BCP)-based artificial cell membranes (3DBCPMs) immobilized on predefined locations is presented.

Topographically and chemically structured microwell array templates facilitate uniform patterning of BCPs and serve as reactors for the effective growth of 3DBCPMs, which diverse shapes, sizes and stability can be tuned by modulating the BCP concentration and the amplitude/frequency of the electric field.

The potential of 3DBCPMs for a variety of biological applications is highlighted by performance of in vitro protein-membrane assays and mimicking of human intestinal organs.

Switching-Modulated Phase Change Memory Realized by Si-Containing Block Copolymers

The phase change memory (PCM) is one of the key enabling memory technologies for next-generation non-volatile memory device applications due to its high writing speed, excellent endurance, long retention time, and good scalability. However, the high power consumption of PCM devices caused by the high switching current from a high resistive state to a low resistive state is a critical obstacle to be resolved before widespread commercialization can be realized. Here, a useful approach to reduce the writing current of PCM, which depends strongly on the contact area between the heater electrode and active layer, by employing self-assembly process of Si-containing block copolymers (BCPs) is presented. Self-assembled insulative BCP pattern geometries can locally block the current path of the contact between a high resistive film (TiN) and a phase-change material (Ge₂ Sb₂ Te₅ ), resulting in a significant reduction of the writing current. Compared to a conventional PCM cell, the BCP-modified PCM shows excellent switching power reduction up to 1/20 given its use of self-assembled hybrid SiFe_x O_y /SiO_x dot-in-hole nanostructures. This BCP-based bottom-up process can be extended to various applications of other non-volatile memory devices, such as resistive switching memory and magnetic storage devices.

3D Printing-Enabled Nanoparticle Alignment: A Review of Mechanisms and Applications

3D printing (additive manufacturing (AM)) has enormous potential for rapid tooling and mass production due to its design flexibility and significant reduction of the timeline from design to manufacturing. The current state-of-the-art in 3D printing focuses on material manufacturability and engineering applications. However, there still exists the bottleneck of low printing resolution and processing rates, especially when nanomaterials need tailorable orders at different scales. An interesting phenomenon is the preferential alignment of nanoparticles that enhance material properties. Therefore, this review emphasizes the landscape of nanoparticle alignment in the context of 3D printing. Herein, a brief overview of 3D printing is provided, followed by a comprehensive summary of the 3D printing-enabled nanoparticle alignment in well-established and in-house customized 3D printing mechanisms that can lead to selective deposition and preferential orientation of nanoparticles. Subsequently, it is listed that typical applications that utilized the properties of ordered nanoparticles (e.g., structural composites, heat conductors, chemo-resistive sensors, engineered surfaces, tissue scaffolds, and actuators based on structural and functional property improvement). This review's emphasis is on the particle alignment methodology and the performance of composites incorporating aligned nanoparticles. In the end, significant limitations of current 3D printing techniques are identified together with future perspectives.

Controlled self-assembly of block copolymers in printed sub-20 nm cross-bar structures

Directed self-assembly (DSA) of block copolymers (BCPs) has garnered much attention due to its excellent pattern resolution, simple process, and good compatibility with many other lithography methods for useful nanodevice applications. Here, we present a BCP-based multiple nanopatterning process to achieve three-dimensional (3D) pattern formation of metal/oxide hybrid nanostructures. We employed a self-assembled sub-20 nm SiO _x line pattern as a master mold for nanotransfer printing (nTP) to generate a cross-bar array. By using the transfer-printed cross-bar structures as BCP-guiding templates, we can obtain well-ordered BCP microdomains in the distinct spaces of the nanotemplates through a confined BCP self-assembly process. We also demonstrate the morphological evolution of a cylinder-forming BCP by controlling the BCP film thickness, showing a clear morphological transition from cylinders to spheres in the designated nanospaces. Furthermore, we demonstrate how to control the number of BCP spheres within the cross-bar 3D pattern by adjusting the printing angle of the multiple nTP process to provide a suitable area for spontaneous BCP accommodation. This multiple-patterning-based approach is applicable to useful 3D nanofabrication of various devices with complex hybrid nanostructures.

Printable Smart Materials and Devices: Strategies and Applications

Smart materials are a kind of functional materials which can sense and response to environmental conditions or stimuli from optical, electrical, magnetic mechanical, thermal, and chemical signals, etc. Patterning of smart materials is the key to achieving large-scale arrays of functional devices. Over the last decades, printing methods including inkjet printing, template-assisted printing, and 3D printing are extensively investigated and utilized in fabricating intelligent micro/nano devices, as printing strategies allow for constructing multidimensional and multimaterial architectures. Great strides in printable smart materials are opening new possibilities for functional devices to better serve human beings, such as wearable sensors, integrated optoelectronics, artificial neurons, and so on. However, there are still many challenges and drawbacks that need to be overcome in order to achieve the controllable modulation between smart materials and device performance. In this review, we give an overview on printable smart materials, printing strategies, and applications of printed functional devices. In addition, the advantages in actual practices of printing smart materials-based devices are discussed, and the current limitations and future opportunities are proposed. This review aims to summarize the recent progress and provide reference for novel smart materials and printing strategies as well as applications of intelligent devices.

Developing Anisotropy in Self-Assembled Block Copolymers: Methods, Properties, and Applications

Block copolymers (BCPs) self-assembly has continually attracted interest as a means to provide bottom-up control over nanostructures. While various methods have been demonstrated for efficiently ordering BCP nanodomains, most of them do not generically afford control of nanostructural orientation. For many applications of BCPs, such as energy storage, microelectronics, and separation membranes, alignment of nanodomains is a key requirement for enabling their practical use or enhancing materials performance. This review focuses on summarizing research progress on the development of anisotropy in BCP systems, covering a variety of topics from established aligning techniques, resultant material properties, and the associated applications. Specifically, the significance of aligning nanostructures and the anisotropic properties of BCPs is discussed and highlighted by demonstrating a few promising applications. Finally, the challenges and outlook are presented to further implement aligned BCPs into practical nanotechnological applications, where exciting opportunities exist.

Topographically designed hybrid nanostructures via nanotransfer printing and block copolymer self-assembly

Nanotransfer printing (nTP) has attracted much attention due to its high pattern resolution, simple process, and low processing cost for useful nanofabrication. Here, we introduce a thermally assisted nTP (T-nTP) process for the effective fabrication of various periodic three-dimensional (3D) nanosheets, such as concavo-convex lines, spine lines, square domes, and complex multi-line patterns. The T-nTP method allows continuous nanoscale 3D patterns with functionality to be transferred onto both rigid and flexible substrates by heat without any collapse of uniform convex nanostructures with nanochannels. We also show the pattern formation of multi-layered hybrid structures consisting of two or more materials by T-nTP. Furthermore, the formation of silicon oxide nanodots (0D) within a printed metallic nanowave structure (3D) can be achieved by the combined method of T-nTP and the self-assembly of poly(styrene-b-dimethylsiloxane) (PS-b-PDMS) block copolymers. Moreover, we demonstrate how to obtain well-defined oxide-metal hybrid nanostructures (0D-in-3D) through the spontaneous accommodation of PDMS spheres in the confined spaces of an Au-wave nanotemplate. This approach is applicable during the nanofabrication of various high-resolution devices with complex geometrical nanopatterns.

Formation of Li2CO3 Nanostructures for Lithium-Ion Battery Anode Application by Nanotransfer Printing

Various high-performance anode and cathode materials, such as lithium carbonate, lithium titanate, cobalt oxides, silicon, graphite, germanium, and tin, have been widely investigated in an effort to enhance the energy density storage properties of lithium-ion batteries (LIBs). However, the structural manipulation of anode materials to improve the battery performance remains a challenging issue. In LIBs, optimization of the anode material is a key technology affecting not only the power density but also the lifetime of the device. Here, we introduce a novel method by which to obtain nanostructures for LIB anode application on various surfaces via nanotransfer printing (nTP) process. We used a spark plasma sintering (SPS) process to fabricate a sputter target made of Li2CO3, which is used as an anode material for LIBs. Using the nTP process, various Li2CO3 nanoscale patterns, such as line, wave, and dot patterns on a SiO2/Si substrate, were successfully obtained. Furthermore, we show highly ordered Li2CO3 nanostructures on a variety of substrates, such as Al, Al2O3, flexible PET, and 2-Hydroxylethyl Methacrylate (HEMA) contact lens substrates. It is expected that the approach demonstrated here can provide new pathway to generate many other designable structures of various LIB anode materials.

Microtip focused electrohydrodynamic jet printing with nanoscale resolution

Electrohydrodynamic jet (E-Jet) printing is a promising manufacturing technique for micro-/nano-patterned structures with high resolution, high efficiency and high material compatibility. However, further improvement of the necking ratio of the E-Jet is still limited by the focusing principle. Moreover, ink viscosity is limited to values well below 90 mPa s owing to the high probability of nozzle blockage. Here, we propose a microtip focused electrohydrodynamic jet (MFEJ) printing to overcome these limitations. This technique uses a solid microtip with a radius of curvature (ROC) of several micrometers rather than a hollow nozzle, which is very simple and highly efficient to prepare and can effectively avoid nozzle clogging problems even with high-viscosity printing ink. High-resolution patterns in diverse geometries were printed using different inks with a wide range of viscosities (8.4-3500 mPa s). Nanodroplets with an average diameter of 73 nm were achieved. Moreover, nanofibers with a diameter of 30 nm were obtained using a 4 μm ROC microtip and the necking ratio was as high as 266 : 1. To the best of our knowledge, this is the smallest droplet or fiber diameter directly obtained via E-Jet printing to date without further physical or chemical processing. This MFEJ printing technique can improve printing resolution at the nanoscale, significantly enlarge the material applicability and effectively avoid nozzle clogging for the fabrication of nanodevices.

Accurate generation of attolitre droplets for directly printing gold nanoparticles from solution through confined reaction

Small droplets exist in nature widely and have attractive applications. Although there are some well-established techniques to produce small droplets, it is still a substantial challenge to generate and measure the volume of ultrafine droplets down to attolitres (aL) precisely. Here, we accurately generate ultrafine droplets in attolitre scale by an electrohydrodynamic jet method. By superimposing a low frequency pulse over a static electric field, the volumes of the ultrafine droplets are accurately controlled from 1 to 5 aL with the best accuracy of 0.3 aL and coefficient of variations less than 25%. Gold nanoparticles are deposited on substrate directly from the ultrafine droplets of HAuCl4/H2O solution through a confined reaction in a reducing environment. The gold nanoparticles exhibit highly sensitive and reproductive in surface-enhanced Raman scattering.

Thermally assisted nanotransfer printing with sub-20-nm resolution and 8-inch wafer scalability

Nanotransfer printing (nTP) has attracted considerable attention due to its good pattern resolution, process simplicity, and cost-effectiveness. However, the development of a large-area nTP process has been hampered by critical reliability issues related to the uniform replication and regular transfer printing of functional nanomaterials. Here, we present a very practical thermally assisted nanotransfer printing (T-nTP) process that can easily produce well-ordered nanostructures on an 8-inch wafer via the use of a heat-rolling press system that provides both uniform pressure and heat. We also demonstrate various complex pattern geometries, such as wave, square, nut, zigzag, and elliptical nanostructures, on diverse substrates via T-nTP. Furthermore, we demonstrate how to obtain a high-density crossbar metal-insulator-metal memristive array using a combined method of T-nTP and directed self-assembly. We expect that the state-of-the-art T-nTP process presented here combined with other emerging patterning techniques will be especially useful for the large-area nanofabrication of various devices.

Phase-field simulations of electrohydrodynamic jetting for printing nano-to-microscopic constructs

A numerical simulation is presented for predicting the transient ejection of micro-/nano-scopic jets from microscale nozzles, when a liquid confined within the nozzle is subjected to an external electric field. This simulation is based on the Taylor–Melcher leaky dielectric model, and uses the phase field method for interface tracking. The presented model is able to successfully simulate the deformation of a flat liquid meniscus into a Taylor cone, eventually leading to jet formation and breakup into droplets. Several simulations are performed to understand the effect of process parameters like applied voltage, liquid flow rate and properties on jet ejection dynamics. The results reveal the dependence of the ejected jet diameter and current primarily on the applied electric potential, liquid flow rate and electrical conductivity of the liquid. For high conductivity liquids, it is found that the convection current is of the same order of magnitude as the conduction current. In contrast, the convection current dominates the conduction current during jet ejection in the case of low conductivity liquids, regardless of the flow rate. It is also found that stable jets smaller than 200 nm can be produced from a 2 μm nozzle, which would facilitate patterning structures at the nanoscale. This model presents an approach to analyze the effect of process parameters on electrojet ejections and can effectively guide the design of printheads for e-jet systems that pattern nanoscale features in jetting and nano-dripping modes from microscopic nozzles.

This paper simulates the transient evolution of an electrohydrodynamic jet and reveals the dependence of its characteristics on the underlying process parameters.

Lamellar Orientation of a Block Copolymer via an Electron-Beam Induced Polarity Switch in a Nitrophenyl Self-Assembled Monolayer or Si Etching Treatments

Directed self-assembly (DSA) was investigated on self-assembled monolayers (SAMs) chemically modified by electron beam (EB) irradiation, which is composed of 6-(4-nitrophenoxy) hexane-1-thiol (NPHT). Irradiating a NPHT by EB could successfully induce the orientation and selective patterning of block copolymer domains. We clarified that spatially-selective lamellar orientations of polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) could be achieved by a change of an underlying SAM. The change of an underlying SAM is composed of the transition of an NO2 group to an NH2 group, which is induced by EB. The modification in the polarity of different regions of the SAM with EB lithography controlled the lamellar orientation of PS-b-PMMA. The reduction of the NPHT SAM plays an important role in the orientation of block copolymer. This method might significantly simplify block copolymer DSA processes when it is compared to the conventional DSA process. By investigating the lamellae orientation with EB, it is clarified that only suitable annealing temperatures and irradiation doses lead to the vertical orientation. We also fabricated pre-patterned Si substrates by EB lithographic patterning and reactive ion etching (RIE). DSA onto such pre-patterned Si substrates was proven to be successful for subdivision of the lithographic patterns into line and space patterns.

Strain-Dependent Nanowrinkle Confinement of Block Copolymers

This paper describes an all-soft, templated assembly of block copolymers (BCPs) with programmable alignment. Using polymeric nanowrinkles as a confining scaffold, poly(styrene)-block-poly(dimethylsiloxane) (PS-b-PDMS) BCPs were assembled to be parallel or perpendicular to the wrinkle orientation by manipulating the substrate strain. Self-consistent field theory modeling revealed that wrinkle curvature and surface affinity govern the BCP structural formation. Furthermore, control of BCP alignment was demonstrated for complex wrinkle geometries, various copolymer molecular weights, and functional wrinkle skin layers. This integration of BCP patterning with flexible 3D architectures offers a promising nanolithography approach for next-generation soft electronics.

Electrohydrodynamic jet 3D printing of PCL/PVP composite scaffold for cell culture

Controlled printing of biodegradable and bioresorbable polymers at desired 3D scaffold is of great importance for cell growth and tissue regeneration. In this work, a novel electrohydrodynamic jet 3D printing technology with the resultant effect of electrohydrodynamic force and thermal convection was developed, and its feasibility to fabricate controllable filament composite scaffolds was verified. This method introduces an effective thermal field under the needle to simultaneously enhance the ink viscosity, jetting morphology controllability and printing structure solidify. The fabrication mechanisms of thermal convection on jetting morphology and printed structures feature were investigated through theoretical analysis and experimental characterization. Under optimized conditions, a stable and finer jet was formed; then with the use of this jet, various 3D structures were directly printed at a high aspect ratio ~30. Furthermore, the PCL/PVP composite scaffolds with the controllable filament diameter (~10 μm) which is closed to living cells were printed. Cell culture experiments showed that the printed scaffolds had excellent cell biocompatibility and facilitated cellular proliferation in vitro. It is a great potential that the developed electrohydrodynamic jet 3D printing technology might provide a novel approach to directly print composite synthetic biopolymers into flexibly scale structures for tissue engineering applications.

Microscale electrohydrodynamic printing of in situ reactive features for patterned ZnO nanorods

Patterning of zinc oxide (ZnO) nanorods has attracted considerable interests to enhance the performance of ZnO-based functional devices. Most of the existing techniques for patterned ZnO nanorods are based on conventional microfabrication methods that commonly require cleanroom environment, high-cost equipment and complicated processes. In this study, electrohydrodynamic (EHD) printing strategy was accommodated to fabricate microscale ZnO nanorods patterns based on in situ reactive inks. Smaller working voltage and larger nozzle-to-collector distance facilitated the formation of thinner PEO-Zn(NO₃)₂ filaments, which were decomposed into ZnO nanoparticles to serve as the seeding template for the hydrothermal growth of ZnO nanorods. The resultant ZnO nanorods can be flexibly tuned by the EHD printed patterns. The effect of growth time on the size and morphology of ZnO nanorods was investigated. Compared with the spin-coating method, the photoelectrochemical property of patterned ZnO nanorods was well controlled and showed enhanced photoelectrochemical stability. The presented method provides a flexible and rapid way to customize patterned ZnO nanorods that can be potentially used in the fields of optical detectors, biosensors or solar-driven devices.

Micro-to-nanometer patterning of solution-based materials for electronics and optoelectronics

Technologies for micro-to-nanometer patterns of solution-based materials (SBMs) contribute to a wide range of practical applications in the fields of electronics and optoelectronics. Here, state-of-the-art micro-to-nanometer scale patterning technologies of SBMs are disseminated. The utilisation of patterning for a wide-range of SBMs leads to a high level of control over conventional solution-based film fabrication processes that are not easily accessible for the control and fabrication of ordered micro-to-nanometer patterns. In this review, various patterning procedures of SBMs, including modified photolithography, direct-contact patterning, and inkjet printing, are briefly introduced with several strategies for reducing their pattern size to enhance the electronic and optoelectronic properties of SBMs explained. We then conclude with comments on future research directions in the field.

Instrument for fine control of drop-on-demand electrohydrodynamic jet printing by current measurement

In this work, an instrument of drop-on-demand electrohydrodynamic jet (DoD E-Jet) printing device equipped with a current measurement and control system was designed and developed for finely controlling the printing process. The relationships between the current and printing parameters of voltage, frequency, and flow rate were deeply investigated, and the examination data and conclusion were obtained under the condition of the needle size remaining unchanged. Especially, the equation relationship between the flow rate and current was established, which can be used for the modification of the DoD E-Jet printing process. The map describing the stable printing range, droplet size, and current was also recognized, which can help us to select parameters for stable printing. Based on the current measurement and control system and the established relationship, the optimized current and printing parameters were chosen to print uniform graphene microstructures. This instrument provides an effective method for monitoring, adjusting, and controlling the DoD E-Jet printing process and further improving the quality of the printed structures for micro/nanoelectromechanical system (M/NEMS) devices.

Domino Patterning of Water and Oil Induced by Emulsion Breaking

Patterning of water or oil is of great significance in microfluidics and printing; however, it is still a great challenge to achieve the synchronous patterning of water and oil. Here, we report a distinct Domino patterning of water and oil, simultaneously originating from O/W emulsions. The O/W emulsions first form various emulsion patterns on the textured substrates due to local capillary differences. With the evaporation, the emulsion breaking in emulsion patterns propagates from the boundary toward the center along the radial direction, followed by the formation of water droplet arrays like a Domino. Combining patterned substrates with the Domino patterning, a variety of polymer patterns, including circle-dot arrays, quadrangle-dot arrays, and triangle-dot arrays on tens of micrometers, are successfully produced on the substrates. The Domino patterning may provide a new view for phase separation patterning, liquid directional transport, and block polymer patterns.

Hierarchical multi-level block copolymer patterns by multiple self-assembly

Uniform, well-ordered sub-20 nm patterns can be generated by the templated self-assembly of block copolymers (BCPs) with a high Flory-Huggins interaction parameter (χ). However, the self-assembled BCP monolayers remain limited in the possible structural geometries. Here, we introduce a multiple self-assembly method which uses di-BCPs to produce diverse morphologies, such as dot, dot-in-honeycomb, line-on-dot, double-dot, pondering, dot-in-pondering, and line-on-pondering patterns. To improve the diversity of BCP morphological structures, we employed sphere-forming and cylinder-forming poly(styrene-block-dimethylsiloxane) (PS-b-PDMS) BCPs with a high χ. The self-assembled mono-layer and double-layer SiOx dot patterns were modified at a high temperature (∼800 °C), showing hexagonally arranged (dot) and double-hexagonally arranged (pondering) SiOx patterns, respectively. We successfully obtained additional new nanostructures (big-dot, dot-in-honeycomb, line-on-dot, pondering, dot-in-pondering, and line-on-pondering types) through a second self-assembly of cylinder-forming BCPs using the dot and pondering patterns as guiding templates. This simple approach can likely be extended to the multiple self-assembly of many other BCPs with good functionality, significantly contributing to the development of various nanodevices.

Directed Self-Assembly of Templatable Block Copolymers by Easily Accessible Magnetic Control

Magnetic control has been a prosperous and powerful contactless approach in arraying materials into high-order nanostructures. However, it is tremendously difficult to control organic polymers in this way on account of the weak magnetic response. The preparation of block copolymers (BCPs) with high magnetostatic energy is reported here, relying on an effective electrostatic coupling between paramagnetic ions and polymer side chains. As a result, the BCPs undergo a magnetically directed self-assembly to form microphase-segregated nanostructures with long-range order. It is emphasized that such a precisely controlled alignment of the BCPs is performed upon a single commercial magnet with low-intensity field (0.35 Tesla). This strategy is profoundly easy-to-handle in contrast to routine electromagnetic methods with high-intensity field (5-10 Tesla). More significantly, the paramagnetic metal component in the BCP samples can be smartly removed, providing a template effect with a preservation of the directed self-assembled nanofeatures for patterning follow-up functionalized species through the original binding site.

Hierarchical patterns with sub-20 nm pattern fidelity via block copolymer self-assembly and soft nanotransfer printing

We describe the development of a technique to transfer micrometer patterns of organic thin films with sub-50 nm edge resolution and sub-20 nm pattern fidelity.

Experimental Study of the Influence of Ink Properties and Process Parameters on Ejection Volume in Electrohydrodynamic Jet Printing

Electrohydrodynamic jet (e-jet) printing has very promising applications due to its high printing resolution and material compatibility. It is necessary to know how to choose the printing parameters to get the right ejection volume. The previous scaling law of the ejection volume in e-jet printing borrows the scaling law of the ejection volume of an unstable isolated droplet charged to the Rayleigh limit. The influence of viscosity, applied voltage amplitude, and nozzle-to-substrate distance on the ejection volume in e-jet printing was not taken into account in the scaling law. This study investigated the influence of viscosity, conductivity, applied voltage, and nozzle-to-substrate distance on the ejection volume. The ejection volume increases with viscosity and decreases with applied voltage and nozzle-to-substrate distance. The average electric field was kept unchanged while changing the nozzle-to-substrate distance by changing the applied voltage according to the electric field model of a semi-infinite wire perpendicular to an infinite large planar counter electrode. The ejection volume decreases with conductivity as V~K−0.6, which is different from the previous scaling law, which concludes that V~K−1. Finally, a model about the relation between the ejection volume and four parameters was established by regression analysis using a third-order polynomial. Two more experiments were done, and the predicted results of the fitted model accorded well with the experiments. The model can be used to choose the ink properties and process parameters to get the right ejection volume.

Spontaneous Registration of Sub-10 nm Features Based on Subzero Celsius Spin-Casting of Self-Assembling Building Blocks Directed by Chemically Encoded Surfaces

For low-cost and facile fabrication of innovative nanoscale devices with outstanding functionality and performance, it is critical to develop more practical patterning solutions that are applicable to a wide range of materials and feature sizes while minimizing detrimental effects by processing conditions. In this study, we report that area-selective sub-10 nm pattern formation can be realized by temperature-controlled spin-casting of block copolymers (BCPs) combined with submicron-scale-patterned chemical surfaces. Compared to conventional room-temperature spin-casting, the low temperature ( e.g., -5 °C) casting of the BCP solution on the patterned self-assembled monolayer achieved substantially improved area selectivity and uniformity, which can be explained by optimized solvent evaporation kinetics during the last stage of film formation. Moreover, the application of cold spin-casting can also provide high-yield in situ patterning of light-emitting CdSe/ZnS quantum dot thin films, indicating that this temperature-optimized spin-casting strategy would be highly effective for tailored patterning of diverse organic and hybrid materials in solution phase.

Hierarchical Order in Dewetted Block Copolymer Thin Films on Chemically Patterned Surfaces

We investigated the dewetting process on flat and chemically patterned surfaces of ultrathin films (thickness between 2 and 15 nm) of a cylinder forming polystyrene- block-poly(methyl methacrylate) (PS- b-PMMA) spin coated on poly(styrene- r-methyl methacrylate) random copolymers (RCPs). When the PS- b-PMMA film dewets on a 2 nm-thick RCP layer, the ordering of the hexagonally packed PMMA cylinders in the dewetted structures extends over distances far exceeding the correlation length obtained in continuous block copolymer (BCP) films. As a result, micrometer-sized circular droplets featuring defectless single grains of self-assembled PS- b-PMMA with PMMA cylinders perpendicularly oriented with respect to the substrate are generated and randomly distributed on the substrate. Additionally, alignment of the droplets along micrometric lines was achieved by performing the dewetting process on large-scale chemically patterned stripes of 2 nm thick RCP films by laser lithography. By properly adjusting the periodicity of the chemical pattern, it was possible to tune and select the geometrical characteristics of the dewetted droplets in terms of maximum thickness, contact angle and diameter while maintaining the defectless single grain perpendicular cylinder morphology of the circular droplets.

Nanoscale coaxial focused electrohydrodynamic jet printing

Controlled patterning of nanostructures at desired positions is of great importance for high-performance M/NEMS devices. Here, we demonstrate a high-resolution, high-speed and cost-effective fabrication method, named coaxial focused electrohydrodynamic jet printing, to print functional nanostructures. A coaxial needle was designed and developed; a functional ink and high viscosity liquid are applied in the inner and outer needle, respectively. Under optimised conditions, a stable coaxial jet is formed; then, the electrical shearing force and electrical field induce viscous shearing force and internal pressure that are jointly applied on the inner functional ink, focusing the inner jet on the nanoscale. Using this stable coaxial jet with a nano-jet inside it, nanostructures with highly aligned nanowire arrays, nano-freebeams and nano-cantilever beams down to the scale of 40 nm were directly printed. The needle size was 130 μm, and the ratio of the sizes of the needle and the printed structure was as high as 3250/1. This technique realizes the controllable printing of nanoscale structures with the use of a one hundred micrometer-sized needle. The printed PZT nanostructures exhibit pure perovskite structures and distinct piezoelectric responses.

Simultaneous In-Film Polymer Synthesis and Self-Assembly for Hierarchical Nanopatterns

A key requirement for practical applications of nanostructured block copolymer (BCP) self-assembly is the ability to generate complex geometries including different shapes and diverse sizes across one substrate surface. This has been difficult because spatial control over the underlying chemistry of the BCP has been limited. Here, we demonstrate a photocontrolled in-film polymerization process in the presence of monomer vapor for synthesizing homopolymers in self-assembled BCP films. The homopolymers blend with BCPs and alter the nanopatterns by changing the underlying polymer chemistry and composition. We apply this technique to a variety of BCPs including polystyrene-b-polyisoprene-b-polystyrene, polystyrene-b-poly(methyl methacrylate), and polystyrene-b-poly(4-vinylpyridine). The region of in-film polymerization can be modulated by the location of irradiation using photomasks for obtaining distinct morphologies on one substrate, providing a new platform for hierarchically manipulating nanopatterns within the self-assembled BCP thin film as well as opening up a new area for radical polymerizations of monomers within such geometrically confined, swollen films.

Nanostructure and Microstructure Fabrication: From Desired Properties to Suitable Processes

When designing a new nanostructure or microstructure, one can follow a processing-based manufacturing pathway, in which the structure properties are defined based on the processing capabilities of the fabrication method at hand. Alternatively, a performance-based pathway can be followed, where the envisioned performance is first defined, and then suitable fabrication methods are sought. To support the latter pathway, fabrication methods are here reviewed based on the geometric and material complexity, resolution, total size, geometric and material diversity, and throughput they can achieve, independently from processing capabilities. Ten groups of fabrication methods are identified and compared in terms of these seven moderators. The highest resolution is obtained with electron beam lithography, with feature sizes below 5 nm. The highest geometric complexity is attained with vat photopolymerization. For high throughput, parallel methods, such as photolithography (≈10¹ m² h^-1 ), are needed. This review offers a decision-making tool for identifying which method to use for fabricating a structure with predefined properties.

Fabrication of gold nanowires in micropatterns using block copolymers

In this work, we introduce a facile method for fabricating well-aligned gold nanowires in a desired microstructure by combining the shear alignment of block copolymer (BCP) cylinders with a conventional lithography process.

Self-Assembled Nanofeatures in Complex Three-Dimensional Topographies via Nanoimprint and Block Copolymer Lithography Methods

Achieving ultrasmall dimensions of materials and retaining high throughput are critical fabrication considerations for nanotechnology use. This article demonstrates an integrated approach for developing isolated sub-20 nm silicon oxide features through combined "top-down" and "bottom-up" methods: nanoimprint lithography (NIL) and block copolymer (BCP) lithography. Although techniques like those demonstrated here have been developed for nanolithographic application in the microelectronics processing industry, similar approaches could be utilized for sensor, fluidic, and optical-based devices. Thus, this article centers on looking at the possibility of generating isolated silica structures on substrates. NIL was used to create intriguing three-dimensional (3-D) polyhedral oligomeric silsesquioxane (POSS) topographical arrays that guided and confined polystyrene-block-poly(dimethylsiloxane) (PS-b-PDMS) BCP nanofeatures in isolated regions. A cylinder forming PS-b-PDMS BCP system was successfully etched using a one-step etching process to create line-space arrays with a period of 35 nm in confined POSS arrays. We highlight large-area (>6 μm) coverage of line-space arrays in 3-D topographies that could potentially be utilized, for example, in nanofluidic systems. Aligned features for directed self-assembly application are also demonstrated. The high-density, confined silicon oxide nanofeatures in soft lithographic templates over macroscopic areas illustrate the advantages of integrating distinct lithographic methods for attaining discrete features in the deep nanoscale regime.