1
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Tseng E, Kuo G, Baek SH, Matsuda N, Maimone A, Schiffers F, Chakravarthula P, Fu Q, Heidrich W, Lanman D, Heide F. Neural étendue expander for ultra-wide-angle high-fidelity holographic display. Nat Commun 2024; 15:2907. [PMID: 38649369 PMCID: PMC11035703 DOI: 10.1038/s41467-024-46915-3] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/25/2023] [Accepted: 03/06/2024] [Indexed: 04/25/2024] Open
Abstract
Holographic displays can generate light fields by dynamically modulating the wavefront of a coherent beam of light using a spatial light modulator, promising rich virtual and augmented reality applications. However, the limited spatial resolution of existing dynamic spatial light modulators imposes a tight bound on the diffraction angle. As a result, modern holographic displays possess low étendue, which is the product of the display area and the maximum solid angle of diffracted light. The low étendue forces a sacrifice of either the field-of-view (FOV) or the display size. In this work, we lift this limitation by presenting neural étendue expanders. This new breed of optical elements, which is learned from a natural image dataset, enables higher diffraction angles for ultra-wide FOV while maintaining both a compact form factor and the fidelity of displayed contents to human viewers. With neural étendue expanders, we experimentally achieve 64 × étendue expansion of natural images in full color, expanding the FOV by an order of magnitude horizontally and vertically, with high-fidelity reconstruction quality (measured in PSNR) over 29 dB on retinal-resolution images.
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Affiliation(s)
- Ethan Tseng
- Department of Computer Science, Princeton University, Princeton, NJ, USA
| | - Grace Kuo
- Reality Labs Research, Meta, Redmond, WA, USA
| | - Seung-Hwan Baek
- Department of Computer Science, Princeton University, Princeton, NJ, USA
- Department of Computer Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Republic of Korea
| | | | | | | | | | - Qiang Fu
- Visual Computing Center, King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia
| | - Wolfgang Heidrich
- Visual Computing Center, King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia
| | | | - Felix Heide
- Department of Computer Science, Princeton University, Princeton, NJ, USA.
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2
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Cao H, Xue Z, Deng H, Chen S, Wang D, Gui C. Micromirror Array with Adjustable Reflection Characteristics Based on Different Microstructures and Its Application. MICROMACHINES 2024; 15:506. [PMID: 38675317 PMCID: PMC11052270 DOI: 10.3390/mi15040506] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/12/2024] [Revised: 03/31/2024] [Accepted: 04/03/2024] [Indexed: 04/28/2024]
Abstract
The conventional reflective optical surface with adjustable reflection characteristics requires a complex external power source. The complicated structure and preparation process of the power system leads to the limited modulation of the reflective properties and difficulty of use in large-scale applications. Inspired by the biological compound eye, different microstructures are utilized to modulate the optical performance. Convex aspheric micromirror arrays (MMAs) can increase the luminance gain while expanding the field of view, with a luminance gain wide angle > 90° and a field-of-view wide angle close to 180°, which has the reflective characteristics of a large gain wide angle and a large field-of-view wide angle. Concave aspheric micromirror arrays can increase the luminance gain by a relatively large amount of up to 2.66, which has the reflective characteristics of high gain. Industrial-level production and practical applications in the projection display segment were carried out. The results confirmed that convex MMAs are able to realize luminance gain over a wide spectrum and a wide range of angles, and concave MMAs are able to substantially enhance luminance gain, which may provide new opportunities in developing advanced reflective optical surfaces.
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Affiliation(s)
- Hao Cao
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China
| | - Zhishuang Xue
- Research Center of Graphic Communication, Printing and Packaging, Wuhan University, Wuhan 430072, China
| | - Hongfeng Deng
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China
| | - Shuo Chen
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China
| | - Deming Wang
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China
| | - Chengqun Gui
- The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China
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3
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Pribošek J, Bainschab M, Sasaki T. Varifocal MEMS mirrors for high-speed axial focus scanning: a review. MICROSYSTEMS & NANOENGINEERING 2023; 9:135. [PMID: 37900975 PMCID: PMC10603115 DOI: 10.1038/s41378-022-00481-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/20/2021] [Revised: 04/03/2022] [Accepted: 04/13/2022] [Indexed: 10/31/2023]
Abstract
Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation above several hundred kHz, and can be designed to combine focusing with lateral steering in a single-chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel figure of merit for varifocal mirrors on the basis of which we evaluate and compare nearly all reported devices from the literature. At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies, as well as a systematic study of methods reported to enhance the focusing performance in terms of speed, resolution, and shape fidelity. We believe this analysis will fuel the future technological development of next-generation varifocal mirrors reaching the axial resolution of 1000 resolvable planes.
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4
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Ersaro NT, Yalcin C, Murray L, Kabuli L, Waller L, Muller R. Fast non-iterative algorithm for 3D point-cloud holography. OPTICS EXPRESS 2023; 31:36468-36485. [PMID: 38017799 DOI: 10.1364/oe.498302] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/22/2023] [Accepted: 09/28/2023] [Indexed: 11/30/2023]
Abstract
Recently developed iterative and deep learning-based approaches to computer-generated holography (CGH) have been shown to achieve high-quality photorealistic 3D images with spatial light modulators. However, such approaches remain overly cumbersome for patterning sparse collections of target points across a photoresponsive volume in applications including biological microscopy and material processing. Specifically, in addition to requiring heavy computation that cannot accommodate real-time operation in mobile or hardware-light settings, existing sampling-dependent 3D CGH methods preclude the ability to place target points with arbitrary precision, limiting accessible depths to a handful of planes. Accordingly, we present a non-iterative point cloud holography algorithm that employs fast deterministic calculations in order to efficiently allocate patches of SLM pixels to different target points in the 3D volume and spread the patterning of all points across multiple time frames. Compared to a matched-performance implementation of the iterative Gerchberg-Saxton algorithm, our algorithm's relative computation speed advantage was found to increase with SLM pixel count, reaching >100,000x at 512 × 512 array format.
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5
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Cao J, Chang J, Wang W, Lai X, Li D, Wang L. Design of off-axis aspheric four-mirror non-axial mechanical zoom optical system with large relative aperture. OPTICS EXPRESS 2023; 31:29119-29131. [PMID: 37710718 DOI: 10.1364/oe.498082] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/14/2023] [Accepted: 08/07/2023] [Indexed: 09/16/2023]
Abstract
A large relative aperture is essential to improve the spatial resolution of zoom systems. To overcome the limitations of the existing off-axis reflective mechanical zoom system with a low zoom rate and a small relative aperture, this paper proposes a non-axis movement method for increasing the degrees of freedom. On the basis of nodal aberration theory, passive eccentricity is changed into active eccentricity to achieve wave aberration balance in the multiple structures of the zoom imaging system. An off-axis aspherical four-mirror non-axial mechanical zoom optical system is designed and fabricated. The prototype has been successfully processed and assembled with the help of computer-aided alignment technology. The prototype's F-number is 4 and zoom ratio is 4.57:1. Experimental results verify the feasibility of the proposed method.
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6
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Yu X, Zhou L, Qi T, Zhao H, Xie H. MEMS Enabled Miniature Two-Photon Microscopy for Biomedical Imaging. MICROMACHINES 2023; 14:470. [PMID: 36838170 PMCID: PMC9958604 DOI: 10.3390/mi14020470] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/22/2023] [Revised: 02/07/2023] [Accepted: 02/07/2023] [Indexed: 06/18/2023]
Abstract
Over the last decade, two-photon microscopy (TPM) has been the technique of choice for in vivo noninvasive optical brain imaging for neuroscientific study or intra-vital microendoscopic imaging for clinical diagnosis or surgical guidance because of its intrinsic capability of optical sectioning for imaging deeply below the tissue surface with sub-cellular resolution. However, most of these research activities and clinical applications are constrained by the bulky size of traditional TMP systems. An attractive solution is to develop miniaturized TPMs, but this is challenged by the difficulty of the integration of dynamically scanning optical and mechanical components into a small space. Fortunately, microelectromechanical systems (MEMS) technology, together with other emerging micro-optics techniques, has offered promising opportunities in enabling miniaturized TPMs. In this paper, the latest advancements in both lateral scan and axial scan techniques and the progress of miniaturized TPM imaging will be reviewed in detail. Miniature TPM probes with lateral 2D scanning mechanisms, including electrostatic, electromagnetic, and electrothermal actuation, are reviewed. Miniature TPM probes with axial scanning mechanisms, such as MEMS microlenses, remote-focus, liquid lenses, and deformable MEMS mirrors, are also reviewed.
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Affiliation(s)
- Xiaomin Yu
- Key Laboratory of Biological Effect of Physical Field and Instrument, Department of Electrical and Electronic Engineering, Chengdu University of Information Technology, Chengdu 610225, China
| | - Liang Zhou
- Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA
| | - Tingxiang Qi
- BIT Chongqing Institute of Microelectronics and Microsystems, Chongqing 401332, China
| | - Hui Zhao
- BIT Chongqing Institute of Microelectronics and Microsystems, Chongqing 401332, China
- Foshan Lightview Technology Co., Ltd., Foshan 528000, China
| | - Huikai Xie
- BIT Chongqing Institute of Microelectronics and Microsystems, Chongqing 401332, China
- Foshan Lightview Technology Co., Ltd., Foshan 528000, China
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
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7
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Madadi N, Amiri M. Efficient methodology with potential uses of Fresnel diffractometry for real-time study of uniaxial nematic liquid crystal phase transitions. Sci Rep 2023; 13:2184. [PMID: 36750594 PMCID: PMC9905512 DOI: 10.1038/s41598-023-29174-y] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/18/2022] [Accepted: 01/31/2023] [Indexed: 02/09/2023] Open
Abstract
Due to the different features of their various phases and expanding physical understanding, liquid crystals (LCs) play a fundamental and crucial role in contemporary technology. Recently, they have also been utilised in adaptive optics, active switching, and next-generation displays for augmented and virtual reality. In order to determine relevant quantities for thermotropic uniaxial nematic liquid crystals (NLCs), our aim is to assess the applicability of a ground-breaking method. The method being discussed is based on Fresnel diffraction (FD) from phase objects, which has been employed over the past 20 years in several accurate and precise metrological applications. Using a phase step and quantitatively registering the visibility of the diffraction patterns, diffractometry can transform any change in the order of LCs brought on by a change in temperature into a change in the optical phase. Owing to its low sensitivity to environmental vibrations, inherent compactness, and ease of set up, diffractometry can be used much more effectively than interferometry. Additionally, as a special major feature, if the various phases of a LC have the required transparency, it is possible to record the number of phases in the bulk of the LC, the surface ordering, and the approximate temperature of the phase transitions in a single-shot imaging by applying a suitable temperature gradient. The numerical computations and practical data comparisons from our theoretical considerations demonstrate a very high level of agreement with the output from other currently used methodologies. As we shall see, by addressing some of the faults and inadequacies of existing techniques, this strategy has the potential to both complement and strengthen them.
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Affiliation(s)
- Narges Madadi
- grid.411807.b0000 0000 9828 9578Department of Physics, Bu-Ali Sina University, Hamedan, 65175-4161 Iran
| | - Mohammad Amiri
- Department of Physics, Bu-Ali Sina University, Hamedan, 65175-4161, Iran.
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8
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Kashani Ilkhechi A, Martell M, Zemp R. Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing. MICROMACHINES 2022; 14:40. [PMID: 36677101 PMCID: PMC9865535 DOI: 10.3390/mi14010040] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/16/2022] [Revised: 12/06/2022] [Accepted: 12/07/2022] [Indexed: 06/17/2023]
Abstract
Here, we introduce ultrafast tunable MEMS mirrors consisting of a miniature circular mirrored membrane, which can be electrostatically actuated to change the mirror curvature at unprecedented speeds. The central deflection zone is a close approximation to a parabolic mirror. The device is fabricated with a minimal membrane diameter, but at least double the size of a focused optical spot. The theory and simulations are used to predict maximum relative focal shifts as a function of membrane size and deflection, beam waist, and incident focal position. These devices are demonstrated to enable fast tuning of the focal wavefront of laser beams at ≈MHz tuning rates, two to three orders of magnitude faster than current optical focusing technologies. The fabricated devices have a silicon membrane with a 30-100 μm radius and a 350 nm gap spacing between the top and bottom electrodes. These devices can change the focal position of a tightly focused beam by ≈1 mm at rates up to 4.9 MHz and with response times smaller than 5 μs.
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9
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Eybposh MH, Curtis VR, Rodríguez-Romaguera J, Pégard NC. Advances in computer-generated holography for targeted neuronal modulation. NEUROPHOTONICS 2022; 9:041409. [PMID: 35719844 PMCID: PMC9201973 DOI: 10.1117/1.nph.9.4.041409] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/08/2022] [Accepted: 05/17/2022] [Indexed: 05/08/2023]
Abstract
Genetically encoded calcium indicators and optogenetics have revolutionized neuroscience by enabling the detection and modulation of neural activity with single-cell precision using light. To fully leverage the immense potential of these techniques, advanced optical instruments that can place a light on custom ensembles of neurons with a high level of spatial and temporal precision are required. Modern light sculpting techniques that have the capacity to shape a beam of light are preferred because they can precisely target multiple neurons simultaneously and modulate the activity of large ensembles of individual neurons at rates that match natural neuronal dynamics. The most versatile approach, computer-generated holography (CGH), relies on a computer-controlled light modulator placed in the path of a coherent laser beam to synthesize custom three-dimensional (3D) illumination patterns and illuminate neural ensembles on demand. Here, we review recent progress in the development and implementation of fast and spatiotemporally precise CGH techniques that sculpt light in 3D to optically interrogate neural circuit functions.
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Affiliation(s)
- M. Hossein Eybposh
- University of North Carolina at Chapel Hill, Department of Applied Physical Sciences, Chapel Hill, North Carolina, United States
- University of North Carolina at Chapel Hill, Department of Biomedical Engineering, Chapel Hill, North Carolina, United States
| | - Vincent R. Curtis
- University of North Carolina at Chapel Hill, Department of Applied Physical Sciences, Chapel Hill, North Carolina, United States
- University of North Carolina, Department of Psychiatry, Chapel Hill, North Carolina, United States
| | - Jose Rodríguez-Romaguera
- University of North Carolina, Department of Psychiatry, Chapel Hill, North Carolina, United States
- University of North Carolina, Neuroscience Center, Chapel Hill, North Carolina, United States
- University of North Carolina, Carolina Institute for Developmental Disabilities, Chapel Hill, North Carolina, United States
- University of North Carolina, Carolina Stress Initiative, Chapel Hill, North Carolina, United States
| | - Nicolas C. Pégard
- University of North Carolina at Chapel Hill, Department of Applied Physical Sciences, Chapel Hill, North Carolina, United States
- University of North Carolina at Chapel Hill, Department of Biomedical Engineering, Chapel Hill, North Carolina, United States
- University of North Carolina, Neuroscience Center, Chapel Hill, North Carolina, United States
- University of North Carolina, Carolina Stress Initiative, Chapel Hill, North Carolina, United States
- Address all correspondence to Nicolas C. Pégard,
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10
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Qu Z, Zhong X, Zhang K, Li L, Wang Y. Automatic initial configuration in off-axis reflective optical system design using combined nodal and Seidel aberration. APPLIED OPTICS 2022; 61:3630-3640. [PMID: 36256402 DOI: 10.1364/ao.457092] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/25/2022] [Accepted: 03/28/2022] [Indexed: 06/16/2023]
Abstract
Currently, an off-axis reflective optical system is designed always from a coaxial initial system, and good imaging performance depends heavily on the choice of good initial configurations. This paper first establishes an imaging-performance evaluation function of the off-axis initial configuration based on nodal aberration theory and Seidel aberration theory. An automatic optimization method of the off-axis initial configuration using the global simulated annealing algorithm is proposed. Two design examples of off-axis three-mirror reflective optical systems are used to demonstrate the effectiveness and simplicity based on the initial configuration design method. Example 1: a series of optical systems with a large 10∘×3∘ field of view (FOV) is quickly and simply implemented using simple surfaces, and the optical systems exhibit perfect imaging quality. Example 2: starting from the good automatic initial configurations, two larger 20∘×3∘ FOV optical systems with focal lengths of 500 mm and f-numbers of five are designed, resulting in good imaging performance and providing a valuable design reference.
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11
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Zhang R, Xu Z, Zhang L, Cao L, Hu Y, Lu B, Shi L, Yao D, Zhao X. The effect of stimulus number on the recognition accuracy and information transfer rate of SSVEP-BCI in augmented reality. J Neural Eng 2022; 19. [PMID: 35477130 DOI: 10.1088/1741-2552/ac6ae5] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/25/2021] [Accepted: 04/26/2022] [Indexed: 11/12/2022]
Abstract
OBJECTIVE The biggest advantage of steady-state visual evoked potential (SSVEP)-based brain-computer interface (BCI) lies in its large command set and high information transfer rate (ITR). Almost all current SSVEP-BCIs use a computer screen (CS) to present flickering visual stimuli, which limits its flexible use in actual scenes. Augmented reality (AR) technology provides the ability to superimpose visual stimuli on the real world, and it considerably expands the application scenarios of SSVEP-BCI. However, whether the advantages of SSVEP-BCI can be maintained when moving the visual stimuli to AR glasses is not known. This study investigated the effects of the stimulus number for SSVEP-BCI in an AR context. APPROACH We designed SSVEP flickering stimulation interfaces with four different numbers of stimulus targets and put them in AR glasses and a CS to display. Three common recognition algorithms were used to analyze the influence of the stimulus number and stimulation time on the recognition accuracy and ITR of AR-SSVEP and CS-SSVEP. MAIN RESULTS The amplitude spectrum and signal-to-noise ratio of AR-SSVEP were not significantly different from CS-SSVEP at the fundamental frequency but were significantly lower than CS-SSVEP at the second harmonic. SSVEP recognition accuracy decreased as the stimulus number increased in AR-SSVEP but not in CS-SSVEP. When the stimulus number increased, the maximum ITR of CS-SSVEP also increased, but not for AR-SSVEP. When the stimulus number was 25, the maximum ITR (142.05 bits/min) was reached at 400 ms. The importance of stimulation time in SSVEP was confirmed. When the stimulation time became longer, the recognition accuracy of both AR-SSVEP and CS-SSVEP increased. The peak value was reached at 3 s. The ITR increased first and then slowly decreased after reaching the peak value. SIGNIFICANCE Our study indicates that the conclusions based on CS-SSVEP cannot be simply applied to AR-SSVEP, and it is not advisable to set too many stimulus targets in the AR display device.
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Affiliation(s)
- Rui Zhang
- School of Electrical Engineering, Zhengzhou University, Zhengzhou, 450001, China, Zhengzhou university, Zhengzhou, 450000, CHINA
| | - Zongxin Xu
- School of Electrical Engineering, Zhengzhou University, Zhengzhou, 450001, China , Zhengzhou university, Zhengzhou, Henan, 450001, CHINA
| | - Lipeng Zhang
- Zhengzhou University, Zhengzhou university, Zhengzhou, 450001, CHINA
| | - Lijun Cao
- Zhengzhou University, Zhengzhou university, Zhengzhou, 450000, CHINA
| | - Yuxia Hu
- Zhengzhou University, Zhengzhou university, Zhengzhou, 450001, CHINA
| | - Beihan Lu
- Zhengzhou University, Zhengzhou university, Zhengzhou, 450001, CHINA
| | - Li Shi
- Department of Automation, Tsinghua University, BeiJing, Beijing, P. R, 100084, CHINA
| | - Dezhong Yao
- School of Life Science and Technology, University of Electronic Science and Technology of China, Chengdu 610054, Sichuan Province, chengdu, sichuan, 610054, CHINA
| | - Xincan Zhao
- Zhengzhou University, Zhengzhou university, Zhengzhou, 450001, CHINA
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Wang BX, Zheng JX, Qi JY, Guo MR, Gao BR, Liu XQ. Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology. MICROMACHINES 2022; 13:mi13020218. [PMID: 35208341 PMCID: PMC8878309 DOI: 10.3390/mi13020218] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/31/2021] [Revised: 01/27/2022] [Accepted: 01/28/2022] [Indexed: 11/16/2022]
Abstract
Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Herein, we propose a femtosecond-laser-assisted dry etching technology to realize the fabrication of silicon microlenses. The size of the microlens can be controlled by the femtosecond laser pulse energy and the number of pulses. To verify the applicability of this method, multifocal microlens arrays (focal lengths of 7–9 μm) were integrated into a silicon microcantilever using this method. The proposed technology would broaden the application scope of MOEMSs in three-dimensional imaging systems.
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13
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Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification. MATERIALS 2022; 15:ma15020678. [PMID: 35057393 PMCID: PMC8779314 DOI: 10.3390/ma15020678] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/25/2021] [Revised: 01/14/2022] [Accepted: 01/15/2022] [Indexed: 02/07/2023]
Abstract
Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was proposed to realize micro-optical devices with low roughness on glass. Compared to traditional laser ablation, the fabrication efficiency in this work was improved by one order of magnitude, and the surface roughness was decreased to 15 nm. Using this method, aspherical convex microlenses and spherical concave microlenses that possess excellent focusing and imaging properties are realized on photosensitive glass. The diameter and height of the microlenses were controlled by adjusting the fabrication parameters. These results indicate that the fs-laser-based hybrid method will open new opportunities for fabricating micro-optical components on hard materials.
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14
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Mohammad T, He S, Mrad RB. Analysis of Optical Diffraction Profiles Created by Phase-Modulating MEMS Micromirror Arrays. MICROMACHINES 2021; 12:891. [PMID: 34442511 PMCID: PMC8401841 DOI: 10.3390/mi12080891] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/01/2021] [Revised: 07/23/2021] [Accepted: 07/26/2021] [Indexed: 11/16/2022]
Abstract
This paper presents modeling and analysis of light diffraction and light-intensity modulation performed by an optical phased array (OPA) system based on metal-coated silicon micromirrors. The models can be used in the design process of a microelectromechanical system (MEMS)-based OPA device to predict its optical performance in terms of its field of view, response, angular resolution, and long-range transmission. Numerical results are derived using an extended model for the 1st-order diffracted light intensity modulation due to phase shift. The estimations of the optical characteristics are utilized in the designs of an OPA system capable of active phase modulation and an OPA system capable of array pitch tuning. Both designs are realized using the Multi-User MEMS Processes (PolyMUMPs) in which polysilicon is used as structural material for the MEMS-actuated mirrors. The experiments are performed to evaluate the optical performance of the prototypes. The tests show that the individually actuated micromirrors, which act as phase shifters, can transmit the most optical power along the 1st-order diffracted beam by actively changing their out-of-plane positions. In addition, the 1st-order diffracted beam with high optical intensity can be steered for distance measurement.
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Affiliation(s)
- Tarek Mohammad
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON M5S 3G8, Canada;
| | - Siyuan He
- Department of Mechanical and Industrial Engineering, Ryerson University, Toronto, ON M5B 2K3, Canada;
| | - Ridha Ben Mrad
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON M5S 3G8, Canada;
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15
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Yu X, Wang H, Yao Y, Tan S, Xu Y, Ding Y. Automatic design of a mid-wavelength infrared dual-conjugate zoom system based on particle swarm optimization. OPTICS EXPRESS 2021; 29:14868-14882. [PMID: 33985199 DOI: 10.1364/oe.418584] [Citation(s) in RCA: 10] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/07/2021] [Accepted: 04/14/2021] [Indexed: 06/12/2023]
Abstract
This paper presents a method for the automatic design of a special mid-wavelength infrared zoom system in which the positions of both the pupil planes and the image plane are fixed during the zooming process. In this method, the formulas for the desired zoom system are derived to ensure the exact fulfillment of the conditions with three moving components based on Gaussian reduction. A mathematical model is established based on the particle swarm optimization to determine the first-order parameters of the paraxial design. Then, the model is optimized by iteratively updating a candidate solution with regard to a specific merit function that characterizes the zoom ratio, compactness, and aberration terms. In the optimization phase, the physical feasibility is considered as the constraint on the candidate solutions. Using two examples, this work demonstrates that the developed method is an efficient and practical tool for finding a realizable initial configuration of a dual-conjugate zoom system. Since this method is no longer reliant on the traditional trial-and-error technique, it is an important step toward the automatic design of complex optical systems using artificial intelligence.
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